KR930026510U - 석영 보오트 걸이 - Google Patents

석영 보오트 걸이

Info

Publication number
KR930026510U
KR930026510U KR2019920007651U KR920007651U KR930026510U KR 930026510 U KR930026510 U KR 930026510U KR 2019920007651 U KR2019920007651 U KR 2019920007651U KR 920007651 U KR920007651 U KR 920007651U KR 930026510 U KR930026510 U KR 930026510U
Authority
KR
South Korea
Prior art keywords
quartz boat
hanger
boat hanger
quartz
boat
Prior art date
Application number
KR2019920007651U
Other languages
English (en)
Other versions
KR950001741Y1 (ko
Inventor
김염규
유해산
권용만
최종명
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR92007651U priority Critical patent/KR950001741Y1/ko
Publication of KR930026510U publication Critical patent/KR930026510U/ko
Application granted granted Critical
Publication of KR950001741Y1 publication Critical patent/KR950001741Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning In General (AREA)
KR92007651U 1992-05-06 1992-05-06 석영 보오트 걸이 KR950001741Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR92007651U KR950001741Y1 (ko) 1992-05-06 1992-05-06 석영 보오트 걸이

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR92007651U KR950001741Y1 (ko) 1992-05-06 1992-05-06 석영 보오트 걸이

Publications (2)

Publication Number Publication Date
KR930026510U true KR930026510U (ko) 1993-12-28
KR950001741Y1 KR950001741Y1 (ko) 1995-03-13

Family

ID=19332756

Family Applications (1)

Application Number Title Priority Date Filing Date
KR92007651U KR950001741Y1 (ko) 1992-05-06 1992-05-06 석영 보오트 걸이

Country Status (1)

Country Link
KR (1) KR950001741Y1 (ko)

Also Published As

Publication number Publication date
KR950001741Y1 (ko) 1995-03-13

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Legal Events

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E701 Decision to grant or registration of patent right
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FPAY Annual fee payment

Payment date: 20030218

Year of fee payment: 9

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