KR930015118A - Light receiving element - Google Patents

Light receiving element Download PDF

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Publication number
KR930015118A
KR930015118A KR1019910023015A KR910023015A KR930015118A KR 930015118 A KR930015118 A KR 930015118A KR 1019910023015 A KR1019910023015 A KR 1019910023015A KR 910023015 A KR910023015 A KR 910023015A KR 930015118 A KR930015118 A KR 930015118A
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KR
South Korea
Prior art keywords
layer
receiving element
light receiving
type
intrinsic
Prior art date
Application number
KR1019910023015A
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Korean (ko)
Other versions
KR940008573B1 (en
Inventor
남재국
이두환
Original Assignee
정몽헌
현대전자산업 주식회사
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Priority to KR1019910023015A priority Critical patent/KR940008573B1/en
Publication of KR930015118A publication Critical patent/KR930015118A/en
Application granted granted Critical
Publication of KR940008573B1 publication Critical patent/KR940008573B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Light Receiving Elements (AREA)

Abstract

내용 없음No content

Description

수광소자Light receiving element

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 종래의 액상 에피텍셜 성장장치(LPE)를 이용하여 형성된 수광소자 단면도.1 is a cross-sectional view of a light receiving element formed using a conventional liquid epitaxial growth apparatus (LPE).

제2도는 본발명에 따른 액상 에피텍셜 성장장치(LPE)를 이용하여 형성된 수광소자 단면도.2 is a cross-sectional view of a light receiving element formed using a liquid epitaxial growth apparatus (LPE) according to the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : n형 InP 기판 2 : n형 InP 버퍼층1: n-type InP substrate 2: n-type InP buffer layer

3 : i(intrinsic) - InGaAs 4 : P형 InGaAs층3: i (intrinsic)-InGaAs 4: P-type InGaAs layer

5 : i(intrinsic) - InGaAsP 형성층 6 : P형 InGaAsP 성장층5: i (intrinsic)-InGaAsP formation layer 6: P-type InGaAsP growth layer

7 : P형 InP 성장층7: P-type InP growth layer

Claims (1)

n형 InP 기판(1)과 n형 InP 버퍼층(2)과, i(intrinsic)-InGaAs 흡수층(3)과 P타입 InGaAs층(4)을 구비하는 수광소자에 있어서, 상기 i(intrinsic)-InGaAs 흡수층(3) 상부에 InP층(7)을 성장시키기 위해, i(intrinsic)-InGaAsP 형성층(5) 및 P타입 InGaAsP 성장층(6)이 중간층으로 형성되는 것을 특징으로 하는 수광소자.In a light-receiving element comprising an n-type InP substrate 1, an n-type InP buffer layer 2, an i (intrinsic) -InGaAs absorbing layer 3, and a P-type InGaAs layer 4, the i (intrinsic) -InGaAs A light receiving element characterized in that an i (intrinsic) -InGaAsP forming layer (5) and a P-type InGaAsP growth layer (6) are formed as an intermediate layer in order to grow an InP layer (7) on top of an absorbing layer (3). ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019910023015A 1991-12-14 1991-12-14 Photo absorption device KR940008573B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019910023015A KR940008573B1 (en) 1991-12-14 1991-12-14 Photo absorption device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019910023015A KR940008573B1 (en) 1991-12-14 1991-12-14 Photo absorption device

Publications (2)

Publication Number Publication Date
KR930015118A true KR930015118A (en) 1993-07-23
KR940008573B1 KR940008573B1 (en) 1994-09-24

Family

ID=19324824

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910023015A KR940008573B1 (en) 1991-12-14 1991-12-14 Photo absorption device

Country Status (1)

Country Link
KR (1) KR940008573B1 (en)

Also Published As

Publication number Publication date
KR940008573B1 (en) 1994-09-24

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