KR20240037169A - Light scattering measuring apparatus - Google Patents

Abstract

The present invention provides a light scattering measurement device equipped with an optical element holder that contributes to miniaturization of the light scattering measurement device. A light source (1), a sample cell (2) that accommodates a sample and into which light from the light source (1) enters, and a detection unit (3) that detects the emitted light (SL) emitted from the sample cell (2), It has a rotation axis (AR) orthogonal to the plane defined by the path (LP) of the emitted light (SL) from the sample cell (2) to the detection unit (3), and a rotation axis (AR) around the rotation axis (AR), respectively. ), an optical element holder 4 holding and supporting a plurality of optical elements 401 including a first optical element 401-1 and a second optical element 401-2, and a rotation axis AR It is provided with an optical element holder support portion 5 that supports the optical element holder 4 so as to be rotatable around it, and the optical element holder 4 has at least the first optical element 401-1 along the path LP. A light scattering measurement device 100 is provided that can rotate between a first posture positioned on the image and a second posture in which the second optical element 401-2 is positioned on the path LP.

Description

Light scattering measuring device {LIGHT SCATTERING MEASURING APPARATUS}

The present invention relates to a light scattering measurement device.

In a light scattering measurement device, an optical element holder holding an optical element that changes optical properties such as polarization direction may be provided between the sample cell and the detection unit. For example, when measuring the anisotropy of a measurement sample using a light scattering measurement device, a polarizing element holder is provided between the sample cell and the detection unit.

When two or more types of optical elements are held in an optical element holder, it is necessary to switch between these optical elements. For example, in the case of extracting and measuring the vertical linearly polarized light component and the horizontal linearly polarized light component from the scattered light from the measurement sample, a polarizing element with a vertical polarization axis and a polarizing element with a horizontal polarizing axis are used. A transition becomes necessary.

Conventionally, various optical element holders that enable mutual switching between a plurality of optical elements have been studied. For example, in the field of variable polarization wafer inspection, a technique for switching the polarization direction by horizontally sliding a plate-shaped holder on which a plurality of polarizing elements are arranged (see FIG. 3 in Patent Document 1 below) is known. Additionally, in the field of measuring the appearance of birefringent fibers, there is a technique for switching the direction of polarization by placing a plurality of polarizing elements on a disk-shaped holder with a rotation axis parallel to the path of light and rotating the holder around the rotation axis (patent below) (see Figure 3a of Document 2) is known.

Japanese Patent Publication No. 2015-516574 Japanese Patent Publication No. 2011-069805

On the other hand, the conventional optical element holder as described in the above patent document requires a large space for its installation. This is because, in a conventional optical element holder, a plurality of optical elements are provided on the same plane. Specifically, in a conventional optical element holder, a plurality of optical elements are arranged on a plate-shaped or disk-shaped substrate. And, these optical elements all face the same direction, that is, the same direction as the path of light incident towards the optical element holder. Here, in the optical element holder, the optical element involved in measurement, that is, placed on the path of light, is only one of the plurality of optical elements. Among the plurality of optical elements, optical elements other than this one occupy a certain space in the optical element holder in the width direction of the substrate, even though they are not involved in the measurement. As a result, dead space is created for a certain amount of space.

Therefore, using the conventional optical element holder causes the problem that the light scattering measurement device itself becomes larger. In particular, when the light scattering measurement device has two or more detection units, that is, when measuring by a multi-angle light scattering method, two or more optical element holders are also required. In this case, if a conventional optical element holder is used, the dead space increases and the size of the measuring device becomes more significant.

The present invention was made in view of the above problems, and its purpose is to provide a light scattering measurement device equipped with an optical element holder that contributes to miniaturization of the light scattering measurement device.

(1) A light scattering measurement device according to the present invention includes a light source, a sample cell that accommodates a sample and into which light from the light source enters, a detection unit that detects emitted light from the sample cell, and a light scattering unit that detects light emitted from the sample cell. A plurality of optical elements including a first optical element and a second optical element, each of which has a rotation axis orthogonal to a plane determined by the path of the emitted light toward the detection unit and is provided around the rotation axis and toward the rotation axis. an optical element holder that holds and supports an optical element holder support part that supports the optical element holder so as to be rotatable about the rotation axis, wherein the optical element holder is such that at least the first optical element is positioned on the path. It is possible to rotate between a first posture in which the second optical element is positioned and a second posture in which the second optical element is positioned on the path.

(2) In the light scattering measurement device of (1), the optical element holder has a main body and holds the plurality of optical elements on a side surface of the main body, and the first optical element is on a side surface of the main body. A plurality of openings may be provided, including a first opening opening on the opposite side and a second opening opening on the opposite side of the second optical element.

(3) In the light scattering measuring device of (2), the rotation axis is located on the path and is sandwiched between the first optical element and the first opening, and the second optical element and the second opening. It can be sandwiched between them.

(4) In the light scattering measurement device of (3), the plurality of optical elements and the plurality of openings may be arranged at equiangular intervals around the entire circumference of the rotation axis.

(5) In the light scattering measurement device of any of (1) to (4), the optical element holder may include a polygonal portion in its cross section.

(6) In the light scattering measurement device of any of (2) to (5), the plurality of openings may include a third opening and a fourth opening that face each other.

(7) In the light scattering measurement device of any of (1) to (6), the first optical element and the second optical element may each be a polarizing element.

(8) In the light scattering measurement device of any of (1) to (7), the direction of the polarization axis of the first optical element may be different from the direction of the polarization axis of the second optical element.

(9) The light scattering measurement device of any of (1) to (8) includes a plurality of detection units including a first detection unit and a second detection unit adjacent to the first detection unit, and a first detection unit corresponding to the first detection unit. A plurality of the optical element holders including an optical element holder and a second optical element holder corresponding to the second detection unit may be provided.

(10) The light scattering measurement device of any of (1) to (9) includes a first gear, meshes with the first gear, rotates in accordance with rotation of the first gear, and includes the first optical element holder and It may be provided with a second gear that is rotatable integrally with the first gear, and a third gear that rotates in accordance with the rotation of the first gear and is rotatable integrally with the second optical element holder. .

1 is a perspective view showing a light scattering measurement device according to an embodiment of the present invention.
FIG. 2 is a diagram schematically showing the planar arrangement of a light scattering measurement device according to an embodiment of the present invention.
Fig. 3 is a perspective view showing an optical element holder according to an embodiment of the present invention.
Fig. 4 is a side view showing an optical element holder according to an embodiment of the present invention.
FIG. 5 is a longitudinal cross-sectional view of FIG. 4 cut along a plane including the rotation axis AR.
Figure 6 is a cross-sectional view of Figure 4 taken along line VI-VI.
Fig. 7 is a perspective view showing a light scattering measurement device according to a modified example.

Hereinafter, embodiments of the present invention will be described in detail based on the drawings.

First, using FIGS. 1 and 2, an outline of a light scattering measurement device according to an embodiment of the present invention will be described. 1 is a perspective view showing a light scattering measurement device according to an embodiment of the present invention. FIG. 2 is a diagram schematically showing the planar arrangement of a light scattering measurement device according to an embodiment of the present invention.

As shown in FIGS. 1 and 2, the light scattering detection device 100 includes a light source 1, a sample cell 2, a plurality of detection units 3, a plurality of optical element holders 4, It is provided with an optical element holder support portion (5). The light scattering detection device 100 of this embodiment is a multi-angle light scattering measurement device.

The light source 1 generates light L that is irradiated to the sample. The sample cell 2 is a transparent container that accommodates the sample. Light L from the light source 1 enters the sample cell 2 (the sample within the sample cell 2). Scattered light SL is emitted from the sample cell 2 (the sample within the sample cell 2) in a plurality of directions with different angles θ around the sample cell 2.

Each of the plurality of detection units 3 detects the scattered light SL corresponding to the detection unit 3 among the scattered light SL emitted in the plurality of directions. Therefore, each of the plurality of detection units 3 is provided adjacent to each other at an angle θ with the sample cell 2 as the center on the circumference C1 surrounding the sample cell 2 (FIG. 2) . The output of each of the plurality of detection units 3 is transmitted to a control device (not shown). Then, the control device calculates the particle size or molecular weight of the substance in the sample based on the angle dependence of the intensity of the scattered light SL detected by each of the plurality of detection units 3. In this embodiment, the sample is assumed to be a liquid sample, but the sample may be a solid sample.

Each of the plurality of optical element holders 4 holds the first optical element 401-1 and the second optical element 401-2 (see FIGS. 3 to 6), as will be described later. Each of the plurality of optical element holders 4 is provided between the sample cell 2 and the detection unit 3 corresponding to the optical element holder 4. That is, each of the plurality of optical element holders 4 is arranged to be adjacent to each other at an angle θ on a concentric circumference C2 surrounding the sample cell 2 and located inside the circumference C1. There is (Figure 2). And, each of the plurality of optical element holders 4 has a first optical element on the path LP of the scattered light SL heading from the sample cell 2 to the detection unit 3 corresponding to the optical element holder 4. It is possible to rotate between a first posture in which 401-1 is located and a second posture in which second optical element 401-2 is located on the path LP (see FIGS. 3 to 6).

In this way, each of the plurality of optical element holders 4 is rotatable between the first posture and the second posture, so that in the light scattering measurement device 100, the first optical element 401-1 is used. Switching between measurement and measurement using the second optical element 401-2 becomes possible. 1 and 2 show a case where the number of detection units 3 and optical element holders 4 is 11, but the number of detection units 3 and optical element holders 4 is less than this, or It can be more.

As described above, the optical element holder support portion 5 supports the plurality of optical element holders 4 so as to be rotatable. That is, the optical element holder support portion 5 is formed of an annular plate along the circumference C2, and a sample cell 2 is disposed in a hole portion at the center of the annular shape. Additionally, the shape of the optical element holder support portion 5 is not limited to an annular shape, and may have other shapes.

Below, details of the optical element holder 4 will be described. First, using FIGS. 3 to 5, the entire optical element holder 4 will be described. Fig. 3 is a perspective view showing an optical element holder according to an embodiment of the present invention. Fig. 4 is a side view showing an optical element holder according to an embodiment of the present invention. FIG. 5 is a longitudinal cross-sectional view of FIG. 4 cut along a plane including the rotation axis AR. Additionally, in FIGS. 3 to 5, only a portion of the path LP and the optical element holder support 5 are shown.

3 to 5, the optical element holder 4 has a main body 40 and a handle 41. The main body 40 includes a lower part 40a and an upper part 40b.

The shape of the lower part 40a is a hexagonal column shape, and the shape of the upper part 40b is a cylindrical shape (FIG. 3). The central axis of the lower part 40a and the central axis of the upper part 40b are arranged on the same straight line (FIG. 5), and the straight line becomes the rotation axis AR of the optical element holder 4. Additionally, the shape of the lower portion 40a is not limited to a hexagonal column shape, and may be other shapes such as a column shape or a hemisphere shape.

The lower end of the upper part 40b is rotatably supported by the optical element holder support part 5 via spacers 51 and 51 (FIG. 5). The shape of the spacers 51 and 51 is each annular plate, with a cylindrical wall standing upright on its inner circumference. A plurality of holes are formed on the optical element holder support portion 5 along the circumference C2, one side of the spacer 51, 51 is inserted from the upper side of each hole, and one side of the spacer 51, 51 is inserted from the lower side of each hole. The other side is inserted. Additionally, a cylindrical handle 41 is non-rotatably fitted to the upper end of the upper part 40b (FIGS. 3 and 5). Thereby, the user can hold the handle 41 and rotate the optical element holder 4 around the rotation axis AR. The shape of the handle 41 may be other than a cylindrical shape.

Hereinafter, details of the optical element holder 4 will be described, also referring to FIG. 6. FIG. 6 is a cross-sectional view of FIG. 4 taken along line VI-VI.

The lower part 40a is provided with a first through hole TH1 and a second through hole TH2 penetrating opposing side surfaces (FIG. 6). The first optical element 401-1 is provided at one end of the first through hole TH1, and the other end of the first through hole TH1 is a first opening 402-1. The second optical element 401-2 is provided at one end of the second through hole TH2, and the other end of the second through hole TH2 is a second opening 402-2. Additionally, the first optical element 401-1 and the first opening 402-1 face each other. Likewise, the second optical element 401-2 and the second opening 402-2 face each other.

As a result, the scattered light SL incident on the first optical element 401-1 passes through the first through hole TH1 and is emitted from the first opening 402-1, so that the first optical element ( The detection unit 3 can detect the scattered light (SL) that has passed through 401-1). Similarly, since the scattered light SL incident on the second optical element 401-2 passes through the second through hole TH2 and is emitted from the second opening 402-2, the second optical element 401-2 The detection unit 3 can detect the scattered light (SL) that has passed through -2). Additionally, the scattered light SL incident on the first opening 402-1 may pass through the first through hole TH1 and then through the first optical element 401-1. Additionally, the scattered light SL incident on the second opening 402-2 may pass through the second through hole TH2 and then through the second optical element 401-2.

Additionally, the lower portion 40a is provided with a third through hole TH3 that penetrates the opposing side surface (FIG. 6). One end of the third through hole TH3 is the third opening 402-3, and the other end of the third through hole TH3 is the fourth opening 402-4. The third opening 402-3 and the fourth opening 402-4 face each other. Additionally, by rotating the optical element holder 4, the third opening 402-3 and the fourth opening 402-4 can be positioned on the path LP. In this way, by providing a through hole in which no optical element is provided, even when the light scattering measurement device 100 is provided with the optical element holder 4, the first optical element 401-1 and the second optical element Ordinary measurements that do not involve (401-2) can be performed.

Additionally, the optical element holder 4 may have a plurality of four or more through holes. That is, the optical element holder 4 may hold a plurality of three or more optical elements. Additionally, the optical element holder 4 may have a plurality of openings of five or more. In addition, the arrangement aspect of the first optical element 401-1 and the second optical element 401-2 is not limited to that shown in FIG. 6, and for example, the first optical element 401-1 and the second optical element 401-2 The optical elements 401-2 may be positioned adjacent to each other.

Additionally, the openings such as the first opening 402-1 are circular holes (see Fig. 3, etc.), but may be changed to a shape other than a hole within the range of performing the function of allowing light to pass through. For example, the opening may be a notch provided at the top or bottom of the lower portion 40a.

The center line CL1 of the first through hole TH1 is perpendicular to the rotation axis AR and passes through the rotation center CR, which is the intersection of the rotation axis AR and the path LP (FIG. 6). Similarly, the center line CL2 of the second through hole TH2 is perpendicular to the rotation axis AR and passes through the rotation center CR, which is the intersection of the rotation axis AR and the path LP (FIG. 6) . In addition, the center line CL3 of the third through hole TH3 is perpendicular to the rotation axis AR and passes through the rotation center CR, which is the intersection of the rotation axis AR and the path LP (FIG. 6) . Additionally, the rotation axis AR is located on the path LP and is perpendicular to the path LP (FIGS. 3 to 5).

As a result, when the optical element holder 4 is rotated, the scattered light SL can pass through the first through hole TH1, the second through hole TH2, and the third through hole TH3. Additionally, as long as this effect is achieved, the rotation axis AR and the path LP may intersect in a manner other than orthogonal. In addition, as long as this effect is exerted, the rotation axis AR and the center line CL1 of the first through hole TH1, the center line CL2 of the second through hole TH2, or the center line of the third through hole TH3 (CL3) may intersect in a manner other than orthogonal. In addition, the rotation axis AR does not have to be located on the path LP, and may intersect the path LP in a manner other than orthogonal to the path LP as long as it exerts the above effect.

The first optical element 401-1 and the second optical element 401-2 each have a plate shape with two main surfaces. Here, the normal direction of the main surface of each of the first optical element 401-1 and the second optical element 401-2 (i.e., the direction of the center line CL1 of the first through hole TH1 and the direction of the second through hole ( The direction of the center line (CL2) of TH2) is perpendicular to the rotation axis AR (FIGS. 5 and 6). In other words, the first optical element 401-1 and the second optical element 401-2 are each provided around the rotation axis AR and toward the rotation axis AR. That is, since the plurality of optical elements 401 are not provided on the same plane, the dead space caused by optical elements not involved in measurement can be reduced, so the optical element holder 4 can be made compact. Additionally, the main surfaces of the first optical element 401-1 and the second optical element 401-2 may be flat or curved.

The first optical element 401-1 and the second optical element 401-2 are each polarizing elements (polarizing plates) here as examples. The direction of the polarization axis of the first optical element 401-1 is parallel to the rotation axis AR, that is, the vertical direction, and the direction of the polarization axis of the second optical element 401-2 is perpendicular to the rotation axis AR. , that is, in the horizontal direction. Additionally, the direction of the polarization axis of the first optical element 401-1 and the direction of the polarization axis of the second optical element 401-2 may be set arbitrarily depending on the purpose of measurement. Additionally, as the first optical element 401-1 and the second optical element 401-2, in addition to the polarizing element, various optical elements such as an ND filter for adjusting the amount of light and a colored glass filter for adjusting the wavelength can be selected. there is. For example, one of the first optical element 401-1 and the second optical element 401-2 is used as a polarizing element, and the first optical element 401-1 and the second optical element 401-2 are used as polarizing elements. Different types of optical elements may be used in appropriate combination, such as using the other side as an ND filter.

However, in the optical element holder 4 of this embodiment, the rotation axis AR is located on the path LP, and the first optical element 401-1 and the first opening 402-1 are located on the rotation axis ( The second optical element 401-2 and the second opening 402-2 are arranged so as to sandwich the rotation axis AR (FIGS. 5 and 6). With this configuration, the side surface of the lower part 40a of the optical element holder 4 can be utilized more effectively, so the optical element holder 4 can be made more compact.

In addition, the direction of the center line CL1 of the first through hole TH1, the direction of the center line CL2 of the second through hole TH2, and the direction of the center line CL3 of the third through hole TH3 are rotated. It varies by 60 degrees around the center (CR) (Figure 6). That is, the first optical element 401-1, the third opening 402-3, the second optical element 401-2, the first opening 402-1, and the fourth opening 402- 4) and the second opening 402-2 are arranged at equiangular intervals around the entire circumference of the rotation axis AR. With this configuration, the side surface of the lower portion 40a of the optical element holder 4 can be utilized to the fullest extent, making it possible to make the optical element holder 4 even more compact.

Additionally, the present invention is not limited to the above embodiments, and various modifications are possible. Hereinafter, one modification of the present invention will be described using FIG. 7. Fig. 7 is a perspective view showing a light scattering measurement device according to a modified example.

In this modification, the light scattering measuring device 100 further includes a gear wheel 6 and a plurality of pinions 7. The gear wheel 6 is provided on the optical element holder support portion 5, and its plural teeth surround the sample cell 2. Additionally, the rotation axis of the gear wheel 6 is parallel to the rotation axis AR of each of the plurality of optical element holders 4.

Each of the plurality of pinions 7 is non-rotatably fitted to the upper end of the upper part 40b of the optical element holder, instead of the handle 41 in the above-described embodiment, and is rotatable integrally with the optical element holder. there is. Each of the plurality of pinions (7) engages with the gear wheel (6) and rotates according to the rotation of the gear wheel (6). In the previously described embodiment, each of the plurality of optical element holders 4 was rotated by manually turning the handle 41, but in this modification, the plurality of optical element holders 4 were rotated by power such as a motor. All of the optical element holders 4 can be rotated at once.

100: optical measurement device 1: light source
2: Sample cell 3: Detection unit
4: Optical element holder 5: Optical element holder support part
6: gear wheel 7: pinion
40: Body 41: Handle
401: optical element 402: aperture
51: Spacer L: Optical
SL: Scattered light LP: Path
AR: Rotating axis TH: Through hole
CR: center of rotation

Claims (10)

light source,
a sample cell that accommodates a sample and receives light from the light source;
a detection unit that detects light emitted from the sample cell;
It has a rotation axis orthogonal to a plane determined by the path of the emitted light from the sample cell to the detection unit, and includes a first optical element and a second optical element each provided around the rotation axis and facing the rotation axis. An optical element holder that holds and supports a plurality of optical elements,
An optical element holder support portion that supports the optical element holder so that it can rotate around the rotation axis.
Equipped with
The optical element holder is rotatable between at least a first posture in which the first optical element is located on the path and a second posture in which the second optical element is located on the path.
Light scattering measurement device. The optical element holder according to claim 1, wherein the optical element holder has a main body and holds the plurality of optical elements on a side surface of the main body,
A light scattering measurement device in which a plurality of openings including a first opening opening on a side opposite to the first optical element and a second opening opening on a side opposite to the second optical element are provided on a side of the main body. 3. Light scattering measurement according to claim 2, wherein the rotation axis is located on the path and is sandwiched between the first optical element and the first aperture, and is sandwiched between the second optical element and the second aperture. Device. The light scattering measurement device according to claim 3, wherein the plurality of optical elements and the plurality of openings are arranged at equiangular intervals around the entire circumference of the rotation axis. The light scattering measurement device according to claim 4, wherein the optical element holder includes a polygonal portion in its cross section. The light scattering measurement device according to claim 2, wherein the plurality of openings include third openings and fourth openings facing each other. The light scattering measurement device according to claim 1, wherein the first optical element and the second optical element are each a polarizing element. The light scattering measuring device according to claim 7, wherein the direction of the polarization axis of the first optical element and the direction of the polarization axis of the second optical element are different from each other. The method of claim 1, comprising: a plurality of detection units including a first detection unit and a second detection unit adjacent to the first detection unit;
A light scattering measurement device comprising a plurality of optical element holders including a first optical element holder corresponding to the first detection unit and a second optical element holder corresponding to the second detection unit. 10. The method of claim 9, comprising: a first gear;
a second gear that engages the first gear, rotates in accordance with the rotation of the first gear, and is rotatable integrally with the first optical element holder;
A light scattering measurement device comprising a third gear that engages the first gear, rotates in accordance with rotation of the first gear, and is rotatable integrally with the second optical element holder.

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