KR910008409B1 - Transducer manufacturing method in ultrasonic cleaning device - Google Patents

Transducer manufacturing method in ultrasonic cleaning device Download PDF

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Publication number
KR910008409B1
KR910008409B1 KR1019900001062A KR900001062A KR910008409B1 KR 910008409 B1 KR910008409 B1 KR 910008409B1 KR 1019900001062 A KR1019900001062 A KR 1019900001062A KR 900001062 A KR900001062 A KR 900001062A KR 910008409 B1 KR910008409 B1 KR 910008409B1
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South Korea
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ultrasonic
workpiece
lapping
ring
piezoelectric
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KR1019900001062A
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Korean (ko)
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KR910014157A (en
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주성수
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금성통신 주식회사
박준창
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor

Abstract

The transducer continuously radiates strong ultrasound wave within the cleaner, so the heat stability of the vibrator and the errosion- resistance of the metal block are bettered. The manufacturing method comprises i) putting a ring (2) on a top plate (1) and inserting a carrier (3) into the ring, for preventing workpieces (metal block, piezoelectric ceramics) from shaking in lapping, ii) lapping are end of each of the workpieces by rotatting the top plate after spreading water and lapping agent, iii) lapping the other ends of the workpieces by turning the workpieces upside down, and iv) equalizing the roughness of both ends by repeating the processes ii), iii).

Description

초음파 세척기의 압전랸쥬반형 트랜스 듀서 제조방법Piezoelectric Zhuban Transducer for Ultrasonic Cleaner

제1a도는 종래의 압전랸쥬반형 트랜스 듀서의 분해사시도.Figure 1a is an exploded perspective view of a conventional piezoelectric juban type transducer.

제1b도는 종래의 압전랸쥬반형 트랜스 듀서의 결합상태도.Figure 1b is a state diagram of the conventional piezoelectric transducer type transducer.

제2도는 종래 압전랸쥬반형 트랜스 듀서에서의 표면 조도 비교표시도.2 is a surface roughness comparison display diagram of a conventional piezoelectric juban type transducer.

제3a도는 본 발명에 따른 압전랸쥬반형 트랜스 듀서의 분해사시도.Figure 3a is an exploded perspective view of a piezoelectric transducer type transducer according to the present invention.

제3b도는 본 발명에 따른 압전랸쥬반형 트랜스 듀서의 결합상태도.Figure 3b is a coupling state of the piezoelectric transducer type transducer according to the present invention.

제4도는 본 발명에 따른 래핑가공시의 평면도.4 is a plan view of the lapping process according to the present invention.

제5도는 본 발명에 따른 래핑가공시의 정면도.5 is a front view of the lapping process according to the present invention.

제6도는 본 발명에 따른 압전랸쥬반형 트랜스 듀서에서의 표면 조도 비교표시도.6 is a surface roughness comparison diagram of the piezoelectric Jojuban transducer according to the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1a : 초음파 방사금속 1b : 초음파 반사금속1a: Ultrasonic Radiating Metal 1b: Ultrasonic Reflective Metal

1c, 1c' : 압전세라믹진동자 1d, 1d' : 전극판1c, 1c ': piezoceramic vibrator 1d, 1d': electrode plate

1e : 볼트 1f : 질연부싱1e: Bolt 1f: Vaginal Bushing

1g : 너트 1 : 정반1g: Nut 1: platen

2 : 링 3 : 캐리어2: ring 3: carrier

4 : 4가공물 5 : 웨이트링4: 4 processed material 5: weight ring

6 : 연마제6: abrasive

본 발명은 초음파 세척기에 이용되는 압전략쥬반형 트랜스 듀서에 관한 것으로 특히 진동자의 초음파 진동에너지를 세정기의 액체내에 강력 초음파로 지속적으로 방사시켜 진동자의 열안정성 및 금속블럭(초음파 방사금속, 초음파 반사금속)의 표면에 내부 식성을 좋게하고 진동자 조립체결시 금속블럭과 압전세라믹진동자의 마찰로 인한 미끄럼 방지 및 압전세라믹진동자의 파손을 방지하고 전기, 기계적 특성을 향상시키고 초음파 진동 전달 및 세정 효과를 향상시킨 초음파 세척기의 압전랸쥬반형 트랜스 듀서 제조방법에 관한 것이다.The present invention relates to a pressure strategy juban type transducer used in an ultrasonic cleaner, and in particular, the ultrasonic vibration energy of the vibrator is continuously radiated with strong ultrasonic waves in the liquid of the cleaner, so that the thermal stability of the vibrator and the metal block (ultrasonic radiating metal, ultrasonic reflecting metal). It has good corrosion resistance on the surface of) and prevents slippage due to friction of metal block and piezoceramic vibrator and breakage of piezoceramic vibrator, improves electrical and mechanical properties, and improves ultrasonic vibration transmission and cleaning effect. It relates to a piezoelectric Jojuban transducer manufacturing method of the ultrasonic cleaner.

종래의 초음파 세척기에 사용되는 압전략쥬반형 트랜스 듀서는 제1a, b도와 같이 금속블럭(초음파 방사금속(1a)의 상면, 저면(1a1')과 초음파 반사금속(1b)의 상면, 저면(1b') 그리고 너트(1g)의 저면(1g'))은 원재료 상태에서 원하는 형상 규격대로 절삭가공만을 하여 초음파 방사금속(1a)에 볼트(1e)를 접착고정시킨 후 절연부싱(1f)를 끼워넣은 후 순차적으로 전극판(1d)와 압전세라믹진동자(1c)와 전극판(1d')와 압전세라믹진동자(1c')를 초음파 반사금속(1b)으로 접속시킨 후 볼트(1e)와 너트(1g)에 접착제를 도포하여 체결하는 기술이 있으며, 또한 초음파 방사금속(1a)에 볼트(1e)를 접착고정시킨 후, 절연부싱(1f)을 끼워 넣은 후 순차적으로 전극판(1d)과 압전세라믹진동자(1c)와 전극판(1d')과 압전세라믹(1c')를 접속시킨 후 볼트(1e)에 접착제를 도포하여 초음반사금속(1b)을 체결하므로써 구성완료된다.The pressure strategy juban type transducer used in the conventional ultrasonic cleaner is a metal block (top surface, bottom surface 1a1 'of the ultrasonic radiating metal 1a, and top surface, bottom surface 1b of the ultrasonic reflective metal 1b as shown in FIGS. 1a and b). ') And the bottom surface (1g') of the nut (1g) are made by cutting only to the desired shape specification in the raw material state, and then fixing and fixing the bolt (1e) to the ultrasonic radiating metal (1a) by inserting the insulating bushing (1f). Then, the electrode plate 1d, the piezoelectric ceramic vibrator 1c, the electrode plate 1d ', and the piezoelectric ceramic vibrator 1c' were sequentially connected with the ultrasonic reflecting metal 1b, and then the bolt 1e and the nut 1g were connected. There is a technique of applying an adhesive to the fastener, and also after fixing the bolt (1e) to the ultrasonic radiating metal (1a), and inserting the insulating bushing (1f) and then sequentially the electrode plate (1d) and the piezoceramic vibrator ( 1c), the electrode plate 1d ', and the piezoelectric ceramic 1c' are connected to each other, and then an adhesive is applied to the bolt 1e to make the supersonic reflective metal 1b. The configuration is completed by tightening the.

상기와 같이 종래의 진동자로 구성되는 압전랸쥬반형 트랜스 듀서에 있어서 세정기에 진동자를 조립하여 전극판(1d)과 전극판(1d')에 고주파 전기 입력신호가 인가되면 압전세라믹진동자(1c)와 압전세라믹진동자(1c')는 입력신호와 같은 주기로 진동하게 되고 이러한 진동에너지는 초음파 방사금속(1a)을 통해서 실부하측으로 전파되고 상대적으로 초음파 반사금속(1b)을 통해서 진동에너지는 차단된다.As described above, in a piezoelectric vacuum pump type transducer composed of a conventional vibrator, when a vibrator is assembled to a washing machine and a high frequency electric input signal is applied to the electrode plate 1d and the electrode plate 1d ', the piezoelectric ceramic vibrator 1c and the piezoelectric member The ceramic vibrator 1c 'vibrates at the same period as the input signal, and the vibration energy is propagated to the actual load side through the ultrasonic radiation metal 1a, and the vibration energy is blocked through the ultrasonic reflection metal 1b.

이때 압전세라믹진동자(1c) (1c')는 래핑(Lapping)공정을 거친 후 표면 조도, 평면도등이 얻어져 조립이 이루어지고 있는데 제1도와 제2도의 표면조도 비교도와 같이 금속블럭(초음파 방사금속(1a), 초음파 반사금속(1b))의 표면(1a'1b')은 절삭가공 및 쇼트처리()하여 조립이 이루어지고 있기 때문에 초음파방사금속(1a)과 초음파 반사금속(1b)의 각 표면(1a',1b')은 절삭가공이 거칠어서 조립시 압전세라믹진동자의 파손이 생기고 그 틈새사이로 진동자 전체에 높은 열을 발생시켜 진동 전달 효율 및 세정효과를 크게 저하시키면서 동작이 이루어지고 있다.At this time, the piezoelectric ceramic vibrators 1c and 1c 'are subjected to a lapping process to obtain surface roughness and a plan view, and the assembly is performed. As shown in FIG. 1 and FIG. (1a), the surfaces 1a'1b ') of the ultrasonic reflective metal 1b) are cut and processed (), so that the surfaces of the ultrasonically reflective metal 1a and the ultrasonic reflective metal 1b are assembled. (1a ', 1b') has a rough cutting process, which causes breakage of the piezoelectric ceramic vibrator during assembly and generates high heat in the entire vibrator between the gaps, thereby greatly reducing vibration transmission efficiency and cleaning effect.

즉 상기와 같은 종래의 압전랸쥬반형 트랜스 듀서에서는 압전세라믹진동자의 양표면을 표면 조도 및 평면을 일정하게 얻기 위해서 양표면을 실버 페이스트(Silver Paste) 및 연마 래핑하여 조립이 사용되고 있으나 이에 결합되는 금속블럭(초음파 방사금속, 초음파 반사금속, 너트)등은 절삭가공 및 쇼트브리스트 공정을 거쳐 조립 즉 매질과 매질사이의 표면조도와 양표면의 평면도가 일정하지 않아 조립체결시 압전세라믹진동자의 파손이 생기고 압전세라믹진동자와 금속블럭사이에 틈새(Gap) 및 표면 거칠음으로 인하여 그 틈새사이로 트랜스 듀서 전체에 높은 열을 발생시키는 요인이 있으며 진동자의 전기, 기계적 특성이 저하되고 토오크(torque)체결 조립시 안전세라믹진동자(1c,1c')와 금속블럭(초음파 방사금속, 초음파 반사금속, 전극판(1d,1d'))에 미끄럼 마찰이 생겨 진동자 중심에 편심이 발생되고 있으며 초음파 진동 전달 효율 및 세정효과를 현저히 저하시키는 문제점이 있었다.That is, in the conventional piezoelectric coupling type transducer as described above, in order to obtain uniform surface roughness and plane of both surfaces of the piezoelectric ceramic vibrator, assembly is performed by using silver paste and polishing lapping on both surfaces. (Ultrasonic Radiating Metal, Ultrasonic Reflective Metal, Nut, etc.) are processed through cutting process and short-bristling process, that is, the surface roughness between the medium and the medium is not uniform, and the piezoceramic vibrator is damaged when assembly. Gap and surface roughness between the piezoelectric ceramic vibrator and the metal block cause high heat to the entire transducer between the gaps.The electrical and mechanical properties of the vibrator are deteriorated, and the safety ceramics when torque tightening are assembled. Slip on vibrators 1c and 1c 'and metal blocks (ultrasonic radiating metals, ultrasonic reflecting metals, electrode plates 1d and 1d') The friction and the eccentricity is generated in the vibrator blossomed center there is a problem that significantly decreases the ultrasonic vibration transmission efficiency and washing effect.

본 발명은 이러한 문제점을 해결하기 위한 것으로서 첨부도면을 참조하여 상세히 설명하면 다음과 같다.The present invention is to solve such a problem as described in detail with reference to the accompanying drawings as follows.

본 발명은 제3a, b도에서와 같이 금속블럭(초음파 방사금속(1a)의 상면, 저면(1a')과 초음파 반사금속(1b)의 상면, 저면(1b'))을 절삭 가공을 한 후 매질사이의 이물질(표면 거칠기, 버어(Burr), 평면)을 경도가 높은 용융정제 마이크로 알루미나(Alumina)연마제를 사용하여 래핑가공을 거쳐 매질의 표면 조도(0.5㎛)를 정밀하게 한다.The present invention cuts the metal block (top surface of the ultrasonic radiation metal 1a, top surface 1a 'and top surface of the ultrasonic reflective metal 1b, bottom surface 1b') as shown in FIGS. 3a and b. Foreign matter between the media (surface roughness, burr, plane) is subjected to lapping using high-purity molten-purified micro alumina polishing agent to precisely surface roughness (0.5 μm) of the medium.

즉 본 발명은 매끄러운 면을 가진 초음파 방사금속(1a)에 볼트(1e)를 접속 고정시킨 후 절연부싱(1f)를 끼워넣은 다음 압전세라믹진동자(1c,1c')도 양질의 표면을 얻은 후 전극판(1d), 전극판(1d') 사이사이에 접속시키고 또한 양표면을 래핑 공정을 거친 초음파 반사금속(1b)을 접속배치시킨 후 너트(1g)의 단면(1g')만 래핑 가공을 거쳐 토오크 체결조립하므로서 구성 완료된다.That is, according to the present invention, the bolt 1e is connected and fixed to the ultrasonic radiating metal 1a having a smooth surface, and then the insulating bushing 1f is inserted into the piezoelectric ceramic vibrators 1c and 1c '. After connecting the ultrasonic reflective metal 1b, which is connected between the plate 1d and the electrode plate 1d ', and both surfaces have been lapping, only the end face 1g' of the nut 1g is subjected to lapping. The torque is assembled and assembled.

여기서 래핑 가공 공정을 제4도의 평면도와 제5도의 정면도를 참조하여 상세히 설명하면, 정반(1)위에 링(2)를 올려놓고 캐리어(3)을 링(2)안에 장착하는데 캐리어(3)을 링(2)안에 장착하는 이유는 래핑 가공시 가공물(금속블럭 또는 압전세라믹)(4)의 흔들림을 없애고 가공물을 안정성 있게 가공하기 위해서이다.Herein, the lapping process will be described in detail with reference to the plan view of FIG. 4 and the front view of FIG. 5. The carrier 3 is mounted on the plate 1 and the carrier 3 is mounted in the ring 2. The reason for mounting in the ring 2 is to remove the shaking of the workpiece (metal block or piezoelectric ceramic) 4 during lapping and to stably process the workpiece.

캐리어(3)을 링(2)안에 장착한 후 웨이트 링(Weight Ring)(5)을 가공물(4)위에 올려놓고 연마제(6)(물 : 300∼500ml와 연마제 30∼50g을 혼합한 연마제)을 정반(1)위에 뿌리면 정반(1)이 회전하면서 연마제(6)가 가공물(4)표면 틈새 틈새 사이에 침투하여 가공이 이루어진다.After mounting the carrier 3 in the ring 2, the weight ring 5 was placed on the workpiece 4, and the abrasive 6 (water: abrasive mixed with 300 to 500 ml and 30 to 50 g of abrasive) When sprinkled on the surface plate 1, the surface plate 1 is rotated while the abrasive 6 penetrates between the surface spaces of the workpiece 4, and processing is performed.

1차 가공물의 표면조도를 얻기 위해서는 제5도와 같이 먼저 가공물(4)의 1차 단면 가공을 한 후 다시 가공물(4)을 뒤집어서 2차 단면가공을 하고 다시 뒤집어 최종가공을 하면 양면이 일치된 직각도 및 평면조도를 얻을 수 있다.To obtain the surface roughness of the primary workpiece, first perform the first end face machining of the workpiece 4 as shown in FIG. 5, and then turn the workpiece 4 again, perform the secondary cross-section machining, and turn it upside down to finish the final machining. Degrees and planar roughness can be obtained.

이를 다시 설명하면, 정반(1)위에 링(2)을 올려놓고 링(2)내부에 가공물 유동방지용 캐리어(3)을 끼어넣으며 캐리어(3)의 통공으로 가공물(4)을 넣은 후 가공물(4)위에 웨이트링(5)을 얹어놓은 상태에서 물과 연마제를 혼합한 연마제(6)를 사용하여 정반(1)을 회전시켜 1차 단면 가공을 하고 1차 단면 가공후 정반(1)을 정지시켜 캐리어(3)의 통공에 있는 가공물(4)을 뒤집어 넣고 다시 정반(1)을 정지시켜 2차 단면 가공을 한 후 다시 가공물(4)을 뒤집어 넣고 최종가공하여 양면의 평행도 직각도 표면조도가 일치되도록 한다.To put it again, the ring 2 is placed on the surface plate 1, the workpiece flow preventing carrier 3 is inserted into the ring 2, and the workpiece 4 is inserted into the through hole of the carrier 3. With the weight ring (5) on it, the surface plate (1) is rotated using the abrasive (6) mixed with water and abrasives to perform the first end surface processing, and the surface plate (1) is stopped after the first end surface processing. Turn the workpiece (4) in the through hole of the carrier (3) upside down and stop the surface plate (1) again for secondary cross-section processing, then turn the workpiece (4) over again and finish the final processing to match the parallelism and the squareness of both sides. Be sure to

상기와 같은 방법으로 공정되는 금속블럭(초음파 방사금속(1a), 초음파 반사금속(1g')의 래핑 가공공정을 거쳐 평면(표면조도) 및 표면 거칠기 0.5㎛ 가공을 얻은후 그 표면(양면) 래핑부위(초음파 방사금속(1a)의 상면, 저면(1a'), 초음파 반사금속(1b)의 상면, 저면(1b') 너트(1g)의 저면(1g'))의 증착면을 밀착성 및 열안정성을 좋게하기 위해 열처리를 한 다음 볼트(1e)를 접속시킨 후 절연부싱(1f) 전극판(1d) 압전세라믹진동자(1c) 전극판(1d') 압전세라믹진동자(1c') 초음파 반사금속(1b)을 순차적으로 조립 체결 완료하여 전극판(1d)와 전극판(1d')에 고주파 전기 입력신호를 인가하면 압전세라믹진동자(1c,1c')는 입력신호와 같은 주기로 진동하게 되고 이러한 진동에너지는 초음파 반사금속(1a)을 통해 실부하측으로 전파되고 상대적으로 초음파 반사금속(1b)을 통해서 진동에너지는 차단된다.After lapping the metal block (ultrasonic radiating metal (1a) and ultrasonic reflecting metal (1g '), which is processed in the same way as above, a flat (surface roughness) and a surface roughness of 0.5 µm are obtained, and then the surface (double-sided) lapping is performed. Adhesion and thermal stability of the deposited surface of the site (top surface of ultrasonic radiating metal 1a, bottom surface 1a ', top surface of ultrasonic reflective metal 1b, bottom surface 1b', bottom surface 1g 'of nut 1g) Heat treatment and then the bolts 1e are connected and the insulating bushing 1f electrode plate 1d piezoelectric ceramic vibrator 1c electrode plate 1d 'piezoelectric ceramic vibrator 1c' ultrasonic reflecting metal 1b ) Is sequentially assembled and applied to the electrode plate 1d and the electrode plate 1d 'to apply a high frequency electric input signal. The piezoelectric ceramic vibrators 1c and 1c' vibrate at the same period as the input signal, and the vibration energy is It propagates to the actual load side through the ultrasonic reflective metal 1a and relatively passes through the ultrasonic reflective metal 1b. Dynamic energy is cut off.

이때 초음파 방사금속(1a)의 상면(1a') 초음파 반사금속(1b)의 저면(1b')의 매질과 매질사이의 기타 이물질(표면 거칠기, 버어(Burr), 평면) 및 틈새가 없어 압전세라믹진동자의 파손을 방지하고 매질과 매질사이의 표면조도가 정밀 안정하여 진동 전달 효율 및 세정효과를 크게 향상시키면서 동작이 이루어진다.At this time, the piezoelectric ceramic is free from other foreign matter (surface roughness, burr, plane) and gap between the medium and the medium of the upper surface 1a 'of the ultrasonic radiating metal 1a and the lower surface 1b' of the ultrasonic reflecting metal 1b. It prevents damage of the vibrator and precisely stabilizes the surface roughness between the medium and the medium, thereby greatly improving the vibration transmission efficiency and the cleaning effect.

따라서 본 발명은 제3a, b도 및 제6도 표면조도의 비교표와 같이 표면조도(0.5㎛)를 정밀하고 매끄럽게 하여 조립하므로서 금속블럭과 압전세라믹진동자의 파손을 방지하고 매질과 매질사이(금속블럭과 압전세라믹진동자의 틈새(Gap))표면조도가 정밀안정하여 조립시 마찰로 인한 미끄럼을 방지하고 연속적인초음파 에너지에 의해 강력 초음파가 지속적으로 발생하더라도 초음파 진동자의 열안정성 및 전기, 기계적 특성을 향상시키고 진동 전달 효율 및 세정효과를 크게 향상시키는 효과가 있다.Accordingly, the present invention prevents breakage of the metal block and piezoelectric ceramic vibrator by assembling the surface roughness (0.5 μm) precisely and smoothly as shown in the comparison table of the surface roughness of FIGS. 3a, b and 6, and between the medium and the medium (metal block). Surface roughness of piezoceramic vibrator is precisely stabilized to prevent slippage during assembly and improve thermal stability and electrical and mechanical properties of ultrasonic vibrator even if strong ultrasonic wave is continuously generated by continuous ultrasonic energy. And it has the effect of greatly improving the vibration transmission efficiency and cleaning effect.

Claims (2)

초음파 세척기의 압전랸쥬반형 트랜스 듀서에 있어서, 정반(1)위에 링(2)을 올려놓고 링(2)내부에 가공물 유동 방지용 캐리어(3)을 끼워넣으며 캐리어(3)의 통공으로 가공물(4)을 넣은 후 가공물(4)위에 웨이트링(5)을 얹어놓은 상태에서 물과 연마제를 혼합한 연마제(6)를 사용하여 정반(1)을 회전시켜 1차 단면 가공을 하고, 1차 단면 가공후 정반(1)을 정지시켜 캐리어(3)의 통공에 있는 가공물(4)을 뒤집어 넣고 다시 정반(1)을 회전시켜 2차 단면 가공을 하고, 다시 가공물(4)을 뒤집어 넣고 최종가공하여 양면의 평행도 직각도 표면조도가 일치되도록 하는 것을 특징으로 하는 초음파 세척기의 압전랸쥬반형 트랜스 듀서의 제조방법.In the piezoelectric flat plate type transducer of an ultrasonic cleaner, a ring (2) is placed on a surface plate (1), a workpiece flow preventing carrier (3) is inserted into the ring (2), and the workpiece (4) is formed through the hole of the carrier (3). After putting the weight ring (5) on the workpiece (4), rotate the surface plate (1) using the abrasive (6) mixed with water and abrasives, and perform the first end face processing, and after the first end face machining Stop the surface plate 1, turn over the workpiece 4 in the through hole of the carrier 3, rotate the surface plate 1 again to perform secondary cross-section processing, turn the workpiece 4 upside down and finish the final processing. Method for producing a piezoelectric Jojuban transducer of the ultrasonic cleaner characterized in that the parallelism and the squareness and the surface roughness to match. 제1항에 있어서, 연마재 35∼50g과 물 300∼500ml를 혼합한 연마재를 사용하여 가공하는 것을 특징으로 하는 초음파 세척기의 압전랸쥬반형 트랜스 듀서의 제조방법.The method for producing a piezoelectric vacuum-type transducer of an ultrasonic cleaner according to claim 1, which is processed by using an abrasive mixed with 35 to 50 g of abrasive and 300 to 500 ml of water.
KR1019900001062A 1990-01-31 1990-01-31 Transducer manufacturing method in ultrasonic cleaning device KR910008409B1 (en)

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