KR920013646A - Wafer Stage Automatic Rotator - Google Patents

Wafer Stage Automatic Rotator Download PDF

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Publication number
KR920013646A
KR920013646A KR1019900022470A KR900022470A KR920013646A KR 920013646 A KR920013646 A KR 920013646A KR 1019900022470 A KR1019900022470 A KR 1019900022470A KR 900022470 A KR900022470 A KR 900022470A KR 920013646 A KR920013646 A KR 920013646A
Authority
KR
South Korea
Prior art keywords
motor
wafer stage
control box
stage automatic
switch
Prior art date
Application number
KR1019900022470A
Other languages
Korean (ko)
Inventor
정병국
Original Assignee
문정환
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 문정환, 금성일렉트론 주식회사 filed Critical 문정환
Priority to KR1019900022470A priority Critical patent/KR920013646A/en
Publication of KR920013646A publication Critical patent/KR920013646A/en

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

내용 없음No content

Description

웨이퍼 스테이지 자동 회전장치Wafer Stage Automatic Rotator

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2도의 (가)는 본 발명에 따른 웨이퍼 스테이지의 상측면도, 제2도의 (나)는 본 발명에 따른 웨이퍼 스테이지의 특면도, 제3도는 본 발명에 다른 모타 구동회로도.2A is an upper side view of the wafer stage according to the present invention, FIG. 2B is a special view of the wafer stage according to the present invention, and FIG. 3 is a motor driving circuit diagram according to the present invention.

Claims (2)

X축 스테이지의 중앙에 기어측을 구성하고 상기 기억측에 기어와 모터를 차례로 구성하여, 상기 모터를 스위치가 연결된 콘트롤박스로 제어토록 구성한 것을 특징으로 하는 웨이퍼 스테이지 자동 회전장치.And a gear side configured in the center of the X-axis stage, and a gear and a motor arranged in turn on the storage side, so that the motor is controlled to be controlled by a control box connected to a switch. 제1항에 있어서, 콘트롤박스는 안정된 전원을 공급하는 정전압부와, 모터의 속도를 제어하는 속도제어부와. 모타를 동작시키는 모터구동부와, 스위치에 따라 정역회전신호를 출력시키는 정역회전구동부를 포함하여 구성한것을 특징으로 하는 웨이퍼 스테이지 자동 회전장치.The control box of claim 1, wherein the control box comprises: a constant voltage unit for supplying stable power, and a speed control unit for controlling the speed of the motor. And a motor drive unit for operating a motor and a forward and reverse drive unit for outputting a forward and reverse rotation signal in accordance with a switch. ※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.※ Note: This is to be disclosed by the original application.
KR1019900022470A 1990-12-29 1990-12-29 Wafer Stage Automatic Rotator KR920013646A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019900022470A KR920013646A (en) 1990-12-29 1990-12-29 Wafer Stage Automatic Rotator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019900022470A KR920013646A (en) 1990-12-29 1990-12-29 Wafer Stage Automatic Rotator

Publications (1)

Publication Number Publication Date
KR920013646A true KR920013646A (en) 1992-07-29

Family

ID=67538229

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900022470A KR920013646A (en) 1990-12-29 1990-12-29 Wafer Stage Automatic Rotator

Country Status (1)

Country Link
KR (1) KR920013646A (en)

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E601 Decision to refuse application