KR910003411U - 진공시스템의 컴프레션 헤드 - Google Patents

진공시스템의 컴프레션 헤드

Info

Publication number
KR910003411U
KR910003411U KR2019890011094U KR890011094U KR910003411U KR 910003411 U KR910003411 U KR 910003411U KR 2019890011094 U KR2019890011094 U KR 2019890011094U KR 890011094 U KR890011094 U KR 890011094U KR 910003411 U KR910003411 U KR 910003411U
Authority
KR
South Korea
Prior art keywords
vacuum system
compression head
system compression
head
vacuum
Prior art date
Application number
KR2019890011094U
Other languages
English (en)
Other versions
KR910007776Y1 (ko
Inventor
김진연
Original Assignee
삼성전관 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전관 주식회사 filed Critical 삼성전관 주식회사
Priority to KR2019890011094U priority Critical patent/KR910007776Y1/ko
Publication of KR910003411U publication Critical patent/KR910003411U/ko
Application granted granted Critical
Publication of KR910007776Y1 publication Critical patent/KR910007776Y1/ko

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38Exhausting, degassing, filling, or cleaning vessels
    • H01J9/385Exhausting vessels
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00Apparatus and processes for manufacture of discharge tubes
    • H01J2209/38Control of maintenance of pressure in the vessel
    • H01J2209/383Vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
KR2019890011094U 1989-07-28 1989-07-28 진공시스템의 컴프레션 헤드 KR910007776Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019890011094U KR910007776Y1 (ko) 1989-07-28 1989-07-28 진공시스템의 컴프레션 헤드

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019890011094U KR910007776Y1 (ko) 1989-07-28 1989-07-28 진공시스템의 컴프레션 헤드

Publications (2)

Publication Number Publication Date
KR910003411U true KR910003411U (ko) 1991-02-27
KR910007776Y1 KR910007776Y1 (ko) 1991-10-05

Family

ID=19288703

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019890011094U KR910007776Y1 (ko) 1989-07-28 1989-07-28 진공시스템의 컴프레션 헤드

Country Status (1)

Country Link
KR (1) KR910007776Y1 (ko)

Also Published As

Publication number Publication date
KR910007776Y1 (ko) 1991-10-05

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Legal Events

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