KR900009741Y1 - Stero micro scope - Google Patents

Abstract

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Description

Clinical, metal microscope

1 is a front view showing an installation state of the present invention.

2 is a side view of the same.

3 is a cross-sectional view showing the lifting operation state of the test piece coordinate setting device of the present invention.

Figure 4 is a cross-sectional view of the operating state of the elevating upper condensing lens of the present invention.

5 is a perspective view of a wafer holder plate for wafer placement, which is a metal test piece of the present invention.

Figure 6 is a perspective view of the installation state of the clinical upper condensing device of the present invention.

* Explanation of symbols for main parts of the drawings

1: expectation 2: eyepiece

3: Nopis 5: Half mirror

6: half mirror housing 7: prism

8: upper light control device 9: metal light collecting device

10, 10 ': filter 11, 11': aperture

12: test piece coordinate setting device 13: base

15 lifting device 17: wafer holder plate

18, 18 ': groove 23: mounting plate

24: clinical imaging condenser lens 25: Shanghai-dong

26: axis 26 ': pinion gear

27: adjusting knob 28: clinical light collecting device

29: lower light control device 30, 30 ': reflector support and reflector

31: clinical lower focusing lens 32: aperture

33: switch

The present invention relates to a microscope for clinical and metallurgy, in which a single microscope can be used to observe a metal specimen as well as a clinical specimen. In particular, the present invention can be used to set specimen coordinates like a conventional microscope. The device is installed under the eyepiece, and between the eyepiece and the nosepiece is installed a half mirror housing connected to a metal condenser installed horizontally on the upper end to illuminate the metal specimen through the nosepiece. In this way, the observation image can be clearly observed without any shadow phenomenon, and the clinical condenser lens is installed directly below the center of the test piece coordinate setting device, and the clinical illumination lamp and the condenser that illuminates the light are placed inside the seat. It is installed horizontally, but the clinical part on the upper surface and inside of the base of the clinical upper condensing lens directly below The lower condenser lens and the reflector are mounted so that the illumination of the clinical test piece is illuminated vertically from the lower side with respect to the nosepiece so that the observation of the clinical test piece can be more clearly and closely examined and observed. With reference to the original utility model registration application No. 87-10527 and the patent application No. 88-4297 selected by the present cause of the same, the clinical or metal test specimens are used as a single instrument while using the same method of using and operating an existing microscope. It can observe together, and it improved reasonably so that the function as a microscope might be excellent.

Generally known microscopes are divided into two types for observing metal specimens or for observing clinical specimens, and most of them are monotonous functions that must be used according to their type, and these metal or clinical microscopes are used to illuminate the specimens. There was a drawback in that it was impossible to illuminate the room or to intensively illuminate only the observation part of the specimen, so that the observation of the specimen could not be observed clearly and optimally, or that such a microscope would be used only for metal or clinical use. Where simultaneous observation of metal and clinical specimens is required due to the limited functional limitations, two or more microscopes with different functions and / or economic burdens of separately purchasing metal and clinical microscopes according to the use function are installed. Reduced area of used space There was a defect causing a problem such as being.

Therefore, the present invention aims to correct the functional problems of the conventional microscope as described above, and to observe the metal and clinical specimens together as one microscope, and to illuminate the clinical or metal specimens to be observed. Another purpose is to make the observation of metal and clinical specimens more clearly by illuminating downward vertically through the nosepiece or intensively illuminating upwardly and downwardly from the position directly below the nosepiece. This will be described in detail with reference to the accompanying drawings.

A test piece was attached to the lower surface of the eyepiece 2 provided on the base 1 by attaching a nosepiece support 4 on which several nosepieces 3 were placed and fixed to the test piece placing table. In the above, the half mirror housing 6 in which the half mirror 5 is mounted at an angle of about 45 ° between the eyepiece case 2 'and the nosepiece support 4 is installed, and the naked eye can be seen through the eyepiece 2. The perspective angle is refracted through the prism 7 so as to pass through the half mirror 5 so that it can be viewed perpendicular to the nosepiece 3.

The metal light concentrating device 9 connecting between the one side wall on which the projection hole 6 'of the half mirror housing 6 is formed and the upper dimmer 8 installed on the upper end of the base 1 is placed in a horizontal state. It installs several lenses at both ends and middle part of it, and at the same time, two filter 10 and 10 'are detachably installed at the upper dimmer 8 side and half mirror housing 6 side and middle Apertures 11 and 11 'are installed on each side of the couple, and on one side of the upper dimming device 8, an angle adjuster 8 "for adjusting the installation angle of the metal lighting lamp 8' is installed outside. It is.

Under the nospiece 3, the elevating actuator 15 in which the test piece coordinate setting device 12 is fitted into the inner rail groove 14 'of the support 14 placed on the upper surface of the seat 13 to adjust the lifting operation. The upper plate 12b portion, which is installed in the superimposed state of the lower plate 12a portion in the fixed state of the test piece coordinate setting device 12, is provided for the front and rear movement adjustment provided at the bottom of one side of the lower plate 12a portion. The shaft knob 16a and the X-axis knob 16b for adjusting the left and right movements are configured so that the movement can be controlled back and forth and left and right. It is configured to observe the entire surface by moving left and right.

A wafer holder plate 17 is detachably mounted on the upper surface of the upper plate 12b portion of the test piece coordinate setting device 12. The wafer holder plate 17 is formed as shown in FIG. Stepped recesses 17 ', 17 ", ... (17" "") are formed on the upper surface so that they can be stably placed according to the size (diameter) of the wafer. Fan-shaped grooves 18 and 18 'are formed to facilitate the placement and withdrawal of the wafers that are being placed and placed so as to eliminate breakage during handling of the wafer, which is a test piece.

In addition, the elevating adjustment operation of the test piece coordinate setting device 12 is provided on the support 19 on the upper surface of the pedestal 13 as shown in the example of FIG. The rack size gear portion 22 engaged with the gear portion 21 (see the technical contents of Patent Application No. 88-4297) configured to rotate at a high rotation speed and a very low rotation speed by the rotation operation of (20 ') is operated. Since it is attached to the sieve 15 (refer to Fig. 4), it is possible to adjust the elevating control operation quickly or very slowly by selecting the small knob 20. It can be done correctly.

In addition, the lower plate 12a portion of the lower surface of the test piece coordinate setting device 12 and the elevating actuator 15 is attached to the fixed plate body 23 having a cross-section "a" in a fixed state, and formed on the upper surface thereof. The clinical upper condenser lens 24 is inserted and installed to move up and down through the guide hole 23 '. The clinical upper condenser lens 24 is an upper annulus of the upper and lower movable port 25 having a "a" shape. And the lower rack gear 25 "is engaged with the pinion gear 26 'of the shaft 26 supported through both walls 23" of the attachment plate 23, The adjustment knob 27 is fixed to both ends of the shaft 26.

In addition, a clinical condenser lens 28, in which several lenses are mounted, is mounted in a horizontal state at an inner center of the base 13, and a lower dimming device 29 is installed at a rear end thereof and a clinical illumination therein. The reflector 30 'reflecting the light of the lamp 29' to the clinical upper condensing lens 24 is installed at a 45 ° angle on the reflector support 30 mounted at the inner end of the light concentrator 28. It was.

In addition, the upper part of the tip end axis of the clinical light collecting device 28, that is, the projection hole 28 'directly below the reflector 30', and the clinical lower part on the upper surface of the base 13 at the position directly above the projection hole 28 '. The condenser lens 31 was installed, and the diaphragm 32 was installed in the clinical concentrator 28 to adjust the amount of light. The lower dimming device 29 also controlled the installation angle of the clinical dimming lamp 29 '. Thus, the angle adjuster 29 "is installed so that the light is projected onto the clinical concentrator 28 without scattering.

In addition, the switch 33 for selectively applying or simultaneously applying power to the metal and clinical lighting lamps 8 'and 29' of the upper and lower dimming devices 8 and 29 is also expected ( 1) Installed on one side and selectively adjusting according to the type of metal or clinical test piece, and it is configured to see the observation of the test piece more clearly without shadow phenomenon by seeing light from above or below the test piece.

Referring to the effect of the present invention configured in this way in more detail as follows.

First, when the surface of the metal test piece is to be enlarged and observed, operate the switch 33 installed on one side of the base 2 so that only the metal lighting lamp 8 'above the base 1 is turned on. The light of the lamp 8 'is collected by several lenses installed in the metal light collecting device 9, and passes through the projection hole 6' of the half mirror housing 6 at a 45 ° angle. It is reflected by the mirror (5) to illuminate the metal test specimen placed on the upper surface of the specimen coordinate setting device 12 as a vertical state through the nosepiece (3), so that the metal without the occurrence of shade caused by the side illumination state of the conventional microscope It can be clearly illuminated on the surface of the test piece, and the half mirror (5) has the characteristics of both a reflection function and a projection function, and the metal test piece is in the same vertical state as the illumination projection angle when visual observation through the eyepiece (2). To see through The observation image can be magnified and observed more clearly, and the top plate 12b is operated by the selection operation of the Y-axis knob 16a and the X-axis knob 16b provided at the bottom of the specimen coordinate setting device 12. ) The front and rear and right and left parts to adjust the part to be observed in the position directly below the nosepiece (3), and also installed on both sides of the support (19), sonob (20), (20 ') Is selected and rotated to move the specimen coordinate setting device 12 upward with respect to the nosepiece 3 to enlarge or observe only a portion of the metal specimen in greater detail, or to move the entire surface of the metal specimen temporarily. It can be observed at magnification.

In the case where the metal test piece to be observed as described above is a wafer containing a semiconductor circuit, the wafer holder plate 17 is installed on the upper surface of the upper surface portion 12b of the specimen coordinate setting device 12 and the wafer to be observed is stepped on the upper surface thereof. Selected and seated on a plurality of thresholds 17 ', 17 ", ... (17" ""), the diameter of the stepped projections 17', (17 "), ... (17" "") Since it is formed to suit several kinds of specifications according to the size (diameter) of the wafer being produced in the state of standardization, it is possible to select the same threshold as the specification of the wafer to be observed and to stably settle the wafer holder plate ( 17) The fan-shaped grooves 18 and 18 'are recessed and formed on both sides in the symmetrical state on the upper surface, so that the wafer can be easily placed and drawn out on the selected threshold. It will never happen to damage the fur.

In addition, when observing the metal test piece as described above, if the observer wants to adjust the lighting conditions, the desired illumination is also achieved by means of attaching and detaching the floaters 10 and 10 'and the operation of the apertures 11 and 11'. Can be illuminated.

In order to observe the clinical test piece, the clinical test piece is mounted on the test piece coordinate setting device 12 and then the switch 33 installed on the base 1 is operated to illuminate the clinical lighting lamp of the lower dimming device 29. When the light 29 'is turned on, the light is reflected by the reflector 30' mounted at 45 ° angle to the reflector support 30 inside the distal end through the clinical condenser 2 to the projection hole 28 '. It is projected in an upward vertical state, and the reflected light is concentrated and projected by the clinical lower condenser lens 31 directly above the projection hole 28 ', and the upper clinical upper condenser lens installed in a perpendicular state to the nosepiece 3 ( 24) the light is concentrated, and the test specimen placed on the upper surface of the specimen coordinate setting device 12 becomes more stepped on and illuminates directly under the nosepiece (3). Can be used for clinical upper condensing When the lens 24 is to be observed in close proximity to the clinical test piece, the adjustment knob 27 provided on both walls 23 ″ of the attachment plate 23 is rotated to rotate the pinion gear 26 ′ of the shaft 26. While the rack gear 25 is to be raised, the "a" shaped shanghai Dong-gu 25 passes through the guide hole 23 'of the clinical upper condenser lens 24 of the attachment plate 23 so as to set the specimen coordinate setting device ( 12) placed in the abutment state on the clinical specimen placed through the inner bottom (see the solid line in Fig. 4), so that a part of the clinical specimen to be observed can be observed by close-up. On the contrary, when the clinical upper condenser lens 24 is moved downward and the whole clinical specimen is to be expanded and observed at a time, the adjustment knob 27 is rotated in the opposite direction as in the upward movement operation so that the pinion gear 26 ' As the rack size (25 ") is lowered, the" A "shaped image The clinical test piece for the clinical upper condenser lens 24 is moved by the high donggu 25 to move the clinical upper condenser lens 24 under the guide hole 23 'of the attachment plate 23 (see the virtual line in FIG. 4). In this case, it is possible to widen the visual observation through the eyepiece 2 because the illumination range is extended and thus the illumination range is enlarged. Can be adjusted.

On the other hand, when observing the clinical test specimen as described above, when illumination is required from the upper side of the clinical test specimen and at the same time, the switch 33 of the base 1 is turned on by the upper and lower dimmers 8 and 29 of the metal. It is possible to effectively observe the observation image by illuminating at the same time on and under the clinical test piece by operating the position to simultaneously light the medical and clinical lighting lamps 8 'and 29'.

The present invention can simultaneously observe a metal or clinical specimen as one microscope, and also illuminates the specimen in a vertical state through the nospiece or in a vertical direction up and down directly under the nospiece. In addition to providing a clearer view of visual observation through the icepiece, the test piece coordinate setting device can be adjusted up, down, left and right, and the clinical condensing device is installed inside the seat. It is possible to reduce the overall height and at the same time, the upper collimating lens for clinical use can be lifted and adjusted by the specimen coordinate setting device so that the test specimen can be illuminated in a close-up state or the whole can be illuminated at once. The microscope of the present invention is the same as the conventional microscope It is of a type and is adapted to use user-friendly, fast, it is useful devised having advantages such as for increased metal and clinical combined, yet the viewer's observation capabilities in the capabilities.

Claims (3)

The above-mentioned eyepiece 2 and the furnace are constructed by attaching a nosepiece support 4 on which several nosepieces 3 are mounted to the lower side of the eyepiece 2 provided on the base 1 and observing the test piece. The half mirror housing 6 mounted between the mouthpiece 3 and the lower light control device 8 on the upper side of the base 1 in a horizontal state are connected to the metal light collecting device 9 through the nosepiece 3. Means for illuminating the test piece in a downward vertical state, and installed in a horizontal state in the interior of the pedestal 13, the lower end of the light control device 29, the front end of the clinical light concentrating device 28 is provided with a reflector 30 ' As a means, the clinical lower condensing lens 31 on the base 13 and the non-piece 3 as the clinical lower condensing lens 24 which are provided in a rectangular direction and are installed below the bottom center of the column piece coordinate setting device 12. ) It is a configuration that illuminates from upside down and upright, and serves as a metal and clinical test. Clinical features of that configuration to be used, a combination of a metal microscope. The pinion gear according to claim 1, wherein a cross section installed on the bottom side of the test piece coordinate setting device 12 is affixed to a shaft 26 penetrated to both wall bodies 23 of the " a " (26 ') by setting the clinical upper condensing lens (24) on the circular frame (25') of the upper "25" Shanghai Donggu (25) meshed with the rack gear (25 ") by rotating the control knob (27) A clinical and metal microscope according to claim 1, wherein the condensing lens 24 is configured to be controlled to move up or down at the bottom of the clinical specimen on which the condenser lens 24 is placed. The method according to claim 1, wherein the clinical light collecting device 28 is installed in a horizontal state inside the pedestal 13, and at its rear end, a lower light dimming device 29 equipped with a clinical light lamp 29 'is provided. It is equipped with a reflector support 30 mounted with a reflector 30 'reflecting light with a clinical lower condenser lens 31 for intensively projecting light with the clinical upper condenser lens 24 to illuminate the lower dimmer 29. A microscope for clinical and metal use, characterized in that it is configured to illuminate the light in a vertically upward direction toward the nosepiece (3).