KR920020087A - Vacuum Exhaust System and Exhaust Method - Google Patents

Vacuum Exhaust System and Exhaust Method Download PDF

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Publication number
KR920020087A
KR920020087A KR1019920004741A KR920004741A KR920020087A KR 920020087 A KR920020087 A KR 920020087A KR 1019920004741 A KR1019920004741 A KR 1019920004741A KR 920004741 A KR920004741 A KR 920004741A KR 920020087 A KR920020087 A KR 920020087A
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South Korea
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vacuum
valve
pump
cooling
main pump
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KR1019920004741A
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Korean (ko)
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KR960003788B1 (en
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가즈에 다까하시
신지로우 우에다
마나부 에마무라
나요유끼 다무라
가즈아끼 이찌하시
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가나이 쯔도무
가부시기가이샤 히다찌 세이사꾸쇼
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Degasification And Air Bubble Elimination (AREA)
  • Devices For Use In Laboratory Experiments (AREA)

Abstract

내용 없음No content

Description

진공배기 시스템 및 배기방법Vacuum Exhaust System and Exhaust Method

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명의 일실시예를 나타낸 시스템 구성도.1 is a system diagram showing an embodiment of the present invention.

제2도는 알곤과 물의 증기압 선도.2 is the vapor pressure of argon and water.

제3도는 본 발명의 다른 나타낸 시스템 구성도.3 is another system configuration diagram of the present invention.

Claims (12)

주펌프와, 이 주펌프의 하류에서 주펌프를 기능시키는 보조펌프와, 상기 주펌프의 상류에 있는 냉각 배플과, 이 냉각배플을 진공용기와 밸브를 거쳐 연통하는 배관계와, 상기 보존펌프를 진공용기와 밸브를 거쳐 연통하는 배관계를 구비하는 진공배기 시스템에 있어서, 상기 냉각 배플에 냉각온도를 제어하는 온도제어수단을 설치한 것을 특징으로 하는 진공배기 시스템.A main pump, an auxiliary pump functioning the main pump downstream of the main pump, a cooling baffle upstream of the main pump, a piping system in communication with the cooling baffle through a vacuum vessel and a valve, and a vacuum for the storage pump. A vacuum exhaust system having a piping system communicating with a vessel through a valve, the vacuum exhaust system comprising a temperature control means for controlling a cooling temperature in said cooling baffle. 제1항에 있어서, 온도 제어수단은 냉각배플의 온도를 검출하는 온도검출기, 이 온도검출기로 부터의 신호에 의하여 냉각배풀에 냉각매체를 삽입하는 도입관에 설치한 제어밸브의 개폐량을 제어하는 제어장치로 이루어진 것을 특징으로 하는 진공배기 시스템.The temperature control means according to claim 1, wherein the temperature control means controls the opening / closing amount of a temperature detector for detecting a temperature of the cooling baffle, and a control valve provided in an introduction tube for inserting a cooling medium into the cooling vessel by a signal from the temperature detector. Vacuum exhaust system, characterized in that consisting of a control device. 주펌프와, 이 주펌프의 하류에서 주펌프를 기능시키는 보조펌프와, 상기 주펌프의 상류에 있는 냉각배플과, 이 냉각배플을 진공용기와 밸브를 거쳐 연통하는 배관계와, 상기 보조펌프를 진공용기와 밸브를 거쳐 연통하는 배관계를 구비하는 진공배기 시스템에 있어서, 진공용기 공급하는 가스의 종류에 따라 냉각배플의 냉각온도를 제어하는 것을 특징으로 하는 진공배기 시스템.A main pump, an auxiliary pump functioning the main pump downstream of the main pump, a cooling baffle upstream of the main pump, a piping system in which the cooling baffle communicates through a vacuum vessel and a valve, and the auxiliary pump is vacuumed. A vacuum exhaust system having a piping system communicating with a vessel through a valve, wherein the cooling temperature of the cooling baffle is controlled according to the type of gas supplied to the vacuum vessel. 제3항에 있어서, 진공용기에 알곤가스를 공급하고, 냉각배플의 냉각온수를 90K내지 144K의 범위에 제어하는 것을 특징으로 하는 진공배기 시스템.The vacuum exhaust system according to claim 3, wherein argon gas is supplied to the vacuum vessel, and the cooling hot water of the cooling baffle is controlled in a range of 90 K to 144 K. 주펌프와, 이주펌프의 하류에 있어서 주펌프를 가능시키는 보조펌프와, 상기 주펌프의 상류에 있는 냉각배플과, 이 냉각배플을 진공용기와 밸브를 거쳐 연통하는 배관계와, 상기 보조펌프를 진공용기와 밸브를 거쳐 연통하는 배관관계를 구비하는 진공배기 시스템에 있어서, 상기 주펌프와 냉각 밸프과의 사이에 밸브를 설치하고, 이 밸브와 상기 주펌프와의 사이를 진공용기에 밸브를 거쳐 연통하는 배관계를 접속하는 것을 특징으로 하는 진공배기 시스템.A main pump, an auxiliary pump for enabling the main pump downstream of the migration pump, a cooling baffle upstream of the main pump, a piping system for communicating the cooling baffle through a vacuum vessel and a valve, and vacuuming the auxiliary pump. In a vacuum exhaust system having a piping relationship communicating with a vessel through a valve, a valve is provided between the main pump and the cooling valve, and the valve and the main pump communicate with each other via a valve in a vacuum vessel. A vacuum exhaust system, characterized in that for connecting the piping system. 주펌프와, 이주펌프의 하류에 있어서 주펌프를 기능시키는 보조펌프와, 상기 주펌프의 상류에 있는 냉각배플과, 이 냉각 배플을 진공용기와 밸브를 거쳐 연통하는 배관계와, 상기 보조펌프를 진공용기와 밸브를 거쳐 연통하는 배관계를 구비하는 진공배기 시스템에 있어서, 상기 주펌프와 냉각 배플과의 사이에 밸브를 설치하고, 이 밸브와 상기 주펌프와의 사이를 진공용기와 연통하는 배관계를 접속함과 동시에 이 배관계에 직렬로 2개의 밸브를 개재시키고, 이2개의 밸브 사이에 상기 보조 펌프에 밸브를 거쳐 연통하는 배관계를 접속하는 것을 특징으로 하는 진공배기 시스템.A main pump, an auxiliary pump functioning the main pump downstream of the migration pump, a cooling baffle upstream of the main pump, a piping system in communication with the cooling baffle through a vacuum vessel and a valve, and a vacuum of the auxiliary pump. In a vacuum exhaust system having a piping system communicating with a vessel through a valve, a valve is provided between the main pump and the cooling baffle, and a piping system communicating with the vacuum vessel is connected between the valve and the main pump. And two valves connected in series with the piping system, and a piping system communicating with the auxiliary pump via the valve is connected between the two valves. 제5항에 있어서, 진공용기에 진공용기를 가열 또는 냉각하기 위한 매체를 도입하는 배관계를 설치하고, 이 배과계에 가열 매체 및 냉각매체를 전환하여 도입하는 전환밸브를 설치한 것을 특징으로 하는 진공배기 시스템.6. The vacuum according to claim 5, wherein a piping system for introducing a medium for heating or cooling the vacuum container is provided in the vacuum container, and a switching valve for switching the heating medium and the cooling medium is introduced in the distribution system. Exhaust system. 제5항에 있어서, 진공용기에 진공용기를 가열하기위한 수단과 냉각하기 위한 냉각매체를 도입하는 도입관을 설치한 것을 특징으로 하는 진공배기 시스템.The vacuum exhaust system according to claim 5, wherein the vacuum vessel is provided with means for heating the vacuum vessel and an introduction tube for introducing a cooling medium for cooling. 제5항에 있어서, 진공용기에 리이크 밸브를 접속하고. 이 리이크 밸브를 접속한 관을 냉각배플의 냉각매체에 의하여 냉각하도록 한 것을 특징으로 하는 진공배기 시스템.6. The leak valve according to claim 5, wherein the leak valve is connected to a vacuum container. A vacuum exhaust system, characterized in that the pipe to which the leak valve is connected is cooled by a cooling medium of a cooling baffle. 주펌프와, 이주펌프의 하류에 있어서 주펌프를 기능시키는 보조펌프와, 상기 주펌프의 상류에 있는 냉각배플과, 이 냉각배플을 진공용기와 밸브를 연통하는 배관계와, 상기 보조펌프를 진공용기와 밸브를 거쳐 연통하는 배관계를 구비하는 진공배기 시스템의 배기방법에 있어서, 냉각 배플과 주펌프와 보조펌프를 각 밸브를 폐쇄하여 격리하고, 진공용기와 보조펌프간의 진공배기계만이 개방이 된 상태로 부터 진공배기를 개시할때의 냉각배플와 주펌프는 정상 상태에서 운전시켜두고, 보조펌프로 진공용기를 배기하고 다음에 보조펌프만의 배기로부터 부조펌프와 냉각 배플과 보펌프를 거쳐 배기하도록각 밸브 조작을 행하도록 한 것을 특징으로 하는 배기방법.A main pump, an auxiliary pump functioning the main pump downstream of the migration pump, a cooling baffle upstream of the main pump, a piping system in communication between the vacuum baffle and the valve, and the auxiliary pump in a vacuum container. A method of evacuating a vacuum exhaust system having a piping system communicating with and through a valve, wherein the cooling baffle, the main pump and the auxiliary pump are closed by isolating each valve, and only the vacuum exhaust machine between the vacuum container and the auxiliary pump is opened. The cooling baffle and the main pump at the start of vacuum exhaust from the pump are operated in a normal state, and the evacuation chamber is evacuated by the auxiliary pump and then exhausted from the exhaust of the auxiliary pump through the auxiliary pump, the cooling baffle and the bo pump. An exhaust method characterized in that the valve operation is performed. 제10항에 있어서, 보조펌프와 주펌프와 냉각 배플을 거쳐 진공배기 하도록한 후, 탈가스처리 진공용기에 실시하고, 그후 급속 냉각하도록 한 것을 특징으로 하는 배기방법.The exhaust method according to claim 10, wherein the exhaust gas is evacuated through the auxiliary pump, the main pump, and the cooling baffle, and then subjected to a degassing vacuum vessel, followed by rapid cooling. 제11항에 있어서, 진공용기를 대기 개방함에 있어서, 진공펌프에 접속되어 있는 밸브를 모두 폐쇄하고, 냉각 배플과 주 펌프는 운전한 채로 하여, 리이크 밸브를 거쳐 진공용기를 대기 개방하도록 한 것을 특징으로 하는 배기방법.12. The method of claim 11, wherein in opening the vacuum vessel to the atmosphere, all the valves connected to the vacuum pump are closed, and the cooling baffle and the main pump are operated to open the vacuum vessel to the atmosphere via the leak valve. An exhaust method characterized by the above-mentioned. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019920004741A 1991-04-25 1992-03-23 Evacuation system and the method thereof KR960003788B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP91-95147 1991-04-25
JP91-095147 1991-04-25
JP3095147A JPH04326943A (en) 1991-04-25 1991-04-25 Vacuum exhaust system and exhaust method

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KR920020087A true KR920020087A (en) 1992-11-20
KR960003788B1 KR960003788B1 (en) 1996-03-22

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US (1) US5259735A (en)
EP (1) EP0510656B1 (en)
JP (1) JPH04326943A (en)
KR (1) KR960003788B1 (en)
DE (1) DE69216277T2 (en)

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EP0510656A3 (en) 1993-08-04
DE69216277T2 (en) 1997-07-10
EP0510656A2 (en) 1992-10-28
US5259735A (en) 1993-11-09
KR960003788B1 (en) 1996-03-22
EP0510656B1 (en) 1997-01-02
JPH04326943A (en) 1992-11-16
DE69216277D1 (en) 1997-02-13

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