KR900701687A - How to increase the thermal conductivity of aluminum nitride via vapor phase carbon - Google Patents

Abstract

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Description

How to increase the thermal conductivity of aluminum nitride via vapor phase carbon

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Claims (22)

A process for producing a dense AIN product with high thermal conductivity from an oxygen-containing AIN compact comprising the following steps a) and b): a) at least partially compacting the compact and b) containing vapor phase carbon By exposing the dense AIN product in the airflow, the oxygen content is sufficiently reduced to make the dense AIN product with high thermal conductivity. The method of claim 1, wherein the AIN compress comprises a densification aid. The method according to claim 2, wherein the compressed powder contains a ceramic powder component consisting essentially of AIN. The method of claim 3 wherein the densification aid is Y ₂ O ₃ . The method of claim 4, wherein in step (b), the dense AIN product is exposed to the air stream containing the vapor phase carbon to sufficiently reduce the oxygen content to produce a dense AIN product having a thermal conductivity of 130 W / m ° K or higher. The method of claim 2 wherein the compact contains a ceramic powder component consisting essentially of AIN and BN. The method of claim 2 wherein the compact contains a ceramic powder component consisting essentially of AIN and SiC. 3. The process of claim 2, wherein the air stream containing vapor phase carbon is selected from the group consisting of carbon monoxide, lower hydrocarbons, and mixtures thereof. A process for producing a dense AIN product with high thermal conductivity from an oxygen-containing AIN compressed powder consisting of the following steps a) and b): a) at least partially densifying the compressed powder, b) an air stream containing vapor phase carbon Dense AIN products are exposed to the oxygen content to reduce the oxygen content sufficiently to produce dense AIN products with thermal conductivity of 130W / m ° K or higher.The AIN products contain compacting aids and are compressed with ceramic powder consisting essentially of AIN. It is formed from minutes. The method of claim 9, wherein the densification aid is Y ₂ O ₃ . The process of claim 10 wherein the stream containing vapor phase carbon is selected from the group consisting of carbon monoxide, lower hydrocarbons, and mixtures thereof. The method of claim 11, wherein in step (b), the AIN product is exposed to the vacuum at 1700 to 1900 ° C. for at least one hour to reduce oxygen content, thereby making a dense AIN product having a thermal conductivity of 130 W / m ° K or more. 10. The method of claim 9 wherein in step (b) the AIN product is exposed to an air stream containing vaporous carbon to sufficiently reduce the oxygen content to produce a dense AIN product having an oxygen content of 0.6 wt% or less. A process for producing a dense AIN product with high thermal conductivity from an oxygen-containing AIN compact comprising the following steps a) and b): a) at least partially compacting the compact and b) containing vapor phase carbon It exposes dense AIN products in airflow to reduce oxygen content sufficiently to produce dense AIN products with high thermal conductivity. AIN products contain densification aids and AIN compressed powder with ceramic powder consisting essentially of AIN and BN. Is formed from. A process for producing a dense AIN product with high thermal conductivity from an oxygen-containing AIN compact comprising the following steps a) and b): a) at least partially compacting the compact and b) containing vapor phase carbon It exposes dense AIN products in the airflow to sufficiently reduce oxygen content to produce dense AIN products with high thermal conductivity. AIN products contain densification aids and AIN compressed with essentially ceramic powder consisting of AIN and SiC. It is formed from minutes. Compact AIN product consisting essentially of AIN with a thermal conductivity of more than 130 W / m ° K. Compact AIN product consisting essentially of AIN and BN with high thermal conductivity. Compact AIN product consisting essentially of AIN and SiC with high thermal conductivity. A dense AIN product with high thermal conductivity formed by the method of claim 1. A compact AIN product having a thermal conductivity of at least 130 W / m ° K formed by the method of claim 9. A compact AIN product having a high thermal conductivity formed by the method of claim 14. A compact AIN product having a high thermal conductivity formed by the method of claim 15. ※ Note: The disclosure is based on the initial application.