KR930016774A - Infrared Gas Analyzer Optical System - Google Patents

Infrared Gas Analyzer Optical System Download PDF

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Publication number
KR930016774A
KR930016774A KR1019920000558A KR920000558A KR930016774A KR 930016774 A KR930016774 A KR 930016774A KR 1019920000558 A KR1019920000558 A KR 1019920000558A KR 920000558 A KR920000558 A KR 920000558A KR 930016774 A KR930016774 A KR 930016774A
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South Korea
Prior art keywords
infrared
gas
gas cell
light source
optical system
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KR1019920000558A
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Korean (ko)
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배극현
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성기설
금성계전 주식회사
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Priority to KR1019920000558A priority Critical patent/KR930016774A/en
Publication of KR930016774A publication Critical patent/KR930016774A/en

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Abstract

본 발명은 적외선 가스분석기의 광학계에 관한 것으로, 기준가스셀과 측정가스셀의 길이를 짧게 하면서도 가스셀에 대한 적외선 빔의 통과 경로를 길게 함으로써 측정의 정확성을 높일 수 있으며, 광원에서 나오는 적외선 빔을 두 갈래로 분리하지 않고 기준 가스셀과 측정가스셀측에 교호로 진행되도록 함으로써 적외선 빔의 세기 저하에 따른 측정의 정확성 저하를 방지할 수 있도록 빔의 세기 저하에 따른 측정의 정확성 저하를 방지할 수 있도록 한 것이다 적외선 빔을 발생시키는 적외선 광원(11)과, 이 광원(11)에서 나오는 적외선 빔을 평행빔으로 만드는 콜리메이팅 렌즈(Collimating Lenz)(12)와, 이 렌즈(12)를 통과한 평행빔을 교호로 양측방향으로 반사시키는 스캐닝 미러(Scanning Mirror)(13)와, 기준 가스가 충전되는 기준가스셀(14)과, 측정가스가 유입, 유출되는 측정가스셀(15)과, 적외선 빔이 이들 가스셀(14)(15)를 반복적으로 통과하게 하는 반복 반사경군(16)(17)과, 반복 반사경군(16)(17)에서 최종 반사된 적외선 빔중 특정 파장대의 빔만을 통과시키는 밴드패스필터(18)(19) 및 이 밴드패스필터(18)(19)를 통과한 적외선 빔을 검지하는 적외선 검지기(20)로 구성된다.The present invention relates to an optical system of an infrared gas analyzer, while shortening the length of a reference gas cell and a measuring gas cell, while increasing the path of the infrared beam passing through the gas cell, it is possible to increase the accuracy of the measurement. It is possible to prevent the deterioration of the measurement accuracy due to the decrease in the intensity of the beam so as to prevent the deterioration of the accuracy of the measurement due to the decrease in the intensity of the infrared beam, by alternately proceeding to the reference gas cell and the measuring gas cell side without separating them. An infrared light source 11 for generating an infrared beam, a collimating lens 12 which makes the infrared beam emitted from the light source 11 into a parallel beam, and a parallel beam passing through the lens 12. The scanning mirror 13 which alternately reflects in both directions, the reference gas cell 14 filled with the reference gas, and the measurement gas flow in and out. The measured gas cells 15, the repeated reflector groups 16 and 17 and the repeated reflector groups 16 and 17 allow the infrared beam to pass through these gas cells 14 and 15 repeatedly. Band pass filters 18 and 19 for passing only beams of a specific wavelength band among the reflected infrared beams, and infrared detectors 20 for detecting infrared beams passing through the band pass filters 18 and 19.

Description

적외선 가스분석기의 광학계Infrared Gas Analyzer Optical System

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 본 발명에 의한 적외선 가스분석기의 광학계통도.2 is an optical system diagram of an infrared gas analyzer according to the present invention.

Claims (5)

적외선 빔을 발생시키는 적외선 광원(11)와, 이 광원(11)에서 나오는 적외선 빔을 교호로 양측방향으로 반사시키는 스캐닝 미러(Scanning Mirror)(13)와, 기준가스가 충전되는 기준가스셀(14)과, 측정가스가 유입, 유출되는 측정가스셀(15)과, 상기 적와선 빔이 이들 가스셀(14)(15)을 반복적으로 통과하게 하는 반복 반사경군(16)(17)과, 반복반사경군(16)(17)에서 최종 반사된 적외선 중 특정 파장대의 빔만을 통과시키는 밴드패스필터(18)(19) 및 이 밴드패스필터(18)(19)를 통과한 적외선 빔을 검지하는 적외선 검지기(20)로 구성됨을 특징으로 하는 적외선 가스분석기의 광원계.An infrared light source 11 for generating an infrared beam, a scanning mirror 13 for alternately reflecting the infrared beam from the light source 11 in both directions, and a reference gas cell 14 filled with a reference gas And a measurement gas cell 15 into which the measurement gas flows in and out, a repetitive reflector group 16 and 17 allowing the red beam beam to pass through these gas cells 14 and 15 repeatedly, and a repeating reflection mirror. Band pass filters 18 and 19 for passing only the beams of a specific wavelength band among the infrared rays finally reflected by the groups 16 and 17 and infrared detectors for detecting the infrared beams passing through the band pass filters 18 and 19. Light source system of the infrared gas analyzer, characterized in that consisting of (20). 제1항에 있어서, 상기 광원(11)과 스캐닝 미러(13)의 사이에는 광원(11)에서 나오는 적외선 빔을 평행빔으로 만드는 콜리메이팅 렌즈(12)를 설치한 것을 특징으로 하는 적외선 가스분석기의 광학계.2. The infrared gas analyzer of claim 1, wherein a collimating lens (12) is formed between the light source (11) and the scanning mirror (13) to make parallel beams of the infrared beam from the light source (11). Optical system. 제1항에 있어서, 상기 반복반사경군(16)(17)은 스캐닝 미러(13)에서 반사되어 입사된 평행빔을 기준가스셀(14)과 측정가스셀(15)의 축선방향에 평행한 방향으로 반사시키는 1차반사경(16a)(17a)과, 각 가스셀 (14)(15)의 축선방향에 대하여 45°로 배치되는 2차, 3차, 4차, 5차 및 최종반사경 (16b,16f)(17b,17f)으로 구성됨을 특징으로 하는 적외선 가스분석기의 광학계.The method of claim 1, wherein the repeating reflection group (16, 17) is a parallel beam reflected by the scanning mirror 13 in the direction parallel to the axial direction of the reference gas cell 14 and the measuring gas cell 15 Primary reflecting mirrors 16a and 17a to reflect, and secondary, tertiary, quaternary, fifth and final reflecting mirrors 16b and 16f disposed at 45 ° with respect to the axial direction of each gas cell 14 and 15. Optical system of the infrared gas analyzer, characterized in that consisting of (17b, 17f). 제3항에 있어서, 상기 각 반사경 (16a,16f)(17a,17f)는 그 반사경면의 중심이 편위되며, 최종반사경 (16f)(17f)는 반사경면의 중심이 가스셀(14)(15)의 중심축과 일치하는 상태로 배열된 것을 특징으로 하는 적외선 가스 분석기의 광학계.4. The reflection mirrors 16a, 16f, 17a, 17f have centers of their reflection mirrors, and the final reflection mirrors 16f, 17f have a center of the gas mirrors 14, 15f. Optical system of the infrared gas analyzer, characterized in that arranged in a state coinciding with the central axis. 제3항 또는 제4항에 있어서, 상기 2차반사경(16b)및 (17b)와 3차 반사경(16c) 및 (17c)사이에는 5차반사경(16e) 및 (17e)에서 최종적으로 반사된 빔이 최종반사경(16f) 및 (17f)에 입사될 수 있도록 하기 위한 간격이 형성된 것을 특징으로 하는 적외선 가스분석기의 광학계.The beam finally reflected by the fifth reflectors 16e and 17e between the second reflectors 16b and 17b and the third reflectors 16c and 17c. An optical system of an infrared gas analyzer, characterized in that a gap is formed so as to be incident on the final reflecting mirrors (16f) and (17f). ※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.※ Note: This is to be disclosed by the original application.
KR1019920000558A 1992-01-16 1992-01-16 Infrared Gas Analyzer Optical System KR930016774A (en)

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KR1019920000558A KR930016774A (en) 1992-01-16 1992-01-16 Infrared Gas Analyzer Optical System

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KR1019920000558A KR930016774A (en) 1992-01-16 1992-01-16 Infrared Gas Analyzer Optical System

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100557208B1 (en) * 1997-04-10 2006-05-24 브라이트 솔루션스 인코포레이티드 Material inspection light source
KR101381618B1 (en) * 2014-02-03 2014-04-04 동우옵트론 주식회사 Multi-gas analysis device using non dispersion ultraviolet absorption spectrophotometer
KR20200124479A (en) * 2019-04-24 2020-11-03 건국대학교 산학협력단 NDIR Analyzer With A Compact Type Reference Chamber

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100557208B1 (en) * 1997-04-10 2006-05-24 브라이트 솔루션스 인코포레이티드 Material inspection light source
KR101381618B1 (en) * 2014-02-03 2014-04-04 동우옵트론 주식회사 Multi-gas analysis device using non dispersion ultraviolet absorption spectrophotometer
KR20200124479A (en) * 2019-04-24 2020-11-03 건국대학교 산학협력단 NDIR Analyzer With A Compact Type Reference Chamber

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