KR930015136A - Solar cell manufacturing method - Google Patents

Solar cell manufacturing method Download PDF

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Publication number
KR930015136A
KR930015136A KR1019910025520A KR910025520A KR930015136A KR 930015136 A KR930015136 A KR 930015136A KR 1019910025520 A KR1019910025520 A KR 1019910025520A KR 910025520 A KR910025520 A KR 910025520A KR 930015136 A KR930015136 A KR 930015136A
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KR
South Korea
Prior art keywords
electrode
solar cell
doping
electrode portion
pocl
Prior art date
Application number
KR1019910025520A
Other languages
Korean (ko)
Inventor
남효진
Original Assignee
이헌조
주식회사 금성사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이헌조, 주식회사 금성사 filed Critical 이헌조
Priority to KR1019910025520A priority Critical patent/KR930015136A/en
Publication of KR930015136A publication Critical patent/KR930015136A/en

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Abstract

본 발명은 전극 부위만 스프레이 방법에 의해 도핑을 많이하고 그외의 부분은 Pocl3를 이용하여 도핑을 적게하여 전극부의 접촉저항을 낮추고 단파장에 대한 광흡수 특성을 향상시킬 수 있는 태양전지 제조방법에 관한 것으로 종랭에는 후막으로 Ag전극 형성시 Ag나 글래스질의 침투로 정선이 파괴되기 쉬우며 n+층의 정션 깊이를 0.5㎛이상으로 해 주어야 하는 문제가 있어 P형 위이퍼(11)의 전면 부위에 코팅공정, 전면 전극이외 부분에 Pocl3도핑공정, 반사방지용 TiO2(15) 형성공정, BSF형성 및 전후면 전극(18)(19) 형성 공정을 차례로 실시하는 문제를 개선한 것이다.The present invention relates to a method of manufacturing a solar cell that can do a lot of doping by the spray method only the electrode portion and the other portion is less doping using Pocl 3 to lower the contact resistance of the electrode portion and improve the light absorption characteristics for short wavelengths. When the Ag electrode is formed into a thick film, it is easy to break the line due to the penetration of Ag or glass quality, and the junction depth of the n + layer should be 0.5 μm or more. Therefore, the front surface of the P-type wiper 11 is coated. The problem of performing the Pocl 3 doping process, the anti-reflective TiO 2 (15) forming process, the BSF forming and the front and rear electrodes 18, 19 forming process in the other portions of the front electrode and the front electrode in this order is improved.

Description

태양전지 제조 방법Solar cell manufacturing method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 본 발명 태양전지의 공정 단면도.2 is a cross-sectional view of the solar cell of the present invention.

Claims (2)

P형 웨이퍼(11)에 특성 에치후 도펀트가 포함된 용액을 전면전극 부위에 코팅하는 공정과, 상기 P형 웨이퍼(11)를 N2분위기의 확산로에 넣어 코팅된 부분이 충분히 도핑되게 하고 전면 전극 이외의 부분에 Pocl3를 도핑하는 공정과, 전표면에 반사방지용TiO2(15)를 형성하는 공정과, 웨이퍼 후면에 Al(16) 페이스트를 스크린 프린팅하고 열처리하여 BSF를 형성한 후 Ag를 스크린 프린팅하여 전후면 전극(18)(19)을 형성하는 공정을 차례로 실시하여서 이루어지는 태양 전지 제조방법.Coating the solution containing the characteristic dopant on the P-type wafer 11 on the front electrode, and placing the P-type wafer 11 in a diffusion path of N 2 atmosphere to sufficiently doped the coated portion Doping Pocl 3 to the non-electrode portion, forming anti-reflective TiO 2 (15) on the entire surface, and screen printing and heat-treating Al (16) paste on the back of the wafer to form BSF, followed by Ag A method of manufacturing a solar cell, which is performed by screen printing in order to sequentially form the front and rear electrodes (18, 19). 제1항에 있어서, 전면 전극 부위를 스프레이 코팅 방법으로 높게 도핑하고 그 외의 부분은 낮게 도핑하는 태양전지 제조방법.The method of claim 1, wherein the front electrode portion is highly doped by a spray coating method and the other portions are doped low. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019910025520A 1991-12-30 1991-12-30 Solar cell manufacturing method KR930015136A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019910025520A KR930015136A (en) 1991-12-30 1991-12-30 Solar cell manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019910025520A KR930015136A (en) 1991-12-30 1991-12-30 Solar cell manufacturing method

Publications (1)

Publication Number Publication Date
KR930015136A true KR930015136A (en) 1993-07-23

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910025520A KR930015136A (en) 1991-12-30 1991-12-30 Solar cell manufacturing method

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KR (1) KR930015136A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100590258B1 (en) * 2002-10-08 2006-06-15 삼성에스디아이 주식회사 Method for fabricating solar cell using spray
US8227881B2 (en) 2006-04-05 2012-07-24 Samsung Sdi Co., Ltd. Solar cell and its method of manufacture

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100590258B1 (en) * 2002-10-08 2006-06-15 삼성에스디아이 주식회사 Method for fabricating solar cell using spray
US8227881B2 (en) 2006-04-05 2012-07-24 Samsung Sdi Co., Ltd. Solar cell and its method of manufacture

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