KR20240048925A - System for Measuring Distance Non Contact Type Using Artificial Intelligence - Google Patents

Abstract

The non-contact distance measurement system using artificial intelligence is a non-contact distance measurement device that implements the distance to the measurement object according to changes in gas pressure through an artificial intelligence neural network, making the device configuration uncomplicated and improving distance measurement precision to increase product production and yield. It has the effect of preventing degradation.
The present invention has the effect of reducing economic aspects and costs in various technical fields such as CNC machine tool precision processing and semiconductor wafer processing by developing a sensor that does not cause measurement malfunction or decrease in measurement accuracy.

Description

Non-contact distance measurement system using artificial intelligence {System for Measuring Distance Non Contact Type Using Artificial Intelligence}

The present invention relates to a distance measurement system. More specifically, it is a non-contact distance measurement device that implements the distance to the measurement object according to changes in gas pressure through an artificial intelligence neural network, making the device configuration uncomplicated and improving distance measurement precision. It is about a non-contact distance measurement system using artificial intelligence that can secure repeatability by repeating the distance measurement system.

In the semiconductor market, products with a thickness of 50 micrometers or less are being commercialized following the recent full-scale introduction of SIP (System In Package), IC cards, and RFID tags for mobile products.

Therefore, in the semiconductor market, the importance of thin wafer processing technology is increasing along with the demand for final products.

For thin wafers, the wafer surface height is measured before polishing the back of the wafer to ultimately determine how much wafer thickness will remain. This wafer surface height is measured using a contact distance measurement sensor.

Conventional contact-type distance measuring sensors cause microscopic impacts and scratches on the wafer surface, causing the wafer to be damaged during polishing and its rigidity to be reduced, which causes the problem of lowering the production yield of semiconductor chips.

To solve this problem, a non-contact distance measurement method using a laser displacement sensor or video camera was developed.

However, in the case of the non-contact distance measurement method, there is no measurement error due to the excellent laser straightness of the laser displacement measurement sensor, but since the curvature of the wafer surface and the shape of the semiconductor chip cause diffuse reflection and polishing powder and polishing water to interfere with the measurement, it must be completely removed. If measurements are not made, measurement errors may occur. This has the disadvantage of increasing the process time because an additional process to remove the substance must be added.

Distance measurement using a video camera is not suitable for measuring in units of 1 micrometer due to pixel error.

Korean Patent Publication No. 10-2015-0007578

In order to solve this problem, the present invention is a non-contact distance measuring device that implements the distance to the measurement object according to the pressure change of the gas through an artificial intelligence neural network, so that the device configuration is not complicated and the distance measurement precision is improved to improve repeatability. The purpose is to provide a non-contact distance measurement system using artificial intelligence that can secure.

A non-contact distance measurement system using artificial intelligence according to the characteristics of the present invention to achieve the above purpose,

A first pipe forming an inlet on the inlet side with a constant first diameter into an empty space for gas to move, a second pipe communicating with the first pipe and having a narrower diameter along the flow direction of the gas, and the second pipe a third pipe that communicates with the third pipe and has a diameter equal to the first diameter of the first pipe and is longer than the length of the first pipe; and a third pipe that communicates with the third pipe and has a diameter that narrows along the flow direction of the gas. A pressure measuring device in the shape of a hollow tube consisting of an air injection nozzle that sprays gas onto the measurement object; and

A microcontroller unit electrically connected to the pressure measuring device and calculating and displaying the distance between the outlet of the pressure measuring device and the measurement object based on the amount of change in the electrical signal obtained by the pressure value detected by the pressure measuring device. Includes.

The second pipe is in communication with the first pipe and has a first reduced portion whose diameter gradually decreases compared to the first diameter of the first pipe along the gas flow direction, thereby reducing the cross-sectional area through which the gas flows; a first bottleneck communicating with the first reduction unit to maintain the diameter reduced by the first reduction unit at a constant length; And a first enlarged part that communicates with the first bottleneck and gradually increases in diameter along the gas flow direction to increase the cross-sectional area through which the gas flows, wherein the first bottleneck is coupled with a temperature sensor that measures the temperature of the gas moving inside. Then measure the temperature of the gas.

The third pipe is in communication with the first enlarged portion and has a diameter equal to the first diameter of the first pipe, is longer than the length of the first pipe, and is installed on the pipe through which the gas moves, so that it can be used when the gas moves. A second pressure sensor that measures the pressure value is coupled, and the air injection nozzle communicates with the third pipe so that the diameter gradually decreases compared to the second diameter of the third pipe along the gas flow direction, thereby reducing the cross-sectional area through which the gas flows. It includes a second reduction unit and a second bottleneck unit that communicates with the second reduction unit, maintains the diameter reduced by the second reduction unit at a constant length, and forms the discharge port on an outlet side.

The microcontroller unit inputs the pressure difference between the pressure value measured by the first pressure sensor and the pressure value measured by the second pressure sensor to the artificial nerve engine unit, and connects an outlet corresponding to the difference pressure value in response to the artificial nerve engine unit. Outputs the detection distance between measurement objects.

With the above-described configuration, the present invention measures the distance to the measurement object using changes in gas pressure, so the device configuration is not complicated, and measurement precision is improved, which has the effect of preventing a decrease in product production and yield.

The present invention has the effect of realizing economic efficiency and high resolution by securing repeatability by deriving the pressure difference value and detection distance through an artificial neural network.

The present invention has the effect of reducing economic aspects and costs in various technical fields such as CNC machine tool precision processing and semiconductor wafer processing by developing a sensor that does not cause measurement malfunction or decrease in measurement precision.

Figure 1 is a diagram showing the configuration of a non-contact distance measurement system using artificial intelligence according to a first embodiment of the present invention.
Figure 2 is a diagram showing a pressure measuring device inside a housing according to a first embodiment of the present invention.
Figure 3 is a cross-sectional view of a pressure measuring device according to a first embodiment of the present invention.
Figure 4 is a diagram showing the connection relationship between a pressure measuring device, a signal processing device, and a microcontroller unit according to the first embodiment of the present invention.
Figure 5 is a block diagram briefly showing the internal configuration of a microcontroller unit according to the first embodiment of the present invention.
Figure 6 is a diagram showing the connection relationship between a pressure measuring device, a signal processing device, and a microcontroller unit according to a second embodiment of the present invention.
Figure 7 is a diagram showing the configuration of a non-contact distance measurement system using artificial intelligence according to a second embodiment of the present invention.
Figure 8 is a diagram showing the configuration of a vertical movement device according to a second embodiment of the present invention.
Figure 9 is a block diagram briefly showing the internal configuration of the lidar sensor unit according to the second embodiment of the present invention.
Figure 10 is a diagram showing the connection relationship of the height control module that controls the lidar sensor unit according to the second embodiment of the present invention.
Figure 11 is a cross-sectional view of a pressure measuring device according to a second embodiment of the present invention.
Figure 12 is a cross-sectional view of a pressure measuring device according to a third embodiment of the present invention.
Figure 13 is a block diagram briefly showing the internal configuration of a microcontroller unit according to a second embodiment of the present invention.
Figure 14 is a cross-sectional view of a pressure measuring device according to a fourth embodiment of the present invention.

Since the present invention can make various changes and have various embodiments, specific embodiments will be illustrated in the drawings and described in detail in the detailed description. However, this is not intended to limit the present invention to specific embodiments, and should be understood to include all changes, equivalents, and substitutes included in the spirit and technical scope of the present invention. While describing each drawing, similar reference numerals are used for similar components.

Terms such as first, second, A, B, etc. may be used to describe various components, but the components should not be limited by the terms. Terms are used only to distinguish one component from another. For example, a first component may be named a second component without departing from the scope of the present invention, and similarly, the second component may also be named a first component. The term “and/or” includes any of a plurality of related stated items or a combination of a plurality of related stated items.

When a component is said to be "connected" or "connected" to another component, it is understood that it may be directly connected to or connected to the other component, but that other components may exist in between. It should be. On the other hand, when it is mentioned that a component is “directly connected” or “directly connected” to another component, it should be understood that there are no other components in between.

The terms used in this application are only used to describe specific embodiments and are not intended to limit the invention. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, terms such as “comprise” or “have” are intended to designate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but are not intended to indicate the presence of one or more other features. It should be understood that this does not exclude in advance the possibility of the existence or addition of elements, numbers, steps, operations, components, parts, or combinations thereof.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by a person of ordinary skill in the technical field to which the present invention pertains. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related technology, and unless explicitly defined in the present application, should not be interpreted in an ideal or excessively formal sense. No.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the attached drawings. In order to facilitate overall understanding when describing the present invention, the same reference numerals are used for the same components in the drawings, and duplicate descriptions of the same components are omitted.

Figure 1 is a diagram showing the configuration of a non-contact distance measurement system using artificial intelligence according to a first embodiment of the present invention, and Figure 2 is a diagram showing a pressure measuring device inside a housing according to a first embodiment of the present invention. , FIG. 3 is a cross-sectional view of a pressure measuring device according to a first embodiment of the present invention.

The non-contact distance measuring system 100 using artificial intelligence according to the first embodiment of the present invention includes a base plate 20 on which the shelf member 110 is mounted on the upper surface, a support 111, a mobile case 112, and a housing. 120 and a microcontroller unit 150.

The shelf member 110 holds the measurement object 10 on its upper surface. Here, the measurement object 10 may be various items such as wafers.

The support 111 is coupled to one side of the shelf member 110 and stands vertically.

The mobile case 112 is coupled with one side penetrating the vertically standing rod-shaped support 111, and reciprocates in the up and down direction along the support 111. The mobile case 112 penetrates the longitudinal butterfly bolt 113, which can be tightened or loosened from the outside, in the horizontal direction to reach the support 111, and loosens the butterfly bolt 113 to secure the support 111. After moving in the up and down direction, tighten the butterfly bolt (113) to fix it in the corresponding position.

The support 111 serves as a guide to slide the mobile case 112 in the vertical direction.

The housing 120 is coupled to one side of the mobile case 112, and moves simultaneously in the downward direction of the mobile case 112 to closely approach the measurement object 10.

The housing 120 forms an internal space 121 in the shape of a hexahedron, and a pressure measuring device 130 that detects a pressure value that changes depending on the distance to the measurement object 10 by spraying air to the measurement object 10. ) and a signal processing device 140 that processes the signal of the pressure value detected from the pressure measuring device 130 and transmits it to the microcontroller unit 150.

The pressure measuring device 130 is made of stainless steel and is formed in the shape of a hollow tube, has an inlet 132 at the upper end for introducing air, and has an outlet at the lower end for spraying air onto the surface of the measurement object 10. 139d).

The housing 120 communicates with the inlet 132 of the pressure measuring device 130 through a first hole 122 opened on one side of the upper surface, and measures pressure through a second hole 123 opened on one side of the lower surface. It communicates with the outlet 139d of the device 130.

A gas supply device (not shown) is connected to the top of the housing 120 and supplies gas through the first hole 122 and the inlet 132, and detailed description is omitted as it is a known technology.

The microcontroller unit 150 determines the detection distance between the outlet 139d of the pressure measurement device 130 and the measurement object 10 based on the amount of change in the electrical signal obtained by the pressure value detected by the pressure measurement device 130. Calculate and display. That is, the microcontroller unit 150 stores the correlation between the electrical signal of the pressure value and the detection distance between the outlet 139d and the measurement object 10 as a graph.

The pressure measuring device 130 consists of a first pipe 131, a second pipe 134, a third pipe 137a, and an air injection nozzle 139a, which are formed as empty spaces for gas to move.

The first pipe 131 is formed to have a constant first diameter and forms an inlet 132 on the inlet side. Gas flows in through the inlet 132, and is installed on the pipe through which the gas moves, so that the gas flows when the gas moves. The first pressure sensor 133 that measures the pressure value is combined.

In the second pipe 134, the first reduced portion 135, the first bottleneck portion 136, and the first enlarged portion 137 are integrally formed and communicate with each other.

The first reduced portion 135 is in communication with the first pipe 131, and its diameter gradually decreases compared to the first diameter of the first pipe 131 along the gas flow direction, thereby reducing the cross-sectional area through which the gas flows.

The first bottleneck 136 communicates with the first reduction part 135 and maintains the diameter reduced by the first reduction part 135 at a constant length.

The first bottleneck 136 is installed with a temperature sensor 138 that measures the temperature of the gas moving inside, and the temperature of the gas moving inside the first bottleneck 136 is measured by the temperature sensor 138. Measure.

The first enlarged part 137 communicates with the first bottleneck 136 and gradually increases in diameter along the gas flow direction, thereby increasing the cross-sectional area through which the gas flows.

The third pipe 137a communicates with the first enlarged portion 137 and has a diameter equal to the first diameter of the first pipe 131, and is longer than the length of the first pipe 131.

The third pipe 137a is installed near the first enlarged part 137 on the pipe through which the gas passing through the first enlarged part 137 moves, and measures the pressure value when the gas moves. Combine the second pressure sensor 139.

The first bottleneck 136 may serve to separate the pressure chambers of the first pipe 131 and the third pipe 137a and divide the reference pressure and the measured pressure.

The air injection nozzle 139a communicates with the third pipe 137a and has a diameter gradually reduced from the second diameter of the third pipe 137a along the gas flow direction, thereby reducing the cross-sectional area through which the gas flows. ) and a second bottleneck portion (139c) that communicates with the second reduction portion (139b) and maintains the diameter reduced by the second reduction portion (139b) at a constant length.

The second bottleneck 139c forms an outlet 139d on the outlet side, and gas is injected into the measurement object 10 through the outlet 139d.

Figure 4 is a diagram showing the connection relationship between a pressure measuring device, a signal processing device, and a microcontroller unit according to the first embodiment of the present invention.

The signal processing device 140 according to the first embodiment of the present invention includes a first amplifier 141, a second amplifier 142, a third amplifier 143, a differential amplifier 144, and a first buffer amplifier. 145 and a second buffer amplifier 146.

The input terminal of the first amplifier 141 is electrically connected to the first pressure sensor 133, and the output terminal is electrically connected to the non-inverting terminal (+) of the differential amplifier 144.

The first amplifier 141 receives the pressure value measured by the first pressure sensor 133, amplifies the analog signal into a signal with a constant voltage, and transmits it to the non-inverting terminal (+) of the differential amplifier 144.

The input terminal of the second amplifier 142 is electrically connected to the second pressure sensor 139, and the output terminal is electrically connected to the inverting terminal (-) of the differential amplifier 144.

The second amplifier 142 receives the pressure value measured by the second pressure sensor 139, amplifies the analog signal into a signal with a constant voltage, and transmits it to the inverting terminal (-) of the differential amplifier 144.

The differential amplifier 144 receives the first pressure value (reference pressure data) of the first pressure sensor 133 output from the first amplifier 141 through the non-inverting terminal (+) and inputs it through the inverting terminal (-). The second pressure value of the second pressure sensor 139 output from the second amplifier 142 is input, the difference is differentially amplified, and transmitted to the first analog-to-digital converter 151 of the microcontroller unit 150. .

The input end of the third amplifier 143 is electrically connected to the temperature sensor 138, and the output end is electrically connected to the second analog-to-digital converter 152 of the microcontroller unit 150.

The third amplifier 143 receives the temperature value measured by the temperature sensor 138, amplifies the analog signal into a signal with a constant voltage, and transmits it to the second analog-to-digital converter 152 of the microcontroller unit 150. .

The first buffer amplifier 145 and the second buffer amplifier 146 are employed between the wireless communication circuit blocks to prevent the rear circuit block from electrically influencing the front circuit block, or to reduce the input impedance of the rear circuit block. It prevents voltage drops that may occur when is small, or prevents the electrical characteristics of the front circuit block from changing due to external factors.

The first buffer amplifier 145 and the second buffer amplifier 146 have a larger input impedance, a smaller output impedance is better, and must satisfy certain voltage gain characteristics as needed.

The first buffer amplifier 145 is electrically connected to the differential amplifier 144, and inputs 0.8 mV to the differential amplifier 144 under the control of the first digital-to-analog converter 153.

The second buffer amplifier 146 is electrically connected to the first pressure sensor 133 and the second pressure sensor 139, and generates a current driving signal of 0.6 to 1.5 mA under the control of the second digital-to-analog converter 154. is input to the first pressure sensor 133 and the second pressure sensor 139.

Gas flows into the inside of the pressure measuring device 130 through the first hole 122 of the housing 120 and the inlet 132 of the pressure measuring device 130, and the first pipe 131 and the second pipe ( 134), moves to the third pipe 137a and the air injection nozzle 139a to the measurement object 10 through the outlet 139d of the air injection nozzle 139a and the second hole 123 of the housing 120. It is sprayed.

Figure 5 is a block diagram briefly showing the internal configuration of a microcontroller unit according to the first embodiment of the present invention.

The microcontroller unit 150 according to the first embodiment of the present invention includes a first analog-to-digital converter 151, a second analog-to-digital converter 152, a first digital-to-analog converter 153, and a second digital-to-analog converter. It includes a conversion unit 154, a control unit 155, a communication unit 156, and a display unit 157.

The first analog-to-digital converter 151 converts the analog data differentially amplified by the differential amplifier 144 into digital data and outputs it to the control unit 155.

The second analog-to-digital converter 152 converts the temperature value signal amplified by the third amplifier 143 into digital data and outputs it to the control unit 155.

The first digital-to-analog converter 153 converts a certain voltage value into an analog signal and outputs it to the first buffer amplifier 145, and the first buffer amplifier 145 converts the constant voltage value into an analog signal and outputs it to the first buffer amplifier 145. The analog signal is amplified to a 0.8 mV signal and input to the differential amplifier 144.

The second digital-to-analog converter 154 converts the current driving signal into an analog signal and outputs it to the second buffer amplifier 146, and the second buffer amplifier 146 converts the current driving signal into an analog signal. The analog signal is converted into a current driving signal of 0.6 to 1.5 mA and input to the first pressure sensor 133 and the second pressure sensor 139.

The control unit 155 uses digital data received from the first analog-to-digital converter 151, that is, the difference between the first pressure value of the first pressure sensor 133 and the second pressure value of the second pressure sensor 139. Analyze the value.

Here, the first pressure value refers to the reference pressure, and the second pressure value refers to the measured pressure.

The control unit 155 calculates the detection distance corresponding to the difference pressure value using a graph showing the correlation between the detection distance between the outlet 139d and the measurement object 10 corresponding to the difference pressure value. Here, when the difference pressure value is expressed as an electric signal (voltage, etc.), the detection distance for the difference pressure value is calculated using a graph showing the correlation between the electric signal and the detection distance between the outlet 139d and the measurement object 10. You may.

In another embodiment, the control unit 155 compares the differential pressure value with a preset pressure table and calculates the detection distance between the outlet 139d and the measurement object 10 corresponding to the differential pressure value. The control unit 155 outputs the calculated detection distance to the display unit 157. For example, if the differential pressure value is 1, the detection distance may be 1 μm, if the differential pressure value is 1.5, the detection distance may be 1.2 μm, etc.

Figure 6 is a diagram showing the connection relationship between a pressure measuring device, a signal processing device, and a microcontroller unit according to a second embodiment of the present invention.

The second embodiment omits description of components overlapping with the first embodiment of FIG. 4 and focuses on differences.

As a second embodiment, the first pressure sensor 133 measures the internal pressure of the first pipe 131, amplifies it through the first amplification unit 141, and transmits it to the first analog-to-digital converter 151. The first analog-to-digital converter 151 converts the first pressure value of the first pressure sensor 133 into digital data and transmits it to the control unit 155.

The second pressure sensor 139 measures the internal pressure of the third pipe 137a, amplifies it through the second amplification unit 142, and transmits it to the first analog-to-digital converter 151. The first analog-to-digital converter 151 converts the second pressure value of the second pressure sensor 139 into digital data and transmits it to the control unit 155.

The internal pressure of the third pipe 137a varies depending on the distance between the outlet 139d and the measurement object 10. In other words, the second pressure value measured by the second pressure sensor 139 changes.

The control unit 155 calculates the difference pressure value between the first pressure value of the first pressure sensor 133 and the second pressure value of the second pressure sensor 139, and compares the calculated difference pressure value with a preset pressure table. Thus, the detection distance between the outlet (139d) and the measurement object (10) corresponding to the difference pressure value is calculated. The control unit 155 outputs the calculated detection distance to the display unit 157.

As another embodiment, the first pressure sensor 133 measures the internal pressure of the first pipe 131, amplifies it through the first amplification unit 141, and periodically transmits it to the first analog-to-digital converter 151. . The first analog-to-digital converter 151 converts the first pressure value of the first pressure sensor 133 into digital data and transmits it to the control unit 155. The first pressure sensor 133 can measure the amount of change in internal pressure of the first pipe 131.

The control unit 155 calculates the gas velocity V using the pressure change measured in the first pipe 131 using Bernoulli's equation (Equation 1).

Here, G is the gravitational acceleration and B represents the pressure change.

The control unit 155 uses the gas velocity V to calculate the volume Q of the first pipe 131 using the gas flow rate formula (Equation 2).

Here, A is the preset cross-sectional area of the pipe, and V is the velocity of the gas.

The second pressure sensor 139 measures the internal pressure of the third pipe 137a, amplifies it through the second amplification unit 142, and periodically transmits it to the second analog-to-digital converter 152. The second analog-to-digital converter 152 converts the second pressure value of the second pressure sensor 139 into digital data and transmits it to the control unit 155.

The first pipe 131, the second pipe 134, the third pipe 137a, and the air injection nozzle 139a establish a relationship between pressure and speed in Bernoulli's theorem, as shown in Equation 3 below.

The internal pressure of the third pipe 137a varies depending on the distance between the outlet 139d and the measurement object 10. In other words, P ₄ × V ₄ changes, and P ₃ × V ₃ changes accordingly.

The control unit 155 calculates P ₁ × V ₁ based on the first pressure value measured by the first pressure sensor 133, and P ₃ based on the second pressure value measured by the second pressure sensor 139. Calculate × V ₃ .

The control unit 155 calculates the difference value by comparing _{it with P 3 ×} V ₃ based on P ₁ The detection distance between the measurement objects 10 is calculated.

As another embodiment, the control unit 155 calculates the detection distance corresponding to the difference value using a graph showing the correlation of the detection distance between the outlet 139d and the measurement object 10 corresponding to the difference value.

The control unit 155 outputs the calculated detection distance to the display unit 157. The present invention compares pressure × speed rather than comparing only the first pressure value and the second pressure value, so the numerical value increases, thereby improving the accuracy of the resulting data.

The control unit 155 determines whether the voltage signal (temperature value measured by the temperature sensor 138) received from the second analog-to-digital converter 152 is a reference voltage, and calculates a difference voltage between the voltage signal and the reference voltage.

The control unit 155 calculates a pressure compensation value corresponding to the calculated difference voltage using a graph showing the correlation between the calculated difference voltage and the pressure compensation value, reflects the calculated pressure compensation value in the difference pressure value, and reflects the reflected pressure compensation value. Calculate the detection distance corresponding to the difference pressure value. For example, assuming that the difference voltage is 0.1mV and the pressure compensation value is 0.1μm, after increasing the pressure compensation value (0.1μm) to the difference pressure value of 0.8μm, the outlet (139d) for the difference pressure value of 0.9μm The detection distance between and the measurement object 10 is calculated.

Figure 7 is a diagram showing the configuration of a non-contact distance measurement system using artificial intelligence according to a second embodiment of the present invention, and Figure 8 is a diagram showing the configuration of a vertical movement device according to a second embodiment of the present invention.

The non-contact distance measurement system 100 using artificial intelligence according to the second embodiment of the present invention includes a base plate 20, a support 111, and a moving block unit 112a for mounting the shelf member 110 on the upper surface. ), a housing 120 and a microcontroller unit 150, a vertical movement device 160 that moves the housing 120 in the vertical direction, and a lidar sensor unit 170 on one side of the bottom of the housing 120. forms. The second embodiment omits description of components that overlap with the first embodiment of FIG. 1 and focuses on differences.

The lidar sensor unit 170 performs a function of measuring the distance between the measurement object 10 and the lower surface of the housing 120.

The vertical movement device 160 penetrates the base plate 20 and stands vertically to couple the screw 161 in the longitudinal direction, and the screw 161 penetrates the moving block 112a of a certain shape to form the screw 161. The moving block unit 112a moves back and forth in the up and down direction.

Inside the base plate 20, a first bevel gear 162 is coupled to the lower end of the screw 161, and a second bevel gear 163 is geared and engaged in a direction perpendicular to the first bevel gear 162. and the second bevel gear 163 is coupled to the rotation shaft 164 of the drive motor 165.

The screw 161 is formed in a straight line with a constant length and is formed long in the longitudinal direction so as to penetrate the moving block portion 112a of a certain shape.

The screw 161 is formed long in the longitudinal direction and penetrates and couples to the moving block portion 112a of a certain shape.

The screw 161 has thread grooves processed by rolling or grinding along the circumferential direction.

The moving block portion 112a forms a nut portion (not shown) inside, and a screw 161 is coupled through the center portion of the nut portion.

The nut portion of the moving block portion 112a forms a through hole penetrating the front and rear surfaces so that the screw 161 is coupled to the center portion, and the inner peripheral surface of the through hole has a thread corresponding to the screw groove formed on the outer peripheral surface of the screw 161. is formed

The screw 161 is inserted into the through hole of the nut portion of the moving block portion 112a, and the screw groove and thread are screwed together.

The moving block unit 112a reciprocates in the up and down direction along the screw 161 according to the driving of the drive motor 165.

The housing 120 coupled to the front of the movable block unit 112a moves together with the vertical movement of the movable block unit 112a. The housing 120 moves up and down vertically above the measurement object 10.

Figure 9 is a block diagram briefly showing the internal configuration of the LiDAR sensor unit according to the second embodiment of the present invention, and Figure 10 is a connection relationship of the height control module for controlling the LiDAR sensor unit according to the second embodiment of the present invention. This is a drawing showing .

The lidar sensor unit 170 according to the second embodiment of the present invention calculates the distance between the measurement object 10 and the lower surface of the housing 120.

LiDAR distance measurement uses Time of Flight (ToF) to calculate the distance by measuring the time difference between the reference point when the pulse signal is transmitted to the object and the detection point of the reflected wave signal that is reflected back.

The LiDAR sensor unit 170 includes a laser diode 171, a laser diode driver 172, a laser diode driver 173, a photo diode 174, an optical unit 175, a LiDAR control unit 176, and a reception signal processing unit. Includes (177).

The laser diode driver 173 may input a driving signal for driving the laser diode 171 to the laser diode driver 172.

The laser diode 171 may receive a driving current from the laser diode driver 173 and transmit a laser pulse signal to the measurement object 10 through the optical unit 175.

The laser diode driver 172 may apply a driving current to the laser diode 171.

The optical unit 175 includes an optical lens and a prism (Mido) that take into account optical characteristics such as equalization of laser light emission distribution, beam shaping ratio, and concentrating power of the beam when receiving light in order to secure the viewing angle of the laser pulse transmitted from the laser diode 171 and secure angular resolution. Poetry), etc. may be included.

A laser diode (LD) 171 generates laser pulses and transmits them to the human object 11.

After the laser diode 171 transmits the laser pulse signal to the measurement object 10, the photodiode (Photodiode Array, PD) 174 transmits the laser pulse signal to the measurement object 10 through the optical unit 175. The reflected wave signal reflected from is detected.

The LiDAR control unit 176 receives a detection signal from a laser diode detection unit (not shown) that detects the driving signal of the laser diode 171 and calculates the departure time of the LiDAR Time of Flight (ToF).

The LiDAR control unit 176 receives the reflected wave signal reflected from the measurement object 10 and calculates the arrival time of the LiDAR flight time.

The LIDAR control unit 176 calculates the flight time from detection of the laser pulse signal to detection of the reflected wave signal using the departure time and arrival time.

The LIDAR control unit 176 includes a reception signal processing unit 177 that processes signals received from the laser diode detection unit and the photo diode 174 to calculate the flight time.

The LIDAR control unit 176 may calculate the flight time based on the signal processed by the reception signal processing unit 177.

The reception signal processing unit 177 includes an amplification unit 178, a comparison unit 179, and a time-to-digital conversion unit 179a.

The amplification unit 178 amplifies the input signal to suit the input voltage level of the comparison unit 179 and the time digital converter (Tme to Digital Converter, TDC) 179a.

The comparator 179 compares the voltage signal amplified by the amplification unit 178 with a threshold voltage and generates a pulse signal when the voltage signal is greater than or equal to the threshold voltage.

The time digital converter 179a converts the pulse signal passing through the comparison unit 179 into digital data of encoded departure and arrival times for calculating the flight time.

The LIDAR control unit 176 calculates distance information by measuring the time difference between departure time and arrival time. The LIDAR control unit 176 stores the calculated distance information at regular intervals. In other words, the LIDAR sensor unit 170 calculates distance information between the measurement object 10 and the lower surface of the housing 120 and transmits the calculated distance information to the height control module 166.

As shown in FIG. 10, the inside of the base plate 20 includes a drive motor 165, a height control module 166, and a communication module 167, and the height control module 166 includes a drive motor 165. , is electrically connected to the communication module 167 and the lidar sensor unit 170.

The microcontroller unit 150 includes an input unit 158 that can input distance information between the measurement object 10 and the lower surface of the housing 120, and when distance information is input from the input unit 158, a communication unit 156 It includes a control unit 155 that transmits to the communication module 167 through.

The input unit 158 includes user input means such as a keyboard, mouse, touch pad, keypad, and touch screen.

The height control module 166 receives distance information input from the microcontroller unit 150 from the communication module 167, generates a drive control signal corresponding to the received distance information, and transmits it to the drive motor 165.

The height control module 166 receives distance information between the measurement object 10 calculated by the lidar sensor unit 170 and the lower surface of the housing 120, and transmits the received distance information through the communication module 167. Transmitted to the microcontroller unit 150.

The control unit 155 of the microcontroller unit 150 receives measurement distance information measured by the lidar sensor unit 170 through the communication unit 156, and compares the received measurement distance information with the input distance information input to the input unit. It is then determined whether the difference between the measured distance information and the input distance information is close to 0 or within a preset distance range.

If the control unit 155 determines that the difference between the measured distance information and the input distance information is 0 or is within a preset distance range, the control unit 155 may recognize that the lidar sensor unit 170 is in a normal state with no driving error.

If the control unit 155 determines that the difference between the measured distance information and the input distance information is not within the preset distance range, the control unit 155 determines that there is a driving error in the lidar sensor unit 170 and generates an alarm message to display the display unit 157. ) is output.

Figure 11 is a cross-sectional view of a pressure measuring device according to a second embodiment of the present invention.

The pressure measuring device 180 according to the second embodiment of the present invention is formed in the shape of a hollow tube, which is an empty space for gas to move, and has an internal pipe 182 of a certain length and is in communication with the internal pipe 182. It consists of an air injection nozzle 183 that sprays gas to the measurement object 10, a portion of the internal pipe 182 is exposed to the outside, and is connected to the exposed internal pipe 182 to form an external pipe 181.

The air injection nozzle 183 is in communication with the internal pipe 182 and has a reduced portion 184 whose diameter gradually decreases compared to the first diameter of the internal pipe 182 along the gas flow direction, thereby reducing the cross-sectional area through which the gas flows, and a reduced portion 184 It includes a bottleneck portion 185 that communicates with the portion 184 and maintains the diameter reduced by the reduction portion 184 at a constant length.

The bottleneck 185 forms an outlet (not shown) on the outlet side, and gas is injected into the measurement object 10 through the outlet.

The external pipe 181 is installed on the pipe through which the gas moves and couples the first pressure sensor 133 to measure the pressure value when the gas moves. The pressure value measured by the first pressure sensor 133 becomes the reference pressure.

The internal pipe 182 is installed on the pipe through which gas moves near the air injection nozzle 183 and couples a second pressure sensor 139 that measures the pressure value when the gas moves. The pressure value measured by the second pressure sensor 139 becomes the measured pressure.

The internal pipe 182 is equipped with a temperature sensor 138 that measures the temperature of the gas moving inside, and the temperature sensor 138 measures the temperature of the gas moving inside the internal pipe 182.

Since the pressure measuring device 180 of the second embodiment has the same connection relationship between the signal processing unit 140 and the microcontroller unit 150 in FIGS. 4 and 6, redundant description will be omitted.

FIG. 12 is a cross-sectional view of a pressure measuring device according to a third embodiment of the present invention, and FIG. 13 is a block diagram briefly showing the internal configuration of a microcontroller unit according to a second embodiment of the present invention.

The pressure measuring device 130 according to the third embodiment of the present invention includes a first pipe 131, a second pipe 134, a third pipe 137a, and an air injection nozzle ( 139a).

The microcontroller unit 150 according to the second embodiment of the present invention includes a first analog-to-digital converter 151, a second analog-to-digital converter 152, a first digital-to-analog converter 153, and a second digital-to-analog converter. Conversion unit 154, control unit 155, communication unit 156, display unit 157, input unit 158, artificial neural engine unit 190, learning model unit 191, learning unit 192, classification unit ( 193), an artificial neural processing network 194, a first solenoid controller 195, and a second solenoid controller 196.

The third embodiment omits descriptions of components that overlap with the pressure measuring device (first embodiment) of FIG. 3 (first embodiment) and the microcontroller unit (first embodiment) of FIG. 5, and focuses on differences.

The air tank unit 200 stores compressed air at a constant pressure.

The first solenoid controller 195 is electrically connected to the first solenoid valve 211 and generates an on-off drive signal and transmits it to the first solenoid valve 211 to control the operation of the first solenoid valve 211. .

The second solenoid controller 196 is electrically connected to the second solenoid valve 214 and generates an on-off drive signal and transmits it to the second solenoid valve 214 to control the operation of the second solenoid valve 214. .

The control unit 155 may control the first solenoid valve 211 and the second solenoid valve 214 by driving the first solenoid controller 195 and the second solenoid controller 196.

One side of the first solenoid valve 211 is connected to the air tank unit 200 through a first pipe 210, and the other side is connected to the first pipe 131 through a second pipe 212.

The first solenoid valve 211 is opened under the control of the first solenoid controller 195 to supply compressed air from the air tank unit 200 into the first pipe 131.

One side of the second solenoid valve 214 is connected to the air tank unit 200 through a third pipe 213, and the other side is connected to the third pipe 137a through a fourth pipe 215.

The second solenoid valve 214 is opened under the control of the second solenoid controller 196 to supply compressed air from the air tank unit 200 into the third pipe 137a.

The control unit 155 analyzes the pressure difference between the first pressure value of the first pressure sensor 133 and the second pressure value of the second pressure sensor 139, and when the difference pressure value is outside the preset pressure range, A driving signal is generated and transmitted to the first solenoid controller 195 and the second solenoid controller 196. The first solenoid controller 195 and the second solenoid controller 196 open the first solenoid valve 211 and the second solenoid valve 214 to allow compressed air from the air tank unit 200 to flow through the first pipe 131. and the third pipe 137a for a certain period of time.

Afterwards, the control unit 155 analyzes the pressure difference between the first pressure value of the first pressure sensor 133 and the second pressure value of the second pressure sensor 139, and the difference pressure value exceeds the preset pressure range. Determine whether the pressure is within the pressure range and repeat the compressed air supply process.

The control unit 155 determines whether the first pressure value of the first pressure sensor 133 is within a preset standard pressure range, and if it is outside the standard pressure range, drives the first solenoid controller 195.

The first solenoid valve 211 opens under the control of the first solenoid controller 195 and supplies compressed air from the air tank unit 200 to the first pipe 131. The control unit 155 may determine whether the first pressure value of the first pressure sensor 133 is within a preset reference pressure range and repeat the process of supplying compressed air until it does not deviate from the reference pressure range.

The second solenoid valve 214 opens under the control of the second solenoid controller 196 and supplies compressed air from the air tank unit 200 to the third pipe 137a. The control unit 155 may determine whether the second pressure value of the second pressure sensor 139 is within a preset reference pressure range and repeat the process of supplying compressed air until it does not deviate from the reference pressure range.

In the above method, the control unit 155 can repeat the process until the internal pressures of the first pipe 131 and the third pipe 137a are the same.

The artificial neural engine unit 190 includes a learning model unit 191 and an artificial neural processing network 194. The learning model unit 191 includes a learning unit 192 and a classification unit 193.

The control unit 155 is electrically connected to the learning unit 192 and the classification unit 193.

The artificial nerve engine unit 190 inputs a pressure difference between the first pressure value of the first pressure sensor 133 and the second pressure value of the second pressure sensor 139 as an input, and outputs a pressure difference value corresponding to the difference pressure value. The detection distance between the outlet 139d and the measurement object 10 can be output as result information.

The artificial neural engine unit 190 may input the temperature value measured by the temperature sensor 138 as an input, and output a pressure compensation value of the difference pressure value corresponding to the temperature value as result information.

The control unit 155 provides a pressure difference between the first pressure value of the first pressure sensor 133 and the second pressure value of the second pressure sensor 139, an outlet 139d corresponding to the difference pressure value, and an object to be measured (10). ) is stored as learning data.

The learning unit 192 can learn through a neural network using the learning data stored in the control unit 155.

The learning unit 192 can detect feature points from learning data and adjust connection weights applied to the neural network based on the learning results of the detected feature points.

The learning unit 192 may calculate an error by comparing the output value generated from the output layer of the neural network with the desired expected value for the learning data, and adjust the connection weight applied to the recognition model of the neural network in a direction to reduce the error.

The learning unit 192 is composed of an input layer, a hidden layer, and an output layer, inputs the difference pressure value to the input layer, and detects the input difference pressure value and the detection distance between the corresponding outlet 139d and the measurement object 10. A neural network can be trained to output to the output layer.

The learning unit 192 is composed of an input layer, a hidden layer, and an output layer, and inputs the temperature value measured by the temperature sensor 138 to the input layer, and calculates the pressure compensation value of the input temperature value and the corresponding difference pressure value. A neural network can be trained to output to the output layer.

The learning unit 192 detects a feature point from the difference pressure value between the first pressure value of the first pressure sensor 133 and the second pressure value of the second pressure sensor 139, which is the learning data received from the control unit 155, A neural network can be trained using feature points.

The learning unit 192 can detect a feature point from the difference pressure value between the first pressure value of the first pressure sensor 133 and the second pressure value of the second pressure sensor 139 and learn the neural network using the feature point. .

The learning unit 192 can detect feature points from the temperature value measured by the temperature sensor 138 and train a neural network using the feature points.

In other words, the learning unit 192 can detect feature vectors from difference pressure values or temperature values and train a neural network using the detected feature vectors.

If the difference pressure value is not determined according to the control of the control unit 155, the learning unit 192 may control learning using a neural network recognition model with new data.

The learning unit 192 performs learning of the artificial neural processing network 194 on a training set consisting of difference pressure values from the control unit 155, and uses deep learning feature values for each type to correspond to the difference pressure values. The detection distance between the outlet (139d) and the measurement object (10) is learned.

The learning unit 192 performs learning of the artificial neural processing network 194 on a training set consisting of temperature values measured by the temperature sensor 138 from the control unit 155, and uses deep learning feature values for each type. Thus, the pressure compensation value of the difference pressure value corresponding to the temperature value is learned.

The learning unit 192 learns the detection distance between the outlet 139d and the measurement object 10 corresponding to the difference pressure value in the artificial neural processing network 194 using deep learning feature values for each type.

The learning unit 192 learns the pressure compensation value of the difference pressure value corresponding to the temperature value from the artificial neural processing network 194 using deep learning feature values for each type.

The learning unit 192 uses a training set consisting of difference pressure values as an input vector, and when it passes through the input layer, hidden layer, and output layer, the measurement object 10 and the outlet 139d corresponding to the difference pressure value are formed. It is learned through supervised learning to generate the detection distance as an output vector.

The learning unit 192 uses the artificial neural processing network 194 to input feature values of the difference pressure value as input vectors, and when they pass through the input layer, hidden layer, and output layer, an outlet 139d corresponding to the difference pressure value is generated. The detection distance between and the measurement object 10 is learned through supervised learning to generate an output vector.

The learning unit 192 uses the artificial neural processing network 194 to input feature values of the temperature value as input vectors, and when they pass through the input layer, hidden layer, and output layer, pressure compensation of the difference pressure value corresponding to the temperature value is performed. It is learned through supervised learning to generate values as output vectors.

When training data, test data, or new data not used for learning are input to the artificial neural processing network 194 with updated connection weights, the classification unit 193 divides the input layer - hidden layer - polling connected layer - output layer. The output result can be obtained and output as response data.

The artificial neural processing network 194 generates a deep learning-based classifier model through optimization based on the prediction result of the detection distance between the outlet 139d and the measurement object 10 corresponding to the input difference pressure value.

The artificial neural processing network 194 generates a deep learning-based classifier model through optimization based on whether the pressure compensation value of the difference pressure value corresponding to the input temperature value is predicted.

The classification unit 193 receives and stores the recognition model of the neural network from the learning unit 192, receives the difference pressure value from the control unit 155, and detects the corresponding difference pressure value using the recognition model of the neural network. Derive the distance.

The classification unit 193 receives and stores the recognition model of the neural network from the learning unit 192, receives the temperature value from the control unit 155, and uses the recognition model of the neural network to obtain a difference pressure value corresponding to the received temperature value. Derive the pressure compensation value of

The classification unit 193 quantizes the received difference pressure value to extract feature points, compares the extracted feature points with feature vectors of the learning data learned in the learning unit 192, and creates an outlet 139d corresponding to the difference pressure value. The result of the detection distance between and the measurement object 10 is transmitted to the control unit 155.

The classification unit 193 outputs the difference pressure value, which is test data, as a result of the response data (detection distance result) using the deep learning-based classifier model of the artificial neural processing network 194.

The classification unit 163 determines whether a result is a detection distance or a non-detection distance in response to the difference pressure value.

The classification unit 163 determines whether the difference pressure value, which is test data, is a detection distance result or a non-detection distance result using the deep learning-based classifier model of the artificial neural processing network 194.

Figure 14 is a cross-sectional view of a pressure measuring device according to a fourth embodiment of the present invention.

The pressure measuring device 180 according to the fourth embodiment of the present invention is formed in the shape of a hollow tube, which is an empty space for gas to move, and has an internal pipe 182 of a certain length and communicates with the internal pipe 182. It consists of an air injection nozzle 183 that sprays gas to the measurement object 10, a portion of the internal pipe 182 is exposed to the outside, and is connected to the exposed internal pipe 182 to form an external pipe 181.

The air injection nozzle 183 is in communication with the internal pipe 182 and has a reduced portion 184 whose diameter gradually decreases compared to the first diameter of the internal pipe 182 along the gas flow direction, thereby reducing the cross-sectional area through which the gas flows, and a reduced portion 184 It includes a bottleneck portion 185 that communicates with the portion 184 and maintains the diameter reduced by the reduction portion 184 at a constant length.

The fourth embodiment omits description of components that overlap with the pressure measuring device (second embodiment) of FIG. 11 and focuses on differences.

The air tank unit 200 stores compressed air at a constant pressure.

The first solenoid controller 195 is electrically connected to the first solenoid valve 211 and generates an on-off drive signal and transmits it to the first solenoid valve 211 to control the operation of the first solenoid valve 211. .

The control unit 155 may control the first solenoid valve 211 by driving the first solenoid controller 195.

One side of the first solenoid valve 211 is connected to the air tank unit 200 through a first pipe 210, and the other side is connected to the internal pipe 182 through a second pipe 212.

The control unit 155 analyzes the pressure difference between the first pressure value of the first pressure sensor 133 and the second pressure value of the second pressure sensor 139, and when the difference pressure value is outside the preset pressure range, A driving signal is generated and transmitted to the first solenoid controller 195. The first solenoid controller 195 opens the first solenoid valve 211 to supply compressed air from the air tank unit 200 to the internal pipe 182 for a certain period of time.

Afterwards, the control unit 155 analyzes the pressure difference between the first pressure value of the first pressure sensor 133 and the second pressure value of the second pressure sensor 139, and the difference pressure value exceeds the preset pressure range. Determine whether the pressure is within the pressure range and repeat the compressed air supply process.

Operations according to embodiments of the present specification can be implemented as a computer-readable program or code on a computer-readable recording medium. Computer-readable recording media include all types of recording devices that store data that can be read by a computer system. Additionally, computer-readable recording media can be distributed across networked computer systems so that computer-readable programs or codes can be stored and executed in a distributed manner.

When the embodiment is implemented in software, the above-described techniques may be implemented as modules (processes, functions, etc.) that perform the above-described functions. Modules are stored in memory and can be executed by a processor. Memory may be internal or external to the processor and may be connected to the processor by a variety of well-known means.

Additionally, computer-readable recording media may include hardware devices specially configured to store and execute program instructions, such as ROM, RAM, flash memory, etc. Program instructions may include not only machine language code such as that created by a compiler, but also high-level language code that can be executed by a computer using an interpreter, etc.

Although some aspects of the invention have been described in the context of an apparatus, it may also refer to a corresponding method description, where a block or device corresponds to a method step or feature of a method step. Similarly, aspects described in the context of a method may also be represented by corresponding blocks or items or features of a corresponding device. Some or all of the method steps may be performed by (or using) a hardware device, such as a microprocessor, programmable computer, or electronic circuit, for example. In some embodiments, one or more of the most important method steps may be performed by such an apparatus.

In embodiments, a programmable logic device (e.g., a field programmable gate array) may be used to perform some or all of the functionality of the methods described herein. In embodiments, a field programmable gate array may operate in conjunction with a microprocessor to perform one of the methods described herein. In general, the methods are preferably performed by some hardware device.

Although the present invention has been described above with reference to preferred embodiments, those skilled in the art may make various modifications and changes to the present invention without departing from the spirit and scope of the present invention as set forth in the claims below. You will understand that you can do it.

10: Measurement object 20: Base plate
100: Distance measuring system 110: Shelf member
111: support 112: mobile case
113: butterfly bolt 120: housing
121: internal space 122: first hole
123: second hole 130: pressure measuring device
131: first pipe 132: inlet
133: first pressure sensor 134: second pipe
135: first reduction section 136: first bottleneck section
137: first enlarged portion 137a: third pipe
138: temperature sensor 139: second pressure sensor
139a: air injection nozzle 139b: second reduced portion
139c: second bottleneck 139d: outlet
140: signal processing device 141: first amplifier
142: second amplification unit 143: third amplification unit
144: differential amplifier 145: first buffer amplifier
146: second buffer amplifier 150: microcontroller unit
151: first analog-to-digital conversion unit 152: second analog-to-digital conversion unit
153: first digital-to-analog converter 154: second digital-to-analog converter
155: control unit 156: communication unit
157: display unit

Claims (5)

A first pipe forming an inlet on the inlet side with a constant first diameter into an empty space for gas to move, a second pipe communicating with the first pipe and having a narrower diameter along the flow direction of the gas, and the second pipe a third pipe that communicates with the third pipe and has a diameter equal to the first diameter of the first pipe and is longer than the length of the first pipe; and a third pipe that communicates with the third pipe and has a diameter that narrows along the flow direction of the gas. A pressure measuring device in the shape of a hollow tube consisting of an air injection nozzle that sprays gas onto the measurement object; and
A microcontroller unit electrically connected to the pressure measuring device and calculating and displaying the distance between the outlet of the pressure measuring device and the measurement object based on the amount of change in the electrical signal obtained by the pressure value detected by the pressure measuring device. A non-contact distance measurement system using artificial intelligence that includes. In claim 1,
The first pipe is a non-contact distance measurement system using artificial intelligence that is installed on the pipeline through which the gas moves and combines a first pressure sensor that measures the pressure value when the gas moves. In claim 2,
The second pipe is,
a first reduction portion that is in communication with the first pipe and has a diameter gradually smaller than the first diameter of the first pipe along the gas flow direction, thereby reducing the cross-sectional area through which the gas flows;
a first bottleneck communicating with the first reduction unit to maintain the diameter reduced by the first reduction unit at a constant length; and
It includes a first enlarged part that is in communication with the first bottleneck and whose diameter gradually increases along the gas flow direction to increase the cross-sectional area through which the gas flows,
A non-contact distance measurement system using artificial intelligence that measures the temperature of the gas by combining a temperature sensor that measures the temperature of the gas moving inside the first bottleneck. In claim 3,
The third pipe is in communication with the first enlarged portion and has a diameter equal to the first diameter of the first pipe, is longer than the length of the first pipe, and is installed on the pipe through which the gas moves, so that the gas Combine a second pressure sensor that measures the pressure value when moving,
The air injection nozzle is connected to the third pipe and has a diameter gradually smaller than the second diameter of the third pipe along the gas flow direction, thereby reducing the cross-sectional area through which the gas flows, and the second reduced portion. A non-contact distance measurement system using artificial intelligence including a second bottleneck that communicates and maintains the diameter reduced by the second reduction portion at a constant length and forms the outlet on the outlet side. In claim 4,
The microcontroller unit,
The pressure difference between the pressure value measured by the first pressure sensor and the pressure value measured by the second pressure sensor is input to the artificial nerve engine unit, and the outlet corresponding to the difference pressure value in response to the artificial nerve engine unit. A non-contact distance measurement system using artificial intelligence that outputs the detection distance between the object and the measurement object.

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