KR880001027A - Bonding method of semiconductor wafer and bonding apparatus thereof - Google Patents
Bonding method of semiconductor wafer and bonding apparatus thereof Download PDFInfo
- Publication number
- KR880001027A KR880001027A KR1019860004652A KR860004652A KR880001027A KR 880001027 A KR880001027 A KR 880001027A KR 1019860004652 A KR1019860004652 A KR 1019860004652A KR 860004652 A KR860004652 A KR 860004652A KR 880001027 A KR880001027 A KR 880001027A
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor wafer
- hollow shafts
- caught
- bonding
- face
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Abstract
내용 없음No content
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제1도는 본 발명에 관한 접합장치중 일부를 제외한 사시도. 제2도는 접합장치내에서 접합공정전의 배치상태를 나타내는 단면도. 제3도는 접합공정적인 접합장치를 나타내는 단면도.1 is a perspective view excluding some of the bonding apparatus according to the present invention. 2 is a cross-sectional view showing an arrangement state before a joining process in a joining apparatus. 3 is a cross-sectional view showing a bonding apparatus in the bonding process.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019860004652A KR900003249B1 (en) | 1986-06-12 | 1986-06-12 | Semiconductor wafer bonding method and structure thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019860004652A KR900003249B1 (en) | 1986-06-12 | 1986-06-12 | Semiconductor wafer bonding method and structure thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
KR880001027A true KR880001027A (en) | 1988-03-31 |
KR900003249B1 KR900003249B1 (en) | 1990-05-12 |
Family
ID=19250441
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019860004652A KR900003249B1 (en) | 1986-06-12 | 1986-06-12 | Semiconductor wafer bonding method and structure thereof |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR900003249B1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7192841B2 (en) | 2002-04-30 | 2007-03-20 | Agency For Science, Technology And Research | Method of wafer/substrate bonding |
US7361593B2 (en) | 2002-12-17 | 2008-04-22 | Finisar Corporation | Methods of forming vias in multilayer substrates |
US7259466B2 (en) | 2002-12-17 | 2007-08-21 | Finisar Corporation | Low temperature bonding of multilayer substrates |
-
1986
- 1986-06-12 KR KR1019860004652A patent/KR900003249B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR900003249B1 (en) | 1990-05-12 |
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