KR20240016081A - Device for Precision Vibration Monitoring using Magnetic Resonance Test - Google Patents

Abstract

The present invention relates to a device for precision vibration monitoring using magnetic resonance flaw detection, and more specifically, to a device comprising a drive coil and a pick-up coil, and to the object made of metal. The drive coil applies a voltage for at least one frequency, the pickup coil receives a signal from the sensor unit and the sensor unit that receives changes in the magnetic field for each frequency, and performs magnetic resonance data processing, and a plurality of preset plots are performed. It is characterized by comprising a magnetic resonance control unit that measures the magnetic resonance data for at least one of heat treatment, hardness, crack, roughness, and gap information through a (plot) operation.

Description

Device for Precision Vibration Monitoring using Magnetic Resonance Test}

The present invention relates to a device for precise vibration monitoring using magnetic resonance flaw detection that can perform precise inspection while minimizing the influence of external environmental variables, including temperature and aging changes, in non-destructive testing of metal products.

Various rotating machines, such as fans, pumps, and electric motors, are widely used in equipment industries such as steel, chemicals, and petroleum. In particular, rotating machines are a key part of facilities such as steel mills or nuclear and thermal power plants.

Since failure of the rotating equipment used in these facilities can lead to a decrease in productivity and huge economic losses, in order to prevent this in advance, maintenance by stopping the operation of the facilities on a regular basis and inspecting them is necessary. Equipment diagnosis technology requires maintenance technology that predicts possible failures by examining the condition of equipment, or measures and monitors the condition of equipment during operation in real time and strategically.

In general, in the case of electric motors, failures occurring in the stator, rotor, and bearings account for 80% of all failures, and a method of detecting failures by monitoring vibration is widely used as a method of monitoring the failure status of these parts. .

In addition, methods that can inspect the quality of these parts include non-destructive testing and destructive testing, and conventional non-destructive testing includes ultrasonic or radiographic testing, vision testing, and eddy current testing. As a widely used non-destructive test, eddy current test is a method of inspecting defects by detecting changes in the intensity and width of the primary and secondary magnetic fields due to obstruction of current flow by the coil. It has a simple configuration, easy signal interpretation, and Although it is advantageous for diagnosing surface corrosion, the penetration depth is limited to 2 to 3 mm, so it is limited in diagnosing internal defects, so it is disadvantageous for internal inspection. In addition, the depth of magnetic field penetration is important in eddy current inspection, but the skin effect of conventional inspection devices causes a problem in which the magnetic field of the coil forms a reflected magnetic field on the surface of the conductor and is lost. In addition, in the case of conventional eddy current inspection devices, inspection is generally performed at a single frequency, but in the case of a single frequency, there is a possibility that it responds to the magnetic field only up to a certain distance, or all data within a certain distance are output from the sensor, so the sensor There is a problem that it has an unnecessary effect on the resolution.

Accordingly, there is a need to develop an algorithm that can stably process signals for minute changes in the metal surface itself. It is compatible with existing vibration sensors and can be inspected by increasing the resolution of the sensor, ensuring more accurate quality of metal products. It requires the development of an inspection device that can detect.

The present invention was created to solve the above problems, and the purpose of the present invention is to provide a non-destructive inspection device for parts that is applied and used in general fields including semiconductors, home appliances, railroads, nuclear and thermal power, smart factories, etc. It is a device that performs inspection using a magnetic resonance flaw detection method, and can perform inspection while minimizing data noise caused by the external environment. Through the inspection device of the present invention, heat treatment, corrosion, vibration, cracks, welding, etc. The goal is to provide a precision vibration monitoring device using magnetic resonance inspection that can perform more detailed and accurate inspection of comprehensive performance including specific gravity and roughness.

It is configured to include a drive coil and a pick-up coil of the present invention, so that the drive coil applies a voltage for at least one frequency to an object made of a metal material, and the pick-up coil A sensor unit that receives changes in the magnetic field for each frequency; and performing magnetic resonance data processing by receiving a signal from the sensor unit, and processing the magnetic resonance data through at least one of heat treatment, hardness, cracks, roughness, and gap through a plurality of preset plot operations. It includes a magnetic resonance control unit that measures information, wherein the magnetic resonance control unit receives impedance values for each frequency from the sensor unit, and uses the impedance values to generate at least preset arbitrary values S1, S2, S3, and S4. It is characterized in that magnetic resonance data processing is performed by calculating the value for .

At this time, the sensor unit is characterized in that the drive coil applies voltage to eight channels (CH) having different frequencies.

의 값이고, 상기 S2는 각 채널의 위상(phase) 신호인

의 값이고, 상기 S3은 각 채널의 X-value 신호인 X의 값이고, 상기 S4는 각 채널의 Y-value 신호인 Y의 값인 것을 특징으로 한다.At this time, S1 is the magnitude signal of each channel.

is the value of, and S2 is the phase signal of each channel.

, where S3 is the value of X, the X-value signal of each channel, and S4 is the value of Y, the Y-value signal of each channel.

At this time, the magnetic resonance control unit calculates 32 magnetic resonance data that are different values for each channel, sequentially classifies the data in order of smallest amplitude among the plurality of magnetic resonance data, and preset according to the information. The plot operation is performed using at least one piece of data according to a standard.

In addition, the magnetic resonance control unit includes data on samples before heat treatment and samples after heat treatment, which are reference values, with respect to the heat treatment information, and calculates the plot by comparing the magnetic resonance data of the target product with the data of the reference value. By performing, it is characterized by determining whether or not the object is heat treated.

In addition, the magnetic resonance control unit includes a graph of magnetic resonance data per linear hardness value obtained from data of a sample whose hardness value is known, which is a reference value, with respect to the hardness information, and through the graph, the The hardness of the object is measured by performing the plot operation to read the hardness value corresponding to the magnetic resonance data of the product.

In addition, the magnetic resonance control unit measures the impedance value while the sensor unit moves the surface of the object over time with respect to the crack information, and measures the magnetic resonance data calculated from the measured impedance value in time. By performing the plot operation to convert the magnetic resonance data according to the graph into a graph, cracks in the object are measured.

)를 생성하는 상기 플롯 연산을 수행하는 것으로, 상기 대상품의 표면 조도를 측정하는 것을 특징으로 한다.In addition, the magnetic resonance control unit, with respect to the illuminance information, measures the impedance value while the sensor unit moves the surface of the object over time, and measures the magnetic resonance data calculated from the measured impedance value in time. Convert the magnetic resonance data into a graph, extract the average line through a B-spline, and graph the amplitude by removing the average line from the magnetic resonance data (

) by performing the plot operation to generate the surface roughness of the object.

)를 절대값 처리하는 것으로 상기 대상품의 평균 거칠기를 계산하는 것을 특징으로 한다.At this time, the magnetic resonance control unit, the graph (

) is characterized in that the average roughness of the object is calculated by processing it as an absolute value.

In addition, the magnetic resonance control unit generates a graph of magnetic resonance data per linear gap measurement value obtained from data of a sample whose distance is known, which is a reference value, for the gap information, which is the distance between the object and the sensor unit. It includes performing the plot operation to read the gap measurement value corresponding to the magnetic resonance data of the object through the graph, and measuring the size of the gap between the object and the sensor unit.

In addition, the sensor unit is adjacent to the object and includes a head that applies a voltage and receives changes in a magnetic field, and a handle that holds the head to position it in a required position, and the diameter of the head is that of the handle. It is characterized by being formed larger than the diameter.

Alternatively, the sensor unit is adjacent to the object and includes a head that applies voltage and receives changes in a magnetic field, and a handle that holds the head to position it in a required position, and the diameter of the head is that of the handle. It is characterized by being formed smaller than the diameter.

The device for precision vibration monitoring using magnetic resonance flaw detection of the present invention with the above configuration can perform inspection while minimizing data noise caused by the external environment, so the accuracy of measured values is high, and the output value is maintained despite temperature changes and changes over time. There are no errors, and the control unit can stably process signals despite minute changes in the metal surface itself, allowing measurement by increasing the resolution of the sensor, and improving the precision of inspection because the distance to the metal can be distinguished within 1 micrometer. There is an effect.

In addition, standardization of technology can be applied to ensure compatibility with existing equipment, and it is a process that can easily perform inspections including heat treatment, corrosion, vibration, cracks, welding, specific gravity, and roughness using a single inspection device. Since it includes, it is effective in performing various inspections as needed while meeting detailed requirements for various demands.

In addition, it can be used for precise diagnosis of various precision instruments and rotating machines, and can monitor the safety, failure, and status of equipment in real time. Through this, the fundamental causes of failure of machines can be identified, and turbines, engines, etc. In addition to diagnosing high value-added products, it is possible to predict the lifespan of machines and further automate factories.

1 is a conceptual diagram of the present invention
Figure 2 is a perspective view of the sensor unit according to an embodiment of the present invention
Figure 3 is a perspective view of the sensor unit according to another embodiment of the present invention
Figure 4 is a plot of magnetic resonance data for a stationary point.
Figure 5 is a plot of magnetic resonance data for consecutive points.
Figure 6 shows magnetic resonance data of the sample before and after heat treatment included in the magnetic resonance control unit.
Figure 7 is a plot calculation result of the magnetic resonance control unit for the results of Figure 6
Figure 8 shows magnetic resonance data of a sample for measuring hardness included in the magnetic resonance control unit.
Figure 9 is a hardness calibration curve graph for the results of Figure 8 included in the magnetic resonance control unit.
Figure 10 is a plot calculation result of magnetic resonance data according to crack occurrence
Figure 11 is a graph of average line extraction of magnetic resonance data according to illuminance measurement
Figure 12 is a plot operation result of magnetic resonance data with slope and step corrected for Figure 11
Figure 13 shows magnetic resonance data of the sample according to the change in gap contained in the magnetic resonance control unit.
Figure 14 is a calibration graph of the gap with respect to Figure 13 included in the magnetic resonance control unit.

Hereinafter, the technical idea of the present invention will be described in more detail using the attached drawings. Prior to this, the terms or words used in this specification and claims should not be construed as limited to their usual or dictionary meanings, and the inventor should appropriately define the concept of terms in order to explain his or her invention in the best way. It must be interpreted as meaning and concept consistent with the technical idea of the present invention based on the principle of definability.

Accordingly, the embodiments described in this specification and the configurations shown in the drawings are only one of the most preferred embodiments of the present invention and do not represent the entire technical idea of the present invention, so at the time of filing this application, various alternatives are available to replace them. It should be understood that variations may exist.

Hereinafter, the technical idea of the present invention will be described in more detail using the attached drawings. The attached drawings are merely examples to illustrate the technical idea of the present invention in more detail, so the technical idea of the present invention is not limited to the form of the attached drawings.

The present invention is characterized as an inspection device that monitors precise vibration of a metal object using magnetic resonance inspection. Magnetic resonance is a phenomenon in which a magnetic field resonates with electromagnetic waves. A defect detection system using magnetic resonance is a defect detection device that applies a non-destructive inspection method that detects defects by applying a magnetic field to a metal object and then measuring the reflected magnetic field. Magnetic resonance inspection can be performed on defects accompanied by plastic deformation formed in the object, internal cracks, defects of non-metallic inclusions, different structures compared to the base material, hardness heterogeneity compared to the base material, etc. The defect detection device using magnetic resonance can be used without restrictions on the shape of the object, can detect cracks not only on the outside but also on the inside, and has a simple device configuration and can be standardized, so it is easy to install and can be used as a basic inspection device. It is compatible and has the advantage of being able to form a device at a lower price than an eddy current inspection (ECT) device. Accordingly, it can be used to detect internal and external defects in metal, and can be used in a variety of fields such as inspecting the quality of the object such as heat treatment, corrosion, vibration, cracks, welding, specific gravity, and roughness. .

As explained with reference to FIG. 1, the present invention is a precision vibration monitoring device that performs precision vibration monitoring using magnetic resonance inspection on an object made of metal, and includes a drive coil and a pick-up coil. up coil), wherein the drive coil applies a voltage for at least one frequency to the object, and the pickup coil receives a change in the magnetic field for each frequency; and a sensor unit (100) 100), perform magnetic resonance data processing, and convert the magnetic resonance data into at least one of heat treatment, hardness, crack, roughness, and gap information through a plurality of preset plot operations. It is characterized by including a magnetic resonance control unit 200 that measures the magnetic resonance. At this time, the magnetic resonance control unit 200 receives impedance values for each frequency from the sensor unit 100, and uses the impedance values to calculate values for at least S1, S2, S3, and S4, which are preset arbitrary values. It is characterized in that magnetic resonance data processing is performed.

The sensor unit 100 is a device that applies a voltage to an object made of a metal material, reads the change in the magnetic field due to the applied voltage, and transmits it to the magnetic resonance control unit 200. It contacts the object or is predetermined. It is characterized as a device that operates in a spaced apart state. The sensor unit 100 includes the drive coil and the pick-up coil, and the sensor unit 100 provides different sizes to the object through the drive coil. The branch applies a voltage for at least one frequency, and through this, the pickup coil reads changes in the magnetic field formed in the object. In one embodiment of the present invention, the sensor unit 100 may apply voltage for eight channels (CH) in which the drive coil has different frequencies to the object. Accordingly, in precision vibration monitoring, a wide range of frequencies can be used, and an approximate vibration displacement can be obtained using this, and the resolution of the sensor is improved by narrowing the displacement to the frequency of the displacement and outputting a signal again. It can have a structure. At this time, the frequencies between the eight channels may be frequency ranges with a certain intercalation in the order of channel numbers, or the frequencies for each channel may be set individually. That is, the sensor unit 100 applies voltage for eight channels in which the drive coil has different frequencies to the object, and accordingly changes the magnetic field formed in the object through the pickup coil. It is characterized by being readable through . Therefore, the pickup coil transmits the change in magnetic field read by the coil to the sensor unit 100, and the sensor unit 100 receives this as an impedance value for each frequency, that is, for each channel. Resonance inspection can be performed. In addition, the sensor unit 100 may perform flaw detection on any part of the object at a stationary point, or may move according to time and perform flaw detection continuously.

The sensor unit 100 is characterized in that it performs magnetic resonance inspection with an object by operating a coil while in contact with the object or adjacent to it within a predetermined distance. At this time, the sensor unit 100 may be configured to include a head 110 adjacent to the object and a handle 120 for gripping the head 110 to position it in an appropriate position. That is, when one end of the sensor unit 100 is in contact with or adjacent to the object and performs magnetic resonance flaw detection, one end of the sensor is the head 110, and the other end of the sensor unit 100 is the handle 120. ) can be. It is preferable that a drive coil and a pickup coil are configured inside the head 110 so that the head 110 can apply voltage to the object and also receive changes in the magnetic field due to the applied voltage. In addition, the handle 120 extends from the head 110 toward the other end, and may not contain any special components inside the handle 120, and an electric wire is connected to the other end of the handle 120. , the wire may connect the sensor unit 100 and the magnetic resonance control unit 200. At this time, the device for precision vibration monitoring of the present invention is characterized by being able to measure at least one information of heat treatment, hardness, crack, roughness, and gap. In this case, the sensor unit 100 of the present invention is The sensor may be provided in different forms depending on the type of information to be measured or according to a specific standard.

In more detail, the sensor unit 100 can be provided by freely selecting the shape of one end of the head 110 depending on the type of the object, and one end cross-section of the head 110 is circular, square, or It can be formed in various shapes, such as a ring shape, and can be provided in any free shape as needed, without limitation, as long as a predetermined area of one end cross-section can have a flat surface. Accordingly, as an embodiment of the present invention, when described with reference to FIG. 2, the sensor unit 100a detects the head 110a when the magnetic resonance control unit 200 measures heat treatment, hardness, cracks, and roughness. may be formed as a ring-shaped cross-section with one end having a hole in the middle. At this time, the diameter of the head 110a can be formed to be larger than the diameter of the handle 120a, so that the coil can respond to a wider area. It is characterized by being able to be composed of various geometric shapes. In addition, as another embodiment of the present invention, when described with reference to FIG. 3, the sensor unit 100b is configured to use a gap that is the size of the distance between the object and the sensor unit 100 by the magnetic resonance control unit 200. When measuring, the head 110b can be formed to detect signals more sensitively by having one end cross-sectional area of the minimum size. At this time, the diameter of the head 110b is made smaller than the diameter of the handle 120b, so that the micro-unit gap with the object can be sensitively sensed and measured with the head 110b, which has a small area. It can be configured so that

의 값이고, 상기 S2는 각 채널의 위상(phase) 신호인

의 값이고, 상기 S3은 각 채널의 X-value 신호인 X의 값이고, 상기 S4는 각 채널의 Y-value 신호인 Y의 값인 것을 특징으로 한다. 상기 자기공명 제어부(200)는, 32개의 상기 자기공명 데이터에 대해서, 기설정된 플롯(plot) 연산을 통해서 그래프로서 결과값을 출력할 수 있으며, 정지된 지점에 대한 결과인 것으로 도 4와 같이 도시할 수 있으며, 연속적인 측정 결과에 대한 것으로 도 5와 같이 도시할 수 있다.The magnetic resonance control unit 200 is connected to transmit and receive signals with the sensor unit 100, and the signal recognized by the pickup coil of the sensor unit 100 is transmitted to the magnetic resonance control unit 200. The magnetic resonance control unit 200 is characterized as a device that performs magnetic resonance data processing on received signals. The magnetic resonance control unit 200 is capable of receiving impedance values for each frequency from the pickup coil of the sensor unit 100, and performs data processing using the impedance values. Additionally, for data processing, the magnetic resonance control unit 200 may calculate the impedance value as an arbitrary value preset for each channel. In one embodiment of the present invention, the magnetic resonance control unit 200 of the present invention may calculate the impedance values for each frequency into at least S1, S2, S3, and S4 values and convert them into magnetic resonance data. That is, the sensor unit 100 generates signals of frequencies for eight channels, and the magnetic resonance control unit 200 calculates the values of S1, S2, S3, and S4 for each channel to determine magnetic resonance. Since data processing is performed, 32 pieces of data are formed. At this time, S1 is the magnitude signal of each channel.

is the value of, and S2 is the phase signal of each channel.

, where S3 is the value of X, the X-value signal of each channel, and S4 is the value of Y, the Y-value signal of each channel. The magnetic resonance control unit 200 can output the result as a graph through a preset plot operation for the 32 pieces of magnetic resonance data, and the result for a stationary point is shown in FIG. 4. This can be done, and the results of continuous measurement can be shown as shown in FIG. 5.

The magnetic resonance control unit 200 is capable of measuring at least one of heat treatment, hardness, cracks, roughness, and gap information on the object through a plurality of preset plot operations on the processed magnetic resonance data. It is characterized by As shown in FIGS. 4 and 5, the plot basically includes an operation to output a graph for each magnetic resonance data, and at least one of a plurality of magnetic resonance data is selected depending on the type of information to be measured. Thus, preset plot operations can be performed. At this time, first, the magnetic resonance control unit 200 can select a value that well represents the physical change of the object among the 32 magnetic resonance data, which may be data with the smallest amplitude, and can be calculated according to the plot operation. At least 1 to a maximum of 32 pieces of magnetic resonance data can be selected, and the values for all the selected data can be added to create a single plot. In addition, the magnetic resonance control unit 200 can sequentially list and distinguish the data in order of smallest amplitude, and appropriate data is automatically selected according to a preset plot operation. In this case, the standard may be the data with the smallest amplitude. . Hereinafter, the information measured by the magnetic resonance control unit 200 will be described in detail.

First, the magnetic resonance control unit 200 may perform a plot operation on heat treatment information. At this time, the magnetic resonance control unit 200 performs a plot calculation of the heat treatment to check the magnetic resonance of the sample before heat treatment and the sample after heat treatment using the precision vibration monitoring device of the present invention for the metal whose heat treatment can be confirmed as a reference value. It may include data such as that shown in FIG. 6, and may also include a graph of the results of calibration of data on samples before and after heat treatment as shown in FIG. 7. At this time, referring to the graph of FIG. 7, the previous data value of about 575 based on the time on the x-axis is the amplitude value (y-axis) for the sample before heat treatment, and the subsequent data value is the amplitude value (y-axis) for the sample after heat treatment. It can be. Accordingly, the magnetic resonance control unit 200 compares and determines the measured magnetic resonance data of the object with the reference value and performs a plot operation to detect the difference, thereby determining whether the object has been heat treated or not. It is characterized by being able to determine.

Additionally, the magnetic resonance control unit 200 may perform a plot operation on hardness information. At this time, the magnetic resonance control unit 200 may include magnetic resonance data inspected through the precision vibration monitoring device of the present invention for a sample whose hardness value is known as a reference value through hardness plot calculation, Through these data, a calibrated curve graph can be calculated as shown in FIG. 8. In addition, the magnetic resonance control unit 200 may calculate a linear graph of magnetic resonance data values according to hardness from the sample as shown in FIG. 9 through a plot operation and include this as a reference value. Accordingly, the magnetic resonance control unit 200, with respect to the measured magnetic resonance data of the object, displays the corresponding magnetic resonance data value (y-axis) through a linear graph of the magnetic resonance data value according to the included hardness. ) by reading the hardness value (x-axis) corresponding to the object, and performing a plot operation to measure the hardness of the object.

Additionally, the magnetic resonance control unit 200 may perform a plot operation on crack information. At this time, the crack information is about defects in the object, and to measure cracks, the sensor unit 100 moves the position of the surface of the object according to time and performs inspection to obtain continuous measurement values. You can. Accordingly, the magnetic resonance control unit 200 receives the impedance value over time by plotting the crack, processes the magnetic resonance data from the impedance value, and converts it into a graph of the magnetic resonance data value over time. By performing a plot calculation, cracks in the target product can be measured. If explained with reference to FIG. 10, the degree of change in the magnetic resonance data displayed on the graph is distinguished, and the location of the crack can be confirmed as well as whether the object is cracked. In Figure 10, it can be confirmed that a crack has occurred in the area where the amplitude (y-axis) of the magnetic resonance data is partially reduced, and crack detection applies a threshold to the program, and data that is below or exceeds the threshold is considered to be a crack. You can perform plot operations with this.

)를 생성할 수 있다. 즉, 도 12에 도시된 바와 같이, 상기 자기공명 센서부(100)는 조도 플롯 연산에 의해 평균 라인 추출에 의해 기울기 및 단차가 교정된 그래프(

)를 계산함으로써 상기 대상품의 표면 조도를 측정할 수 있다. 또한, 상기 자기공명 제어부(200)는 상기 그래프(

)를 절대값 처리 하는 것으로, 상기 대상품의 평균 거칠기를 계산할 수 있는 것을 특징으로 한다.The magnetic resonance control unit 200 may perform a plot operation on the illuminance information. The roughness information is about the surface roughness of the object, and the magnetic resonance sensor unit 100 performs an inspection while moving the position of the surface of the object over time to measure the surface roughness, thereby performing continuous measurement. value can be obtained. Accordingly, the magnetic resonance sensor unit 100 receives the impedance value over time by plotting the illuminance measurement, processes the magnetic resonance data from the impedance value, and converts it into a graph of magnetic resonance data values varying over time. It gets converted. At this time, the magnetic resonance control unit 200 extracts an average line from the graph through a B-spline as shown in FIG. 11 through illuminance plot calculation, and calculates the average line from the magnetic resonance data. Graph of removed amplitude (

) can be created. That is, as shown in FIG. 12, the magnetic resonance sensor unit 100 displays a graph in which the slope and step are corrected by extracting the average line by calculating the illuminance plot (

) can be used to measure the surface roughness of the object. In addition, the magnetic resonance control unit 200 controls the graph (

) is processed as an absolute value, and the average roughness of the object can be calculated.

(Equation 1)

In addition, the magnetic resonance control unit 200 may perform a plot operation on gap information, which is the distance between the object and the sensor unit 100. At this time, as shown in FIG. 13, the magnetic resonance control unit 200 records magnetic resonance data for the impedance value measured while changing the distance from the sensor to 0 to 2 mm from a sample whose distance is known within the effective range. It may include, and the graph may be a graph of magnetic resonance data (y-axis) according to the gap (x-axis) moved per time. The magnetic resonance control unit 200 shows measurement linearity according to the distance between the sensor unit 100 and the object within the effective distance of the device of the present invention through the magnetic resonance data of the sample, as shown in FIG. 14. You can calculate and include the calibrated graph. Accordingly, it is assumed that linearity can be secured when the sensor is located within the effective measurement range (0 to 2 mm), and when measuring gap information of the object, the magnetic resonance control unit 200 is used as shown in Figure 14 included. In the graph, by performing a plot operation to read the gap measurement value (x-axis, mm unit) corresponding to the magnetic resonance data (y-axis) of the object, the distance between the object and the sensor unit 100 is It is characterized by being able to measure the gap.

As described above, the present invention has been described with reference to specific details such as specific components and drawings of limited embodiments, but this is only provided to facilitate a more general understanding of the present invention, and the present invention is not limited to the above-mentioned embodiment. No, those skilled in the art can make various modifications and variations from this description.

Accordingly, the spirit of the present invention should not be limited to the described embodiments, and all matters that are equivalent or equivalent to the claims of this patent as well as the claims described below shall fall within the scope of the spirit of the present invention. .

100: sensor part
200: magnetic resonance control unit

Claims (12)

It is composed of a drive coil and a pick-up coil, and the drive coil applies a voltage for at least one frequency to an object made of metal, and the pick-up coil applies a magnetic field for each frequency. A sensor unit that receives changes in; and
Receives a signal from the sensor unit, performs magnetic resonance data processing, and converts the magnetic resonance data into at least one of heat treatment, hardness, crack, roughness, and gap information through a plurality of preset plot operations. It includes a magnetic resonance control unit that measures for,
The magnetic resonance control unit,
Magnetic resonance, characterized in that it receives impedance values for each frequency from the sensor unit, calculates values for at least S1, S2, S3, and S4, which are preset arbitrary values, using the impedance values, and performs magnetic resonance data processing. A device for precise vibration monitoring using flaw detection.
According to clause 1,
The sensor unit,
A device for precision vibration monitoring using magnetic resonance flaw detection, characterized in that the drive coil applies voltage to eight channels (CH) having different frequencies.
According to clause 2,
The S1 is the magnitude signal of each channel.

is the value of,
The S2 is the phase signal of each channel

is the value of,
The S3 is the value of X, which is the X-value signal of each channel,
A device for precision vibration monitoring using magnetic resonance flaw detection, wherein S4 is the value of Y, which is the Y-value signal of each channel.
According to clause 3,
The magnetic resonance control unit,
Calculate 32 magnetic resonance data with different values for each channel,
Among the plurality of magnetic resonance data, the data is sequentially classified in order of smallest amplitude,
A device for precision vibration monitoring using magnetic resonance flaw detection, characterized in that the plot operation is performed using at least one piece of data according to a preset standard according to the information.
According to clause 1,
The magnetic resonance control unit,
Regarding the heat treatment information above,
It includes data on samples before heat treatment and samples after heat treatment, which are reference values.
A device for precision vibration monitoring using magnetic resonance flaw detection, characterized in that the presence or absence of heat treatment of the object is determined by performing the plot operation to compare and determine the magnetic resonance data of the object and the data of the reference value.
According to clause 1,
The magnetic resonance control unit,
Regarding the above hardness information,
Contains a graph of magnetic resonance data per linear hardness value obtained from data of samples with known hardness values, which is a reference value,
A device for precision vibration monitoring using magnetic resonance flaw detection, characterized in that the hardness of the object is measured by performing the plot operation to read the hardness value corresponding to the magnetic resonance data of the object through the graph.
According to clause 1,
The magnetic resonance control unit,
Regarding the crack information above,
The sensor unit moves the surface of the object over time and measures the impedance value,
Precision using magnetic resonance flaw detection, characterized in that cracks in the object are measured by performing the plot operation to convert the magnetic resonance data calculated from the measured impedance value into a graph of magnetic resonance data over time. Device for vibration monitoring.
According to clause 1,
The magnetic resonance control unit,
Regarding the above illuminance information,
The sensor unit moves the surface of the object over time and measures the impedance value,
The magnetic resonance data calculated from the measured impedance value is converted into a graph of magnetic resonance data over time, an average line is extracted through a B-spline, and the average line is removed from the magnetic resonance data. Graph of amplitude (

) A device for precision vibration monitoring using magnetic resonance flaw detection, characterized in that the surface roughness of the object is measured by performing the plot operation to generate ).
According to clause 8,
The magnetic resonance control unit,
The above graph (

A device for precision vibration monitoring using magnetic resonance flaw detection, characterized in that the average roughness of the object is calculated by processing ) as an absolute value.
According to clause 1,
The magnetic resonance control unit
Regarding the gap information, which is the distance between the object and the sensor unit,
Contains a graph of magnetic resonance data per linear gap measurement obtained from data from samples of known distances, which is a reference value,
Magnetic resonance flaw detection, characterized in that the size of the gap between the object and the sensor unit is measured by performing the plot operation to read the gap measurement value corresponding to the magnetic resonance data of the object through the graph. A device for precision vibration monitoring.
According to any one of claims 5 to 9,
The sensor unit,
A head adjacent to the object that applies a voltage and receives changes in a magnetic field, and a handle that holds the head to position it in a required position,
A device for precision vibration monitoring using magnetic resonance flaw detection, characterized in that the diameter of the head is formed to be larger than the diameter of the handle.
According to clause 10,
The sensor unit,
A head adjacent to the object that applies a voltage and receives changes in a magnetic field, and a handle that holds the head to position it in a required position,
A device for precision vibration monitoring using magnetic resonance flaw detection, characterized in that the diameter of the head is smaller than the diameter of the handle.