KR930007972B1 - Surface pretreating apparatus for plane display element - Google Patents

Surface pretreating apparatus for plane display element Download PDF

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Publication number
KR930007972B1
KR930007972B1 KR1019910005321A KR910005321A KR930007972B1 KR 930007972 B1 KR930007972 B1 KR 930007972B1 KR 1019910005321 A KR1019910005321 A KR 1019910005321A KR 910005321 A KR910005321 A KR 910005321A KR 930007972 B1 KR930007972 B1 KR 930007972B1
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South Korea
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housing
passage
storage tank
chemical
substrate
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KR1019910005321A
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Korean (ko)
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KR920020630A (en
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이희국
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삼성전자 주식회사
김광호
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Liquid Crystal (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

The device for cleaning a plurality of boards simultaneously, performing preparatory-processing and reducing a cleansing solution, comprises a housing (1) forming the first passage (2) separated from the inner wall of the housing and having inner case (5) with perforating holes (9) at both side-walls; cleansing solution storage tank (7) with inner heater (8) for forming secondary passage (6); UV lamps (11) positioned between upper or lower case (5) and partition wall (10); blowing fan (15) mounted at discharging tube (14) of the tank (7).

Description

평판표시소자용 기판예비처리장치Substrate preliminary processing device for flat panel display elements

제 1 도는 본 발명의 계략적으로 도시한 측단면도이고,1 is a schematic cross-sectional side view of the present invention,

제 2 도는 종래기술의 개략측단면도이다.2 is a schematic side cross-sectional view of the prior art.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 하우징 2 : 제 1 통로1 housing 2 first passage

3 : 유리기판 4 : 기판장착카세트3: glass substrate 4: substrate mounting cassette

5 : 내부케이스 6 : 제 2 통로5: inner case 6: second passage

7 : 약품저장조 8 : 히이터7: chemical storage tank 8: heater

9 : 관통구멍 10 : 격벽9 through hole 10 bulkhead

11 : 자외선램프 12 : 진공펌프11: ultraviolet lamp 12: vacuum pump

13 : 받침플레이트 14 : 방출관13: support plate 14: discharge pipe

16 : 산소공급관16: oxygen supply pipe

본 발명은 평판표시소자용 기판예비처리장치에 관한 것으로, 특히 다수의 기판을 동시에 세정하여 예비처리할 수 있으면서 세정약품의 소비량을 줄여 비용을 절감하고 작업효율를 향상시킬 수 있도록 한 평판표시소자용 기판예비처리장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate preliminary processing apparatus for a flat panel display device. In particular, a substrate for a flat panel display device can reduce the consumption of cleaning chemicals while reducing the consumption of cleaning chemicals while simultaneously cleaning a plurality of substrates. It relates to a pretreatment device.

일반적으로 유리, 석영 등의 비정질 기판상에 반도체 박막을 부착시킨 박막트랜지스터(Thin Film Transistor)를 이용하여 액정 TV등을 제작할 때 유리가판에 액정배향막을 정형하고, 표시동작에 불필요한 부분을 제거하기 위해 상기 액정배향막상에 강경화성 수지 또는 광분해성 수지로된 포토레지스트를 도포, 건조시켜 레지스트막을 형성한다음, 이 레지스트막에 노광을 실시하게 된다.In general, when manufacturing a liquid crystal TV using a thin film transistor in which a semiconductor thin film is attached to an amorphous substrate such as glass or quartz, to form a liquid crystal alignment film on a glass substrate and to remove unnecessary parts for display operation. A photoresist made of a hardenable resin or photodegradable resin is applied and dried on the liquid crystal alignment film to form a resist film, and then the resist film is exposed to light.

그런데 유리기판에는 공기중 또는 장비등에 부착되어있는 미세한 유기물이라던가 수분등이 묻어있어 포토레지스트의 접착력을 저하시키게 되므로 이와 같은 이물질을 완전히 제거하기 위해 포토레지스트 도포작업전에 HMDS등과 같은 약품으로 기판을 세정시켜주는 예비처리를 하게 된다.However, because the glass substrate contains minute organic matter or moisture attached to the air or equipment, it lowers the adhesion of the photoresist. Therefore, the substrate should be cleaned with chemicals such as HMDS before the photoresist application to completely remove such foreign substances. The state is preliminary.

종래 기판예비처리장치는 제 2 도에 도시된 바와같이, 하우징(20) 내부에 구동수단에 연결되어 회전하도록된 진공흡착식 스핀척(21)과, 이 스핀척(21)의 상부면에 흡착지지된 포토레지스트 도포용 유리기판(22), 상기 하우징(20)의 상부커버(23)의 중앙을 관통하여 설치된 약품공급관(24)의 선단에 갖춰진 노즐(25)로 구성되어, 상기 스핀척(21)을 회전시켜 이에 흡착지지된 유리기판(22)을 회전시키면서 상기 노즐(25)을 통해 세정약품을 유리기판(22)의 중앙부 상에 분사시키며, 세정약품의 분사력 및 회전되는 유리기판(22)상에서 원심력에 의해 세정약품이 유리기판(22)의 중앙부에서 바깥 가장자리쪽으로 와류흐름의 형태로 유동되면서 유리기판(22) 상의 이물질을 분해, 제거시키도록 되어 있다.As shown in FIG. 2, the conventional substrate preliminary processing apparatus includes a vacuum suction type spin chuck 21 which is connected to a driving means and rotates inside the housing 20, and is supported by suction on an upper surface of the spin chuck 21. FIG. And a nozzle 25 provided at the tip of the chemical supply pipe 24 installed through the center of the upper cover 23 of the housing 20, the photoresist coating glass substrate 22, and the spin chuck 21 Rotates the glass substrate 22 adsorbed and supported thereon, and sprays the cleaning chemical onto the central portion of the glass substrate 22 through the nozzle 25, and the spraying force and the rotating glass substrate 22 of the cleaning chemical. As the cleaning chemical flows in the form of vortex flow from the central portion of the glass substrate 22 to the outer edge by centrifugal force in the phase, the foreign matter on the glass substrate 22 is decomposed and removed.

그러나 상기 종래장치는 세정작업시 유리기판(22)을 한 장씩 밖에 세정할 수 없게 되어 작업효율이 낮을 뿐만 아니라 세정약품이 유리기판(22)상에서 원심력에 의해 비산되어 커버(23)에 부딪힌 다음 유리기판(22)상에 낙하되거나 하우징(20)의 내벽면에 부착되어 흘러내리면서 앞선 세정작업의 부산물인 찌거기가 혼입되게 되는바, 이에따라 세정약품의 회수에 상당한 비용이 소요되는 등 강제성이 낮아, 한번 사용한 세정약품을 그대로 버리게되어 결과적으로 세정약품의 소요량이 많게 됨으로해서 원가절감을 기대할 수 없다고 하는 결점이 있다.However, in the conventional apparatus, only one sheet of glass substrate 22 can be cleaned during the cleaning operation, so that the working efficiency is low, and the cleaning chemical is scattered by the centrifugal force on the glass substrate 22 to hit the cover 23 and then the glass. As it falls on the substrate 22 or adheres to the inner wall of the housing 20 and flows down, the debris, which is a by-product of the previous cleaning operation, is mixed. Accordingly, a considerable cost is required to recover the cleaning chemicals. As a result, once used cleaning chemicals are discarded as a result, the required amount of cleaning chemicals is large, resulting in a cost reduction.

이하 본 발명은 상기와 같은 제반 결점을 해결하기 위해 발명된 것으로, 본 발명은 세정약품(HMDS)을 증기상태로 공급하여 한꺼번에 다수의 유리기판을 세정할 수 있으면서 미량의 약품을 잔류시켜 포토레지스트의 접착력을 향상시킴과 더불어 세정약품을 재사용할 수 있도록 하여 작업효율 및 비용을 절감할 수 있도록된 평판표시소자용 기판세정장치를 제공함에 그 목적이 있다.Hereinafter, the present invention has been invented to solve the above-mentioned shortcomings, and the present invention can supply a cleaning chemical (HMDS) in a vapor state to clean a plurality of glass substrates at the same time while leaving a small amount of chemicals in the photoresist. It is an object of the present invention to provide a substrate cleaning device for a flat panel display device that can improve the adhesive strength and reuse the cleaning chemicals, thereby reducing work efficiency and cost.

상기와 같은 목적을 달성하기 위한 본 발명은, 하우징 내부에 이 하우징의 내벽과 이격되게 다수의 유리기판이 수납된 기판장착 카세트를 갖춘 내부케이스가 설치되고, 이 내부케이스이 하부와 소정거리를 두고 히이터가 내장된 약품저장조가 갖춰지며, 상기 내부케이스의 상,하부에는 투명격벽을 사이에두고 자외선 램프가 설치되는 한편, 상기 약품저장조의 한쪽에 약품증기를 송풍하도록 송풍편이 설치된 구조로 되어 있다.The present invention for achieving the above object, there is provided an inner case having a substrate mounting cassette in which a plurality of glass substrates are stored spaced apart from the inner wall of the housing, the inner case is a heater at a predetermined distance from the lower portion Is equipped with a built-in chemical storage tank, the upper and lower portions of the inner case is provided with an ultraviolet lamp across the transparent partition wall, while the blowing piece is installed to blow the chemical vapor on one side of the chemical storage tank.

따라서 상기와 같은 구성으로된 본 발명은, 먼저 내부케이스를 진공상태로 만들어주고 자외선램프를 동작시켜 기판장착 카세트에 장착된 유리기판상의 유기물을 분해한다음, 히이터를 동작시켜 약품저장조내의 약품을 증발시켜 증기상태로 만들어 송풍팬을 매개로 기판장착 카세트에 장착된 유리기판으로 약품증기를 산소(O2)와 함께 송품함으로써 유리기판상에 미량의 약품을 잔류시켜 포토레지스트이 접착력을 향상시킬 수 있도록되고, 또한 약품증기를 순환시키면서 유리기판을 예비처리하도록 함으로써 불필요하게 손실되는 약품량을 줄여 소요비용을 절감할 수 있음과 더불어 한꺼번에 다수의 유리기판을 동시에 예비처리할 수 있도록 하여 작업효율을 향상시키도록 되어 있다.Therefore, the present invention having the configuration as described above, first to make the inner case in a vacuum state and to operate the ultraviolet lamp to decompose the organic matter on the glass substrate mounted on the substrate mounting cassette, and then operate the heater to evaporate the chemical in the chemical storage tank By sending the chemical vapor along with oxygen (O 2 ) to the glass substrate mounted on the substrate mounting cassette through the blower fan to make a vapor state, a small amount of chemical remains on the glass substrate so that the photoresist can improve the adhesion. In addition, by pre-treating the glass substrate while circulating the chemical vapor, it is possible to reduce the unnecessary cost by reducing the amount of unnecessarily lost chemicals, and to improve the work efficiency by allowing the pre-treatment of multiple glass substrates at the same time. have.

이하 본 발명을 첨부된 예시도면에 의거 상세히 설명한다.Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

본 발명은 제 1 도에 도시된 바와 같이, 하우징(1) 내부에 이 하우징(1)의 좌,우내벽과의 사이에 소정의 제 1 통로(2)가 형성되도록 이격되게 예비처리하고자하는 유리기판(3)을 수납하는 기판장착카세트(4)가 내장된 내부케이스(5)가 설치되고, 이 내부케이스(5)의 하부에는 소정의 제 2 통로(6)가 형성되도록 이격 설치되면서 처리약품, 에컨대 HMDS가 채워진 약품저장조(7)가 설치되며, 이 약품저장조(7)에는 약품을 가열하여 증발시키도록 석영히이터(8)가 설치되어 있다.According to the present invention, as shown in FIG. 1, the glass is intended to be preliminarily spaced so that a predetermined first passage 2 is formed between the left and right inner walls of the housing 1 inside the housing 1. An inner case 5 having a substrate mounting cassette 4 thereinto accommodates the substrate 3 is installed, and a lower portion of the inner case 5 is installed to be spaced apart so that a predetermined second passage 6 is formed. For example, a chemical storage tank 7 filled with HMDS is provided, and the chemical storage tank 7 is provided with a quartz heater 8 to heat and evaporate the chemical.

여기서 상기 내부케이스(5)는 그 좌,우양쪽 측벽에 약품증기가 제 1,2통로(2,6)로 유입되거나 유출되도록 다수의 관통구멍(9)이 전체면에 걸쳐 뚫려있고, 상기 내부케이스(5)의 상,하부에는 투명재질, 예컨대 염화비닐로 만들어진 격벽(10)을 사이에 두고 자외선을 유리기판(3)에 조사하도록된 자외선램프(11)가 설치되며, 상기 하우징(1)의 한쪽 측벽 상단에는 이 하우징(1)의 내부공간을 진공으로 만들 수 있도록 진공펌프(12)가 연결되는 한편, 상기 아랫쪽 격벽(10)의 윗쪽에는 기판장착카세트(4)를 올려놓을 수 있도록 투명재질의 받침플레이트(13)가 가로 설치되어 있다.Here, the inner case (5) has a plurality of through holes (9) are perforated over the entire surface so that chemical vapors flow into or out of the first and second passages (2, 6) on the left and right sidewalls thereof. The upper and lower parts of the case 5 are provided with ultraviolet lamps 11 for irradiating the glass substrate 3 with ultraviolet light through the partition 10 made of a transparent material, for example, vinyl chloride, and the housing 1. A vacuum pump 12 is connected to the upper side of one side wall of the housing 1 so as to vacuum the inner space of the housing 1, while a substrate mounting cassette 4 is transparent to the upper side of the lower partition 10. Support plate 13 made of material is installed horizontally.

한편 상기 내부케이스(5)의 하부와 약품저장조(7) 사이에 형성된 제 2 통로(6)의 한쪽 끝부위, 즉 약품저장조(7)의 상부에 갖춰진 약품증기 방출관(14)에는 약품저장조(7)에서 발생된 약품증기를 송풍하도록 된 송풍팬(15)이 설치되고, 상기 제 2 통조(6)의 다른쪽 끝부위에는 산소(O2)공급관(16)이 연결되어 있다.Meanwhile, a chemical storage tank (14) is provided at one end of the second passage (6) formed between the lower portion of the inner case (5) and the chemical storage tank (7), that is, the upper portion of the chemical storage tank (7). Blowing fan 15 to blow the chemical vapor generated in 7) is installed, the oxygen (O 2 ) supply pipe 16 is connected to the other end of the second tank (6).

다음에는 상기와 같은 구성으로된 본 발명의 작용효과를 설명한다.Next, the operational effects of the present invention having the above configuration will be described.

먼저 기판장착카세트(4)에다 예비처리하고자하는 다수의 유리기판(3)을 차례로 장착시킨 뒤, 도시되지 않은 커버를 닫아 하우징(1) 내부를 밀폐시킨 상태에서 진공펌프(12)를 동작시켜 하우징(1) 내부를 진공으로 만든다음, 자외선램프(11)에 전원을 인가하여 이 자외선램프(1)로부터 자외선을 방출시키면, 자외선이 투명재질의 격벽(10)을 투과하여 기판장착 카세트(4)에 장착된 유리기판(3)에 조사되게 된다.First, a plurality of glass substrates 3 to be pretreated are sequentially mounted on the substrate mounting cassette 4, and then the vacuum pump 12 is operated by closing the cover (not shown) to seal the inside of the housing 1, (1) When the inside is vacuumed, power is supplied to the ultraviolet lamp 11 to emit ultraviolet light from the ultraviolet lamp 1, so that the ultraviolet light passes through the partition 10 of the transparent material and the substrate mounting cassette 4 The glass substrate 3 mounted on the glass substrate 3 is irradiated.

이에따라 이 자외선에 의해 유리기판(3)상에 묻어있던 유기물등이 분해되는바, 이때 발생되는 Co2라던가 NH3와 같은 개스는 상기 진공펌프의 흡입동작에 의해 외부로 방출되게 된다.Accordingly, the ultraviolet light decomposes the organic matter and the like buried on the glass substrate 3, and the gas such as Co 2 or NH 3 generated at this time is released to the outside by the suction operation of the vacuum pump.

이어 히이터(8)에 전원을 가하여 약품저장조(7)내에 저장된 HMDS와 같은 약품을 가열하면, 이 약품이 증발되어 증기상태로 되는바, 이에따라 송풍팬(15)을 가동시키면 상기 약품증기가 약품저장조(7)의 한쪽방출관(14)을 통해 왼쪽 제 1 통로(2)로 유입된 다음, 내부케이스(5)의 측벽에 뚫려진 관통구멍(9)을 통해 이 내부케이스(5)의 내부공간으로 유입되어 기판장착 카세트(4)에 장착된 유리기판(3) 위를 통과하게 된다.Subsequently, when the heater 8 is heated to heat a chemical agent such as HMDS stored in the chemical storage tank 7, the chemical vaporizes and becomes a vapor. Accordingly, when the blower fan 15 is operated, the chemical vapor is chemically stored in the chemical storage tank. The inner space of the inner case 5 enters the left first passage 2 through the one discharge pipe 14 of (7) and then through the through hole 9 drilled in the side wall of the inner case 5. Flows into the glass substrate 3 mounted on the substrate mounting cassette 4.

따라서, 약품증기가 유리기판(3)을 스쳐지나가면서 이들 사이의 경계면, 즉 유리기판(3)의 표면에서 상기 자외선램프(11)의 자외선에 의해 분해된 유기물이 약품증기와 결합되어 세정작용을 하게 되는바, 이때 산소공급관(16)을 통해 산소(O2)를 제 2 통로(6)로 공급하는데, 이에따라 산소는 송풍팬(15)의 흡입력에 의해 약품증기와 함께 내부케이스(5)의 내부공간으로 유입된 다음, 자외선에 의해 분해되어 오존(O3)을 발생하게 되고, 이 오존은 발생기 산소의 형태로 유기판(3)상에 부착되게 된다.Therefore, the chemical vapor passes through the glass substrate 3 and the organic matter decomposed by the ultraviolet rays of the ultraviolet lamp 11 at the interface between them, that is, the surface of the glass substrate 3, is combined with the chemical vapor to perform the cleaning action. In this case, oxygen (O 2 ) is supplied to the second passage (6) through the oxygen supply pipe (16). Accordingly, oxygen is supplied with the chemical vapor by the suction force of the blower fan (15) of the inner case (5). After entering the inner space, it is decomposed by ultraviolet rays to generate ozone (O 3 ), which is attached to the organic plate 3 in the form of generator oxygen.

따라서, 유기판(3)의 표면에는 증착된 HMDS막위에 발생기 산소가 분포하게 되므로, 차후 포토레지스트 도포작압시 포토레지스트의 접착력이 향상되게 된다.Therefore, since the generator oxygen is distributed on the deposited HMDS film on the surface of the organic plate 3, the adhesion of the photoresist is improved during the subsequent photoresist coating operation.

한편 상기 기판장착 카세트(4)를 관통하여 나온 약품증기는 내부케이스(5)의 오른쪽 측벽에 형성된 관통구멍(9)을 통해 오른쪽 제 1 통로(2)로 유입된다음 송풍팬(15)의 송풍력에 의해 제 2 통로(6)를 거쳐 방출관(14)으로부터 새롭게 배출되는 약품증기와 혼합되어 내부케이스(5)내부로 재공급되는 순환동작이 되풀이되면서 유리기판(3)을 예비처리하게 된다.Meanwhile, the chemical vapor that penetrates through the substrate mounting cassette 4 is introduced into the right first passage 2 through the through hole 9 formed in the right side wall of the inner case 5, and then the air is blown out of the blower fan 15. The glass substrate 3 is pretreated by being mixed with the chemical vapor newly discharged from the discharge pipe 14 through the second passage 6 by the wind and resupplied into the inner case 5. .

이상의 설명에서와 같이 본 발명은, 포토레지스트 도포작업을 위한 유리가판 예비처리시 자외선을 조사하면서 HMDS약품을 증기상태로 다수의 유리기판에 송풍하여 유기물을 분해함과 더불어 미량을 잔류시켜 포토레지스트의 접착력을 향상시킬 수 있도록 되고, 또 손실되는 약품량을 최소화시켜 비용을 절감할 수 있음과 더불어 한꺼번에 다수의 유리기판을 동시에 예비처리함으로써 작업효율을 향상시킬 수 있는 효과가 있다.As described above, the present invention, while pretreatment of the glass substrate for the photoresist coating operation by blowing ultraviolet rays to HMDS chemicals in a plurality of glass substrates in the vapor state while decomposing organic matter and remaining a small amount of the photoresist Adhesion can be improved, and the amount of chemicals lost can be minimized and cost can be reduced, and work efficiency can be improved by pre-treating a plurality of glass substrates at the same time.

Claims (3)

하우징(1) 내부에 이 하우징(1)의 내벽과 이격되게 제 1 통로(2)를 형성하도록되면서 양쪽 측벽에 다수의 관통구멍(9)이 뚫려진 내부케이스(5)가 설치되고, 이 내부케이스(5)의 하부와 이격되게 제 2 통로(6)를 형성하도록 히이터(8)가 내장된 약품저장조(7)가 갖춰지며, 상기 내부케이스(5)의 상,하부에는 격벽(10)을 사이에 두고 자외선램프(11)가 설치되는 한편, 상기 약품저장조(7)의 방출관(14)에 송풍팬(15)이 갖춰진 평판표시소자용 기판예비처리장치.An inner case 5 having a plurality of through holes 9 formed therein is installed at both side walls while forming the first passage 2 spaced apart from the inner wall of the housing 1 in the housing 1. A chemical storage tank 7 having a heater 8 therein is provided to form a second passage 6 spaced apart from a lower portion of the case 5, and partition walls 10 are disposed on upper and lower portions of the inner case 5. An ultraviolet lamp (11) interposed between the substrate preliminary processing device for a flat panel display device, wherein a blowing fan (15) is provided in the discharge tube (14) of the chemical storage tank (7). 제 1 항에 있어서, 상기 하우징(1)에는 하우징(1) 내부를 진공상태로 만들어주도록 진공펌프(12)가 연결된 것을 특징으로 하는 평판표시소자용 기판예비처리장치.2. The substrate preliminary processing apparatus of claim 1, wherein a vacuum pump (12) is connected to the housing (1) to make the inside of the housing (1) in a vacuum state. 제 1 항에 있어서, 상기 내부케이스(5)와 약품저장조(7) 사이의 제 2 통로(6)에 산소공급관(16)이 연결된 것을 특징으로 하는 평판표시소자용 기판예비처리장치.2. The substrate preliminary processing apparatus of claim 1, wherein an oxygen supply pipe (16) is connected to a second passage (6) between the inner case (5) and the chemical storage tank (7).
KR1019910005321A 1991-04-02 1991-04-02 Surface pretreating apparatus for plane display element KR930007972B1 (en)

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KR1019910005321A KR930007972B1 (en) 1991-04-02 1991-04-02 Surface pretreating apparatus for plane display element

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KR930007972B1 true KR930007972B1 (en) 1993-08-25

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