KR890023782U - 자동압력 조절기 - Google Patents

자동압력 조절기

Info

Publication number
KR890023782U
KR890023782U KR2019880007340U KR880007340U KR890023782U KR 890023782 U KR890023782 U KR 890023782U KR 2019880007340 U KR2019880007340 U KR 2019880007340U KR 880007340 U KR880007340 U KR 880007340U KR 890023782 U KR890023782 U KR 890023782U
Authority
KR
South Korea
Prior art keywords
pressure regulator
automatic pressure
automatic
regulator
pressure
Prior art date
Application number
KR2019880007340U
Other languages
English (en)
Other versions
KR910006037Y1 (ko
Inventor
임희용
문성집
서왕석
이성수
Original Assignee
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자 주식회사 filed Critical 삼성전자 주식회사
Priority to KR2019880007340U priority Critical patent/KR910006037Y1/ko
Publication of KR890023782U publication Critical patent/KR890023782U/ko
Application granted granted Critical
Publication of KR910006037Y1 publication Critical patent/KR910006037Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
KR2019880007340U 1988-05-17 1988-05-17 자동압력 조절기 KR910006037Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019880007340U KR910006037Y1 (ko) 1988-05-17 1988-05-17 자동압력 조절기

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019880007340U KR910006037Y1 (ko) 1988-05-17 1988-05-17 자동압력 조절기

Publications (2)

Publication Number Publication Date
KR890023782U true KR890023782U (ko) 1989-12-04
KR910006037Y1 KR910006037Y1 (ko) 1991-08-16

Family

ID=19275296

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019880007340U KR910006037Y1 (ko) 1988-05-17 1988-05-17 자동압력 조절기

Country Status (1)

Country Link
KR (1) KR910006037Y1 (ko)

Also Published As

Publication number Publication date
KR910006037Y1 (ko) 1991-08-16

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Legal Events

Date Code Title Description
A201 Request for examination
N231 Notification of change of applicant
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20020708

Year of fee payment: 12

EXPY Expiration of term