KR20240078141A - Overhead hoist transport - Google Patents

Abstract

The technical idea of the present invention is to include: a conveyed material transport vehicle having a space for transporting and loading the transported material, and including a running wheel, a guide wheel, and a steering wheel; a running rail that provides a movement path for the cargo transport vehicle and is disposed along the ceiling of the semiconductor manufacturing line; A measurement sensor attached to the cargo transport vehicle and measuring a running state of the cargo transport vehicle; and a system configured to receive the measured value of the measurement sensor, wherein the traveling rail includes at least one traveling section of a straight section, a curved section, and a branch section, and the system is configured to transmit the cargo transport vehicle on the traveling rail. An overhead hoist transport device is provided, configured to determine whether a particular wheel is delaminated.

Description

Overhead hoist transport device {Overhead hoist transport}

The technical idea of the present invention relates to an overhead hoist transfer device, and more specifically, to an overhead hoist transfer device that can determine whether or not a wheel is separated.

The production process of semiconductor products involves hundreds of processes to reach the finished product, and hundreds of thousands of logistics movements occur during the semiconductor manufacturing process. In order to prevent contamination and damage to semiconductor materials and delivery accidents during this logistics transfer process, the semiconductor manufacturing line uses an overhead hoist transfer device as an automated logistics transfer system. The overhead hoist transfer device is a system that automates logistics transfer between numerous semiconductor processes. It is responsible for transporting wafers contained in Front Opening Unified Pod (FOUP) along rails installed on the ceiling to manufacturing facilities for each production process.

The problem to be solved by the technical idea of the present invention is to provide an overhead hoist transport device that can determine the driving section of a conveyed material transport vehicle and determine whether or not the wheels are separated.

The problem to be solved by the technical idea of the present invention is to provide an overhead hoist transport device that can determine whether a specific wheel is peeled depending on the driving section of the cargo transport vehicle.

In addition, the problem to be solved by the technical idea of the present invention is not limited to the problems mentioned above, and other problems can be clearly understood by those skilled in the art from the description below.

In order to solve the above problems, the technical idea of the present invention is to include: a cargo transport vehicle having a space for transporting and loading cargo, and including a running wheel, a guide wheel, and a steering wheel; a running rail that provides a movement path for the cargo transport vehicle and is disposed along the ceiling of the semiconductor manufacturing line; A measurement sensor attached to the cargo transport vehicle and measuring a running state of the cargo transport vehicle; and a system configured to receive the measured value of the measurement sensor, wherein the traveling rail includes at least one traveling section of a straight section, a curved section, and a branch section, and the system is configured to transmit the cargo transport vehicle on the traveling rail. An overhead hoist transport device is provided, configured to determine whether a particular wheel is delaminated.

In one embodiment of the present invention, the measurement sensor can measure the speed, vibration, and torque of the cargo transport vehicle.

In one embodiment of the present invention, the axis perpendicular to the ceiling is the Z axis, the curved section is a section in which the transported material transport vehicle rotates clockwise or counterclockwise about the Z axis, and the branch section is a section where the transported material is transported. This may be a section in which the vehicle rotates clockwise and counterclockwise at intervals based on the Z-axis.

In one embodiment of the present invention, the system may be configured to determine a section of the traveling rail along which the cargo transport vehicle travels.

In one embodiment of the present invention, the axis perpendicular to the ceiling is the Z axis, the measurement sensor is configured to measure the rotation direction of the cargo transport vehicle with respect to the Z axis, and the system is configured to measure the rotation direction of the cargo transport vehicle with respect to the rotation direction. It may be configured to determine the section of the traveling rail along which the transport vehicle travels.

In one embodiment of the present invention, whether the traveling wheel, the guide wheel, and the steering wheel rotate may be different for each straight section, the curved section, and the branch section of the cargo transport vehicle.

In one embodiment of the present invention, the system determines whether the traveling wheel is delaminated when the transported material transport vehicle travels in the straight section, and determines whether the guide wheel is delaminated when the transported material transport vehicle travels in the curved section. It is possible to determine whether the steering wheel is separated when the cargo transport vehicle travels the branch section.

In one embodiment of the present invention, the system is configured to store driving standard information of the driving section, and the system compares the measured value of the measurement sensor with the driving standard information to determine whether the wheel of the cargo transport vehicle is delaminated. It can be configured to judge.

In order to solve the above problem, the technical idea of the present invention is to include a plurality of cargo transport vehicles having a space for transporting and loading cargo, and including a running wheel, a guide wheel, and a steering wheel; a running rail that provides a movement path for the cargo transport vehicle and is disposed along the ceiling of the semiconductor manufacturing line; a plurality of measurement sensors attached to the plurality of different cargo transport vehicles to measure driving conditions of the plurality of cargo transport vehicles in real time; a server that transmits and receives a plurality of measurement values from the plurality of measurement sensors; and a system configured to receive the plurality of measurement values from the server, wherein the traveling rail includes at least one of a straight section, a curved section, and a branch section, and the system is configured to receive the plurality of measurement values from the server. An overhead hoist transport device configured to determine whether a specific wheel of a plurality of conveyance transport vehicles is delaminated is provided.

In one embodiment of the present invention, the server and the system are located apart from the plurality of cargo transport vehicles, and the plurality of measurement sensors and the server can wirelessly transmit and receive the plurality of measurement values.

In one embodiment of the present invention, the system may be configured to monitor the driving status of the plurality of cargo transport vehicles in real time.

In one embodiment of the present invention, the system may be configured to generate a driving reference value of the driving section and calculate the driving reference value and each of the plurality of measurement values to generate residual data.

In one embodiment of the present invention, the system may be configured to visualize the residual data to determine whether a particular wheel of the plurality of cargo transport vehicles is delaminated.

In one embodiment of the present invention, the system includes a variant auto-encoder, and the system may be configured to determine whether a specific wheel of the plurality of conveyance transport vehicles is delaminated through the variant auto-encoder.

In one embodiment of the present invention, the traveling wheel may be connected to a drive and driven, and the guide wheel and the steering wheel may be configured to rotate in contact with the traveling rail.

In order to solve the above problem, the technical idea of the present invention is to include a plurality of cargo transport vehicles having a space for transporting and loading cargo, and including a running wheel, a guide wheel, and a steering wheel; a running rail that provides a movement path for the conveyed material transport vehicle and includes a straight section, a curved section, and a branch section along the ceiling of the semiconductor manufacturing line; a plurality of measurement sensors attached to the plurality of different cargo transport vehicles to measure speed, vibration and torque of the plurality of cargo transport vehicles in real time; a server that transmits and receives a plurality of measurement values from the plurality of measurement sensors; A system configured to receive the plurality of measurement values from the server and monitor the driving status of the plurality of driving vehicles in real time, wherein the server and the system are located spaced apart from the plurality of cargo transport vehicles, and the system Provides an overhead hoist transfer device configured to determine whether a specific wheel of the plurality of conveyance transport vehicles is delaminated for each section of the traveling rail.

The overhead hoist transport device according to the technical idea of the present invention can determine the driving section of the cargo transport vehicle through a measurement sensor.

In the overhead hoist transfer device according to the technical idea of the present invention, the wheel in contact with the travel rail changes depending on the travel section of the transport vehicle. Using these characteristics, it is possible to determine whether a specific wheel is delaminated depending on the driving section.

1 is a conceptual diagram schematically showing an overhead hoist transfer device according to an embodiment of the present invention.
Figures 2 and 3 are configuration diagrams showing the overhead hoist transfer device of Figure 1 in more detail.
Figure 4 is a graph showing the change in the angular velocity of Yaw over time of the cargo transport vehicle of the overhead hoist transport device according to an embodiment of the present invention.
FIG. 5 is a conceptual diagram showing the driving state of a cargo transport vehicle in a curved section of the overhead hoist transport device of FIG. 1.
Figure 6 is a graph showing the change in the angular velocity of Yaw over time of the cargo transport vehicle of the overhead hoist transport device according to an embodiment of the present invention.
FIG. 7 is a conceptual diagram showing the driving state of the cargo transport vehicle in the branch section of the overhead hoist transport device of FIG. 1.
Figure 8 is a flow chart schematically showing the procedure for determining whether or not a wheel is separated in the overhead hoist transfer device system according to an embodiment of the present invention.
Figure 9 is a conceptual diagram schematically showing an overhead hoist transfer device according to an embodiment of the present invention.
Figures 10 and 11 are configuration diagrams showing the overhead hoist transfer device of Figure 9 in more detail.
FIG. 12 is a conceptual diagram schematically showing a method of determining whether or not a wheel is separated in the system of the overhead hoist transfer device of FIG. 9.
FIG. 13 is a graph visualizing residual data of the overhead hoist transfer device of FIG. 9.
Figure 14 is a flowchart schematically showing the procedure for determining whether or not a wheel is separated in the overhead hoist transfer device system according to an embodiment of the present invention.

The terms used in the present embodiments were selected as widely used general terms as possible while considering the functions in the present embodiments, but this may vary depending on the intention or precedent of a technician working in the field, the emergence of new technology, etc. there is. In addition, in certain cases, there are terms arbitrarily selected by the applicant, and in this case, the meaning will be described in detail in the relevant section. Therefore, the terms used in the present embodiments should not be defined simply as the names of the terms, but should be defined based on the meaning of the term and the overall content of the present embodiments.

Since these embodiments can be subject to various changes and have various forms, some embodiments will be illustrated in the drawings and described in detail. However, this is not intended to limit the present embodiments to a specific disclosure form, and should be understood to include all changes, equivalents, and substitutes included in the spirit and technical scope of the present embodiments. The terms used in this specification are merely used to describe the embodiments and are not intended to limit the embodiments.

1 is a conceptual diagram schematically showing an overhead hoist transfer device according to an embodiment of the present invention. Figures 2 and 3 are configuration diagrams showing the overhead hoist transfer device of Figure 1 in more detail.

Referring to FIGS. 1 to 3 , the overhead hoist transfer device 10 may include a cargo transport vehicle 100, a traveling rail 200, a measurement sensor 500, and a system 600.

Hereinafter, the direction in which the traveling rail 200 extends is defined as the X direction, the direction perpendicular to the X direction is defined as the Y direction, and the direction perpendicular to each of the X and Y directions is defined as the Z direction. That is, the Z-axis may be an axis perpendicular to the ceiling.

The cargo transport vehicle 100 of the overhead hoist transfer device 10 may have a space where the cargo is transferred. The cargo transport vehicle 100 may be configured to transport cargo. The conveyed material includes wafers, glass substrates, printed circuit boards, semiconductor devices, display devices, etc. used in the manufacturing process of semiconductor devices or display devices.

The cargo transport vehicle 100 may include a traveling module 110 and an elevating module 120. The traveling module 110 may allow the cargo transport vehicle 100 to move on the traveling rail 200 . The lifting module 120 may be configured to be connected to the bottom of the traveling module 110 in a suspended manner through a rotating shaft. According to exemplary embodiments, the lifting module 120 may be configured so that containers containing substrates can move up and down.

The travel module 110 may include a travel wheel 111, a guide wheel 112, and a steering wheel 113. The traveling wheel 111 may be connected to a motor to provide power so that the cargo transport vehicle 100 can travel. The guide wheel 112 may rotate in contact with the traveling rail 200 when the cargo transport vehicle 100 travels in the curved section C_2. When the cargo transport vehicle 100 selects a route in the branch section C_3, the steering wheel 113 may move in the Y-axis direction and rotate in contact with the traveling rail 200 of the set route. In other words, the traveling wheel 111 is a wheel that provides power to the cargo transport vehicle 100 and can contact the traveling rail 200 in all sections (C_1, C_2, C_3). The guide wheel 112 may contact the curved section C_2 of the traveling rail 200. The steering wheel 113 may contact the branch section C_3 of the traveling rail 200.

In some embodiments, the cargo transport vehicle 100 determines whether the traveling wheel 111, the guide wheel 112, and the steering wheel 113 rotate for each straight section (C_1), curved section (C_2), and branch section (C_3). may be different. In other words, the cargo transport vehicle 100 has a running wheel 111, a guide wheel 112, and a steering wheel 113 along the straight section (C_1), the curved section (C_2), and the branch section (C_3). (200) may vary. In some embodiments, when the cargo transport vehicle 100 travels in a straight section C_1, the traveling wheel 111 may contact the traveling rail 200. When the cargo transport vehicle 100 travels in the curved section C_2, the traveling wheel 111 and the guide wheel 112 may contact the traveling rail 200. When the cargo transport vehicle 100 travels in the branch section C_3, the traveling wheel 111 and the steering wheel 113 may contact the traveling rail 200.

The traveling rail 200 of the overhead hoist transport device 10 may be configured to provide a movement path for transporting the transported object to the manufacturing facility 11. The traveling rail 200 may provide a movement path for the cargo transport vehicle 100. Additionally, the traveling rail 200 may be provided along the ceiling of the semiconductor manufacturing line, and its shape may vary depending on the arrangement of the manufacturing equipment 11.

The traveling rail 200 may include at least one traveling section among a straight section (C_1), a curved section (C_2), and a branching section (C_3). The straight section C_1 may be a section in which the traveling rail 200 has no curvature. The curved section C_2 may be a section in which the traveling rail 200 has a curvature. The branch section C_3 may be a section in which the traveling rail 200 is divided into a plurality of paths. In some embodiments, the branch section may be in the form of a Y-shaped branch or a T-shaped branch.

In other words, the straight section C_1 may be a section in which the cargo transport vehicle 100 does not rotate about the Z-axis. The curved section C_2 may be a section in which the cargo transport vehicle 100 rotates clockwise or counterclockwise about the Z-axis. The branch section (C_3) may be a section in which the cargo transport vehicle rotates clockwise and counterclockwise about the Z axis. That is, the angle at which the cargo transport vehicle 100 rotates about the Z axis in the curved section (C_2) has one peak value, and the angle at which the cargo transport vehicle 100 rotates about the Z axis in the branch section has two peak values. You can have it.

The measurement sensor 500 of the overhead hoist transfer device 10 may be attached to the cargo transfer vehicle 100. In some embodiments, measurement sensor 500 may be attached to lift module 120 . 2 and 3 illustrate that the measurement sensor 500 is attached to the elevating module 120, but the present invention is not limited thereto, and the measurement sensor 500 may be attached to the travel module 110.

The measurement sensor 500 can measure the driving state of the cargo transport vehicle 100. Specifically, the measurement sensor 500 can measure the speed, vibration, and torque of the cargo transport vehicle 100. That is, the measurement sensor 500 can measure vibration in the X-axis, Y-axis, Z-axis, yaw, pitch, and roll directions of the cargo transport vehicle 100. Yaw refers to the angle of rotation based on the Z axis. The measurement sensor 500 can measure the speed and torque of the front wheels, rear wheels, hoist, and slide directions of the cargo transport vehicle 100. In some embodiments, measurement sensor 500 may include a 6-axis gyro sensor.

In some embodiments, the measurement sensor 500 may measure the direction in which the cargo transport vehicle 100 rotates about the Z-axis. The measurement sensor 500 can obtain the yaw of the cargo transport vehicle 100 by finding the angular velocity of the Yaw of the cargo transport vehicle 100. In some embodiments, when the cargo transport vehicle 100 rotates clockwise, the angular velocity of Yaw has a positive peak value, and when the cargo transport vehicle 100 rotates counterclockwise, the angular velocity of Yaw may have a negative peak value. .

The system 600 of the overhead hoist transport device 10 may receive measurement values from the measurement sensor 500. In some embodiments, the system 600 may be located in the cargo transport vehicle 100 and connected to the measurement sensor 500 by wire. 2 and 3 , the system 600 is illustrated as being located in the cargo transport vehicle 100, but the system 600 is not limited thereto, and the system 600 may be located spaced apart from the cargo transport vehicle 100.

System 600 may be implemented in hardware, firmware, software, or any combination thereof. For example, system 600 may be a computing device, such as a workstation computer, desktop computer, laptop computer, tablet computer, etc. The system 600 may be a complex processor such as a microprocessor, CPU, GPU, etc., a processor configured by software, dedicated hardware, or firmware. In some embodiments, system 600 may be implemented by a general-purpose computer or application-specific hardware, such as a digital signal processor (DSP), field programmable gate array (FPGA), and application specific integrated circuit (ASIC).

In some embodiments, the operations of system 600 may be implemented as instructions stored on a machine-readable medium that can be read and executed by one or more processors. Here, machine-readable media may include any mechanism for storing and/or transmitting information in a form readable by a machine (e.g., computing device). For example, machine-readable media may include read only memory (ROM), random access memory (RAM), magnetic disk storage media, optical storage media, flash memory devices, electrical, optical, acoustic, or other forms of radio signals ( For example, carrier waves, infrared signals, digital signals, etc.) and other arbitrary signals.

The system 600 may determine whether the wheels of the cargo transport vehicle 100 are separated in the traveling section of the traveling rail 200. That is, the system 600 may determine whether a specific wheel is separated in at least one of the straight section C_1, the curved section C_2, and the branch section C_3 of the traveling rail 200. In some embodiments, the system 600 may determine whether the traveling wheel 111 is delaminated in the straight section C_1. System 600 may determine whether the guide wheel 112 is separated in the curved section C_2. The system 600 may determine whether the steering wheel 123 is separated in the branch section C_3.

The system 600 can determine the sections (C_1, C_2, C_3) of the traveling rail 200 on which the cargo transport vehicle 100 is traveling through the measured value of the measurement sensor 500. This will be described later with reference to FIGS. 4 to 7.

The system 600 may store driving standard information of the straight section (C_1), the curved section (C_2), and the branch section (C_3). That is, the system 600 stores in advance at least one of the driving standard information of the straight section (C_1), the driving standard information of the curved section (C_2), and the driving standard information of the branch section (C_3) in the database. You can.

The system 600 may compare the driving standard information and the measurement value of the measurement sensor 500 to determine whether the wheels of the cargo transport vehicle 100 are delaminated. Specifically, the measurement value that combines the vibration, speed, and torque values of the cargo transport vehicle 100 measured by the measurement sensor 500 can be compared with the driving standard information. If the difference between the measured value and the driving standard information is within the error range, the system 600 may determine that the wheels of the cargo transport vehicle 100 are in contact with the driving rail 200. If the difference between the measured value and the driving standard information exceeds the error range, the system 600 may determine that the wheels and driving rails 200 of the cargo transport vehicle 100 are separated. This will be described later with reference to FIG. 8.

The overhead hoist transfer device 10 of the present invention can determine whether the wheels of the moving cargo transfer vehicle 100 are delaminated through the system 600. In other words, it is possible to determine whether the wheel of the cargo transport vehicle 100 is delaminated and respond to this without regular inspection by the operator. In addition, there was an error in the normal judgment of wheel detachment because the worker visually checked it, but the overhead hoist transfer device 10 of the present invention determines wheel detachment through the system 600 and accurately determines wheel detachment. can do.

Figure 4 is a graph showing the change in the angular velocity of Yaw over time of the cargo transport vehicle of the overhead hoist transport device according to an embodiment of the present invention. FIG. 5 is a conceptual diagram showing the driving state of a cargo transport vehicle in a curved section of the overhead hoist transport device of FIG. 1.

Figure 6 is a graph showing the change in angular velocity of Yaw over time of the cargo transport vehicle of the overhead hoist transport apparatus according to an embodiment of the present invention. FIG. 7 is a conceptual diagram showing the driving state of the cargo transport vehicle in the branch section of the overhead hoist transport device of FIG. 1.

Hereinafter, with reference to FIGS. 4 to 7 , a process in which the system determines the section of the traveling rail on which the cargo transport vehicle is traveling will be described through the measured value of the measurement sensor.

Figure 4 is a graph where the X-axis represents the passage time of the curved section, and the Y-axis represents the angular velocity of Yaw. In Figure 4, the angular velocities of time and Yaw are expressed based on arbitrary units.

Figure 6 is a graph where the X-axis represents the branch section passage time and the Y-axis represents the angular velocity of Yaw. In Figure 6, the angular velocities of time and Yaw are expressed based on arbitrary units.

Referring to FIGS. 4 and 5 , in the curved section C_2, the second cargo transport vehicle 100_2 may rotate clockwise or counterclockwise about the Z axis. In other words, a graph showing the change in the angular velocity of Yaw of the second cargo transport vehicle 100_2 over time may have one peak value.

In some embodiments, the measurement sensor may measure the number of peaks of the angular velocity of Yaw over time by measuring the angular velocity of Yaw of the second cargo transport vehicle 100_2. That is, the measurement sensor may measure the number of peaks of the angular velocity of Yaw over time. That is, the measurement sensor may measure the number of peaks of the angular velocity of Yaw over time. If the angular velocity of Yaw (100) is measured and the peak number is one, the cargo transport vehicle may be traveling in a curved section.

Referring to FIGS. 6 and 7 , in the branch section C_3, the third cargo transport vehicle 100_3 may rotate clockwise and counterclockwise with intervals based on the Z axis.

In other words, until entering and exiting the branch section C_3, the third cargo transport vehicle 100_3 may rotate clockwise and counterclockwise at least once with an interval based on the Z axis.

That is, a graph showing the change in the angular velocity of Yaw of the third cargo transport vehicle 100_3 over time may have at least two peak values. In some embodiments, the measurement sensor may measure the Yaw angular velocity of the third cargo transport vehicle 100_3 and measure the peak number of the Yaw angular velocity over time. That is, if the measurement sensor measures the Yaw angular velocity of the cargo transport vehicle (100 in FIG. 1) and the number of peaks is two or more, the cargo transport vehicle may be traveling in a branch section.

Referring to Figures 1 to 7, the system 600 of the overhead hoist transfer device 10 has a traveling rail 200 on which the cargo transport vehicle 100 travels a straight section (C_1), a curved section (C_2), It is possible to determine which section is the branch section (C_3). Specifically, based on the angular velocity value of Yaw measured by the measurement sensor 500, the system 600 determines that the traveling rail 200 on which the cargo transport vehicle 100 travels has a straight section (C_1), a curved section (C_2), and the branch section (C_3).

In some embodiments, through the Z-axis rotation direction of the cargo transport vehicle 100 measured by the measurement sensor 500, the system 600 determines whether the cargo transport vehicle 100 is in a straight section (C_1) or a curved section (C_2). ), and the branch section (C_3) can be determined which section is being driven. That is, when the cargo transport vehicle 100 does not rotate for a certain period of time, the system 600 may determine that the cargo transport vehicle 100 travels in a straight section C_1. If the cargo transport vehicle 100 rotates only clockwise or counterclockwise for a certain period of time, the system 600 may determine that the cargo transport vehicle 100 travels in the curved section C_2. When the cargo transport vehicle 100 rotates clockwise and counterclockwise at intervals for a certain period of time, the system 600 may determine that the cargo transport vehicle 100 travels in the branch section C_3.

In some embodiments, the system 600 may determine that the cargo transport vehicle 100 travels in a straight section C_1 when the peak number of Yaw is 0 during a certain period of time measured by the measurement sensor 500. If the peak number of Yaw is one during a certain period of time measured by the measurement sensor 500, the system 600 may determine that the cargo transport vehicle 100 is traveling in the curved section C_2. If the number of Yaw peaks during a certain period of time measured by the measurement sensor 500 is two or more, the system 600 may determine that the cargo transport vehicle 100 is traveling in the branch section C_3.

The overhead hoist transfer device 10 of the present invention can determine whether the wheels of the moving cargo transfer vehicle 100 are delaminated through the system 600. In other words, it is possible to determine whether the wheel of the cargo transport vehicle is delaminated and respond to this without regular inspection by the user. In addition, in general, the determination of whether the wheel is delaminated is checked with the operator's eyes, and there is an error depending on the operator, but the overhead hoist transfer device of the present invention determines whether the wheel is delaminated through the system, and can accurately determine whether the wheel is delaminated. .

Figure 8 is a flowchart schematically showing the procedure for determining whether or not a wheel is separated in the overhead hoist transfer device system according to an embodiment of the present invention.

Hereinafter, with reference to FIG. 8, a process in which the system determines whether the wheels of the system cargo transport vehicle are separated through the measured values of the measurement sensor will be described.

Referring to FIGS. 1 to 8 , in the process of determining whether the wheel of the hoist transport device is separated (S10), first, the cargo transport vehicle 100 travels on the traveling rail 200 (S11). While driving, the measurement sensor 500 can measure the driving state of the cargo transport vehicle 100. In one embodiment, the measurement sensor 500 may measure vibration, speed, and torque of the cargo transport vehicle 100.

The measured value of the measurement sensor 500 is transmitted to the system 600 (S12). Based on the received measurement value, the system 600 determines which of the straight section (C_1), curved section (C_2), and branch section (C_3) of the travel rail 200 the cargo transport vehicle 100 is traveling on. Do it (S13). In some embodiments, the system 600 may determine the section of the traveling rail 200 on which the cargo transport vehicle 100 is traveling based on the Yaw angular velocity measurement value of the measurement sensor 500.

The system can store the measured values as driving standard information by driving the conveyance transport vehicle 100, where the driving wheel 111, guide wheel 112, and steering wheel 113 are in normal contact with the driving rail 200. there is. That is, by measuring the measured value by driving the cargo transport vehicle 100 in which all wheels 111, 112, and 113 are in a normal state in advance, the system 600 operates in the straight section (C_1), the curved section (C_2), and Driving standard information for at least one of the branch sections (C_3) may be stored.

System 600 compares the stored driving standard information with the received measurement value and calculates the difference. If the difference between the driving standard information and the measured value is within the error range, the system 600 determines that the specific wheel of the cargo transport vehicle 100 is in a normal state, and if the difference between the driving standard information and the measured value exceeds the error range, The system 600 determines that a specific wheel of the cargo transport vehicle 100 is in a peeling state (S14).

In some embodiments, the system 600 determines which of the straight section (C_1), curved section (C_2), and branch section (C_3) of the travel rail 200 the transport vehicle 100 travels through the measurement values. You can decide whether to do it or not. If the measured value and driving standard information exceed the error range in the straight section (C_1), the system 600 may determine that the driving wheel 111 is in a peeling state. If the measured value and driving standard information exceed the error range in the curved section (C_2), the system 600 may determine that the guide wheel 112 is in a peeling state. If the measured value and driving standard information exceed the error range in the branch section (C_3), the system 600 may determine that the steering wheel 113 is in a peeling state.

Specifically, the system 600 may determine the section of the traveling rail 200 on which the cargo transport vehicle 100 is traveling based on the measured value. Wheels that affect the measured value may vary depending on the type of wheel combined depending on the section of the traveling rail 200. Accordingly, the measured value can be used to determine whether a specific wheel is delaminated for each section. In some embodiments, the guide wheel 112 and the traveling wheel 111 rotate in the curved section C_2, and the measurement value measured in the curved section C_2 may be used to determine whether the guide wheel 112 is peeled.

Specifically, the system 600 determines that the cargo transport vehicle 100 is traveling in a straight section (C_1) through the measurement value, and compares the measurement value with the driving standard information of the straight section (C_1) to determine the driving wheel 111. It is possible to determine whether or not there is delamination. The system 600 determines that the cargo transport vehicle 100 is driving in the curved section (C_2) through the measured value, and compares the measured value with the driving standard information in the curved section (C_2) to determine whether the guide wheel 112 is delaminated. can be judged. The system 600 determines that the cargo transport vehicle 100 is driving in the branch section (C_3) through the measured value, and compares the measured value with the driving standard information of the branch section (C_3) to determine whether the steering wheel 113 is delaminated. can be judged.

In some embodiments, through measurements of the first cargo transport vehicle 100_1 traveling in the straight section C_1, the system 600 determines whether the traveling wheel 111 of the first cargo transport vehicle 100_1 is delaminated. can do. Through the measurement value of the second cargo transport vehicle 100_2 traveling in the curved section C_2, the system 600 can determine whether the guide wheel 112 of the second cargo transport vehicle 100_2 is peeled. Through the measurement value of the third cargo transport vehicle 100_3 running in the branch section C_3, the system can determine whether the steering wheel 113 of the third cargo transport vehicle 100_3 is delaminated.

Figure 9 is a conceptual diagram schematically showing an overhead hoist transfer device according to an embodiment of the present invention. Figures 10 and 11 are configuration diagrams showing the overhead hoist transfer device of Figure 9 in more detail. FIG. 12 is a conceptual diagram schematically showing a method for determining whether or not a wheel is separated in the system of the overhead hoist transfer device of FIG. 9. FIG. 13 is a graph visualizing residual data of the overhead hoist transfer device of FIG. 9.

Hereinafter, overlapping content between the overhead hoist transfer device 20 of FIG. 9 and the overhead hoist transfer device (10 of FIG. 1) of FIG. 1 will be omitted and the differences will be described.

9 to 13, the overhead hoist transfer device 20 includes a plurality of cargo transport vehicles 100a, a traveling rail 200, a plurality of measurement sensors 500, a server 300, and a system 400. may include

In some embodiments, the plurality of cargo transport vehicles 100a may include the cargo transport vehicle 100 of FIG. 1 (FIG. 1). In some embodiments, the running rail 200 may include the running rail of FIG. 1 (200 in FIG. 1).

The plurality of measurement sensors 500 of the overhead hoist transfer device 20 may be attached to a plurality of different cargo transport vehicles 100a. The plurality of measurement sensors 500 can measure the driving conditions of a plurality of different cargo transport vehicles 100a in real time. Specifically, the plurality of measurement sensors 500 may measure the speed, vibration, and torque of a plurality of different cargo transport vehicles 100a. That is, each of the plurality of measurement sensors 500 can measure vibration in the X-axis, Y-axis, Z-axis, Yaw, Pitch, and Roll directions of the attached cargo transport vehicle, and the front wheels of the attached transport vehicle, The speed and torque of the rear wheel, hoist, and slide directions can be measured. In some embodiments, the plurality of measurement sensors 500 may include a 6-axis gyro sensor. In some embodiments, the plurality of measurement sensors 500 may include the measurement sensor (121 in FIG. 1) of FIG. 1.

The server 300 of the overhead hoist transfer device 20 may transmit and receive a plurality of measurement values from a plurality of measurement sensors 500. The server 300 may receive a plurality of measurement values from a plurality of measurement sensors 500 and transmit a plurality of measurement values to the system 400. The server 300 may be located spaced apart from the plurality of cargo transport vehicles 100a. In some embodiments, a plurality of measurement values measured by a plurality of measurement sensors 500 may be transmitted to one system 400 through a server. That is, the overhead hoist transfer device 20 may include an Internet of Things (IoT) environment through the server 300. The measurement sensor 500 and system 400 can transmit and receive information wirelessly with the server 300. That is, the overhead hoist transfer device 20 can determine in real time whether the wheels of the plurality of cargo transfer vehicles 100a are separated.

System 400 of overhead hoist transport device 20 may receive a plurality of measurements from server 300. In some embodiments, the system 400 may be positioned spaced apart from the plurality of cargo transport vehicles 100a.

The system 400 may determine whether a specific wheel of the plurality of cargo transport vehicles 100a is separated in a section of the traveling rail 200. Specifically, the system 400 determines whether a specific wheel of the cargo transport vehicle is delaminated in at least one of the straight section (C_1), curved section (C_2), and branch section (C_3) of the traveling rail 200. can do. In some embodiments, the system 400 may determine whether the traveling wheel 111 of the transport vehicle traveling in the straight section C_1 is delaminated. The system 400 can determine whether the guide wheel 112 of the cargo transport vehicle traveling in the curved section C_2 is delaminated. The system 400 can determine whether the steering wheel 113 of the cargo transport vehicle traveling in the branch section C_3 is delaminated.

System 400 may receive a plurality of measurement values wirelessly through server 300. Accordingly, the system 400 can monitor the driving status of the plurality of cargo transport vehicles 100a in real time. In some embodiments, one system may monitor the speed, vibration, and torque of a plurality of cargo transport vehicles 100a.

The system 400 may determine the driving section of the plurality of cargo transport vehicles 100a based on the plurality of measurement values. In other words, the system 400 determines that each of the plurality of cargo transport vehicles 100a has a straight section (C_1) and a curved section (C_2) based on the plurality of measurement values measured by each of the plurality of cargo transport vehicles (100a). ), and the branch section (C_3) can be determined which section is being driven.

In one embodiment, based on the angular velocity of Yaw among the measured values, the system 400 determines that the sections in which each of the plurality of conveyance transport vehicles 100a travel are a straight section (C_1), a curved section (C_2), and a branch section ( You can determine which section of C_3) is being driven. In some embodiments, based on the change in the angular velocity of Yaw over time among the measured values, the system 400 may determine the section in which each of the plurality of cargo transport vehicles 100a travels. In some embodiments, based on the direction in which each of the plurality of cargo transport vehicles 100a rotates about the Z axis among the measured values, the system 400 determines the section in which each of the plurality of cargo transport vehicles 100a travels. You can judge. In some embodiments, the method by which the system 400 determines the driving section of each of the plurality of cargo transport vehicles 100a is the system described in FIG. 8 (122 in FIG. 2) of the cargo transport vehicle (100 in FIG. 2). A method for determining a driving section may be included.

Based on a plurality of measurement values, the system 400 can determine the section of the traveling rail 200 on which each of the plurality of cargo transport vehicles 100a travels and whether the wheels are separated. In some embodiments, the method by which the system 400 determines whether a specific wheel of each of the plurality of conveyance transport vehicles 100a (100a) is delaminated according to the travel section is performed by the system described in FIG. 8 (122 in FIG. 2) transporting the conveyance according to the travel section. It may include a method for determining whether a specific wheel of a vehicle (100 in FIG. 2) is delaminated.

In some embodiments, the system 400 may generate driving reference values for a straight section (C_1), a curved section (C_2), and a branch section (C_3). In some embodiments, the system 400 may generate the driving reference value of the straight section (C_1), the driving reference value of the curved section (C_2), and the driving reference value of the branch section (C_3) through machine learning. That is, the system 400 can generate a driving reference value for determining whether or not a wheel is delaminated through a plurality of measurement values and the results of whether or not the wheel is delaminated.

In some embodiments, system 400 may calculate a driving reference value and each of a plurality of measurements to generate residual data D_E. Residual data (D_E) may be the difference between the driving reference value and the measured value. If the residual data (D_E) is within the error range, the system 400 may determine a specific wheel to be in a normal state according to the driving section. If the residual data (D_E) exceeds the error range, the system 400 may determine a specific wheel to be in a peeling state (abnormal) depending on the driving section.

Specifically, if the residual data (D_E) of the measured value of the first cargo transport vehicle 100a_1 traveling in the straight section C_1 exceeds the error range, the system 400 determines the driving of the first cargo transport vehicle 100a_1 The wheel 111 may be judged to be in a peeling state. If the residual data (D_E) of the measured value of the second cargo transport vehicle 100a_2 traveling in the curved section C_2 exceeds the error range, the system 400 operates the guide wheel 112 of the second cargo transport vehicle 100a_2. ) can be judged as a state of peeling. If the residual data (D_E) of the measured value of the third cargo transport vehicle (100a_3) traveling in the branch section (C_3) exceeds the error range, the system peels off the steering wheel 113 of the third cargo transport vehicle (100a_3) It can be judged by the condition.

In some embodiments, the system 400 may determine whether a particular wheel of the plurality of transport vehicles 100a is delaminated by visualizing the residual data D_E. Figure 13, which is a partial embodiment, is a graph showing residual data (D_E) by visualizing each section number of a plurality of cargo transport vehicles on the Y-axis and section passage time on the X-axis. Among a plurality of conveyance vehicles, an abnormal conveyance vehicle whose residual data is larger than that of other conveyance vehicles may appear in a different color from the other conveyance vehicles on the graph. In other words, the system may determine that the cargo transport vehicle 100a' for which an abnormal measurement value was measured has a specific wheel detached. In some embodiments, the system may determine that the guide wheel 112 is in a separated state when the cargo transport vehicle 100a' for which an abnormal measurement value is measured travels the curved section C_2.

In some embodiments, system 400 may include a Variational Auto Encoder (VAE). The system 400 can determine whether a specific wheel of the plurality of cargo transport vehicles 100a is delaminated through VAE. That is, the system 400 can learn the driving reference value by utilizing the residual data (D_E). Specifically, the system 400 may learn a driving reference value based on a measurement value in which the residual data (D_E) is within an error range. Thereafter, the system 400 may determine whether a specific wheel of each of the plurality of cargo transport vehicles 100a is delaminated based on the learned driving reference value.

Figure 14 is a flowchart schematically showing the procedure for determining whether or not a wheel is separated in the overhead hoist transfer device system according to an embodiment of the present invention.

Referring to FIGS. 9 to 14 , in the wheel separation determination process of the hoist transport device (S20), first, the cargo transport vehicle travels on the travel rail (S21). While driving, the measurement sensor 500 can measure the driving state of the cargo transport vehicle. In one embodiment, the measurement sensor 500 can measure vibration, speed, and torque of the cargo transport vehicle.

The measured value of the measurement sensor 500 is transmitted to the server 300 (S22). Server 300 transmits the measured value to system 400. In some embodiments, measurement values may be transmitted wirelessly from the measurement sensor 500 to the server 300.

Based on the received measurement value, the system 400 determines which of the straight section (C_1), curved section (C_2), and branch section (C_3) of the travel rail 200 the cargo transport vehicle is traveling (S24 ). In some embodiments, the system 400 may determine the section of the traveling rail 200 on which the cargo transport vehicle is traveling based on the measured value of the Yaw angular velocity of the measurement sensor 500.

The system 400 may store driving reference values of the straight section (C_1), the curved section (C_2), and the branch section (C_3) in advance. In some embodiments, the system 400 may generate at least one driving reference value of the straight section (C_1), the driving reference value of the curved section (C_2), and the driving reference value of the branch section (C_3) through machine learning. there is. That is, the system 400 can generate a driving reference value for determining whether or not a wheel is delaminated through a plurality of measurement values and the results of whether or not the wheel is delaminated.

The system 400 generates residual data (D_E) by calculating a pre-stored driving reference value and each of a plurality of measurement values (S25). Residual data (D_E) may be the difference between the driving reference value and the measured value. The system 400 determines whether the residual data is within the error range (S26).

If the residual data (D_E) is within the error range, the system 400 determines a specific wheel to be in a normal state according to the driving section (S271). After the system 400 determines that a specific wheel is in a normal state, it learns the measured value determined to be in a normal state as a driving reference value and stores a new driving reference value (S272).

If the residual data (D_E) exceeds the error range, the system 400 determines a specific wheel to be in a peeling state (abnormal) according to the driving section (S281).

So far, the present invention has been described with reference to the embodiments shown in the drawings, but these are merely illustrative, and those skilled in the art will understand that various modifications and other equivalent embodiments are possible therefrom. will be. Therefore, the true scope of technical protection of the present invention should be determined by the technical spirit of the attached patent claims.

100: Cargo transport vehicle 200: Travel rail
122, 400: System 300: Server
111: driving wheel 112: guide wheel
113: Steering wheel C_1: Straight section
C_2: Curve section C_3: Branch section

Claims (20)

A conveyed material transport vehicle having a space for transferring and loading the conveyed material and including a traveling wheel, a guide wheel, and a steering wheel;
a running rail that provides a movement path for the cargo transport vehicle and is disposed along the ceiling of the semiconductor manufacturing line;
A measurement sensor attached to the cargo transport vehicle and measuring a running state of the cargo transport vehicle; and
A system configured to receive measurement values from the measurement sensor;
Including,
The traveling rail includes at least one traveling section among a straight section, a curved section, and a branch section;
The system is configured to determine whether a specific wheel of the cargo transport vehicle is delaminated in the driving section,
Overhead hoist transport device. According to claim 1,
The measurement sensor measures the speed, vibration, and torque of the cargo transport vehicle,
Overhead hoist transport device. According to clause 2,
The measurement sensor includes a 6-axis gyro sensor,
Overhead hoist transport device . According to claim 1,
The axis perpendicular to the ceiling is the Z axis,
The curved section is a section in which the cargo transport vehicle rotates clockwise or counterclockwise about the Z-axis,
The branch section is a section in which the cargo transport vehicle rotates clockwise and counterclockwise with intervals based on the Z-axis,
Overhead hoist transport device . According to claim 1,
The system is configured to determine the travel section of the travel rail along which the cargo transport vehicle travels,
Overhead hoist transport device . According to claim 1,
The axis perpendicular to the ceiling is the Z axis,
The measurement sensor is configured to measure the direction of rotation of the cargo transport vehicle with respect to the Z axis,
The system is configured to determine a section of the traveling rail along which the cargo transport vehicle travels based on the rotation direction,
Overhead hoist transport device. According to claim 1,
In the cargo transport vehicle, whether the traveling wheel, the guide wheel, and the steering wheel rotate is different for each straight section, the curved section, and the branch section,
Overhead hoist transport device. According to claim 1,
The system is,
When the cargo transport vehicle travels in the straight section, it is determined whether the traveling wheel is separated,
When the cargo transport vehicle travels in the curved section, it is determined whether the guide wheel is separated,
When the cargo transport vehicle travels the branch section, determining whether the steering wheel is separated,
Overhead hoist transport device. According to claim 1,
The system is configured to store driving standard information of the driving section,
The system is configured to compare the measurement value of the measurement sensor and the driving standard information to determine whether the wheel of the cargo transport vehicle is delaminated,
Overhead hoist transport device. a plurality of conveyance vehicles having a space for transferring and loading conveyed objects and including a traveling wheel, a guide wheel, and a steering wheel;
a running rail that provides a movement path for the cargo transport vehicle and is disposed along the ceiling of the semiconductor manufacturing line;
a plurality of measurement sensors attached to the plurality of different cargo transport vehicles to measure driving conditions of the plurality of cargo transport vehicles in real time;
a server that transmits and receives a plurality of measurement values from the plurality of measurement sensors; and
a system configured to receive the plurality of measurements from the server;
Including,
The traveling rail includes at least one traveling section among a straight section, a curved section, and a branch section,
The system is configured to determine whether a specific wheel of the plurality of conveyance transport vehicles is delaminated in the driving section,
Overhead hoist transport device. According to claim 10,
The server and the system are located spaced apart from the plurality of cargo transport vehicles,
The plurality of measurement sensors and the server wirelessly transmit and receive the plurality of measurement values.
Overhead hoist transport device. According to claim 10,
The system is configured to monitor the driving status of the plurality of cargo transport vehicles in real time,
Overhead hoist transport device. According to claim 10,
The system generates a travel reference value of the travel rail,
Configured to generate residual data by calculating the driving reference value and each of the plurality of measurement values,
Overhead hoist transport device. According to claim 13,
The system is configured to visualize the residual data to determine whether a particular wheel of the plurality of conveyance transport vehicles has delaminated,
Overhead hoist transport device. According to claim 10,
The system includes a variant autoencoder,
The system is configured to determine whether a specific wheel of the plurality of conveyance transport vehicles is delaminated through the variant auto encoder,
Overhead hoist transport device. According to claim 10,
The axis perpendicular to the ceiling is the Z axis,
The plurality of measurement sensors are configured to measure a rotation angle of each of the plurality of cargo transport vehicles with respect to the Z axis,
Based on the number of peaks in the angle during the time passing the section, the system is configured to determine in real time the section of the traveling rail along which the plurality of conveyance transport vehicles travel,
Overhead hoist transport device. According to claim 16,
The system is,
Determining whether the traveling wheel of the conveyed material transport vehicle traveling in the straight section among the plurality of transported material transport vehicles is delaminated,
Determining whether the guide wheel of the cargo transport vehicle traveling in the curved section among the plurality of transport vehicles is delaminated,
Determining whether the guide wheel of the cargo transport vehicle traveling on the curved section among the plurality of transport transport vehicles is delaminated,
Overhead hoist transport device. According to claim 10,
The traveling wheel is connected to a drive and driven,
The guide wheel and the steering wheel are configured to rotate in contact with the running rail,
Overhead hoist transport device. According to claim 10,
The plurality of measurement sensors include a 6-axis gyro sensor that measures vibration, speed, and torque of the plurality of different cargo transport vehicles,
Overhead hoist transport device. a plurality of conveyance vehicles having a space for transferring and loading conveyed objects and including a traveling wheel, a guide wheel, and a steering wheel;
a running rail that provides a movement path for the conveyed material transport vehicle, is disposed along the ceiling of the semiconductor manufacturing line, and includes a straight section, a curved section, and a branch section;
a plurality of measurement sensors attached to the plurality of different cargo transport vehicles to measure speed, vibration and torque of the plurality of cargo transport vehicles in real time;
a server that transmits and receives a plurality of measurement values from the plurality of measurement sensors; and
a system configured to receive the plurality of measurement values from the server and monitor driving conditions of a plurality of driving vehicles in real time;
Including,
The server and the system are located spaced apart from the plurality of cargo transport vehicles,
The system is configured to determine whether a specific wheel of the plurality of conveyance transport vehicles is delaminated for each section of the traveling rail,
Overhead hoist transport device.

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