KR930014821A - Belt type filter automatic cleaning device for clean room air conditioning - Google Patents

Belt type filter automatic cleaning device for clean room air conditioning Download PDF

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Publication number
KR930014821A
KR930014821A KR1019910022923A KR910022923A KR930014821A KR 930014821 A KR930014821 A KR 930014821A KR 1019910022923 A KR1019910022923 A KR 1019910022923A KR 910022923 A KR910022923 A KR 910022923A KR 930014821 A KR930014821 A KR 930014821A
Authority
KR
South Korea
Prior art keywords
belt
filter
clean room
cleaning device
washing
Prior art date
Application number
KR1019910022923A
Other languages
Korean (ko)
Other versions
KR940004017B1 (en
Inventor
송강일
방홍열
이병택
임태영
Original Assignee
경상현
재단법인 한국전자통신연구소
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 경상현, 재단법인 한국전자통신연구소 filed Critical 경상현
Priority to KR1019910022923A priority Critical patent/KR940004017B1/en
Publication of KR930014821A publication Critical patent/KR930014821A/en
Application granted granted Critical
Publication of KR940004017B1 publication Critical patent/KR940004017B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting

Abstract

내용 없음No content

Description

청정실 공조용 벨트형 필터 자동세척장치Belt type filter automatic cleaning device for clean room air conditioning

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명의 기술적 구성을 나타낸 상태도.1 is a state diagram showing the technical configuration of the present invention.

제2a도, 제2b도는 종래 발명의 사시도 및 단면도.2A and 2B are a perspective view and a cross-sectional view of a conventional invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 망필터 2 : 벨트형 롤필터1: network filter 2: belt type roll filter

2a : 1차 벨트형 롤필터 2b : 2차 벨트형 롤필터2a: 1st belt type roll filter 2b: 2nd belt type roll filter

3 : 분사장치 4 : 세척조3: injector 4: washing tank

4a : 세척수 5 : 건조팬4a: washing water 5: drying fan

6 : 압착 로울러 7 : 감속모터6: crimping roller 7: reduction motor

7a : V벨트 8 : 차압계7a: V belt 8: Differential pressure gauge

9 : 회전 로울러9: rotating roller

Claims (4)

반도체 공업, 첨단광학 또는 의학분야에서 청정실의 청정도를 유지하기 위한 공조기에 있어서, 큰 분진, 날벌레 등이 섞여있는 오염된 외기가 유입되어 걸러지도록 공조기 전면에 장착된 망필터(1)와, 상기 망필터(1)에 의해 걸러진 공기가 1·2차에 걸쳐 정화되도록 하는 정화부와; 상기 정화부에서 오염된 벨트형 롤필터의 기능유지 및 수명이 연장되도록 물세척하기 위한 세척부와; 상기 세척부에서 세척되어 젖은 벨트형 롤필터를 건조하기 위한 건조부를 구성한 것을 특징으로 하는 청정실 공조용 벨트형 필터 자동세척장치.In the air conditioner for maintaining the cleanliness of the clean room in the semiconductor industry, high-tech optical or medical field, the network filter (1) mounted on the front of the air conditioner to filter the contaminated outside air mixed with large dust, blades, etc., and the network A purifying unit for purifying the air filtered by the filter 1 over the first and second orders; A washing unit for washing water to maintain the function and life of the belt-type roll filter contaminated by the purifying unit; The belt-type filter automatic cleaning device for a clean room of the air conditioner, characterized in that the drying unit is configured to dry the wet belt-type roll filter washed by the washing unit. 제1항에 있어서, 정화부는 망필터(1)에 의해 걸러진 공기가 1·2차에 걸쳐 정화되도록 2중으로 1·2차 벨트형 롤필터(2a),(2b)를 구성한 것을 특징으로 하는 청정실 공조용 벨트형 필터 자동세척장치.The clean room according to claim 1, wherein the purifying unit constitutes primary and secondary belt type roll filters (2a, 2b) so as to purify the air filtered by the net filter (1) over the primary and secondary. Automatic belt cleaning device for air conditioning. 제1항에 있어서, 세척부는 1·2차 벨트형 롤필터(2a),(2b) 부위가 회전 로울러(9)를 통해 이동하여 세척되도록 세척수(4a)가 채워진 세척조(4)와, 이 세척조(4)의 상측에 분사장치(3)를 구성하는 것을 특징으로 하는 청정실 공조용 벨트형 필터 자동세척장치.The washing tank (4) according to claim 1, wherein the washing portion (4) is filled with the washing water (4a) so that the primary and secondary belt-type roll filters (2a) and (2b) are moved through the rotary rollers (9) to be cleaned. A belt-type filter automatic cleaning device for clean room air conditioning, comprising an injection device (3) above the (4). 제1항에 있어서, 건조부는 상기 세척부를 거쳐 젖은 벨트형 롤필터의 물기가 어느정도 제거되도록 하는 압착 로울러(6)와, 이 압착 로울러(6)를 통과한 벨트형 롤필터(2)의 저면에 건조팬(5)을 구성한 것을 특징으로 하는 청정실 공조용 벨트형 필터 자동세척장치.The method of claim 1, wherein the drying unit is provided on the bottom surface of the compression roller (6) and the bottom surface of the belt-shaped roll filter (2) passing through the compression roller (6) to remove the water of the wet belt-type roll filter to some extent through the washing unit. Belt type filter automatic cleaning device for clean room air conditioning, characterized by comprising a drying fan (5). ※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.※ Note: This is to be disclosed by the original application.
KR1019910022923A 1991-12-13 1991-12-13 Automatic cleaning apparatus of belt-type filter for clean room duct KR940004017B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019910022923A KR940004017B1 (en) 1991-12-13 1991-12-13 Automatic cleaning apparatus of belt-type filter for clean room duct

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019910022923A KR940004017B1 (en) 1991-12-13 1991-12-13 Automatic cleaning apparatus of belt-type filter for clean room duct

Publications (2)

Publication Number Publication Date
KR930014821A true KR930014821A (en) 1993-07-23
KR940004017B1 KR940004017B1 (en) 1994-05-10

Family

ID=19324758

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910022923A KR940004017B1 (en) 1991-12-13 1991-12-13 Automatic cleaning apparatus of belt-type filter for clean room duct

Country Status (1)

Country Link
KR (1) KR940004017B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102063857B1 (en) * 2019-06-10 2020-01-08 엔비노드 주식회사 Helical air flow multiple sensor flatform

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102063857B1 (en) * 2019-06-10 2020-01-08 엔비노드 주식회사 Helical air flow multiple sensor flatform

Also Published As

Publication number Publication date
KR940004017B1 (en) 1994-05-10

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