KR20240115350A - 복수의 코일들 사이에 직접-구동 무선 주파수 신호 생성기로부터 전류를 분할하는 (split) 장치 및 방법 - Google Patents

복수의 코일들 사이에 직접-구동 무선 주파수 신호 생성기로부터 전류를 분할하는 (split) 장치 및 방법 Download PDF

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Publication number
KR20240115350A
KR20240115350A KR1020247023912A KR20247023912A KR20240115350A KR 20240115350 A KR20240115350 A KR 20240115350A KR 1020247023912 A KR1020247023912 A KR 1020247023912A KR 20247023912 A KR20247023912 A KR 20247023912A KR 20240115350 A KR20240115350 A KR 20240115350A
Authority
KR
South Korea
Prior art keywords
coil
output terminal
signals
frequency
variable capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247023912A
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English (en)
Korean (ko)
Inventor
매튜 로웰 탈리
알렉산더 밀러 패터슨
유호우 왕
리처드 에이. 마시
Original Assignee
램 리써치 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 램 리써치 코포레이션 filed Critical 램 리써치 코포레이션
Publication of KR20240115350A publication Critical patent/KR20240115350A/ko
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H01J37/3211—Antennas, e.g. particular shapes of coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/28—Coils; Windings; Conductive connections
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01—Frequency selective two-port networks
    • H03H7/0115—Frequency selective two-port networks comprising only inductors and capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Plasma Technology (AREA)
KR1020247023912A 2021-12-17 2022-12-12 복수의 코일들 사이에 직접-구동 무선 주파수 신호 생성기로부터 전류를 분할하는 (split) 장치 및 방법 Pending KR20240115350A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202163291307P 2021-12-17 2021-12-17
US63/291,307 2021-12-17
PCT/US2022/052563 WO2023114143A1 (en) 2021-12-17 2022-12-12 Apparatus and method for splitting current from direct-drive radiofrequency signal generator between multiple coils

Publications (1)

Publication Number Publication Date
KR20240115350A true KR20240115350A (ko) 2024-07-25

Family

ID=86773346

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247023912A Pending KR20240115350A (ko) 2021-12-17 2022-12-12 복수의 코일들 사이에 직접-구동 무선 주파수 신호 생성기로부터 전류를 분할하는 (split) 장치 및 방법

Country Status (4)

Country Link
US (1) US20250174431A1 (https=)
JP (1) JP2024543727A (https=)
KR (1) KR20240115350A (https=)
WO (1) WO2023114143A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240395503A1 (en) * 2021-09-17 2024-11-28 Lam Research Corporation Symmetric Coupling of Coil to Direct-Drive Radiofrequency Power Supplies

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5800532B2 (ja) * 2011-03-03 2015-10-28 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ処理方法
TW201405627A (zh) * 2012-07-20 2014-02-01 Applied Materials Inc 具有同軸ｒｆ饋送及同軸遮罩之對稱的感應性耦合電漿源
KR101522891B1 (ko) * 2014-04-29 2015-05-27 세메스 주식회사 플라즈마 발생 유닛 및 그를 포함하는 기판 처리 장치
US10297422B2 (en) * 2015-11-04 2019-05-21 Lam Research Corporation Systems and methods for calibrating conversion models and performing position conversions of variable capacitors in match networks of plasma processing systems
KR101817210B1 (ko) * 2016-08-01 2018-01-15 세메스 주식회사 플라즈마 발생 장치, 그를 포함하는 기판 처리 장치, 및 그 제어 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240395503A1 (en) * 2021-09-17 2024-11-28 Lam Research Corporation Symmetric Coupling of Coil to Direct-Drive Radiofrequency Power Supplies
US12482634B2 (en) * 2021-09-17 2025-11-25 Lam Research Corporation Symmetric coupling of coil to direct-drive radiofrequency power supplies

Also Published As

Publication number Publication date
US20250174431A1 (en) 2025-05-29
JP2024543727A (ja) 2024-11-22
WO2023114143A1 (en) 2023-06-22

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PA0105 International application

Patent event date: 20240716

Patent event code: PA01051R01D

Comment text: International Patent Application

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