KR920018682U - 다각추형 미러에 의한 스캐닝 장치 - Google Patents

다각추형 미러에 의한 스캐닝 장치

Info

Publication number
KR920018682U
KR920018682U KR2019910003398U KR910003398U KR920018682U KR 920018682 U KR920018682 U KR 920018682U KR 2019910003398 U KR2019910003398 U KR 2019910003398U KR 910003398 U KR910003398 U KR 910003398U KR 920018682 U KR920018682 U KR 920018682U
Authority
KR
South Korea
Prior art keywords
scanning device
polygonal mirror
polygonal
mirror
scanning
Prior art date
Application number
KR2019910003398U
Other languages
English (en)
Other versions
KR940003394Y1 (ko
Inventor
박윤화
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019910003398U priority Critical patent/KR940003394Y1/ko
Publication of KR920018682U publication Critical patent/KR920018682U/ko
Application granted granted Critical
Publication of KR940003394Y1 publication Critical patent/KR940003394Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Optical Scanning Systems (AREA)
KR2019910003398U 1991-03-14 1991-03-14 다각추형 미러에 의한 스캐닝 장치 KR940003394Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019910003398U KR940003394Y1 (ko) 1991-03-14 1991-03-14 다각추형 미러에 의한 스캐닝 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019910003398U KR940003394Y1 (ko) 1991-03-14 1991-03-14 다각추형 미러에 의한 스캐닝 장치

Publications (2)

Publication Number Publication Date
KR920018682U true KR920018682U (ko) 1992-10-19
KR940003394Y1 KR940003394Y1 (ko) 1994-05-23

Family

ID=19311709

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019910003398U KR940003394Y1 (ko) 1991-03-14 1991-03-14 다각추형 미러에 의한 스캐닝 장치

Country Status (1)

Country Link
KR (1) KR940003394Y1 (ko)

Also Published As

Publication number Publication date
KR940003394Y1 (ko) 1994-05-23

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