KR900008409U - Magnet assembly for sputter - Google Patents

Magnet assembly for sputter

Info

Publication number
KR900008409U
KR900008409U KR2019880017255U KR880017255U KR900008409U KR 900008409 U KR900008409 U KR 900008409U KR 2019880017255 U KR2019880017255 U KR 2019880017255U KR 880017255 U KR880017255 U KR 880017255U KR 900008409 U KR900008409 U KR 900008409U
Authority
KR
South Korea
Prior art keywords
sputter
magnet assembly
magnet
assembly
Prior art date
Application number
KR2019880017255U
Other languages
Korean (ko)
Other versions
KR900010217Y1 (en
Inventor
윤기천
Original Assignee
삼성전관 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전관 주식회사 filed Critical 삼성전관 주식회사
Priority to KR2019880017255U priority Critical patent/KR900010217Y1/en
Publication of KR900008409U publication Critical patent/KR900008409U/en
Application granted granted Critical
Publication of KR900010217Y1 publication Critical patent/KR900010217Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
    • H01J37/3455—Movable magnets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
KR2019880017255U 1988-10-25 1988-10-25 Magnet assembly for a sputter KR900010217Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019880017255U KR900010217Y1 (en) 1988-10-25 1988-10-25 Magnet assembly for a sputter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019880017255U KR900010217Y1 (en) 1988-10-25 1988-10-25 Magnet assembly for a sputter

Publications (2)

Publication Number Publication Date
KR900008409U true KR900008409U (en) 1990-05-01
KR900010217Y1 KR900010217Y1 (en) 1990-11-05

Family

ID=19280524

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019880017255U KR900010217Y1 (en) 1988-10-25 1988-10-25 Magnet assembly for a sputter

Country Status (1)

Country Link
KR (1) KR900010217Y1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000052123A (en) * 1999-01-29 2000-08-16 고기헌 Aaaaa
KR100444279B1 (en) * 2001-08-03 2004-08-11 이주영 Manufacturing method of decorative panel for building exterior and decorative panel

Also Published As

Publication number Publication date
KR900010217Y1 (en) 1990-11-05

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 19970821

Year of fee payment: 8

LAPS Lapse due to unpaid annual fee