KR920013711U - 웨이퍼 보관통 - Google Patents

웨이퍼 보관통

Info

Publication number
KR920013711U
KR920013711U KR2019900021172U KR900021172U KR920013711U KR 920013711 U KR920013711 U KR 920013711U KR 2019900021172 U KR2019900021172 U KR 2019900021172U KR 900021172 U KR900021172 U KR 900021172U KR 920013711 U KR920013711 U KR 920013711U
Authority
KR
South Korea
Prior art keywords
storage bin
wafer storage
wafer
bin
storage
Prior art date
Application number
KR2019900021172U
Other languages
English (en)
Other versions
KR970003181Y1 (ko
Inventor
윤영홍
Original Assignee
엘지반도체 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체 주식회사 filed Critical 엘지반도체 주식회사
Priority to KR2019900021172U priority Critical patent/KR970003181Y1/ko
Publication of KR920013711U publication Critical patent/KR920013711U/ko
Application granted granted Critical
Publication of KR970003181Y1 publication Critical patent/KR970003181Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
KR2019900021172U 1990-12-27 1990-12-27 웨이퍼 보관통 KR970003181Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019900021172U KR970003181Y1 (ko) 1990-12-27 1990-12-27 웨이퍼 보관통

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019900021172U KR970003181Y1 (ko) 1990-12-27 1990-12-27 웨이퍼 보관통

Publications (2)

Publication Number Publication Date
KR920013711U true KR920013711U (ko) 1992-07-27
KR970003181Y1 KR970003181Y1 (ko) 1997-04-14

Family

ID=19307956

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019900021172U KR970003181Y1 (ko) 1990-12-27 1990-12-27 웨이퍼 보관통

Country Status (1)

Country Link
KR (1) KR970003181Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020031880A (ko) * 2000-10-24 2002-05-03 백병룡 점착제가 도포된 벽지

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020031880A (ko) * 2000-10-24 2002-05-03 백병룡 점착제가 도포된 벽지

Also Published As

Publication number Publication date
KR970003181Y1 (ko) 1997-04-14

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20050621

Year of fee payment: 9

EXPY Expiration of term