KR20240024078A - Pressure-activated ferrules for high-pressure droplet generator nozzles - Google Patents

Abstract

A capillary retention system comprising a pressure activated ferrule is disclosed, the ferrule being double sealing and configured and arranged such that internal target material pressure acts to increase the sealing pressure. According to another aspect of the embodiment, the pressure activated ferrule is configured and positioned such that the sealing contact pressure on the capillary is closer to the capillary free surface, forming the nozzle outlet and thus reducing the capillary free length, and thus the bending mode of the capillary. increases, making it less likely to be excited by system oscillations.

Description

Pressure-activated ferrules for high-pressure droplet generator nozzles

Cross-reference to related applications

This application claims priority to U.S. Application No. 63/213,804, “PRESSURE-ENERGIZED FERRULE FOR HIGH PRESSURE DROPLET GENERATOR NOZZLE”, filed June 23, 2021, which U.S. application is incorporated by reference in its entirety. included in the specification.

This disclosure relates to a nozzle device. This nozzle device can be used to create targets from extreme ultraviolet (EUV) light sources.

For example, EUV light, which is electromagnetic radiation (sometimes called soft It is used in the photolithography process to do this.

Methods for generating EUV light include, but are not limited to, changing the physical state of a target material to a plasma state. Target materials include elements with emission lines in the EUV range (eg, xenon, lithium, tin). In one such method, often called laser-generated plasma (“LPP”), the required plasma is generated, for example, by irradiating the target material in the form of droplets, streams or clusters of the target material with an amplified light beam (which may be referred to as a driving laser). is created. In this process, plasma is typically generated in a sealed vessel, such as a vacuum chamber, and is monitored using various types of metrology equipment.

CO ₂ amplifiers and lasers that output an amplified light beam at a wavelength of about 10600 nm can provide distinct advantages as a driving laser for irradiating target materials in the LPP process. This is especially true for tin-specific target materials, such as tin-containing materials. For example, one advantage is the ability to produce relatively high conversion efficiency between the driving laser input power and output EUV power.

In an EUV light source, EUV can be generated in a two-step process, in which a droplet of target material moving to the irradiation site is first hit by a pre-pulse, which then triggers a subsequent phase at the irradiation site. Condition the droplet for phase transition. Conditioning in this context may include changing the shape of the droplet, for example flattening the droplet, or distributing the droplet, for example dispersing a portion of the droplet at least partially as a mist. You can. For example, a pre-pulse hits the droplet and modifies the distribution of target material, and a main pulse hits the target and transforms it into an EUV-emitting plasma. In some systems, the pre-pulse and main pulse are provided by the same laser and in other systems the pre-pulse and main pulse are provided by two separate lasers. In some systems, there may be one or more additional conditioning pulses before the main pulse.

A nozzle device can be used to create a stream or jet of fluid material from a capillary tube that terminates at a nozzle outlet or orifice. This nozzle device must remain in place during operation. In one embodiment of the nozzle retention system, a polyimide ferrule is used to seal the glass capillary to the nozzle body. This ferrule creates a seal to contain the high pressure liquid target material. Sealing is achieved using a tightening nut.

This implementation has several drawbacks. One drawback is that as the internal pressure of the target material increases, the ferrule loses its sealing pressure because the polyimide ferrule loses its strength as it heats. Therefore, these ferrules would not be suitable for use at higher pressures, for example, greater than 14,000 psi (1000 bar), which is expected to be required in future droplet generators. Additionally, the ferrule softens at the droplet generator operating temperature, thus adding non-linearity to the overall nozzle system. The resulting decrease in stiffness can lead to capillary tip vibration, which can affect the stability of the droplet.

Therefore, there is a need for a capillary retention system that avoids these drawbacks.

The following provides a simplified summary of one or more embodiments to provide a basic understanding of the embodiments. This summary is not an extensive overview of all embodiments contemplated, and is not intended to identify key or critical elements of all embodiments or to limit the scope of any or all embodiments. Its sole purpose is to present some concepts of one or more embodiments as a prelude to the more detailed description that is presented later.

According to one aspect of embodiments, an apparatus for an extreme ultraviolet light source is disclosed, the apparatus comprising a structure defining a cavity for maintaining under pressure a liquid target material that emits extreme ultraviolet (EUV) light in a plasma state. nozzle body; a capillary tube having a first end and a second end, the capillary being in fluid communication with the cavity at the first end and the second end defining a nozzle outlet for discharging a stream of target material; a ferrule having a through hole, surrounding and forming a seal with at least a longitudinal portion of the capillary, the capillary extending through the through hole; and a nozzle nut mechanically coupling the ferrule to the nozzle body, wherein at least a portion of the ferrule has a conical shape, and the outer diameter of the ferrule decreases in a direction toward the second end of the capillary. The portion of the ferrule having a conical shape is dimensioned to mate with an inner surface of a complementary cavity defined by the nozzle nut to form a seal between the portion of the ferrule having a conical shape and the inner surface. Ferrules are formed from polyimide, polyamide-imide, or polybenzimidazole. The nozzle body is formed of a material containing one or more of molybdenum, tungsten, and tantalum, or an alloy containing one or more of molybdenum, tungsten, and tantalum. The ferrule has an outwardly extending circumferential shoulder adjacent a portion of the conical shape having the largest outer diameter, the shoulder adapted to be received in a channel formed between the nozzle body and the nozzle nut, It is an annular gasket that forms a seal between the gaskets. The device further includes an annular gasket disposed laterally adjacent to a portion of the conical shape having a maximum outer diameter, the annular gasket being received in a channel formed between the nozzle body and the nozzle nut to provide a seal between the nozzle body and the nozzle nut. It is designed to form. The ferrule includes a disk-shaped portion having a circular surface opposing the cavity, the disk-shaped portion surrounding the through hole and including an annular flange configured and arranged to engage the capillary. The ferrule includes a disk-shaped portion having a circular surface opposing the cavity, which disk-shaped portion includes an annular channel disposed radially adjacent to the outside of the through hole. The ferrule includes a disk-shaped portion having a circular surface opposing the cavity, the disk-shaped portion comprising an annular flange configured and arranged to engage the capillary, and an annular flange disposed radially adjacent to the outer side of the annular flange. Contains annular channels.

According to another aspect of the embodiment, an apparatus for an extreme ultraviolet light source is disclosed, the apparatus comprising a structure defining a cavity for maintaining under pressure a liquid target material that emits extreme ultraviolet (EUV) light in a plasma state. nozzle body; a glass capillary having a first end extending into the cavity and a second end defining a nozzle outlet, the nozzle outlet being for discharging target material passed within the glass capillary and along the length of the glass capillary; a ferrule having a central through hole adapted to receive a glass capillary, the ferrule surrounding at least a longitudinal portion of the glass capillary and forming a seal therewith, the glass capillary extending through the central through hole, the ferrule the portion has a truncated conical shape having a first diameter towards a first end of the glass capillary and a second diameter towards a second end of the glass capillary, the first diameter being greater than the second diameter; and a threaded nozzle nut disposed to mechanically engage the nozzle body to hold the ferrule between the threaded nozzle nut and the nozzle body, the nozzle nut being adapted to receive the portion of the ferrule having the truncated cone shape. It has a dimensioned truncated conical cavity. Ferrules are formed from polyimide, polyamide-imide, or polybenzimidazole. The nozzle body is formed of a material containing one or more of molybdenum, tungsten, and tantalum, or an alloy containing one or more of molybdenum, tungsten, and tantalum. The ferrule has an outwardly extending circumferential shoulder that is received in a channel formed between the nozzle body and the nozzle nut. The ferrule has a disk-shaped portion opposing the cavity, the disk-shaped portion surrounding the through hole and including an annular flange configured and arranged to engage the glass capillary. The ferrule has a disk-shaped portion opposing the cavity, which disk-shaped portion includes an annular channel disposed radially adjacent to the outside of the through hole. The ferrule has a disk-shaped portion opposing the cavity, the disk-shaped portion comprising an annular flange configured and arranged to engage the glass capillary and an annular channel disposed radially adjacent to the outer side of the annular flange. do.

According to another aspect of the embodiment, an apparatus for an extreme ultraviolet light source is disclosed, the apparatus comprising a structure defining a cavity for maintaining under pressure a liquid target material that emits extreme ultraviolet (EUV) light in a plasma state. nozzle body; a cylindrical glass capillary having a first end extending into the cavity and a second end defining a nozzle outlet, the nozzle outlet being for discharging target material that has passed through the cylindrical glass capillary; A ferrule having a central through hole, the central through hole forming a cylindrical glass capillary such that the cylindrical glass capillary can extend from a rear end of the ferrule disposed toward the cavity to a front end of the ferrule disposed toward the nozzle outlet. Dimensioned to receive, the ferrule surrounds and forms a seal with at least a middle longitudinal portion of the cylindrical glass capillary, the ferrule axially between a front end of the ferrule and a rear end of the ferrule. the portion has a truncated conical shape having a first diameter towards the rear end of the ferrule and a second diameter towards the front end of the ferrule, the first diameter being greater than the second diameter; and a threaded nozzle nut disposed to mechanically engage the nozzle body to hold the ferrule between the threaded nozzle nut and the nozzle body, the nozzle nut being adapted to receive the portion of the ferrule having the truncated cone shape. It has a dimensioned truncated conical space. Ferrules are formed from polyimide, polyamide-imide, or polybenzimidazole. The nozzle body is formed of a material containing one or more of molybdenum, tungsten, and tantalum, or an alloy containing one or more of molybdenum, tungsten, and tantalum. The ferrule has an outwardly extending circumferential shoulder that is received in a channel formed between the nozzle body and the nozzle nut. The rear end of the ferrule has a disc-shaped portion opposite the cavity, which surrounds the through hole and includes an annular flange configured and arranged to engage the cylindrical glass capillary. The ferrule has a disk-shaped portion opposing the cavity, which disk-shaped portion includes an annular channel disposed radially adjacent to the outside of the through hole. The ferrule has a disk-shaped portion opposing the cavity, the disk-shaped portion comprising an annular flange configured and arranged to engage the capillary and an annular channel disposed radially adjacent to the outer side of the annular flange. .

According to another aspect of the embodiment, a device for an extreme ultraviolet light source is disclosed, the device comprising: a tubular structure disposed on a support structure and having a first end and a second end; an actuator mechanically coupled to the outer wall of the tubular structure, the first end of the tubular structure extending into a cavity configured to receive a liquid target material that emits extreme ultraviolet (EUV) light in a plasma state; at least a portion of is surrounded by a ferrule -; and a ferrule nut adapted to be mechanically coupled to the support structure, wherein the ferrule is received between the support structure and the ferrule nut, wherein at least a portion of the ferrule has a conical shape, and wherein the outer diameter of the ferrule is adjacent to the second end of the tubular structure. decreases in the direction toward . The ferrule is formed from a material containing polyimide. The support structure is formed from a material containing molybdenum. The ferrule may have outwardly extending circumferential ribs that are received in a channel formed between the support structure and the ferrule nut.

The structure and operation of various embodiments, as well as additional embodiments, features and advantages of the subject matter, are described in detail below with reference to the accompanying drawings.

1 is a block diagram of one implementation of an extreme ultraviolet (EUV) light source.
Figure 2A is a side cross-sectional view of the target forming device.
Figure 2B is a top cross-sectional view of the target forming device of Figure 2A.
Figure 3 is a cross-sectional view of the capillary retention system.
4A is a cross-sectional view of a capillary retention system according to one aspect of an embodiment.
FIG. 4B is a perspective view of components of the embodiment of FIG. 4A according to one aspect of the embodiment.
FIG. 4C is a cross-sectional end portion of the embodiment of FIG. 4A according to one aspect of the embodiment.
5A is a cross-sectional view of a capillary retention system according to one aspect of the embodiment.
FIG. 5B is a perspective view of components of the embodiment of FIG. 5A according to one aspect of the embodiment.
Figure 5C is a partial end cross-sectional view of a component of the embodiment of Figure 5A.
Figure 5D is a partial end cross-sectional view of a component of the embodiment of Figure 5A.
6A is a cross-sectional view of a capillary retention system according to one aspect of an embodiment.
Figure 6B is a partial end cross-sectional view of a component of the embodiment of Figure 6A.
7A is a cross-sectional view of a capillary retention system in one aspect of the embodiment.
Figure 7B is a partial end cross-sectional view of a component of the embodiment of Figure 7A.
The structure and operation of various embodiments of the invention, as well as additional features and advantages of the invention, are described in detail below with reference to the accompanying drawings. It should be noted that the invention is not limited to the specific embodiments described herein. These embodiments are presented herein for illustrative purposes only. Additional embodiments will be apparent to those skilled in the art based on the teachings contained herein.

Various embodiments are now described with reference to the drawings, wherein like reference numerals are used to refer to like elements throughout. In the following description, for purposes of explanation, numerous specific details are set forth to facilitate a thorough understanding of one or more embodiments. However, in some or all cases, it may be apparent that any of the embodiments described below may be practiced without adopting the specific design details described below.

Before discussing various implementations of nozzle device 140, an overview of EUV light source 100 and supply system 110 is provided. EUV light source 100 is an example of a system in which nozzle device 140 can be used. However, nozzle device 140 and any of its various implementations may be used in systems other than EUV light sources.

Referring to FIG. 1 , a block diagram of an EUV light source 100 including a supply system 110 is shown. This supply system 110 emits a stream 121 of targets such that the targets 121p are delivered to the plasma formation location 123 within the vacuum chamber 109. The target 121p includes a target material that emits EUV light when in a plasma state. For example, target materials may include water, tin, lithium, and/or xenon. The plasma formation location 123 receives the light beam 106. Light beam 106 is generated by light source 105 and transmitted to vacuum chamber 109 through optical path 107. The interaction between the light beam 106 and the target material of the target 121p creates a plasma 196 that emits EUV light. Supply system 110 includes a capillary tube 114 fluidly connected to reservoir 112 . This capillary tube 114 is held by a nozzle device 140. Capillary tube 114 defines an orifice 119 through which material flows to form stream 121 of the target.

In the example of Figure 1. The capillary tube 114 is mechanically coupled to an actuator 193, which is connected to the control system 190 via a control link 192. Control system 190 may include a function generator, an electronic processor (not shown), and an electronic storage device (not shown) to perform the functions of control system 90. Control link 192 is any type of connection capable of transmitting electronic signals from control system 190 to actuator 193. For example, control link 192 may be a wired and/or wireless connection configured to transmit electronic signals and commands from control system 190 to actuator 193.

Control system 190 generates signals that, when applied to actuator 193 or elements associated with actuator 193, cause actuator 193 to move. For example, the actuator 193 may be a piezoelectric ceramic material whose shape changes depending on the applied voltage. The magnitude and/or polarity of the voltage applied to the actuator 193 is based on a signal from the control system 190. Due to the mechanical coupling between the capillary tube 114 and the actuator 193, when the actuator 193 moves or vibrates, the capillary tube 114 experiences a corresponding movement or vibration. The vibration imparted by the actuator 193 is generally an intentional vibration. More specifically, radial contraction of the actuator causes local contraction of the capillary, and expansion of the actuator causes local expansion of the capillary. Due to this expansion and contraction, sound waves are generated at the frequency of the electrical signal applied to the target material located inside the capillary.

The reservoir 112 contains the target material under pressure (P). The target material is in a molten state and can flow, and the pressure within the vacuum chamber 109 is lower than pressure P. The molten state may include molten metal target material. Accordingly, ticket material flows through capillary tube 114 and is discharged through orifice 119 into chamber 109. Target material exits orifice 119 as a jet or continuous stream 124 of target material. The jet of target material breaks up into individual droplets. The breakup of the jet 124 is controlled by vibrating the capillary tube 114 and generating sound waves within the capillary tube 114 so that individual droplets coalesce into larger droplets that reach the plasma formation location 123 at a desired rate. It can be.

For example, control system 190 may provide signals having at least a first frequency and a second frequency via control link 192 to drive actuator 193 to oscillate at the first and second frequencies. . The first frequency may be in the megahertz (MHz) range. Vibrating the capillary tube 114 at a first frequency causes the jet 124 to break up into relatively small droplets of a desired size and velocity. The second frequency is lower than the first frequency. For example, the second frequency may be in the kilohertz (kHz) range. The second frequency is used to regulate the velocity of the droplets in the stream and promote coalescence of the target. When the capillary tube 114 is driven at the second frequency, a group of droplets is formed. In a given droplet group, different droplets move at different speeds. Droplets with higher velocities can coalesce with droplets with lower velocities to form larger coalesced droplets that make up the stream 121 of the target for the EUV source.

By vibrating the capillary tube 114 in this way, the final target can be produced at a frequency of, for example, 40 to 300 kHz, for example, at 40 to 120 meters per second (m/s) or up to 500 m/s. It can move toward the plasma formation location 123 at any speed, but other frequencies and speeds can also be used. The spatial spacing between two adjacent targets in the stream of targets 121 may be, for example, 1 to 3 mm. Although 50 to 300 initial droplets (also called Rayleigh droplets) can coalesce to form a single, larger target, other spatial spacings can also be used and may exhibit different coalescence characteristics.

Accordingly, the capillary tube 114 is intentionally moved or vibrated, and this intentional movement or vibration is controlled to promote coalescence of the target material and also control the rate of target creation. Intentional vibration and/or environmental influences may cause other unintentional cantilevered vibrations of the capillary tube 114. Nozzle assembly 140 reduces or eliminates unintentional vibration while allowing intentional vibration. Before discussing the example of the nozzle assembly 140 in more detail, an example of the capillary tube 114 and actuator 193 is discussed.

Figure 2A is a cross-sectional side view of the target forming device 216 in the X-Z plane. FIG. 2B is a top cross-sectional view of the target forming device 216 in the Y-Z plane taken along line 2B'-2B' in FIG. 2A.

Target forming device 216 may be used in EUV light source 100 (FIG. 1). Target forming device 216 includes a capillary tube 214 that is mechanically coupled to an actuator 293 by adhesive 234 (shown in cross-hatch shading). For example, adhesive 234 may be an epoxy, benzoxazine resin, benzoxazine-containing resin, bismaleimide resin, cyanate ester resin, or cyanate ester-containing resin. Although the example of FIGS. 2A and 2B includes adhesive 234, actuator 293 and capillary tube 214 may be joined by direct contact (e.g., interference fit or use of fasteners) without the use of adhesive. You can.

The capillary tube 214 includes a side wall 230 extending along the X direction from the first end 231 to the second end 232. This side wall 230 is a three-dimensional object that is generally cylindrical. Side wall 230 includes an inner surface 233 and an outer surface 239. The inner surface 233 defines an inner region 238 (FIG. 2B) in fluid communication with the nozzle 235 at the first end 231. Nozzle 235 narrows along the -X direction to define orifice 219. In operational use, interior region 238 is fluidly connected to a reservoir of target material (e.g., reservoir 112 of FIG. 1 ), and molten target material is stored in interior region 238 of capillary tube 214 - It flows through orifice 219 in the X direction.

2A and 2B, actuator 293 is a cylinder with an outer actuator surface 295 and an inner actuator surface 236. The inner actuator surface 236 defines an open central area extending along the X direction. The inner actuator surface 236 completely surrounds a portion 237 (FIG. 2A) of the outer surface 239. The portion 237 includes any portion of the outer surface 239 surrounded by the actuator 293 . Portion 237 may extend from first end 231 to second end 232, or portion 237 may extend along the X direction shorter than the entire length of side wall 230. In the example of FIG. 2A , portion 237 extends in the X direction shorter than the entire length of side wall 230 . Actuator 293 is mechanically coupled to portion 237 with adhesive 234.

The actuator 293 is made of any material that can move the side wall 230. Actuator 293 may be an electromechanical actuator. For example, the actuator 293 may be a piezoelectric ceramic material such as PZT (Lead Zirconate Titanate) whose shape changes depending on the application of voltage. By changing its shape, PZT also causes the capillary tube 214 to move. Actuator 293 causes symmetrical displacement of the capillary tube 214 wall by periodic radial contraction and expansion.

In the example shown, target 121 is in the form of a stream of droplets ejected by orifice 119. A target can be ionized by this type of main pulse. Alternatively, target 121 may be pre-conditioned for ionization, for example with one or more conditioning pulses that may change the geometric distribution of target 121 . In one embodiment, a polyimide ferrule is used to seal the glass capillary to the nozzle body.

This ferrule participates in creating a seal to contain the high pressure liquid target material. Sealing is achieved using a tightening nut. This capillary retention system 300 is shown in Figure 3. In Figure 3, the capillary tube 304, along with its piezoelectric ceramic actuator 305, is retained in the nozzle body 310 by a ferrule 315 and a nozzle nut 320. A thick portion 306 of the capillary 304 that protrudes into the cavity 330 is also shown. The thick portion 306 may be a fused glass ring as shown or may be formed integrally with the capillary 304. The liquid target material is held within cavity 330 and pressure is applied in the direction indicated by the arrow. Liquid target material flows down the capillary tube 304 to the nozzle exit at the end.

As mentioned, this implementation has drawbacks. Pressure from cavity 330 tends to force ferrule 315 out of sealing engagement with nozzle body 310. This can be seen for example in the area marked with a dashed circle showing the ceiling between the capillary and the nozzle body. Additionally, as the internal pressure of the target material increases and the polyimide polymer loses its strength as it heats, the ferrule loses sealing pressure. Additionally, the ferrule softens at the droplet generator operating temperature, thus adding non-linearity to the overall nozzle system. For example, this low stiffness support can allow vibration of the capillary tip, which can negatively affect the stability of the droplet.

To overcome these drawbacks, according to one aspect of the embodiment, a double seal, pressure activated ferrule is positioned and configured such that internal target material pressure acts to increase the seal pressure. These features allow the ferrule to be used in higher pressure applications. Additionally, the ferrule will reduce the capillary free length by moving the sealing contact pressure on the capillary closer towards the capillary free surface, which will help increase the bending mode frequency of the capillary and thus its potential to be excited by system vibrations. Make it smaller. Additionally, pressure applied to the nozzle moves the capillary into tighter engagement with the ferrule until further sliding of the expanded portion of the capillary is stopped by the ferrule.

Ferrule material selection depends on the specific implementation and application, but materials such as polyimide (e.g., Vespel ^® SP-1), polyamide-imide (e.g., Torlon ^® PAI), and polybenzimidazole (PBI) are available. there is.

According to one aspect of the embodiment, at least the longitudinal portion of the ferrule is in the form of a truncated cone, ie truncated cone.

Additionally, using such a ferrule will result in a higher first mode frequency of the entire assembly, thereby reducing the high frequency oscillations of the capillary.

4A illustrates a capillary retention system 400 according to certain aspects of embodiments. The capillary retention system 400 of FIG. 4A includes a ferrule 405 and a threaded nozzle nut 410 that attaches the ferrule 405 to the nozzle body 420. The nozzle body may be formed of a refractory metal that is compatible with molten tin, such as one or more of molybdenum, tungsten, and tantalum, or an alloy containing one or more of molybdenum, tungsten, and tantalum.

Cavity 430 holds the liquid target material under pressure. Liquid target material flows down along the capillary tube 304. In the configuration shown, the pressure of the target material within the cavity 430 tends to improve the seal between the ferrule 405 and the capillary 304 and the seal between the ferrule 405 and the nozzle body and nozzle nut 410. there is. For example, the area surrounded by the dashed circle 440 indicates how pressure from cavity 430 forces ferrule 405 into closer contact with nozzle nut 410 and nozzle body 420. Dashed circle 445, a smaller dashed circle, shows how the pressure from cavity 430 brings ferrule 405 into closer contact with nozzle nut 410 and capillary 304.

The ferrule 405 has an outwardly extending circumferential shoulder that is received in a channel formed between the nozzle body 420 and the nozzle nut 410. Additionally, the truncated conical portion of the ferrule 405 is dimensioned to receive a matching truncated conical portion of the nozzle nut 410. This also applies to other embodiments.

It should be noted that the portion of the ferrule 405 opposite the cavity 430 may be provided with additional structures to improve the self-energizing aspect of the capillary retention system 400. In the example shown in FIG. 4A , ferrule 405 has an annular channel 450 and an annular flange 460 . This configuration helps to bring the ferrule 405 into closer contact with the adjacent mating surface by pressure.

Figure 4B is a perspective view of the ferrule 405 shown in Figure 4A. It can be seen that the ferrule has a rear end and a front end 466 having a disk-like structure 470 with shoulders 475, the end of the capillary 304 serving as the nozzle outlet having its front end in use. It will protrude through. The ferrule 405 also includes an intermediate truncated conical portion 485 to be received in a space of complementary dimensions in the nozzle nut 410. Again, this holds true for other embodiments as well.

Figure 4C is an end view of ferrule 405. As can be seen, a disc-shaped member ( 470). In the end view of Figure 4c, an annular shoulder 475 surrounds, i.e. radially outwardly adjacent, an annular channel 450, which surrounds an annular flange 460, i.e. Adjacent to the annular flange on the radial outside.

Additionally, according to one aspect of the embodiment, the pressure exerted on the ferrule 405 by the molten target material within the cavity 430 causes the expanded or thickened portion 306 of the capillary 304 to slide further. It should be noted that there is a tendency to push the capillary 304 further into the ferrule 405 to the right until it is stopped by the ferrule 405. This is another aspect of the self-activating seal according to the embodiment, as well as other embodiments as shown.

5A illustrates another capillary retention system 500 according to certain aspects of embodiments. The capillary retention system 500 of Figure 5A is similar to that just described in that it includes a ferrule 505 without a shoulder or flange as shown in Figure 5B. Ferrule 505 achieves a seal between capillary tube 305 and compression fitting nut 410, while a separate gasket 480 achieves seal between nozzle body 420 and nut 410. According to one aspect of the embodiment, this configuration eliminates mechanical coupling between the two seals, which may otherwise interfere with proper sealing action during assembly. Those skilled in the art will understand that this configuration may also be used for other embodiments disclosed herein. Figure 5C is a diagram of gasket 480. 5D is a cutaway view of the end portion of a cross section of ferrule 505.

6A illustrates another capillary retention system 600 according to certain aspects of embodiments. A nozzle nut 510 is shown attaching the ferrule 605 to the nozzle body 520. Cavity 430 holds the liquid target material under pressure. Liquid target material flows down along the capillary tube 304. In the configuration shown, as described above, the pressure of the target material within cavity 430 is applied to the seal between ferrule 605 and capillary 304 and between ferrule 605 and nozzle body 520 and nozzle nut 510. There is a tendency to improve the time between. However, ferrule 605 differs from ferrule 405 in that the portion of ferrule 605 opposing cavity 430 has an annular channel 550. This configuration also helps bring the ferrule 505 into closer contact with the adjacent surface under pressure.

Figure 6B is an end view of ferrule 605. As can be seen, there is a central hole 565 to receive the capillary 304, an annular step 550, and an annular shoulder 570 for the ferrule 505.

7A also illustrates a capillary retention system 700 according to certain aspects of embodiments. The capillary retention system 700 of FIG. 7A is similar to that just described in that it includes a ferrule 705 and a threaded nozzle nut 610 that attaches the ferrule 705 to the nozzle body 620. Cavity 430 holds the liquid target material under pressure. Liquid target material flows down along the capillary tube 304. In the configuration shown, as described above, the pressure of the target material within cavity 430 is applied to the seal between ferrule 705 and capillary 304 and between ferrule 705 and nozzle body 620 and nozzle nut 610. There is a tendency to improve the time between. However, ferrule 705 differs from ferrules 405 and 605 in that the portion of ferrule 705 opposite cavity 430 has an annular channel 640 and flange 645. This configuration helps bring the ferrule 705 into closer contact with the adjacent surface by pressure.

Figure 7b is a cutaway view of the end portion of the ferrule 705. As can be seen, there is a central hole 665 to receive the capillary 304, an annular flange 645, and an annular shoulder 670 for the ferrule 705.

Those skilled in the art will recognize that many additional combinations and permutations of the various embodiments are possible. Accordingly, the described embodiments are intended to cover all such changes, modifications and variations that fall within the scope and spirit of the appended claims. Additionally, when the term "comprising" is used in the description or claims, such term shall be interpreted in a manner similar to the term "comprising" as interpreted when the term "comprising" is used as a transition in the claims. It is intended to be comprehensive. Additionally, although elements of the described aspects and/or embodiments may be described or claimed in the singular, the plural is contemplated unless limitation to the singular is explicitly stated. Additionally, all or part of any aspect and/or embodiment may be utilized in conjunction with all or part of any other aspect and/or embodiment, unless otherwise specified.

Embodiments may be further described using the following clauses.

1. A device for an extreme ultraviolet light source,

A nozzle body including a structure defining a cavity for holding under pressure a liquid target material that emits extreme ultraviolet (EUV) light in a plasma state;

a capillary tube having a first end and a second end, the capillary being in fluid communication with the cavity at the first end and the second end defining a nozzle outlet for discharging a stream of target material;

a ferrule having a through hole, surrounding and forming a seal with at least a longitudinal portion of the capillary, the capillary extending through the through hole; and

Includes a nozzle nut that mechanically couples the ferrule to the nozzle body,

At least a portion of the ferrule has a conical shape, and the outer diameter of the ferrule decreases in a direction toward the second end of the capillary.

2. The method of clause 1, wherein the portion of the ferrule having a conical shape mates with an inner surface of a complementary cavity defined by the nozzle nut to form a seal between the portion of the ferrule having a conical shape and the inner surface. A device dimensioned to form a.

3. The device of clause 1, wherein the ferrule is formed of polyimide, polyamide-imide, or polybenzimidazole.

4. The device of clause 1, wherein the nozzle body is formed of a material comprising one or more of molybdenum, tungsten, and tantalum, or an alloy comprising one or more of molybdenum, tungsten, and tantalum.

5. The ferrule of clause 1, wherein the ferrule has an outwardly extending circumferential shoulder adjacent a portion of the conical shape having the largest outer diameter, the shoulder being adapted to be received in a channel formed between the nozzle body and the nozzle nut, , wherein the shoulder portion is an annular gasket forming a seal between the nozzle body and the nozzle nut.

6. The device according to clause 1, further comprising an annular gasket disposed laterally adjacent to a portion of the conical shape having a maximum outer diameter, the annular gasket being received in a channel formed between the nozzle body and the nozzle nut. A device adapted to form a seal between a nozzle body and a nozzle nut.

7. The ferrule of clause 1, wherein the ferrule includes a disk-shaped portion having a circular surface opposing the cavity, the disk-shaped portion being an annular shape configured and arranged to surround the through hole and engage the capillary. A device comprising a flange.

8. The ferrule of clause 1, wherein the ferrule comprises a disk-shaped portion having a circular surface opposing the cavity, the disk-shaped portion comprising an annular channel disposed radially adjacent to the outside of the through hole. device to do.

9. The ferrule of clause 1, wherein the ferrule includes a disk-shaped portion having a circular surface opposing the cavity, the disk-shaped portion comprising an annular flange configured and arranged to engage the capillary, and the annular flange comprising: A device comprising an annular channel disposed radially adjacent to the outside.

10. A device for an extreme ultraviolet light source,

A nozzle body including a structure defining a cavity for holding under pressure a liquid target material that emits extreme ultraviolet (EUV) light in a plasma state;

a glass capillary having a first end extending into the cavity and a second end defining a nozzle outlet, the nozzle outlet being for discharging target material passed within the glass capillary and along the length of the glass capillary;

a ferrule having a central through hole adapted to receive the glass capillary, the ferrule surrounding at least a longitudinal portion of the glass capillary and forming a seal therewith, the glass capillary extending through the central through hole, the ferrule a portion of has a truncated conical shape having a first diameter towards the first end of the glass capillary and a second diameter towards the second end of the glass capillary, the first diameter being greater than the second diameter; and

a threaded nozzle nut disposed to mechanically engage the nozzle body to retain the ferrule between the threaded nozzle nut and the nozzle body;

and the nozzle nut has a truncated conical cavity dimensioned to receive the portion of the ferrule having the truncated conical shape.

11. The device of clause 10, wherein the ferrule is formed of polyimide, polyamide-imide, or polybenzimidazole.

12. The device of clause 10, wherein the nozzle body is formed of a material comprising one or more of molybdenum, tungsten, and tantalum, or an alloy comprising one or more of molybdenum, tungsten, and tantalum.

13. The apparatus of clause 10, wherein the ferrule has an outwardly extending circumferential shoulder that is received in a channel formed between the nozzle body and the nozzle nut.

14. The ferrule of clause 10, wherein the ferrule has a disk-shaped portion opposing the cavity, the disk-shaped portion comprising an annular flange surrounding the through hole and configured and arranged to engage the glass capillary. , Device.

15. The device of clause 10, wherein the ferrule has a disk-shaped portion opposing the cavity, the disk-shaped portion comprising an annular channel disposed radially adjacent to the outside of the through hole.

16. The ferrule of clause 10, wherein the ferrule has a disk-shaped portion opposite the cavity, the disk-shaped portion comprising an annular flange configured and arranged to engage the glass capillary and a radially outer portion of the annular flange. A device comprising an annular channel disposed adjacent to.

17. A device for an extreme ultraviolet light source, comprising:

A nozzle body including a structure defining a cavity for holding under pressure a liquid target material that emits extreme ultraviolet (EUV) light in a plasma state;

a cylindrical glass capillary having a first end extending into the cavity and a second end defining a nozzle outlet, the nozzle outlet being for discharging target material that has passed through the cylindrical glass capillary;

A ferrule having a central through hole, the central through hole forming a cylindrical glass capillary such that the cylindrical glass capillary can extend from a rear end of the ferrule disposed toward the cavity to a front end of the ferrule disposed toward the nozzle outlet. Dimensioned to receive, the ferrule surrounds and forms a seal with at least a middle longitudinal portion of the cylindrical glass capillary, the ferrule axially between a front end of the ferrule and a rear end of the ferrule. the portion has a truncated conical shape having a first diameter towards the rear end of the ferrule and a second diameter towards the front end of the ferrule, the first diameter being greater than the second diameter; and

a threaded nozzle nut disposed to mechanically engage the nozzle body to retain the ferrule between the threaded nozzle nut and the nozzle body;

and the nozzle nut has a truncated conical space dimensioned to receive the portion of the ferrule having the truncated conical shape.

18. The device of clause 17, wherein the ferrule is formed of polyimide, polyamide-imide, or polybenzimidazole.

19. The device of clause 17, wherein the nozzle body is formed of a material comprising one or more of molybdenum, tungsten, and tantalum, or an alloy comprising one or more of molybdenum, tungsten, and tantalum.

20. The apparatus of clause 17, wherein the ferrule has an outwardly extending circumferential shoulder that is received in a channel formed between the nozzle body and the nozzle nut.

21. The rear end of clause 17, wherein the rear end of the ferrule has a disk-shaped portion opposing the cavity, the disk-shaped portion comprising an annular flange configured and arranged to surround the through hole and engage the cylindrical glass capillary. Device, including.

22. The device of clause 17, wherein the ferrule has a disk-shaped portion opposing the cavity, the disk-shaped portion comprising an annular channel disposed radially adjacent to the outside of the through hole.

23. The ferrule of clause 17, wherein the ferrule has a disk-shaped portion opposite the cavity, the disk-shaped portion comprising an annular flange configured and arranged to engage the capillary and a radially outer portion of the annular flange. A device comprising adjacently disposed annular channels.

24. A device for an extreme ultraviolet light source, comprising:

a tubular structure disposed on a support structure and having a first end and a second end;

an actuator mechanically coupled to the outer wall of the tubular structure, the first end of the tubular structure extending into a cavity configured to receive a liquid target material that emits extreme ultraviolet (EUV) light in a plasma state; at least a portion of is surrounded by a ferrule -; and

a ferrule nut adapted to be mechanically coupled to the support structure;

the ferrule is received between the support structure and a ferrule nut,

At least a portion of the ferrule has a conical shape, and the outer diameter of the ferrule decreases in a direction toward the second end of the tubular structure.

25. The device of clause 24, wherein the ferrule is formed of a material comprising polyimide.

26. The device of clause 24, wherein the support structure is formed of a material comprising molybdenum.

27. The device of clause 24, wherein the ferrule has an outwardly extending circumferential rib received in a channel formed between the support structure and the ferrule nut.

The embodiments described above and other embodiments are also within the scope of the following claims.

Claims (27)

A device for an extreme ultraviolet light source, comprising:
A nozzle body including a structure defining a cavity for holding under pressure a liquid target material that emits extreme ultraviolet (EUV) light in a plasma state;
a capillary tube having a first end and a second end, the capillary being in fluid communication with the cavity at the first end and the second end defining a nozzle outlet for discharging a stream of target material;
a ferrule having a through hole, surrounding and forming a seal with at least a longitudinal portion of the capillary, the capillary extending through the through hole; and
Includes a nozzle nut that mechanically couples the ferrule to the nozzle body,
At least a portion of the ferrule has a conical shape, and the outer diameter of the ferrule decreases in a direction toward the second end of the capillary. According to claim 1,
wherein the portion of the ferrule having a conical shape is dimensioned to mate with an inner surface of a complementary cavity defined by the nozzle nut to form a seal between the portion of the ferrule having a conical shape and the inner surface. Device. According to claim 1,
The device of claim 1, wherein the ferrule is formed of polyimide, polyamide-imide, or polybenzimidazole. According to claim 1,
The device of claim 1, wherein the nozzle body is formed of a material comprising one or more of molybdenum, tungsten, and tantalum, or an alloy comprising one or more of molybdenum, tungsten, and tantalum. According to claim 1,
The ferrule has an outwardly extending circumferential shoulder adjacent a portion of the conical shape having the largest outer diameter, the shoulder being adapted to be received in a channel formed between the nozzle body and the nozzle nut, the shoulder being positioned between the nozzle body and the nozzle nut. A device which is an annular gasket forming a seal between nuts. According to claim 1,
The device further includes an annular gasket disposed laterally adjacent to the portion of the conical shape having a maximum outer diameter, the annular gasket being received in a channel formed between the nozzle body and the nozzle nut to form a seal between the nozzle body and the nozzle nut. A device adapted to form a. According to claim 1,
The ferrule includes a disk-shaped portion having a circular surface opposing the cavity, the disk-shaped portion comprising an annular flange surrounding the through hole and configured and arranged to engage the capillary. According to claim 1,
The ferrule includes a disk-shaped portion having a circular surface opposing the cavity, the disk-shaped portion including an annular channel disposed radially adjacent to the outside of the through hole. According to claim 1,
The ferrule includes a disk-shaped portion having a circular surface opposing the cavity, the disk-shaped portion comprising an annular flange configured and arranged to engage the capillary and disposed radially adjacent to the outer side of the annular flange. A device comprising an annular channel. A device for an extreme ultraviolet light source, comprising:
A nozzle body including a structure defining a cavity for holding under pressure a liquid target material that emits extreme ultraviolet (EUV) light in a plasma state;
a glass capillary having a first end extending into the cavity and a second end defining a nozzle outlet, the nozzle outlet being for discharging target material passed within the glass capillary and along the length of the glass capillary;
a ferrule having a central through hole adapted to receive the glass capillary, the ferrule surrounding at least a longitudinal portion of the glass capillary and forming a seal therewith, the glass capillary extending through the central through hole, the ferrule a portion of has a truncated conical shape having a first diameter towards the first end of the glass capillary and a second diameter towards the second end of the glass capillary, the first diameter being greater than the second diameter; and
a threaded nozzle nut disposed to mechanically engage the nozzle body to retain the ferrule between the threaded nozzle nut and the nozzle body;
and the nozzle nut has a truncated conical cavity dimensioned to receive the portion of the ferrule having the truncated conical shape. According to claim 10,
The device of claim 1, wherein the ferrule is formed of polyimide, polyamide-imide, or polybenzimidazole. According to claim 10,
The device of claim 1, wherein the nozzle body is formed of a material comprising one or more of molybdenum, tungsten, and tantalum, or an alloy comprising one or more of molybdenum, tungsten, and tantalum. According to claim 10,
wherein the ferrule has an outwardly extending circumferential shoulder that is received in a channel formed between the nozzle body and the nozzle nut. According to claim 10,
The ferrule has a disk-shaped portion opposing the cavity, the disk-shaped portion comprising an annular flange surrounding the through hole and configured and arranged to engage the glass capillary. According to claim 10,
The ferrule has a disk-shaped portion opposing the cavity, the disk-shaped portion comprising an annular channel disposed radially adjacent to the outside of the through hole. According to claim 10,
The ferrule has a disk-shaped portion opposite the cavity, the disk-shaped portion comprising an annular flange configured and arranged to engage the glass capillary and an annular channel disposed radially adjacent to the outer side of the annular flange. Including device. A device for an extreme ultraviolet light source, comprising:
A nozzle body including a structure defining a cavity for holding under pressure a liquid target material that emits extreme ultraviolet (EUV) light in a plasma state;
a cylindrical glass capillary having a first end extending into the cavity and a second end defining a nozzle outlet, the nozzle outlet being for discharging target material that has passed through the cylindrical glass capillary;
A ferrule having a central through hole, the central through hole forming a cylindrical glass capillary such that the cylindrical glass capillary can extend from a rear end of the ferrule disposed toward the cavity to a front end of the ferrule disposed toward the nozzle outlet. Dimensioned to receive, the ferrule surrounds and forms a seal with at least a middle longitudinal portion of the cylindrical glass capillary, the ferrule axially between a front end of the ferrule and a rear end of the ferrule. the portion has a truncated conical shape having a first diameter towards the rear end of the ferrule and a second diameter towards the front end of the ferrule, the first diameter being greater than the second diameter; and
a threaded nozzle nut disposed to mechanically engage the nozzle body to retain the ferrule between the threaded nozzle nut and the nozzle body;
and the nozzle nut has a truncated conical space dimensioned to receive the portion of the ferrule having the truncated conical shape. According to claim 17,
The device of claim 1, wherein the ferrule is formed of polyimide, polyamide-imide, or polybenzimidazole. According to claim 17,
The device of claim 1, wherein the nozzle body is formed of a material comprising one or more of molybdenum, tungsten, and tantalum, or an alloy comprising one or more of molybdenum, tungsten, and tantalum. According to claim 17,
wherein the ferrule has an outwardly extending circumferential shoulder that is received in a channel formed between the nozzle body and the nozzle nut. According to claim 17,
The rear end of the ferrule has a disk-shaped portion opposing the cavity, the disk-shaped portion comprising an annular flange surrounding the through hole and configured and arranged to engage the cylindrical glass capillary. According to claim 17,
The ferrule has a disk-shaped portion opposing the cavity, the disk-shaped portion comprising an annular channel disposed radially adjacent to the outside of the through hole. According to claim 17,
The ferrule has a disk-shaped portion opposite the cavity, the disk-shaped portion comprising an annular flange configured and arranged to engage the capillary and an annular channel disposed radially adjacent to the outer side of the annular flange. device to do. A device for an extreme ultraviolet light source, comprising:
a tubular structure disposed on a support structure and having a first end and a second end;
an actuator mechanically coupled to the outer wall of the tubular structure, the first end of the tubular structure extending into a cavity configured to receive a liquid target material that emits extreme ultraviolet (EUV) light in a plasma state; at least a portion of is surrounded by a ferrule -; and
a ferrule nut adapted to be mechanically coupled to the support structure;
the ferrule is received between the support structure and a ferrule nut,
At least a portion of the ferrule has a conical shape, and the outer diameter of the ferrule decreases in a direction toward the second end of the tubular structure. According to claim 24,
The device of claim 1, wherein the ferrule is formed from a material comprising polyimide. According to claim 24,
The device of claim 1, wherein the support structure is formed from a material comprising molybdenum. According to claim 24,
wherein the ferrule has outwardly extending circumferential ribs received in a channel formed between the support structure and the ferrule nut.