KR930003312A - 비접촉프로우브 및 그것을 사용한 액티브 매트릭스 어레이 검사장치 - Google Patents

비접촉프로우브 및 그것을 사용한 액티브 매트릭스 어레이 검사장치 Download PDF

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Publication number
KR930003312A
KR930003312A KR1019920011740A KR920011740A KR930003312A KR 930003312 A KR930003312 A KR 930003312A KR 1019920011740 A KR1019920011740 A KR 1019920011740A KR 920011740 A KR920011740 A KR 920011740A KR 930003312 A KR930003312 A KR 930003312A
Authority
KR
South Korea
Prior art keywords
light
source
matrix array
light beam
signal line
Prior art date
Application number
KR1019920011740A
Other languages
English (en)
Korean (ko)
Inventor
다까시 기도
Original Assignee
오오우라 히로시
가부시끼가이샤 아드반테스트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 오오우라 히로시, 가부시끼가이샤 아드반테스트 filed Critical 오오우라 히로시
Publication of KR930003312A publication Critical patent/KR930003312A/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Liquid Crystal (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR1019920011740A 1991-07-04 1992-07-02 비접촉프로우브 및 그것을 사용한 액티브 매트릭스 어레이 검사장치 KR930003312A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP91-164423 1991-07-04
JP3164423A JPH0513522A (ja) 1991-07-04 1991-07-04 電荷光学プローブ

Publications (1)

Publication Number Publication Date
KR930003312A true KR930003312A (ko) 1993-02-24

Family

ID=15792871

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920011740A KR930003312A (ko) 1991-07-04 1992-07-02 비접촉프로우브 및 그것을 사용한 액티브 매트릭스 어레이 검사장치

Country Status (2)

Country Link
JP (1) JPH0513522A (ja)
KR (1) KR930003312A (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6072179A (en) * 1998-08-07 2000-06-06 Intel Corporation Method and apparatus using an infrared laser based optical probe for measuring voltages directly from active regions in an integrated circuit
SG11201505836WA (en) 2013-02-01 2015-09-29 Hamamatsu Photonics Kk Semiconductor device inspection device and semiconductor device inspection method

Also Published As

Publication number Publication date
JPH0513522A (ja) 1993-01-22

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E902 Notification of reason for refusal
E601 Decision to refuse application