KR20240035345A - Test handler - Google Patents

Abstract

According to one aspect of the present invention, a cleaning element for removing foreign substances from the tester socket of the tester; a test tray including an insert on which the cleaning element can be seated; a loading device that loads the cleaning element into the test tray; a pushing device for bringing the cleaning element mounted on the test tray into contact with the tester socket by bringing the test tray into close contact with the tester socket of the tester; an unloading device that unloads the cleaning element from the test tray; A test handler may be provided, including a cleaning element tray that accommodates the cleaning element loaded into the test tray by the loading device or accommodating the cleaning element unloaded from the unloading device.

Description

Test handler {TEST HANDLER}

The present invention relates to a test handler.

A test handler is a device that supports testing of electronic components such as semiconductor devices manufactured through a certain manufacturing process and classifies electronic components by grade according to the test results. This test handler can test electronic components such as semiconductor devices by electrically connecting the electronic components to the tester socket of the tester.

Additionally, the test handler needs to electrically connect the electronic components loaded into the tester socket to the tester, and the electronic components connected to the tester need to be tested under various temperature conditions. Accordingly, a conventional test handler includes a pusher that electrically connects the electronic component to the tester by pressing it, and a temperature control unit that can control the temperature of the electronic component by adjusting the temperature of the pusher.

Meanwhile, when testing electronic components through a test handler, if contamination occurs in the tester socket, test failure may occur. In other words, the tester socket may be exposed to a contaminated environment during delivery, assembly, docking and undocking with the test handler. Additionally, metallic contamination may occur in the tester socket due to repeated contact with numerous electronic components. Additionally, since the tester socket can be exposed to high and low temperature environments multiple times, surrounding contaminants can easily be deposited and contaminated. Accordingly, when testing electronic components through a test handler, there is a need to periodically clean the tester socket.

However, to clean a conventional tester socket, the test handler must be stopped and the tester must be separated from the test handler so that the test socket can be easily cleaned by the writer. After cleaning, there is a problem that the tester must be connected to the test handler again. In addition, after joining, the equipment can be restarted only after checking for precise contact and sealing for temperature control. Accordingly, there is a problem that the equipment cannot be used for a long time because tests such as teaching stability, temperature environment stability, and bonding stability must be completed.

One embodiment of the present invention is to provide a test handler that can remove foreign substances from a tester socket without stopping the test handler.

According to one aspect of the present invention, a cleaning element for removing foreign substances from the tester socket of the tester; a test tray including an insert on which the cleaning element can be seated; a loading device that loads the cleaning element into the test tray; a pushing device for bringing the cleaning element mounted on the test tray into contact with the tester socket by bringing the test tray into close contact with the tester socket of the tester; an unloading device that unloads the cleaning element from the test tray; A test handler may be provided, including a cleaning element tray that accommodates the cleaning element loaded into the test tray by the loading device or accommodating the cleaning element unloaded from the unloading device.

Additionally, the cleaning element tray may be provided with a test handler that supports the cleaning element so that the lower surface of the cleaning element is spaced apart from the lower surface of the cleaning element tray when the cleaning element is accommodated.

Additionally, the cleaning element may include a contact portion for contacting the tester socket to remove foreign substances from the tester socket; and a support part supporting the contact part, and the cleaning element tray may be provided with a test handler that provides a space for accommodating at least a portion of the contact part.

In addition, the cleaning element tray may further include an accommodating portion for supporting an edge of the support portion, and the accommodating portion may be provided with a test handler in which a support protruding from an inner surface is formed to support a lower surface of the support portion. You can.

In addition, the cleaning element tray further includes an extension part extending upward from the top of the receiving part, the support part is disposed inside the extension part, and the inner surface of the extension part is inclined upward toward the outer surface of the extension part. A test handler, formed as an inclined plane, may be provided.

In addition, it further includes a stacker configured to accommodate a customer tray loaded with devices, wherein the test tray is configured to move along a preset closed path, and the cleaning element tray is loaded on the stacker or in the closed tray. A test handler may be provided, placed adjacent to the path.

Additionally, a test handler may be provided where the contact part includes at least one of a brush member that generates static electricity to remove the foreign material and an adhesive member that adsorbs the foreign material.

One embodiment of the present invention can remove foreign substances from the tester socket while the test handler is operating.

1 is a plan view of a test handler according to a first embodiment of the present invention.
Figure 2 is a cross-sectional view showing a cleaning element accommodated in a test tray of a test handler according to the first embodiment of the present invention.
Figure 3 is a cross-sectional view showing the cleaning element of the test handler according to the first embodiment of the present invention accommodated in the cleaning element tray.
Figure 4 is a cross-sectional view showing the brush member of the cleaning element of the test handler according to the first embodiment of the present invention.
Figure 5 is a plan view showing the bottom of the cleaning element of Figure 2.
Figure 6 is a diagram showing the contact between the cleaning element of Figure 2 and the needle of the tester socket.
Figure 7 is a cross-sectional view showing the insertion groove of the test tray and cleaning element of the test handler according to the first embodiment of the present invention having a semicircular cross section.
Figure 8 is a plan view showing the bottom of the cleaning element of Figure 7.
Figure 9 is a diagram showing the contact between the cleaning element of Figure 9 and the needle of the tester socket.
Figure 10 is a cross-sectional view showing the insertion groove of the tray and cleaning element of the test handler according to the first embodiment of the present invention having a triangular cross-section.
Figure 11 is a plan view showing the bottom of the cleaning element of Figure 10.
Figure 12 is a view showing the insertion groove formed in a shape in which a plurality of diagonal lines overlap each other when looking at the lower surface of the adhesive member of the test handler according to the first embodiment of the present invention.
Figure 13 is a top view of a test handler according to a second embodiment of the present invention.

Hereinafter, specific embodiments for implementing the technical idea of the present invention will be described in detail with reference to the drawings.

In addition, when describing the present invention, if it is determined that a detailed description of a related known configuration or function may obscure the gist of the present invention, the detailed description will be omitted.

In addition, when a component is mentioned as 'contacting', 'supporting', or 'connected' to another component, it should be understood that although it may directly contact, support, or connect to the other component, other components may exist in between. something to do.

The terms used in this specification are merely used to describe specific embodiments and are not intended to limit the invention. Singular expressions include plural expressions unless the context clearly dictates otherwise.

In addition, it should be noted in advance that expressions such as upper, lower, and side in this specification are explained based on the drawings, and may be expressed differently if the direction of the object in question changes. For the same reason, in the accompanying drawings, some components are exaggerated, omitted, or schematically shown, and the size of each component does not entirely reflect the actual size.

Additionally, terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but the components are not limited by these terms. These terms are used only to distinguish one component from another.

As used in the specification, the meaning of "comprising" is to specify a specific characteristic, area, integer, step, operation, element, and/or component, and to specify another specific property, area, integer, step, operation, element, component, and/or group. It does not exclude the existence or addition of .

Hereinafter, the test handler 1 according to the first embodiment of the present invention will be described.

Referring to FIG. 1, the test handler 1 according to the first embodiment of the present invention is an apparatus for testing a device. This test handler (1) includes a main body (B), a test tray (100), a cleaning element (200), a loading device (300), a soak chamber (400), a test chamber (500), a pushing device (600), and a de-soak device. It may include a chamber 700, an unloading device 800, a sensor 900, a control device 1000, a stacker 1100, a cleaning element tray 1200, and an injection device 1300.

The main body (B) includes a test tray 100, a cleaning element 200, a loading device 300, a soak chamber 400, a test chamber 500, a pushing device 600, a desoak chamber 700, and an unloading device. It can support one or more of the device 800, sensor 900, control device 1000, stacker 1100, cleaning element tray 1200, and spray device 1300. The test tray 100 and the cleaning element tray 1200 can be movably supported in this main body (B).

Referring to FIG. 2, one or more test trays 100 are provided and can transfer one or more of the loaded devices and cleaning elements 200 by circulating along a closed path (C) preset by a transfer device. In other words, the test tray 100 can pass through the loading position (LP), the soak chamber 400, the test chamber 500, the desoak chamber 700, and the unloading position (UP) by the transfer device. Additionally, the test tray 100 may include an insert 110 on which the device and the cleaning element 200 can be seated. By this insert 110, the cleaning element 200 and the device can be moved together with the test tray 100 along the closed path C. The insert 110 may include a body 111, a latch 112, and a protrusion 113.

The body 111 can load a device and a cleaning element 200. A through hole through which the cleaning element 200 and the device can be inserted may be formed in this body 111. For example, the through hole may be formed in the vertical direction in which the pushing device 600 moves. Additionally, a protrusion 113 may be formed on the body 111 that protrudes from the inner peripheral surface of the body 111 toward the cleaning element 200 and the device located in the through hole and extends along the inner peripheral surface of the body 111. The cleaning element 200 and the device can be supported in the through hole of the body 111 by this protrusion 113. In other words, the edge of the support part 210, which will be described later, may be supported on the upper surface of the protrusion 113.

The latch 112 may press the cleaning element 200 and the device inserted into the body 111 so that the cleaning element 200 and the device are supported by the body 111 . This latch 112 may be rotatably disposed with respect to the body 111. For example, the latch 112 is rotated upward so that the cleaning element 200 and the device are inserted into the through hole of the body 111, or the cleaning element 200 and the device inserted into the through hole of the body 111 are rotated upward. It can be rotated downward to press towards the protrusion 113. Additionally, the latch 112 may rotate downward to press the cleaning element 200 and the upper surface of the device. By this latch 112, the cleaning element 200 and the device inserted into the through hole of the body 111 can be pressed into the protrusion 113.

Referring further to FIGS. 3 and 4, the cleaning element 200 may be an element for removing foreign substances (S) from the tester socket of the tester. This cleaning element 200 is formed in a shape similar to a device and can be loaded on the test tray 100 and moved along the closed path C. The cleaning element 200 may include a support portion 210 and a contact portion 220.

The support portion 210 may be inserted into a through hole of the body 111 and supported on the body 111 . In other words, the lower surface of the support part 210 may be in contact with the upper surface of the protrusion 113, and the upper surface of the support part 210 may be pressed by the latch 112. The horizontal length of the support portion 210 may be greater than the horizontal length of the inner diameter of the protrusion 113. For example, the support part 210 may be a printed circuit board.

The contact portion 220 may be supported on the support portion 210 so as to contact the tester socket and remove foreign substances (S) from the tester socket. This contact portion 220 may be disposed lower than the support portion 210 when the cleaning element 200 is supported on the body 111. Additionally, the contact portion 220 may be disposed inside the protrusion 113 to be spaced apart from the protrusion 113 when the cleaning element 200 is supported on the body 111. When the support part 210 is accommodated in the cleaning element tray 1200, the contact part 220 may be supported on the cleaning element tray 1200 so as to be spaced apart from the lower surface of the cleaning element tray.

The horizontal length of the contact portion 220 may be smaller than the horizontal length of the support portion 210. Additionally, the length of the contact portion 220 in the vertical direction may be equal to or greater than the length of the protrusion 113 in the vertical direction. In other words, the lower end of the contact portion 220 may be located lower than the body 111 when the cleaning element 200 is supported on the body 111. Additionally, the contact portion 220 may include one or more of an adhesive member 221, a connecting member 222, an elastic member 223, and a brush member 224.

Referring further to FIGS. 5 to 12, the adhesive member 221 is in contact with the tester socket and can adsorb foreign substances (S) of the tester socket. In other words, when the adhesive member 221 contacts the tester socket, the foreign matter (S) in the tester socket may be separated from the tester socket and adhere to the adhesive member 221. Additionally, the length of the adhesive member 221 in the vertical direction may be equal to or greater than the length of the protrusion 113 in the vertical direction. This adhesive member 221 can be formed in various ways to remove foreign substances (S) from the tester socket.

For example, the lower surface of the adhesive member 221 that contacts the tester socket may be formed to be flat. As another example, the lower surface of the adhesive member 221 may be formed to correspond to the shape of the tester socket. In other words, the adhesive member 221 may be formed with an insertion groove 221a that is introduced from the lower surface toward the support portion 210 and into which the needle N of the tester socket can be inserted. When looking at the lower surface of the adhesive member 221, the insertion groove 221a may have a shape such as a square or a circle corresponding to the shape of the needle N of the tester socket, but is not limited thereto. Additionally, the insertion groove 221a may have a cross-section such as square, cone, or triangle corresponding to the shape of the needle N of the tester socket, but is not limited thereto. As another example, the insertion groove 221a of the adhesive member 221 may be formed to open when the adhesive member 221 and the tester socket come into contact and the needle N of the tester socket is inserted. In other words, the size of the insertion groove 221a can be increased. For example, the maximum length in the horizontal direction of the insertion groove (221a) before the needle (N) of the tester socket is inserted into the insertion groove (221a) is when the needle (N) of the tester socket is inserted into the insertion groove (221a). It may be formed to be smaller than the maximum length in the horizontal direction of the later insertion groove 221a. Due to this insertion groove (221a), when the needle (N) of the tester socket is inserted into the insertion groove (221a), the insertion groove (221a) can contact the end and side of the needle (N) of the tester socket. In addition, when the tester socket needle (N) is removed from the insertion groove (221a), the insertion groove (221a) is contracted by its own elastic force and can return to the shape before the tester socket needle (N) was inserted. When looking at the lower surface of the adhesive member 221, this insertion groove 221a may be formed in various shapes such as a straight line, diagonal line, plus line, or X-line. Additionally, the insertion groove 221a may be formed in a shape where a plurality of diagonal lines overlap each other when looking at the lower surface of the adhesive member 221.

The connecting member 222 may be disposed between the adhesive member 221 and the support portion 210 so that the adhesive member 221 is supported on the support portion 210. Additionally, the connecting member 222 can attach the adhesive member 221 to any one of the support portion 210 and the elastic member 223 with an adhesive force stronger than the adsorption force of the adhesive member 221. This connecting member 222 can prevent the adhesive member 221 from being separated from the support portion 210 or the elastic member 223 even if the adhesive member 221 contacts the tuster socket.

The elastic member 223 may be disposed between the adhesive member 221 and the connecting member 222 to provide elastic force. This elastic member 223 is compressed when the adhesive member 221 is in contact with the tester socket, and changes the shape of the adhesive member 221 so that the lower surface of the adhesive member 221 corresponds to the shape of the tester socket. When 221 is separated from the tester socket, the shape of the adhesive member 221 can be restored by providing elastic force.

The brush member 224 may extend downward from the lower surface of the support portion 210. When this brush member 224 comes into contact with the tester socket, it can generate static electricity to remove foreign substances.

The loading device 300 may move the untested device or cleaning element 200 to the test tray 100 at the loading position LP. In other words, the loading device 300 can move the device from the customer tray loaded on the stacker 1100 to the test tray 100. Additionally, the loading device 300 can move the cleaning element 200 from the cleaning element tray 1200 to the test tray 100. Cleaning element

The soak chamber 400 may be operated to preheat or precool the device loaded on the test tray 100 transported from the loading position LP according to test conditions. Additionally, when the cleaning element 200 is loaded on the test tray 100, the soak chamber 400 may not be operated or may be operated to be maintained at room temperature.

The test chamber 500 may provide a space where devices loaded on the test tray 100 transferred from the soak chamber 400 are tested. In other words, the test tray 100 transferred to the test chamber 500 can be placed on the upper side of the tester. Additionally, the test chamber 500 may be provided with a vibration unit 510.

The vibrating unit 510 may vibrate the test tray 100 when the cleaning element 200 is loaded on the test tray 100. Additionally, the vibrating unit 510 may vibrate the test tray 100 when the cleaning element 200 and the tester socket come into contact. The vibrating unit 510 can vibrate the test tray 100 in various directions. For example, the vibrator 510 may vibrate the test tray 100 in the up, down, left, and right directions. When the vibrating unit 510 vibrates the test tray 100, the vibration distance in the horizontal direction of the needle N is greater than the horizontal length of the insertion groove 221a when the needle N is inserted. The test tray 100 may be vibrated to form the test tray 100. In addition, the vibration unit 510 can set the vibration distance of the needle N to prevent the insertion groove 221a of the adhesive member 221 from opening excessively due to the needle N of the tester socket. For example, the vibrating unit 510 adjusts the test tray 100 so that the vibration distance of the needle N is 1.1 to 1.2 times the horizontal length of the insertion groove 221a when the needle N is inserted. ) can be vibrated.

Additionally, the vibration unit 510 may vibrate and move the test tray 100 based on the shape of the insertion groove 221a. For example, when the shape of the insertion groove 221a when viewed from the bottom is square, the vibrating unit 510 is configured to move the needle N while vibrating along the square inner peripheral surface of the insertion groove 221a. (100) can be vibrated and moved in the horizontal direction. In addition, the vibrating unit 510 is configured to operate the test tray 100 so that when the shape of the insertion groove 221a when viewed from the bottom is circular, the needle N moves in a circular shape along the inner peripheral surface of the insertion groove 221a and vibrates. ) can be vibrated. In addition, the vibrating unit 510 is tested so that when the shape of the insertion groove 221a when viewed from the bottom is cross-shaped, the needle N is vibrated and moves in the forward, left, and right directions along the shape of the insertion groove 221a. The tray 100 can be vibrated and moved in the horizontal direction.

By this vibrating unit 510, the cleaning element 200 vibrates together with the test tray 100 to efficiently remove foreign substances (S) from the tester socket. For example, at least a portion of the cleaning element 200 may be vibrated by the vibration unit 510 and repeatedly placed in a contact state in which it is in contact with the tester socket and a non-contact state in which it is separated from the tester socket. As the contact state and non-contact state are repeated, foreign substances (S) in the tester socket may fall from the tester socket and be adsorbed to the adhesive member 221.

The pushing device 600 can press the device or cleaning element 200 into the tester socket when the test tray 100 is transferred to the test chamber 500. For example, as the pushing device 600 moves downward, the device or cleaning element 200 may be pressed into the tester socket. When the device is pressed into the tester socket by the pushing device 600, the device can be electrically connected to the tester and tested. In addition, when the cleaning element 200 is pressed into the tester socket by the pushing device 600, the adhesive member 221 and the tester socket come into contact, and foreign substances (S) in the tester socket may be adsorbed to the adhesive member 221. . Meanwhile, when the cleaning element 200 is pressed into the tester socket by the pushing device 600, the tester may not operate.

The desoak chamber 700 may be heated or cooled in the test chamber 500 and operated to assimilate the tested device to the temperature required for unloading. Additionally, the desoak chamber 700 may not be operated when the cleaning element 200 is loaded on the transferred test tray 100 or may be operated to maintain room temperature.

The unloading device 800 can unload the device or cleaning element 200 loaded on the test tray 100 transferred from the desoak chamber 700 to the unloading position (UP) from the test tray 100. . When devices are loaded on the test tray 100, the unloading device 800 can classify the devices by test class and load them on a customer tray loaded on the stacker 1100. In addition, the unloading device 800 can load the cleaning element 200 on the cleaning element tray 1200 when the cleaning element 200 of the test tray 100 transferred to the unloading position UP is loaded. there is.

The sensor 900 can detect the position of either the device or the cleaning element 200 on the insert 110. The sensor 900 can detect the position of the cleaning element 200 in the insert 110 by detecting the identifier of the cleaning element 200. For example, the sensor 900 may be a CCD image sensor 900. The identifier may be provided on the upper surface of the support portion 210 seated on the insert 110. In other words, if the sensor 900 detects the identifier, it may determine that the cleaning element 200 is seated in the insert 110. If the sensor 900 does not detect the identifier, it may determine that the device is seated, but the sensor 900 is not limited to this. .

The control device 1000 includes a loading device 300, a soak chamber 400, a pushing device 600, a desoak chamber 700, an unloading device 800, a vibration unit 510, and an injection device 1300. You can control it. Additionally, the control device 1000 can determine whether to clean the tester socket based on a normal or abnormal signal transmitted from the tester. In other words, the control device 1000 can enter the cleaning mode and perform cleaning when an abnormal signal is generated in the tester. A normal signal may be a signal transmitted when the tester is normal or the tester's test is normal. An abnormal signal may be a signal generated when an error occurs in the tester or when a foreign substance (S) is present in the tester socket.

When a normal signal is received, the control device 1000 includes a loading device 300, a soak chamber 400, a pushing device 600, a desoak chamber 700, and an unloading device 800 so that untested devices can be tested. ), the vibration unit 510, and the injection device 1300 can be controlled. In other words, when a normal signal is received, the control device 1000 can control the loading device 300 so that the device is loaded on the test tray 100 located at the loading position LP. In addition, when a normal signal is received, the control device 1000 operates the soak chamber 400, the pushing device 600, and the desoak chamber 700 according to the position of the device detected by the sensor 900, and The eastern part 510 can be controlled not to operate. Additionally, when the test tray 100 is in the unloading position (UP), the control device 1000 can control the unloading device 800 to load a device from the test tray 100 onto a customer tray.

When an abnormal signal is received, the control device 1000 can analyze the abnormal signal and determine whether foreign matter has been removed from the tester socket. If it is determined that it is necessary to remove foreign substances (S) from the tester socket, the control device 1000 operates the loading device 300, soak chamber 400, and pushing device 600 so that the cleaning element 200 removes foreign substances from the tester socket. , the desoak chamber 700, the unloading device 800, the vibration unit 510, and the injection device 1300 can be controlled.

In other words, the control device 1000 operates the loading device 300 so that the cleaning element 200 loaded on the cleaning element tray 1200 is loaded on the test tray 100 located at the loading position LP based on the received abnormal signal. ) can be controlled. In addition, the control device 1000 may control the soak chamber 400 and the desoak chamber 700 not to operate or to maintain room temperature based on the received abnormal signal. In addition, the control device 1000 controls the spray device 1300 and the pushing device 600 based on the position of the cleaning element 200 detected by the sensor 900 and sends a signal to the tester to stop operation of the tester. It can be delivered. Additionally, the control device 1000 can control the vibrating unit 510 to vibrate when the cleaning element 200 contacts the tester socket by the pushing device 600.

In addition, the control device 1000 can control the unloading device 800 so that the cleaning element 200 is loaded on the cleaning element tray 1200 when the test tray 100 is located in the unloading position (UP). .

The stacker 1100 can load a customer tray and a cleaning element tray 1200. This stacker 1100 may include a customer stacker, a loading stacker, an unloading stacker, and a multi-stacker in which customer trays are loaded. Additionally, the stacker 1100 may include a cleaning element stacker that accommodates the cleaning element tray 1200 and does not accommodate the customer tray, but is not limited thereto. In other words, the cleaning element tray 1200 can be loaded on any one of a loading stacker, an unloading stacker, a multi-stacker, and a cleaning element stacker. When the tester socket is cleaned, the loading device can load the cleaning element 200 of the cleaning element tray 1200 of the cleaning element stacker into the test tray 100. Additionally, the cleaning element 200 of the cleaning element tray 1200 of the cleaning element stacker can be loaded into the test tray 100 without going through the customer stacker.

The cleaning element tray 1200 can accommodate the cleaning element 200. When the cleaning element 200 is accommodated in the cleaning element tray 1200, the cleaning element 200 may be supported so that the lower surface of the cleaning element 200 is spaced apart from the lower surface of the cleaning element tray 1200. This cleaning element tray 1200 may include a receiving portion 1210 and an extension portion 1220. The receiving portion 1210 and the extension portion 1220 may be referred to as pockets, and a plurality of such pockets may be formed and arranged, but are not limited thereto.

The receiving portion 1210 provides a receiving space 1210a for accommodating at least a portion of the contact portion 220 and may support an edge of the supporting portion 210. Additionally, when the support portion 210 is supported on the receiving portion 1210, the outer surface of the contact portion 220 may be disposed inside the receiving space 1210a and spaced apart from the inner surface of the receiving portion 1210. Additionally, a support protrusion 1211 protruding from the inner surface may be formed in the receiving part 1210 to support the lower surface of the supporting part 210, but the present invention is not limited thereto. In other words, the support jaw 1211 may support the edge of the support part 210 so as not to contact the outer surface of the contact part 220.

The extension portion 1220 may extend upward from the top of the receiving portion 1210. Additionally, the extension portion 1220 may be provided at the top of the receiving portion 1210 to form a step with the support protrusion 1211 of the receiving portion 1210. Additionally, the inner surface of the extension part 1220 may be formed as an inclined surface that slopes upward toward the outer surface of the extension part 1220. In other words, the inner diameter of the extension portion 1220 may become larger toward the top. A support portion 210 may be disposed inside the extension portion 1220. Additionally, the extension portion 1220 may guide the cleaning element 200 to the receiving portion 1210. In other words, when the cleaning element 200 is accommodated in the cleaning element tray 1200, it can be moved and supported along the inner surface of the extension part 1220 to the receiving part 1210.

The spray device 1300 may operate to spray wind, dry air, etc. toward the tester socket to remove foreign substances (S) from the tester socket. This injection device 1300 may be provided in one or more of the test chamber 500 and the pushing device 600, but is not limited thereto. The injection device 1300 may be operated based on the control device 1000's abnormal signal, but is not limited thereto and may be operated even when the control device 1000 receives a normal signal. For example, the spray device 1300 may spray each time a device is tested on a tester.

Hereinafter, the operation and effects of the test handler 1 according to the first embodiment of the present invention will be described.

The cleaning element of the test handler (1) according to the first embodiment of the present invention can efficiently remove foreign substances (S) from the tester socket. In other words, the foreign matter (S) may be separated from the tester socket by the adsorption force of the adhesive member 221. In addition, since the lower surface of the adhesive member 221 in contact with the tester socket can be formed to correspond to the shape of the tester socket, foreign substances (S) can be efficiently separated from the tester socket.

In addition, when the test tray 100 is vibrated by the vibrating unit 510, the cleaning element 200 may also be vibrated, so the adhesive member 221 of the cleaning element 200 is repeatedly in contact and non-contact with the tester socket. Since it can be placed, the foreign matter (S) can be efficiently separated from the test tray (100).

In addition, the cleaning element 200, like the device, is seated on the test tray 100, transferred to the test chamber 500, and contacted with the tester socket by the pushing device 600 to remove foreign substances (S). In other words, the tester socket can be disassembled from the tester or efficiently cleaned by the cleaning element 200 without the test handler 1 being stopped.

In addition, the cleaning element 200 for removing foreign substances (S) from the tester socket is loaded on the test tray 100 and moves along the same path as the device to remove foreign substances (S) from the tester socket, so the test handler (1) can be operated continuously. In other words, the test handler 1 does not need to stop when the foreign matter S in the tester socket is removed.

Additionally, by loading the cleaning element tray 1200 on the stacker 1100, space utilization of the test handler 1 can be increased. In other words, since the cleaning element 200 can be loaded using the existing stacker 1100, there is no need to modify the test handler 1 to store the cleaning element 200.

In addition, the cleaning element tray 1200 can support the cleaning element 200 so that the lower surface of the cleaning element 200 is spaced apart from the lower surface of the cleaning element tray 1200 when the cleaning element 200 is accommodated, so that cleaning is possible. The device tray 1200 and the cleaning device 200 can be prevented from being adsorbed to each other.

Hereinafter, with reference to FIG. 13, the test handler 1 according to the second embodiment of the present invention will be described. In explaining the second embodiment, there is a difference in that the table unit 1400 is further included, and this difference will be mainly explained.

The table unit 1400 may be placed near or in the closed path (C).

As a first example, the table unit 1400 may include a cleaning table 1410 and a testing table 1420. The test table 1420 may be a table on which the electronic component to be tested is placed. In other words, a device can be accommodated on the test table 1420. The cleaning table 1410 may be a table on which the cleaning element 200 is seated. The cleaning table 1410 and the testing table 1420 may be formed integrally with each other. In other words, the cleaning table 1410 may be a partial area of the table unit 1400, and the pocket shape of the cleaning element tray 1200 may be formed in this area as shown in FIG. 3. Meanwhile, in this example, the cleaning table 1410 and the testing table 1420 may be formed separately from each other.

As a second example, the table unit 1400 may include a cleaning table 1410 and a testing table 1420. In this example, the cleaning table 1410 may have the same or corresponding configuration as the cleaning element tray 1200 described above. In other words, the cleaning table 1410 may be composed of a cleaning element tray 1200 or may provide a pocket corresponding to the cleaning element tray 1200.

As a third example, as in the second example described above, the table unit 1400 may include a cleaning table 1410 and a testing table 1420. In this example, the cleaning table 1410 may have the same or corresponding configuration as the cleaning element tray 1200 described above, and can be used as a stacker 1100 like a customer tray without being restricted to the frame of the handler 1. Can move circularly.

Meanwhile, the existing table has a structure that contains electronic components before testing or electronic components after testing, so there are limitations in using it by seating a cleaning element. Accordingly, the table unit 1400 of the present invention is a cleaning table 1410 in which at least a portion of an existing table is configured in the form shown in FIG. 3 so that the cleaning element 200 is seated on the existing table and can be operated stably. ) may also be included.

The table unit 1400 may be placed on the closed path (C) or near any one of the loading position (LP), the unloading position (UP), and the closed path (C). By this table unit 1400, the cleaning element tray 1200 and the cleaning element 200 are also arranged on the closed path (C) or are positioned among the loading position (LP), unloading position (UP), and closed path (C). It can be placed in any one neighborhood.

The cleaning table 1410 included in the table unit 1400 in the first and second examples described above is a movable table configured to be movable and has a rail formed on the base plate, which is the basic bottom surface of the test handler 1. It may be configured to allow advancement and retreat on the platform. In other words, the cleaning table 1410 may be movably disposed on the main body (B). Additionally, the testing table 1420 and the cleaning table 1410 can be selectively supported on the main body. In other words, the testing table 1420 and the cleaning table 1410 can be supported on the main body (B) in a removable manner. For example, the test table 1420 and the cleaning table 1410 can be removed from the main body (B) and replaced with the cleaning element tray 1200. Additionally, the cleaning table 1410 may be moved onto the closed path (C) or spaced apart from the closed path (C). This cleaning table 1410 has high pocket precision and the pitch interval is configured to match the interval between the inserts 110 of the test tray 100, so that the picker of the loading device 300 and the unloading device 800 can grip and hash. Errors can be minimized.

The cleaning table 1410 or the cleaning element tray 1200 included in the table unit 1400 in the third example is not tied to the configuration of the tester handler 1, unlike the customer tray that operates only inside the stacker 1000. It may not be possible. In other words, the cleaning table 1410 or the cleaning element tray 1200 may be configured to move between the table unit 1400 and the stacker 1000. The cleaning table 1410 or cleaning element tray 1200 has narrow spacing between pockets so that as many electronic components (e.g., cleaning elements, devices) can be seated as possible, and there is some clearance to allow electronic components to be easily inserted and removed. It can be made with a pocket.

Based on the received abnormal signal, the control device 1000 controls the test tray in which the cleaning element 200 of the cleaning element tray 1200 loaded on the table unit 1400 or the stacker 1100 is transferred to the loading position (LP). The loading device 300 can be controlled so that it is loaded on 100. In addition, the control device 1000 moves the cleaning element 200 loaded on the test tray 100 transferred to the unloading position (UP) to the space where the existing table is located, a partial area of the existing table, and the table unit 1400. Alternatively, the unloading device 800 can be controlled to load the cleaning element tray 1200 of the stacker 1100. Meanwhile, the cleaning element tray 1200 in the first to third examples described above is the same only in that the contact portion 220 of the cleaning element 200 is spaced apart from the bottom of the receiving portion 1210, and the location varies. They may be formed differently in at least one of the following: spacing between pockets, precision within the pocket, and whether or not they are bound to the base plate surface of the handler 1.

Hereinafter, the operation and effects of the test handler 1 according to the second embodiment of the present invention will be described.

The table unit 1400 of the test handler 1 according to the second embodiment of the present invention is disposed near the loading position LP and the closing path C so that the cleaning element 200 can be quickly placed on the test tray 100. Since it can be loaded easily, foreign substances (S) in the tester socket can be quickly removed.

Additionally, since the table unit 1400 can be provided, many customer trays can be loaded on the stacker 1100.

Although embodiments of the present invention have been described above as specific embodiments, this is merely an example, and the present invention is not limited thereto, and should be construed as having the widest scope following the technical idea disclosed in this specification. A person skilled in the art may implement a pattern of a shape not specified by combining/substituting the disclosed embodiments, but this also does not depart from the scope of the present invention. In addition, a person skilled in the art can easily change or modify the embodiments disclosed based on the present specification, and it is clear that such changes or modifications also fall within the scope of the present invention.

1: Test handler 100: Test tray
110: insert 111: body
112: latch 113: protrusion
200: cleaning element 210: support part
220: contact portion 221: adhesive member
222: connecting member 223: elastic member
224: Brush member 300: Loading device
400: Soak chamber 500: Test chamber
510: Vibration unit 600: Pushing device
700: Desoak chamber 800: Unloading device
900: Sensor 1000: Control device
1100: Stacker 1200: Cleaning element tray
1210: receiving portion 1211: support jaw
1220: extension 1300: injection device
1400: table unit 1410: cleaning table
1420: Table for testing

Claims (7)

A cleaning element for removing foreign substances from the tester socket of the tester;
a test tray including an insert on which the cleaning element can be seated;
a loading device that loads the cleaning element into the test tray;
a pushing device for bringing the cleaning element mounted on the test tray into contact with the tester socket by bringing the test tray into close contact with the tester socket of the tester;
an unloading device that unloads the cleaning element from the test tray; and
A cleaning element tray containing the cleaning elements loaded into the test tray by the loading device or receiving the cleaning elements unloaded from the unloading device,
Test handler. According to claim 1,
The cleaning element tray supports the cleaning element so that the lower surface of the cleaning element is spaced from the lower surface of the cleaning element tray when the cleaning element is accommodated.
Test handler. According to claim 1,
The cleaning element is,
a contact portion that contacts the tester socket to remove foreign substances from the tester socket; and
It includes a support portion supporting the contact portion,
In the cleaning element tray,
Providing a space for accommodating at least a portion of the contact portion,
Test handler. According to claim 3,
In the cleaning element tray,
Further comprising a receiving portion for supporting an edge of the support portion,
In the receiving part,
A support jaw protruding from the inner surface is formed to support the lower surface of the support portion,
Test handler. According to claim 4,
The cleaning element tray,
It further includes an extension portion extending upward from the top of the receiving portion,
The support portion is disposed inside the extension portion,
The inner surface of the extension portion is formed as an inclined surface inclined toward the outer surface of the extension portion upward.
Test handler. According to claim 1,
It further includes a stacker configured to accommodate a customer tray loaded with devices,
The test tray is configured to move along a preset closed path,
The cleaning element tray is loaded on the stacker or disposed adjacent to the closed path.
Test handler. According to claim 3,
The contact part
Comprising at least one of a brush member that generates static electricity to remove the foreign substances and an adhesive member that adsorbs the foreign substances,
Test handler.

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