KR920013646A - Wafer Stage Automatic Rotator - Google Patents
Wafer Stage Automatic Rotator Download PDFInfo
- Publication number
- KR920013646A KR920013646A KR1019900022470A KR900022470A KR920013646A KR 920013646 A KR920013646 A KR 920013646A KR 1019900022470 A KR1019900022470 A KR 1019900022470A KR 900022470 A KR900022470 A KR 900022470A KR 920013646 A KR920013646 A KR 920013646A
- Authority
- KR
- South Korea
- Prior art keywords
- motor
- wafer stage
- control box
- stage automatic
- switch
- Prior art date
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
내용 없음No content
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도의 (가)는 본 발명에 따른 웨이퍼 스테이지의 상측면도, 제2도의 (나)는 본 발명에 따른 웨이퍼 스테이지의 특면도, 제3도는 본 발명에 다른 모타 구동회로도.2A is an upper side view of the wafer stage according to the present invention, FIG. 2B is a special view of the wafer stage according to the present invention, and FIG. 3 is a motor driving circuit diagram according to the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019900022470A KR920013646A (en) | 1990-12-29 | 1990-12-29 | Wafer Stage Automatic Rotator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019900022470A KR920013646A (en) | 1990-12-29 | 1990-12-29 | Wafer Stage Automatic Rotator |
Publications (1)
Publication Number | Publication Date |
---|---|
KR920013646A true KR920013646A (en) | 1992-07-29 |
Family
ID=67538229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019900022470A KR920013646A (en) | 1990-12-29 | 1990-12-29 | Wafer Stage Automatic Rotator |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR920013646A (en) |
-
1990
- 1990-12-29 KR KR1019900022470A patent/KR920013646A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |