KR920013689U - 적층 확산로의 압축공기선로상 안전장치 - Google Patents

적층 확산로의 압축공기선로상 안전장치

Info

Publication number
KR920013689U
KR920013689U KR2019900021418U KR900021418U KR920013689U KR 920013689 U KR920013689 U KR 920013689U KR 2019900021418 U KR2019900021418 U KR 2019900021418U KR 900021418 U KR900021418 U KR 900021418U KR 920013689 U KR920013689 U KR 920013689U
Authority
KR
South Korea
Prior art keywords
compressed air
safety device
air line
diffusion furnace
stacked diffusion
Prior art date
Application number
KR2019900021418U
Other languages
English (en)
Other versions
KR0113166Y1 (ko
Inventor
박성재
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019900021418U priority Critical patent/KR0113166Y1/ko
Publication of KR920013689U publication Critical patent/KR920013689U/ko
Application granted granted Critical
Publication of KR0113166Y1 publication Critical patent/KR0113166Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid-Pressure Circuits (AREA)
KR2019900021418U 1990-12-28 1990-12-28 적층 확산로의 압축공기선로상 안전장치 KR0113166Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019900021418U KR0113166Y1 (ko) 1990-12-28 1990-12-28 적층 확산로의 압축공기선로상 안전장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019900021418U KR0113166Y1 (ko) 1990-12-28 1990-12-28 적층 확산로의 압축공기선로상 안전장치

Publications (2)

Publication Number Publication Date
KR920013689U true KR920013689U (ko) 1992-07-27
KR0113166Y1 KR0113166Y1 (ko) 1998-04-10

Family

ID=19308154

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019900021418U KR0113166Y1 (ko) 1990-12-28 1990-12-28 적층 확산로의 압축공기선로상 안전장치

Country Status (1)

Country Link
KR (1) KR0113166Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100857004B1 (ko) * 2003-12-31 2008-09-04 동부일렉트로닉스 주식회사 수동밸브를 구비한 공기공급장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100857004B1 (ko) * 2003-12-31 2008-09-04 동부일렉트로닉스 주식회사 수동밸브를 구비한 공기공급장치

Also Published As

Publication number Publication date
KR0113166Y1 (ko) 1998-04-10

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Legal Events

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Payment date: 20041018

Year of fee payment: 8

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