KR930016774A - Infrared Gas Analyzer Optical System - Google Patents

Abstract

The present invention relates to an optical system of an infrared gas analyzer, while shortening the length of a reference gas cell and a measuring gas cell, while increasing the path of the infrared beam passing through the gas cell, it is possible to increase the accuracy of the measurement. It is possible to prevent the deterioration of the measurement accuracy due to the decrease in the intensity of the beam so as to prevent the deterioration of the accuracy of the measurement due to the decrease in the intensity of the infrared beam, by alternately proceeding to the reference gas cell and the measuring gas cell side without separating them. An infrared light source 11 for generating an infrared beam, a collimating lens 12 which makes the infrared beam emitted from the light source 11 into a parallel beam, and a parallel beam passing through the lens 12. The scanning mirror 13 which alternately reflects in both directions, the reference gas cell 14 filled with the reference gas, and the measurement gas flow in and out. The measured gas cells 15, the repeated reflector groups 16 and 17 and the repeated reflector groups 16 and 17 allow the infrared beam to pass through these gas cells 14 and 15 repeatedly. Band pass filters 18 and 19 for passing only beams of a specific wavelength band among the reflected infrared beams, and infrared detectors 20 for detecting infrared beams passing through the band pass filters 18 and 19.

Description

Infrared Gas Analyzer Optical System

As this is a public information case, the full text was not included.

2 is an optical system diagram of an infrared gas analyzer according to the present invention.

Claims (5)

An infrared light source 11 for generating an infrared beam, a scanning mirror 13 for alternately reflecting the infrared beam from the light source 11 in both directions, and a reference gas cell 14 filled with a reference gas And a measurement gas cell 15 into which the measurement gas flows in and out, a repetitive reflector group 16 and 17 allowing the red beam beam to pass through these gas cells 14 and 15 repeatedly, and a repeating reflection mirror. Band pass filters 18 and 19 for passing only the beams of a specific wavelength band among the infrared rays finally reflected by the groups 16 and 17 and infrared detectors for detecting the infrared beams passing through the band pass filters 18 and 19. Light source system of the infrared gas analyzer, characterized in that consisting of (20). 2. The infrared gas analyzer of claim 1, wherein a collimating lens (12) is formed between the light source (11) and the scanning mirror (13) to make parallel beams of the infrared beam from the light source (11). Optical system. The method of claim 1, wherein the repeating reflection group (16, 17) is a parallel beam reflected by the scanning mirror 13 in the direction parallel to the axial direction of the reference gas cell 14 and the measuring gas cell 15 Primary reflecting mirrors 16a and 17a to reflect, and secondary, tertiary, quaternary, fifth and final reflecting mirrors 16b and 16f disposed at 45 ° with respect to the axial direction of each gas cell 14 and 15. Optical system of the infrared gas analyzer, characterized in that consisting of (17b, 17f). 4. The reflection mirrors 16a, 16f, 17a, 17f have centers of their reflection mirrors, and the final reflection mirrors 16f, 17f have a center of the gas mirrors 14, 15f. Optical system of the infrared gas analyzer, characterized in that arranged in a state coinciding with the central axis. The beam finally reflected by the fifth reflectors 16e and 17e between the second reflectors 16b and 17b and the third reflectors 16c and 17c. An optical system of an infrared gas analyzer, characterized in that a gap is formed so as to be incident on the final reflecting mirrors (16f) and (17f). ※ Note: This is to be disclosed by the original application.