KR920016693U - Carrier wafer transfer device - Google Patents

Carrier wafer transfer device

Info

Publication number
KR920016693U
KR920016693U KR2019910002156U KR910002156U KR920016693U KR 920016693 U KR920016693 U KR 920016693U KR 2019910002156 U KR2019910002156 U KR 2019910002156U KR 910002156 U KR910002156 U KR 910002156U KR 920016693 U KR920016693 U KR 920016693U
Authority
KR
South Korea
Prior art keywords
transfer device
wafer transfer
carrier wafer
carrier
wafer
Prior art date
Application number
KR2019910002156U
Other languages
Korean (ko)
Other versions
KR930006159Y1 (en
Inventor
류도현
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019910002156U priority Critical patent/KR930006159Y1/en
Publication of KR920016693U publication Critical patent/KR920016693U/en
Application granted granted Critical
Publication of KR930006159Y1 publication Critical patent/KR930006159Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019910002156U 1991-02-13 1991-02-13 Conveying system for semiconductor wafer KR930006159Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019910002156U KR930006159Y1 (en) 1991-02-13 1991-02-13 Conveying system for semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019910002156U KR930006159Y1 (en) 1991-02-13 1991-02-13 Conveying system for semiconductor wafer

Publications (2)

Publication Number Publication Date
KR920016693U true KR920016693U (en) 1992-09-16
KR930006159Y1 KR930006159Y1 (en) 1993-09-15

Family

ID=19310900

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019910002156U KR930006159Y1 (en) 1991-02-13 1991-02-13 Conveying system for semiconductor wafer

Country Status (1)

Country Link
KR (1) KR930006159Y1 (en)

Also Published As

Publication number Publication date
KR930006159Y1 (en) 1993-09-15

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Legal Events

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Year of fee payment: 10

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