KR930024363U - Photo mask - Google Patents

Photo mask

Info

Publication number
KR930024363U
KR930024363U KR2019920006096U KR920006096U KR930024363U KR 930024363 U KR930024363 U KR 930024363U KR 2019920006096 U KR2019920006096 U KR 2019920006096U KR 920006096 U KR920006096 U KR 920006096U KR 930024363 U KR930024363 U KR 930024363U
Authority
KR
South Korea
Prior art keywords
photo mask
photo
mask
Prior art date
Application number
KR2019920006096U
Other languages
Korean (ko)
Other versions
KR0122870Y1 (en
Inventor
고상기
박승현
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019920006096U priority Critical patent/KR0122870Y1/en
Publication of KR930024363U publication Critical patent/KR930024363U/en
Application granted granted Critical
Publication of KR0122870Y1 publication Critical patent/KR0122870Y1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
KR2019920006096U 1992-04-14 1992-04-14 Photomask KR0122870Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019920006096U KR0122870Y1 (en) 1992-04-14 1992-04-14 Photomask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019920006096U KR0122870Y1 (en) 1992-04-14 1992-04-14 Photomask

Publications (2)

Publication Number Publication Date
KR930024363U true KR930024363U (en) 1993-11-27
KR0122870Y1 KR0122870Y1 (en) 1999-02-18

Family

ID=19331677

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019920006096U KR0122870Y1 (en) 1992-04-14 1992-04-14 Photomask

Country Status (1)

Country Link
KR (1) KR0122870Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100638743B1 (en) * 2000-08-31 2006-10-27 주식회사 하이닉스반도체 Method for manufacturing capacitor

Also Published As

Publication number Publication date
KR0122870Y1 (en) 1999-02-18

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Legal Events

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E701 Decision to grant or registration of patent right
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Payment date: 20060502

Year of fee payment: 9

EXPY Expiration of term