KR890001167A - Manufacturing Method of Semiconductor Device - Google Patents
Manufacturing Method of Semiconductor Device Download PDFInfo
- Publication number
- KR890001167A KR890001167A KR1019870006728A KR870006728A KR890001167A KR 890001167 A KR890001167 A KR 890001167A KR 1019870006728 A KR1019870006728 A KR 1019870006728A KR 870006728 A KR870006728 A KR 870006728A KR 890001167 A KR890001167 A KR 890001167A
- Authority
- KR
- South Korea
- Prior art keywords
- film
- manufacturing
- semiconductor device
- bpsg film
- bpsg
- Prior art date
Links
Abstract
내용 없음No content
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제 1(A)-(B)도는 본 발명에 따른 제조 공정도.1 (A)-(B) are manufacturing process diagrams according to the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR8706728A KR890004885B1 (en) | 1987-06-30 | 1987-06-30 | Reflow method of bpsg film for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR8706728A KR890004885B1 (en) | 1987-06-30 | 1987-06-30 | Reflow method of bpsg film for semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
KR890001167A true KR890001167A (en) | 1989-03-18 |
KR890004885B1 KR890004885B1 (en) | 1989-11-30 |
Family
ID=19262484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR8706728A KR890004885B1 (en) | 1987-06-30 | 1987-06-30 | Reflow method of bpsg film for semiconductor device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR890004885B1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5651525A (en) * | 1994-06-28 | 1997-07-29 | Yang; Sikyung | Reading stand |
KR100256418B1 (en) * | 1998-02-21 | 2000-06-01 | 윤종용 | Structure of drawer in drawer type kimch'i store house |
-
1987
- 1987-06-30 KR KR8706728A patent/KR890004885B1/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5651525A (en) * | 1994-06-28 | 1997-07-29 | Yang; Sikyung | Reading stand |
KR100256418B1 (en) * | 1998-02-21 | 2000-06-01 | 윤종용 | Structure of drawer in drawer type kimch'i store house |
Also Published As
Publication number | Publication date |
---|---|
KR890004885B1 (en) | 1989-11-30 |
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A201 | Request for examination | ||
G160 | Decision to publish patent application | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20011008 Year of fee payment: 13 |
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