KR850000778A - 거품반도체 도판트 캐리어 및 그 제조방법 - Google Patents
거품반도체 도판트 캐리어 및 그 제조방법 Download PDFInfo
- Publication number
- KR850000778A KR850000778A KR1019840003278A KR840003278A KR850000778A KR 850000778 A KR850000778 A KR 850000778A KR 1019840003278 A KR1019840003278 A KR 1019840003278A KR 840003278 A KR840003278 A KR 840003278A KR 850000778 A KR850000778 A KR 850000778A
- Authority
- KR
- South Korea
- Prior art keywords
- manufacturing
- semiconductor dopant
- dopant carrier
- foam
- foam semiconductor
- Prior art date
Links
- 239000002019 doping agent Substances 0.000 title claims 2
- 239000006260 foam Substances 0.000 title claims 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 229920000620 organic polymer Polymers 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000003786 synthesis reaction Methods 0.000 claims 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
- C30B31/165—Diffusion sources
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
- Silicon Compounds (AREA)
- Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
Abstract
내용 없음.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
Claims (1)
- 개방세포 거품 내에 상호 연결식으로 배열된 연결입자합내화물을 구비하고 있는 무유기중합체의 도판트 캐리어.※참고사항:최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/502,261 US4526826A (en) | 1983-06-08 | 1983-06-08 | Foam semiconductor dopant carriers |
| US58427584A | 1984-02-27 | 1984-02-27 | |
| US502261 | 1990-04-02 | ||
| US584275 | 1996-01-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR850000778A true KR850000778A (ko) | 1985-03-09 |
Family
ID=27054083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019840003278A KR850000778A (ko) | 1983-06-08 | 1984-06-08 | 거품반도체 도판트 캐리어 및 그 제조방법 |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0156055B1 (ko) |
| KR (1) | KR850000778A (ko) |
| CA (1) | CA1217507A (ko) |
| DE (1) | DE3468447D1 (ko) |
| IE (1) | IE56118B1 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010012252A (ko) * | 1997-05-27 | 2001-02-15 | 휘브너 토마스 | 스커트 또는 바지의 허리띠 폭 조정장치 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4798764A (en) * | 1983-06-08 | 1989-01-17 | Stemcor Corporation | Arsenate dopant sources and method of making the sources |
| US4596716A (en) * | 1983-06-08 | 1986-06-24 | Kennecott Corporation | Porous silicon nitride semiconductor dopant carriers |
| US4525429A (en) * | 1983-06-08 | 1985-06-25 | Kennecott Corporation | Porous semiconductor dopant carriers |
| DE102008014824B4 (de) | 2008-03-18 | 2014-07-10 | Leonhard Kurz Stiftung & Co. Kg | Dotierfolien und deren Verwendung |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3923563A (en) * | 1973-04-16 | 1975-12-02 | Owens Illinois Inc | Process for doping silicon semiconductors using an impregnated refractory dopant source |
| US4798764A (en) * | 1983-06-08 | 1989-01-17 | Stemcor Corporation | Arsenate dopant sources and method of making the sources |
-
1984
- 1984-06-07 CA CA000456086A patent/CA1217507A/en not_active Expired
- 1984-06-07 IE IE1425/84A patent/IE56118B1/xx unknown
- 1984-06-08 KR KR1019840003278A patent/KR850000778A/ko not_active Application Discontinuation
- 1984-06-08 EP EP84303902A patent/EP0156055B1/en not_active Expired
- 1984-06-08 DE DE8484303902T patent/DE3468447D1/de not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010012252A (ko) * | 1997-05-27 | 2001-02-15 | 휘브너 토마스 | 스커트 또는 바지의 허리띠 폭 조정장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3468447D1 (de) | 1988-02-11 |
| IE56118B1 (en) | 1991-04-24 |
| CA1217507A (en) | 1987-02-03 |
| EP0156055A1 (en) | 1985-10-02 |
| IE841425L (en) | 1984-12-08 |
| EP0156055B1 (en) | 1988-01-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E601 | Decision to refuse application |