KR920015423U - Mass flow controller with flow meter - Google Patents

Mass flow controller with flow meter

Info

Publication number
KR920015423U
KR920015423U KR2019910000476U KR910000476U KR920015423U KR 920015423 U KR920015423 U KR 920015423U KR 2019910000476 U KR2019910000476 U KR 2019910000476U KR 910000476 U KR910000476 U KR 910000476U KR 920015423 U KR920015423 U KR 920015423U
Authority
KR
South Korea
Prior art keywords
flow
controller
meter
mass
mass flow
Prior art date
Application number
KR2019910000476U
Other languages
Korean (ko)
Other versions
KR0125883Y1 (en
Inventor
이중재
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019910000476U priority Critical patent/KR0125883Y1/en
Publication of KR920015423U publication Critical patent/KR920015423U/en
Application granted granted Critical
Publication of KR0125883Y1 publication Critical patent/KR0125883Y1/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
KR2019910000476U 1991-01-14 1991-01-14 Flowmeter control device KR0125883Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019910000476U KR0125883Y1 (en) 1991-01-14 1991-01-14 Flowmeter control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019910000476U KR0125883Y1 (en) 1991-01-14 1991-01-14 Flowmeter control device

Publications (2)

Publication Number Publication Date
KR920015423U true KR920015423U (en) 1992-08-17
KR0125883Y1 KR0125883Y1 (en) 1999-03-30

Family

ID=19309762

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019910000476U KR0125883Y1 (en) 1991-01-14 1991-01-14 Flowmeter control device

Country Status (1)

Country Link
KR (1) KR0125883Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101502338B1 (en) * 2014-09-02 2015-03-16 한국환경공단 Portable device for calibrating mass flow controller

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11035710B2 (en) 2018-09-07 2021-06-15 Electronics And Telecommunications Research Institute Method for measuring flow using electromagnetic resonance phenomenon and apparatus using the same
KR20200028821A (en) 2018-09-07 2020-03-17 한국전자통신연구원 Method for measuring flow using electromagnetic resonance phenomenon and apparatus using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101502338B1 (en) * 2014-09-02 2015-03-16 한국환경공단 Portable device for calibrating mass flow controller

Also Published As

Publication number Publication date
KR0125883Y1 (en) 1999-03-30

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Legal Events

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E701 Decision to grant or registration of patent right
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FPAY Annual fee payment

Payment date: 20050523

Year of fee payment: 8

EXPY Expiration of term