KR20240101566A - 패드리스 스택 비아에 대한 리세스 구조물 - Google Patents

패드리스 스택 비아에 대한 리세스 구조물 Download PDF

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Publication number
KR20240101566A
KR20240101566A KR1020247014038A KR20247014038A KR20240101566A KR 20240101566 A KR20240101566 A KR 20240101566A KR 1020247014038 A KR1020247014038 A KR 1020247014038A KR 20247014038 A KR20247014038 A KR 20247014038A KR 20240101566 A KR20240101566 A KR 20240101566A
Authority
KR
South Korea
Prior art keywords
stacked
recess
vias
layer
electrically coupled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247014038A
Other languages
English (en)
Korean (ko)
Inventor
홍복 위
호안 레이 빌라르바 부오트
아니켓 파틸
Original Assignee
퀄컴 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 퀄컴 인코포레이티드 filed Critical 퀄컴 인코포레이티드
Publication of KR20240101566A publication Critical patent/KR20240101566A/ko
Pending legal-status Critical Current

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Classifications

    • H01L23/49822—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • H10W70/685—Shapes or dispositions thereof comprising multiple insulating layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/20—Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
    • H01L21/4857—
    • H01L23/481—
    • H01L23/49838—
    • H01L23/49866—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/021—Manufacture or treatment of interconnections within wafers or substrates
    • H10W20/023—Manufacture or treatment of interconnections within wafers or substrates the interconnections being through-semiconductor vias
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/071—Manufacture or treatment of dielectric parts thereof
    • H10W20/081—Manufacture or treatment of dielectric parts thereof by forming openings in the dielectric parts
    • H10W20/082—Manufacture or treatment of dielectric parts thereof by forming openings in the dielectric parts the openings being tapered via holes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01—Manufacture or treatment
    • H10W70/05—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/65—Shapes or dispositions of interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/66—Conductive materials thereof

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  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
KR1020247014038A 2021-11-18 2022-10-25 패드리스 스택 비아에 대한 리세스 구조물 Pending KR20240101566A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17/455,576 2021-11-18
US17/455,576 US12230552B2 (en) 2021-11-18 2021-11-18 Recess structure for padless stack via
PCT/US2022/078641 WO2023091846A1 (en) 2021-11-18 2022-10-25 Recess structure for padless stack via

Publications (1)

Publication Number Publication Date
KR20240101566A true KR20240101566A (ko) 2024-07-02

Family

ID=84389276

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247014038A Pending KR20240101566A (ko) 2021-11-18 2022-10-25 패드리스 스택 비아에 대한 리세스 구조물

Country Status (7)

Country Link
US (1) US12230552B2 (https=)
EP (1) EP4434083A1 (https=)
JP (1) JP2024543081A (https=)
KR (1) KR20240101566A (https=)
CN (1) CN118215994A (https=)
TW (1) TW202339155A (https=)
WO (1) WO2023091846A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12198977B2 (en) * 2022-05-24 2025-01-14 Nanya Technology Corporation Manufacturing method of semiconductor structure having elastic member within via
US20250248034A1 (en) * 2024-01-29 2025-07-31 Sandisk Technologies Llc Three-dimensional memory device with a staircase isolation ridge and methods of forming the same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6689985B2 (en) * 2001-01-17 2004-02-10 Orbotech, Ltd. Laser drill for use in electrical circuit fabrication
JP2007042662A (ja) 2003-10-20 2007-02-15 Renesas Technology Corp 半導体装置
JP5014632B2 (ja) 2006-01-13 2012-08-29 ルネサスエレクトロニクス株式会社 半導体装置および半導体装置の製造方法
KR101412225B1 (ko) * 2012-08-10 2014-06-25 이비덴 가부시키가이샤 배선판 및 그 제조 방법
US9281242B2 (en) * 2012-10-25 2016-03-08 Nanya Technology Corp. Through silicon via stacked structure and a method of manufacturing the same
US9627318B2 (en) 2014-06-16 2017-04-18 Taiwan Semiconductor Manufacturing Company Ltd. Interconnect structure with footing region
US10325855B2 (en) 2016-03-18 2019-06-18 Qualcomm Incorporated Backside drill embedded die substrate
KR102681797B1 (ko) 2018-12-04 2024-07-03 삼성전자주식회사 비휘발성 메모리 장치 및 그 제조 방법
US11362035B2 (en) 2020-03-10 2022-06-14 Taiwan Semiconductor Manufacturing Company, Ltd. Diffusion barrier layer for conductive via to decrease contact resistance

Also Published As

Publication number Publication date
US20230154829A1 (en) 2023-05-18
CN118215994A (zh) 2024-06-18
US12230552B2 (en) 2025-02-18
WO2023091846A1 (en) 2023-05-25
TW202339155A (zh) 2023-10-01
JP2024543081A (ja) 2024-11-19
EP4434083A1 (en) 2024-09-25

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Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000