KR930003598U - 정전기 방지장치 - Google Patents
정전기 방지장치Info
- Publication number
- KR930003598U KR930003598U KR2019910011207U KR910011207U KR930003598U KR 930003598 U KR930003598 U KR 930003598U KR 2019910011207 U KR2019910011207 U KR 2019910011207U KR 910011207 U KR910011207 U KR 910011207U KR 930003598 U KR930003598 U KR 930003598U
- Authority
- KR
- South Korea
- Prior art keywords
- antistatic device
- antistatic
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67396—Closed carriers characterised by the presence of antistatic elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Elimination Of Static Electricity (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019910011207U KR930007179Y1 (ko) | 1991-07-18 | 1991-07-18 | 정전기 방지장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019910011207U KR930007179Y1 (ko) | 1991-07-18 | 1991-07-18 | 정전기 방지장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR930003598U true KR930003598U (ko) | 1993-02-26 |
| KR930007179Y1 KR930007179Y1 (ko) | 1993-10-13 |
Family
ID=19316674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019910011207U KR930007179Y1 (ko) | 1991-07-18 | 1991-07-18 | 정전기 방지장치 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR930007179Y1 (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100948107B1 (ko) * | 2009-09-25 | 2010-03-16 | 주식회사 엔바이로코리아 | 이온화 생성 튜브 및 이를 구비하는 이온화 생성장치 |
-
1991
- 1991-07-18 KR KR2019910011207U patent/KR930007179Y1/ko not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR930007179Y1 (ko) | 1993-10-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E701 | Decision to grant or registration of patent right | ||
| REGI | Registration of establishment | ||
| FPAY | Annual fee payment |
Payment date: 20020906 Year of fee payment: 10 |
|
| LAPS | Lapse due to unpaid annual fee |