KR930006883B1 - Method of making a dispenser-type cathode - Google Patents

Method of making a dispenser-type cathode Download PDF

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Publication number
KR930006883B1
KR930006883B1 KR1019910014941A KR910014941A KR930006883B1 KR 930006883 B1 KR930006883 B1 KR 930006883B1 KR 1019910014941 A KR1019910014941 A KR 1019910014941A KR 910014941 A KR910014941 A KR 910014941A KR 930006883 B1 KR930006883 B1 KR 930006883B1
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South Korea
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pellet
electron
emitting material
auxiliary
impregnated
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KR1019910014941A
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Korean (ko)
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KR930005061A (en
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장동길
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삼성전관 주식회사
김정배
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/13Solid thermionic cathodes
    • H01J1/20Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • H01J1/28Dispenser-type cathodes, e.g. L-cathode

Abstract

The impregnated cathode is mfd. by (a) forming a pellet (11), an auxiliary pellet (12) and a storage hole (12a), (b) filling the hole with an electron emission material (13) of a mixed powder of BaCO3, CaCO3 and Al2O3, (c) inserting the filled material into the storage cup (14), (d) heat-melting the material (13) in the container (15) under the inert atmosphere at 1700 deg.C to impregnate it into the inner of pellets (11,12), (e) forming a metal-coated layer (18) on the surface of the pellet (11), and (f) fixing the storage cup (15) to the sleeve (16). The cathode has a long life.

Description

합침형 음극의 제조방법Manufacturing method of the joining cathode

제1도의 (a)∼(e)는 종래의 제조방법을 나타낸 공정도.(A)-(e) of FIG. 1 is a process chart which shows the conventional manufacturing method.

제2도의 (a)∼(e)는 이 발명에 따른 제조방법을 나타낸 공정도.(A)-(e) of FIG. 2 are process drawings which show the manufacturing method which concerns on this invention.

제3도의 (a),(b)는 이 발명에 따른 제조방법의 다른 실시예를 나타낸 공정도.Figure 3 (a), (b) is a process diagram showing another embodiment of the manufacturing method according to the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1,11,21 : 펠렛(Pellet) 2,15 : 용기1,11,21: Pellet 2,15: Container

3,13,22 : 전자방출물질 3a : 잔유물3,13,22: electron-emitting material 3a: residue

4,14,23 : 저장조 5,16 : 슬리브4,14,23: reservoir 5,16: sleeve

6,17 : 히터 12 : 보조펠렛6,17 heater 12 auxiliary pellet

12a : 저장구멍 21a : 저장홈12a: storage hole 21a: storage groove

18: 스퍼터 코팅층18: sputter coating layer

이 발명은 음극선관에 설치되는 전자총에서 전자빔을 방사하도록 된 음극에 관한 것으로서, 더욱 상세하게는 고전류 밀도로서 동작이 가능하고 긴수명의 특성을 갖는 함침형 음극의 제조방법에 관한 것이다.The present invention relates to a cathode for radiating an electron beam from an electron gun installed in a cathode ray tube, and more particularly, to a method of manufacturing an impregnated cathode having a long lifetime and capable of operating at a high current density.

종래의 함침형 음극의 제조방법은 제1도의 (a)∼(e)에서와 같이, 전자방출물질을 함침시키기 위한 펠렛(Pellet)(1)을 텅스텐 분말로 소결형성하고, 크기는 지름 두께로 제조한다. 이와같이 제조된 펠렛(1)을 몰리브덴(Mo), 탄타늄(Ta)등의 고융점 금속재질로된 용기(2)에 넣고, 펠렛(1)상에 전자방출물질(3)을 덮은 다음 약 1700。C 정도의 고온으로 가열하여 전자방출물질(3)을 용융시켜 전자방출물이 펠렛(1)의 내부로 함침되게 함으로써 함침공정이 완료된다. 이때 제1도의 (c),(d)에서와 같이, 전자방출물질(3)이 함침된 펠렛(1)의 외부로 전자방출물질의 잔유물(3a)이 남게되므로 이 잔유물을 제거해야 한다. 그리고 함침완료된 펠렛(1)을 저장조(4)에 삽입시키고 제1도의 (e)와 같이, 저장조(4)를 슬리이브(5)와 용접으로 고정하며, 슬리이브(5) 내부에 히터(6)를 설치하면, 히터(6)의 열에 의해 펠렛(1)에서 열전자가 방출할 수 있게 된다.In the conventional method of manufacturing the impregnated cathode, as shown in (a) to (e) of FIG. 1, pellet (1) for impregnating an electron-emitting material is sintered to form tungsten powder, and the size is diameter-thick. Manufacture. The pellet (1) thus prepared is placed in a container (2) made of a high melting point metal such as molybdenum (Mo) or tantalum (Ta), and then covered with an electron-emitting material (3) on the pellet (1), and then about 1700. The impregnation process is completed by melting the electron-emitting material 3 by heating to a high temperature of about C so that the electron-emitting material is impregnated into the pellet 1. At this time, as shown in (c) and (d) of FIG. 1, the residue 3a of the electron-emitting material remains outside of the pellet 1 in which the electron-emitting material 3 is impregnated. Then, the impregnated pellet (1) is inserted into the reservoir (4) and, as shown in (e) of FIG. 1, the reservoir (4) is fixed by welding with the sleeve (5), and the heater (6) inside the sleeve (5). ), Hot electrons can be emitted from the pellet 1 by the heat of the heater 6.

이와같이 함침형 음극의 제조방법은, 제1도의 (b)와 같이, 다수의 펠렛(1)을 용기에 넣고 전자방출물질(3)을 덮은 상태로 함침공정이 이루어지기 때문에, 펠렛(1)에 함침되는 전자방출물질의 양을 제저하기가 어렵고, 그 양을 측정하기가 곤란하며, 펠렛에 함침되는 전자방출물질이 균일하지 못하여 제품관리에 문제점이 있었던 것이다. 그리고 제1도의 (c)에서와 같이 함침된 펠렛(1)의 외부에 전자방출물질(3)의 잔유물(3a)이 남게되어 이를 제거해야하는 공정이 추가됨과 동시에 이를 제거하는 작업 또한 어려운 문제점이 있었던 것이다.As described above, in the method of manufacturing the impregnated cathode, as shown in FIG. 1 (b), the pellet 1 is impregnated with a plurality of pellets 1 placed in a container and covered with the electron-emitting material 3. It was difficult to control the amount of the electron-emitting material impregnated, it was difficult to measure the amount, and the electron-emitting material impregnated in the pellet was not uniform, there was a problem in product management. In addition, as shown in (c) of FIG. 1, the residue 3a of the electron-emitting material 3 remains on the outside of the impregnated pellet 1, and a process of removing it is added, and at the same time, there is a difficult problem of removing the same. will be.

이 발명은 상기의 문제점을 해결하기 위한 것으로서, 함침형 음극을 제조함에 있어 펠렛에 함침되는 전자 방출물질의 함침량을 조절이 가능하고, 펠렛에 함침되는 전자방출물질의 양을 균일하게 함침시킬 수 있어 제품의 관리가 용이하며, 함침후에 잔유물이 발생되지 않도록 하여 잔유물로 인한 번거로움이 제거될 수 있는 함침형 음극의 제조방법을 제공하는데 있다.The present invention is to solve the above problems, in manufacturing the impregnated cathode can control the impregnated amount of the electron-emitting material impregnated in the pellet, it is possible to uniformly impregnated the amount of electron-emitting material impregnated in the pellet The present invention provides a method of manufacturing an impregnated negative electrode, which facilitates the management of a product and prevents residues from being generated after impregnation so that the inconvenience caused by the residues can be removed.

상기의 목적을 달성하기 위한 이 발명은, 소정크기의 펠렛들과 전자방출물질을 용기에 넣고 고온으로 가열하여 펠렛의 내부로 전자방출물질이 용융되면서 함침되도록 하는 함침형 음극의 제조방법에 있어서, 상기펠렛외에 소정크기의 저장구멍이 형성되고 상기 펠렛보다 얇게 형성된 보조펠렛을 제공하는 단계와, 상기 보조펠렛을 펠렛상에 일치시키고 보조펠렛의 저장구멍에 전자방출물질을 채워 넣는 단계와, 상기 펠렛과 보조펠렛을 고융점 금속재질로된 저장조에 삽입시킨 후 비활성분위기 하에서 고온으로 가열하여 보조펠렛의 저장구멍에 채워진 전자방출물질이 용융되어 펠렛 내부로 함침되도록 하는 단계로 되는 함침형 음극의 제조방법을 그 특징으로 하는 것이다.In the present invention for achieving the above object, in the manufacturing method of the impregnated cathode to impregnate the electron emitting material into the inside of the pellet by putting the pellets and the electron-emitting material of a predetermined size in a container and heated to a high temperature, Providing an auxiliary pellet formed with a storage hole of a predetermined size in addition to the pellet and thinner than the pellet; matching the auxiliary pellet on the pellet and filling an electron-emitting material into the storage hole of the auxiliary pellet; And the auxiliary pellets are inserted into a storage tank made of a high melting point metal and heated to a high temperature in an inert atmosphere so that the electron-emitting material filled in the storage holes of the auxiliary pellets is melted and impregnated into the pellets. It is characterized by.

이하, 이 발명에 따른 함침형 음극의 제조방법을 첨부한 도면에 의하여 상세하게 설명한다. 제2도의 (a)∼(b)는 이 발명에 따른 함침형 음극의 제조방법의 실시예를 나타낸 것으로서, (a)에서와 같이 텅스텐 분말을 소결하여 소정크기의 펠렛(111)과 이 펠렛(11)보다 두께가 얇은 보조펠렛(12)을 형성하고, 상기 보조펠렛(12)에는 소정크기의 저장구멍(12a)들을 형성한다.Hereinafter, a method of manufacturing an impregnated negative electrode according to the present invention will be described in detail with reference to the accompanying drawings. 2 (a) to 2 (b) show an embodiment of a method for manufacturing an impregnated cathode according to the present invention. As shown in (a), tungsten powder is sintered to provide a pellet 111 having a predetermined size and the pellet ( An auxiliary pellet 12 having a thickness thinner than that of 11) is formed, and the auxiliary pellet 12 is formed with storage holes 12a having a predetermined size.

그리고 (b)와 같이, 펠렛(11)상에 보조펠렛(12)을 일치시킨 후 보조펠렛(13)의 저장구멍(12a)에 전자방출물질(13), 예를들어 탄산바륨(BaCO3), 탄산칼슘(CaCO3), 산화알루미늄(Al2O3)를 적당한 몰비로 혼합한 분말상태를 보조펠렛(13)의 저장구멍(12a)에 채워넣고, (c)와 같이 고융점금속으로된 저장조(14)에 삽입시킨다. 이와같이 저장조(14)에 삽입된 펠렛(11)들을 역시 고융점금속으로된 용기(15)에 넣고 비활성분위기에서 약 1700℃ 정도의 고온으로 열을 가하여 전자방출물질(13)을 용융시킴으로써 펠렛(11) 및 보조펠렛(12)의 내부로 전자방출물질(13)이 함침되어 함침공정이 끝나게 되며, 펠렛(11) 표면에 이리듐(Ir), 루테늄(Ru), 레늄(Re), 오스뮴(Os) 등의 백금속 금속으로 스퍼터 코팅층(18)을 형성하여 열전자방출을 용이하게 한 후, (e)와 같이 저장조(15)를 슬리브(16)에 용접등으로 고정시키고 슬리브(16) 내부에 히터(17)를 설치함으로써 제조된다.And as shown in (b), after the secondary pellets 12 are matched on the pellets 11, the electron-emitting material 13, for example, barium carbonate (BaCO 3 ) in the storage hole (12a) of the secondary pellet (13) Into the storage hole (12a) of the auxiliary pellet 13, a powder mixture of calcium carbonate (CaCO 3 ) and aluminum oxide (Al 2 O 3 ) in an appropriate molar ratio is made into a high melting point metal as shown in (c). Insert into reservoir (14). In this way, the pellets 11 inserted into the reservoir 14 are placed in a container 15 made of a high melting point metal and heated at a high temperature of about 1700 ° C. in an inert atmosphere to melt the electron-emitting material 13. ) And the impregnation process is completed by impregnating the electron emitting material 13 into the auxiliary pellet 12, and the surface of the pellet 11 is iridium (Ir), ruthenium (Ru), rhenium (Re), and osmium (Os). After the sputter coating layer 18 is formed of a white metal such as to facilitate the release of hot electrons, the reservoir 15 is fixed to the sleeve 16 by welding or the like as shown in (e), and a heater ( It is manufactured by installing 17).

이와같은 이 발명은 보조펠렛(12)에 형성된 저장구멍(12a)의 크기 또는 갯수에 따라 전자방출물질(13)의 함침량이 정해지게 되는 것이고, 상기 저장구멍(12a)의 크기 또는 개수를 조정하여 선택함으로써 전자방출물질(13)의 함침량이 조절될 수 있는 것이다. 또한 펠렛(11) 및 보조펠렛(12)이 저장조(14)에 삽입된 상태로 가열됨에 따라 상기 보조펠렛(12)의 저장구멍(12a)에 채워진 전자방출물질(13)이 저장구멍(12a)내에서 용융되어 함침공정이 끝나게되면 바로 제1도의 (e)와 같이, 슬리브(16)에 설치할 수 있어 공정이 단축되는 것이다. 또한 이 발명의 다른 실시예로서 제3도의 (a), (b)에서와 같이, 펠렛(21)의 일측면에 저장홈(21a)들을 형성하고, 이 저장홈(21a)에 전자방출물질(22)을 채워 저장조(23)에 삽입시킨 후 힘침공정을 행하여도 동일한 효과를 누릴 수 있다.This invention is to determine the impregnation amount of the electron-emitting material 13 in accordance with the size or number of the storage holes (12a) formed in the auxiliary pellet 12, by adjusting the size or number of the storage holes (12a) By selecting, the impregnation amount of the electron-emitting material 13 can be adjusted. In addition, as the pellet 11 and the auxiliary pellet 12 are heated while being inserted into the reservoir 14, the electron-emitting material 13 filled in the storage hole 12a of the auxiliary pellet 12 is stored in the storage hole 12a. As soon as the impregnation process is completed by melting in the inside, it can be installed in the sleeve 16 as shown in (e) of FIG. 1 and the process is shortened. In addition, as another embodiment of the present invention, as shown in (a) and (b) of FIG. 3, storage grooves 21a are formed in one side of the pellet 21, and the electron-emitting material ( 22), the same effect can be enjoyed even if the force impregnation process is performed after being inserted into the reservoir 23.

이상에서와 같이 이 발명에 따른 함침형 음극의 제조방법에 의하여, 펠렛외에 별도로 구비된 보조펠렛의 저장구멍에 전자방출물질을 채워 함침시킴으로써 별도의 잔유물을 제거하는 등의 번거로운 공정이 제거되고, 상기 보조구멍의 크기나 개수를 조정하여 선택하는 것에 의해 전자방출물질의 함침량이 조절될 수 있으며, 전자방출물질의 함침량이 항상 일정하게 할 수 있어 제품의 균일성을 이룰 수 있어 제품관리가 용이한 잇점이 있다.As described above, by the method of manufacturing the impregnated negative electrode according to the present invention, the cumbersome process of removing extra residues is eliminated by impregnating the storage holes of the auxiliary pellets separately provided with the pellets with electron emitting materials. By adjusting the size and number of auxiliary holes, the impregnated amount of the electron-emitting material can be controlled, and the impregnated amount of the electron-emitting material can be kept constant so that product uniformity can be achieved. There is this.

Claims (2)

소정크기의 펠렛들과 전자방출물질을 용기에 넣고 고온으로 가열하여 펠렛의 내부로 전자방출물질이 용융되면서 함침되도록 하는 함침형 음극의 제조방법에 있어서, 상기 펠렛(11)외에 소정크기의 저장구멍(12a)이 형성되고 상기 펠렛(11)보다 얇게 형성된 보조펠렛(12)을 제공하는 단계와, 상기 보조펠렛(12)을 펠렛(11)상에 일치시키고 보조펠렛(12)의 저장구멍(12a)에 전자방출물질(13)을 채워넣는 단계와, 상기 펠렛(11)과 보조펠렛(12)을 저장조(14)에 삽입시킨 후 비활성분위기 하에서 고온으로 가열하여 보조펠렛(12)의 저장구멍(12a)에 채워진 전자방출물질(13)이 용융되어 펠렛(11)내부로 함침되도록 하는 단계로 이루어짐을 특징으로 하는 함침형 음극의 제조방법.In the manufacturing method of the impregnated cathode to impregnate the pellets and the electron-emitting material of a predetermined size into a container and heated to a high temperature to melt the electron-emitting material into the pellet, the storage hole of a predetermined size in addition to the pellet (11) Providing an auxiliary pellet 12 having a 12a formed and thinner than the pellet 11, matching the auxiliary pellet 12 on the pellet 11, and storing the storage hole 12a of the auxiliary pellet 12; Filling the electron-emitting material 13 into the; and inserting the pellets 11 and the auxiliary pellets 12 into the storage tank 14 and heating them to a high temperature in an inert atmosphere to store the storage holes of the auxiliary pellets 12 ( 12a) is a method of manufacturing an impregnated cathode, characterized in that the step of melting the electron-emitting material (13) filled in impregnated into the pellet (11). 제1항에 있어서, 상기 보조펠렛(12)에 형성된 저장구멍(12a)의 크기 또는 갯수에 따라 전자방출물질(13)의 함침량이 조절되는 함침형 음극의 제조방법.The method of claim 1, wherein the impregnation amount of the electron-emitting material (13) is controlled according to the size or number of the storage holes (12a) formed in the auxiliary pellet (12).
KR1019910014941A 1991-08-28 1991-08-28 Method of making a dispenser-type cathode KR930006883B1 (en)

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