KR920001682A - Soi 제조방법 - Google Patents
Soi 제조방법Info
- Publication number
- KR920001682A KR920001682A KR1019900008555A KR900008555A KR920001682A KR 920001682 A KR920001682 A KR 920001682A KR 1019900008555 A KR1019900008555 A KR 1019900008555A KR 900008555 A KR900008555 A KR 900008555A KR 920001682 A KR920001682 A KR 920001682A
- Authority
- KR
- South Korea
- Prior art keywords
- soi manufacturing
- soi
- manufacturing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019900008555A KR930004633B1 (ko) | 1990-06-11 | 1990-06-11 | Soi 제조방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019900008555A KR930004633B1 (ko) | 1990-06-11 | 1990-06-11 | Soi 제조방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR920001682A true KR920001682A (ko) | 1992-01-30 |
| KR930004633B1 KR930004633B1 (ko) | 1993-06-02 |
Family
ID=19299978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019900008555A KR930004633B1 (ko) | 1990-06-11 | 1990-06-11 | Soi 제조방법 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR930004633B1 (ko) |
-
1990
- 1990-06-11 KR KR1019900008555A patent/KR930004633B1/ko not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR930004633B1 (ko) | 1993-06-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| G160 | Decision to publish patent application | ||
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant | ||
| FPAY | Annual fee payment |
Payment date: 20090519 Year of fee payment: 17 |
|
| EXPY | Expiration of term |