KR900011230U - 매거진 랙 클램프장치 - Google Patents

매거진 랙 클램프장치

Info

Publication number
KR900011230U
KR900011230U KR2019880018609U KR880018609U KR900011230U KR 900011230 U KR900011230 U KR 900011230U KR 2019880018609 U KR2019880018609 U KR 2019880018609U KR 880018609 U KR880018609 U KR 880018609U KR 900011230 U KR900011230 U KR 900011230U
Authority
KR
South Korea
Prior art keywords
clamp device
magazine rack
rack clamp
magazine
rack
Prior art date
Application number
KR2019880018609U
Other languages
English (en)
Other versions
KR910005079Y1 (ko
Inventor
김경한
Original Assignee
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자 주식회사 filed Critical 삼성전자 주식회사
Priority to KR2019880018609U priority Critical patent/KR910005079Y1/ko
Publication of KR900011230U publication Critical patent/KR900011230U/ko
Application granted granted Critical
Publication of KR910005079Y1 publication Critical patent/KR910005079Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/14—Mounting supporting structure in casing or on frame or rack
    • H05K7/1401—Mounting supporting structure in casing or on frame or rack comprising clamping or extracting means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/18—Construction of rack or frame
    • H05K7/183—Construction of rack or frame support rails therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Jigs For Machine Tools (AREA)
KR2019880018609U 1988-11-16 1988-11-16 매거진 랙 클램프장치 KR910005079Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019880018609U KR910005079Y1 (ko) 1988-11-16 1988-11-16 매거진 랙 클램프장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019880018609U KR910005079Y1 (ko) 1988-11-16 1988-11-16 매거진 랙 클램프장치

Publications (2)

Publication Number Publication Date
KR900011230U true KR900011230U (ko) 1990-06-04
KR910005079Y1 KR910005079Y1 (ko) 1991-07-15

Family

ID=19281399

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019880018609U KR910005079Y1 (ko) 1988-11-16 1988-11-16 매거진 랙 클램프장치

Country Status (1)

Country Link
KR (1) KR910005079Y1 (ko)

Also Published As

Publication number Publication date
KR910005079Y1 (ko) 1991-07-15

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Legal Events

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A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 19970829

Year of fee payment: 9

LAPS Lapse due to unpaid annual fee