KR20240012195A - Method for manufacturing magnesia granules with dense structure, high thermal conductivity magnesia composition, and thermal interface material using the same - Google Patents
Method for manufacturing magnesia granules with dense structure, high thermal conductivity magnesia composition, and thermal interface material using the same Download PDFInfo
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- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 title claims abstract description 118
- 239000000395 magnesium oxide Substances 0.000 title claims abstract description 57
- 239000008187 granular material Substances 0.000 title claims abstract description 20
- 239000000463 material Substances 0.000 title claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000000203 mixture Substances 0.000 title claims abstract description 8
- 238000000034 method Methods 0.000 title claims abstract description 7
- 239000000843 powder Substances 0.000 claims abstract description 23
- 150000001875 compounds Chemical class 0.000 claims abstract description 17
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000011521 glass Substances 0.000 claims abstract description 15
- 238000002156 mixing Methods 0.000 claims abstract description 14
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 7
- 150000001642 boronic acid derivatives Chemical class 0.000 claims abstract description 7
- 238000001035 drying Methods 0.000 claims abstract description 7
- 239000002245 particle Substances 0.000 claims abstract description 5
- 239000011148 porous material Substances 0.000 claims abstract description 5
- -1 borate compound Chemical class 0.000 claims abstract description 4
- 229910002651 NO3 Inorganic materials 0.000 claims abstract description 3
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052783 alkali metal Inorganic materials 0.000 claims abstract description 3
- 150000001340 alkali metals Chemical class 0.000 claims abstract description 3
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims abstract description 3
- 150000001342 alkaline earth metals Chemical class 0.000 claims abstract description 3
- 239000005385 borate glass Substances 0.000 claims abstract description 3
- 239000004020 conductor Substances 0.000 claims abstract description 3
- 239000011812 mixed powder Substances 0.000 claims abstract description 3
- 238000003756 stirring Methods 0.000 claims abstract description 3
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000003795 chemical substances by application Substances 0.000 claims description 2
- 238000007580 dry-mixing Methods 0.000 claims 1
- 238000005245 sintering Methods 0.000 abstract description 11
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 abstract description 2
- 230000009477 glass transition Effects 0.000 abstract description 2
- 229910052749 magnesium Inorganic materials 0.000 abstract description 2
- 239000011777 magnesium Substances 0.000 abstract description 2
- 239000000945 filler Substances 0.000 description 9
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000009766 low-temperature sintering Methods 0.000 description 1
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 1
- 239000000347 magnesium hydroxide Substances 0.000 description 1
- 235000012254 magnesium hydroxide Nutrition 0.000 description 1
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/03—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on magnesium oxide, calcium oxide or oxide mixtures derived from dolomite
- C04B35/04—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on magnesium oxide, calcium oxide or oxide mixtures derived from dolomite based on magnesium oxide
- C04B35/053—Fine ceramics
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/62625—Wet mixtures
- C04B35/62635—Mixing details
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/62695—Granulation or pelletising
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3409—Boron oxide, borates, boric acids, or oxide forming salts thereof, e.g. borax
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Abstract
본 발명은, 다음의 제조방법을 제공한다.
(a) MgO 분말을 이용하여 건/습식으로 전하(+, -)를 조절하는 단계
(b) 상기 전하 조절이 된 MgO 분말에 보레이트계 화합물과 건/습식으로 혼합하는 단계
(c) 상기 분말에 전하가 다른 보레이트 화합물을 혼합하는 단계
상기 보레이트 화합물은 알카리 금속 및 알카리 토금속을 함유한 보레이트 화합물이나 보레이트 유리 조성물을 1종 이상 사용한 것을 포함하며,
(d) 상기 혼합된 분말을 건습식으로 교반 시간 및 건조조건을 조절하여 그레뉼화 하는 단계
(e ) 상기 그레뉼입자에 전화가 다른 열전도성이 높은 소재를 혼합하는 단계
상기 열전도성이 높은 물질로는 BN, AlN, Si3N4등의 나이트 레이트계 화합물, SiC, ZrC 등의 카바이드계 화합물 중 1종 이상을 포함하며
(f) 상기 분말을 열처리하는 단계:를 포함하고 열처리하여 마그네시아 세부의 기공이 없는 상태로 치밀화하고, 또한 마그네시아 그레뉼 표면에 유리 피막 형성층과 열전도성이 높은 소재가 표면에 형성되는 것을 특징으로 하는 마그네시아 제조 방법.
본 발명의 제조방법에 의해 기공이 없는 치밀한 구조의 마그네시아 그레뉼을 제조할 수 있어 열전도성을 높일 수 있을 뿐만 아니라, 소결에 따른 유리 피막 형성으로 인해 흡습성이 개선된 마그네시아를 얻을 수 있고 유리 전이 온도가 낮은(<1500℃이하) 마그네슘계 보레이트 화합물이나 보레이트계 Glass를 첨가하여 소결시 소결온도를 낮출 수 있는 장점이 있다.The present invention provides the following manufacturing method.
(a) Step of controlling charge (+, -) in dry/wet method using MgO powder
(b) mixing the charge-controlled MgO powder with a borate-based compound in a dry/wet manner
(c) mixing borate compounds with different charges into the powder
The borate compound includes one or more borate compounds or borate glass compositions containing alkali metal and alkaline earth metal,
(d) Granulating the mixed powder by adjusting the stirring time and drying conditions in a wet and dry manner.
(e) Mixing the granule particles with a different material with high thermal conductivity.
The high thermal conductivity material includes one or more of nitrate-based compounds such as BN, AlN, Si 3 N 4 , and carbide-based compounds such as SiC and ZrC.
(f) heat-treating the powder, wherein the powder is heat-treated to densify the magnesia details in a pore-free state, and a glass film formation layer and a highly thermally conductive material are formed on the surface of the magnesia granule. How to make magnesia.
By using the manufacturing method of the present invention, magnesia granule with a dense structure without pores can be manufactured, which not only improves thermal conductivity, but also obtains magnesia with improved hygroscopicity due to the formation of a glass film through sintering, and has a lower glass transition temperature. There is an advantage in that the sintering temperature can be lowered during sintering by adding magnesium-based borate compounds or borate-based glass with low temperature (<1500℃ or less).
Description
본 발명은 치밀한 구조의 마그네시아 그레뉼의 제조방법에 관한 것이다.The present invention relates to a method for producing densely structured magnesia granules.
고출력 LED나 파워 디바이스 등의 고전력이 소모되고, 열이 많이 발생하는 부품 제작에 있어서, 부품의 신뢰성 및 장수명 보장을 위해 방열 패키지가 사용되고 있다. 일반적으로, 방열 패키지는 고열전도성 절연기판, 금속히트싱크 (Metal Heat Sink)로 이루어져 있다. 고열전도성 절연기판과 금속히트싱크 사이에는 방열접착제인 열계면 소재(TIM: Thermal Interface Material)가 사용된다. 열계면 소재는 고열전도성 절연기판과 금속히트싱크를 서로 밀착시키는 접착제 역할을 하거나 방열 부품으로 단독 사용된다. 이러한 열계면 소재는 폴리머와 고열전도성 금속 또는 세라믹 필러 소재의 복합체로 이루어진다. 열계면 소재는 폴리머에 Al2O3 필러를 포함시켜 주로 사용되고 있다. 그러나 Al2O3 필러 소재는 열전도도가 20-30 W/mK으로 다소 낮아서 개선될 필요가 있다. 한편, MgO는 원료 가격이 Al2O3 와 동등 수준이며, 열전도도가 30-60 W/mK으로 Al2O3 필러 소재에 비해 열전도성이 우수하다. 뿐만 아니라, MgO는 10Ohmㆍcm 이상의 비저항을 보여 전기 절연성이 우수하다. 이에 따라 Al2O3 필러 대신 MgO 필러가 사용되면, Al2O3 기반 열계면 소재의 열전도도를 개선할 수 있어서 TIM용 필러로서 유용하다. 하지만, MgO는 흡습성이 비교적 높기 때문에 수분 흡수에 의해 열전도도가 저하된다. 그리고 수분 흡수에 의해 MgO 표면에 발생하는 Mg(OH)2는 고분자와의 복합을 어렵게 하여 TIM으로 제조가 어려울 뿐만 아니라, 체적 팽창으로 인해 폴리머 소재와 분리될 가능성이 높은 점 등의 문제가 발생하기 쉽다. 이러한 점이 MgO를 열전도성 세라믹 필러로의 실용화에 장애 요소가 되고 있다. 이에 따라, MgO를 TIM용 열전도성 세라믹 필러로 개발하기 위해서는 내흡습성을 개선시킬 수 있는 기술 개발이 선행되어야 한다. 한편, MgO는 알루미나(Al2O3)에 비해 열전도도가 30-60 W/mK으로 높은 장점이 있다. 그러나, 알루미나(Al2O3)가 약 1500~1600℃에서 소결되는 반면, 마그네시아(MgO)는 1700℃ 이상 고온에서 소결되는 단점이 있어 마그네시아(MgO) 소결 조건의 개선이 필요하다. 그 동안 마그네시아(MgO)의 저온 소결 시도는 있었으나, 열전도도를 유지하면서 소결 온도를 낮추는 방열 세라믹 소재 연구는 없었다. 따라서, 마그네시아(MgO)의 고열전도 특성은 유지하면서 알루미나(Al2O3)의 소결온도인 1500℃ 보다 낮은 온도에서 소결이 가능하도록 하여 가격 경쟁력이 있는 저가의 고열전도성 산화물 신소재의 개발 연구가 필요하다.When manufacturing parts that consume high power and generate a lot of heat, such as high-output LEDs or power devices, heat dissipation packages are used to ensure reliability and long life of the parts. Generally, a heat dissipation package consists of a highly thermally conductive insulating substrate and a metal heat sink. A thermal interface material (TIM), a heat dissipating adhesive, is used between the high thermal conductivity insulating substrate and the metal heat sink. Thermal interface material acts as an adhesive that adheres a high thermal conductivity insulating board and a metal heat sink to each other, or is used alone as a heat dissipation component. These thermal interface materials are made of a composite of a polymer and a highly thermally conductive metal or ceramic filler material. Thermal interface materials are mainly used by including Al 2 O 3 filler in polymer. However, the Al 2 O 3 filler material needs to be improved because its thermal conductivity is somewhat low at 20-30 W/mK. Meanwhile, the raw material price of MgO is Al 2 O 3 It is at the same level as and has a thermal conductivity of 30-60 W/mK, which is superior to that of Al 2 O 3 filler material. In addition, MgO has excellent electrical insulation properties, showing a resistivity of over 10 Ohm·cm. Accordingly, when MgO filler is used instead of Al 2 O 3 filler, the thermal conductivity of the Al 2 O 3 -based thermal interface material can be improved, making it useful as a filler for TIM. However, because MgO has relatively high hygroscopicity, thermal conductivity decreases due to moisture absorption. In addition, Mg(OH)2 generated on the surface of MgO due to moisture absorption makes it difficult to composite with polymers, which not only makes it difficult to manufacture as TIM, but also causes problems such as the high possibility of separation from the polymer material due to volume expansion. easy. This is an obstacle to the practical use of MgO as a thermally conductive ceramic filler. Accordingly, in order to develop MgO as a thermally conductive ceramic filler for TIM, the development of technology to improve moisture absorption resistance must be preceded. On the other hand, MgO has the advantage of having a high thermal conductivity of 30-60 W/mK compared to alumina (Al 2 O 3 ). However, while alumina (Al2O3) is sintered at about 1500-1600°C, magnesia (MgO) has the disadvantage of being sintered at a high temperature of over 1700°C, so the sintering conditions for magnesia (MgO) need to be improved. Although there have been attempts at low-temperature sintering of magnesia (MgO), there has been no research on heat-dissipating ceramic materials that lower the sintering temperature while maintaining thermal conductivity. Therefore, research is needed to develop low-cost, high thermal conductivity new oxide materials that are price competitive by maintaining the high thermal conductivity characteristics of magnesia ( MgO ) and enabling sintering at a temperature lower than 1500°C, the sintering temperature of alumina (Al 2 O 3 ). do.
본 발명은 기공이 없는 치밀한 구조의 마그네시아 그레뉼을 제조할 수 있어 열전도성을 높일 수 있을 뿐만 아니라, 소결에 따른 유리 피막 형성으로 인해 흡습성이 개선된 마그네시아를 제조하는 것을 목적으로 한다.The purpose of the present invention is to manufacture magnesia granule with a dense structure without pores, which not only improves thermal conductivity, but also has improved hygroscopicity due to the formation of a glass film due to sintering.
본 발명은 기공이 없는 치밀한 구조의 마그네시아 그레뉼을 제조할 수 있어 열전도성을 높일 수 있을 뿐만 아니라, 소결에 따른 유리 피막 형성으로 인해 흡습성이 개선된 마그네시아를 얻을 수 있다.The present invention can produce magnesia granule with a dense structure without pores, which not only improves thermal conductivity, but also obtains magnesia with improved hygroscopicity due to the formation of a glass film due to sintering.
또한, 유리전이 온도가 낮은(<1500℃이하) 마그네슘계 보레이트 화합물이나 보레이트계 Glass를 첨가하여 소결시 소결온도를 낮출 수 있는 장점이 있다.In addition, there is an advantage that the sintering temperature can be lowered during sintering by adding a magnesium-based borate compound or borate-based glass with a low glass transition temperature (<1500°C or lower).
도 1은 MgO 및 보레이트계 화합물을 포함하는 마그네시아 그래뉼의 개념도,
도 2는 상기 도 1의 마그네시아 그래뉼에 유리피막층이 형성된 그래뉼의 개념도,
도 3은 상기 도 2의 유리피막층에 고열전도층이 추가로 형성된 그래뉼의 개념도이다.1 is a conceptual diagram of magnesia granules containing MgO and a borate-based compound;
Figure 2 is a conceptual diagram of a granule in which a glass film layer is formed on the magnesia granule of Figure 1;
Figure 3 is a conceptual diagram of a granule in which a high heat conductive layer is additionally formed on the glass film layer of Figure 2.
본 발명은,The present invention,
(a) MgO 분말을 이용하여 건/습식으로 전하(+, -)를 조절하는 단계(a) Step of controlling charge (+, -) in dry/wet method using MgO powder
(b) 상기 전하 조절이 된 MgO 분말에 보레이트계 화합물과 건/습식으로 혼합하는 단계 (b) mixing the charge-controlled MgO powder with a borate-based compound in a dry/wet manner
(c) 상기 분말에 전하가 다른 보레이트 화합물을 혼합하는 단계(c) mixing borate compounds with different charges into the powder
상기 보레이트 화합물은 알카리 금속 및 알카리 토금속을 함유한 보레이트 화합물이나 보레이트 유리 조성물을 1종 이상 사용한 것을 포함하며,The borate compound includes one or more borate compounds or borate glass compositions containing alkali metal and alkaline earth metal,
(d) 상기 혼합된 분말을 건습식으로 교반 시간 및 건조조건을 조절하여 그레뉼화 하는 단계(d) Granulating the mixed powder by adjusting the stirring time and drying conditions in a wet and dry manner.
(e ) 상기 그레뉼입자에 전화가 다른 열전도성이 높은 소재를 혼합하는 단계(e) Mixing the granule particles with a different material with high thermal conductivity.
상기 열전도성이 높은 물질로는 BN, AlN, Si3N4등의 나이트 레이트계 화합물, SiC, ZrC 등의 카바이드계 화합물 중 1종 이상을 포함하며The high thermal conductivity material includes one or more of nitrate-based compounds such as BN, AlN, Si 3 N 4 , and carbide-based compounds such as SiC and ZrC.
(f) 상기 분말을 열처리하는 단계:를 포함하고 (f) heat treating the powder:
열처리하여 마그네시아 세부의 기공이 없는 상태로 치밀화 하고, 또한 마그네시아 그레뉼 표면에 유리 피막 형성층과 열전도성이 높은 소재가 표면에 형성되는 것을 특징으로 하는 마그네시아 제조 방법에 관한 것이다.It relates to a method for producing magnesia, which is characterized in that the magnesia details are densified without pores by heat treatment, and a glass film formation layer and a highly thermally conductive material are formed on the surface of the magnesia granule.
또한, 본 발명은 상기 (a) 단계의 전하 조절제로는 마그네시아 분말 전체 100 중량%에 대해 0.01 ~ 10 중량%를 포함하는 것을 특징으로 하며,In addition, the present invention is characterized in that the charge control agent in step (a) includes 0.01 to 10% by weight based on 100% by weight of the total magnesia powder,
(b) 단계의 보레이트계 화합물로는 마그네시아 분말 전체 100 중량%에 대해 0.01 ~ 10 중량 %를 포함하는 것을 특징으로 하며,The borate-based compound in step (b) is characterized in that it contains 0.01 to 10% by weight based on 100% by weight of the total magnesia powder,
(c) 단계의 보레이트계 유리조성물로는 마그네시아 분말 전체 100 중량%에 대해 0.01 ~ 10 중량%를 포함하는 것을 특징으로 하며,The borate-based glass composition of step (c) is characterized in that it contains 0.01 to 10% by weight based on 100% by weight of the magnesia powder,
(d) 단계의 보레이트계 화합물로는 마그네시아 분말 전체 100 중량%에 대해 0.01 ~ 10 중량 %를 포함하는 것을 특징으로 한다.The borate-based compound in step (d) is characterized in that it contains 0.01 to 10% by weight based on 100% by weight of the total magnesia powder.
또한 상기 혼합하는 단계는 습식 또는 건식으로 1분에서 72시간 혼합하여 혼합물을 형성하는 것을 특징으로 한다.In addition, the mixing step is characterized by mixing wet or dry for 1 minute to 72 hours to form a mixture.
또한 상기 습식 혼합 후 건조시 건조 온도는 상온~100℃ 1분에서 24시간 건조하는 것을 특징으로 한다.In addition, when drying after wet mixing, the drying temperature is characterized by drying at room temperature to 100°C for 1 minute for 24 hours.
또한 (e) 단계의 그레뉼입자의 크기는 0.5㎛ ~ 500㎛인 것을 특징으로 한다.In addition, the size of the granule particles in step (e) is characterized in that it is 0.5㎛ ~ 500㎛.
또한 (f) 단계에서 열처리 온도는 800 ~ 1800℃에서 열처리하는 것을 특징으로 하며,In addition, in step (f), the heat treatment temperature is characterized by heat treatment at 800 ~ 1800 ℃,
(g) 단계의 보레이트계 화합물로는 마그네시아 분말 전체 100 중량%에 대해 0.01 ~ 10 중량%를 포함하고,The borate-based compound in step (g) includes 0.01 to 10% by weight based on 100% by weight of the magnesia powder,
(f)단계에서 마그네시아 그레뉼 표면에 유리피막 형성층이 형성되는 것을 특징으로 한다.In step (f), a glass film formation layer is formed on the surface of the magnesia granule.
10. MgO
20. 보레이트계 화합물
100. 마그네시아 그래뉼
110. 유리피막층
120. 고열전도층10.
100. Magnesia granule 110. Glass film layer
120. High thermal conductivity layer
Claims (11)
(b) 상기 전하 조절이 된 MgO 분말에 보레이트계 화합물과 건/습식으로 혼합하는 단계
(c) 상기 분말에 전하가 다른 보레이트 화합물을 혼합하는 단계
상기 보레이트 화합물은 알카리 금속 및 알카리 토금속을 함유한 보레이트 화합물이나 보레이트 유리 조성물을 1종 이상 사용한 것을 포함하며,
(d) 상기 혼합된 분말을 건습식으로 교반 시간 및 건조조건을 조절하여 그레뉼화 하는 단계
(e ) 상기 그레뉼입자에 전화가 다른 열전도성이 높은 소재를 혼합하는 단계
상기 열전도성이 높은 물질로는 BN, AlN, Si3N4등의 나이트 레이트계 화합물, SiC, ZrC 등의 카바이드계 화합물 중 1종 이상을 포함하며
(f) 상기 분말을 열처리하는 단계:를 포함하고
열처리하여 마그네시아 세부의 기공이 없는 상태로 치밀화 하고, 또한 마그네시아 그레뉼 표면에 유리 피막 형성층과 열전도성이 높은 소재가 표면에 형성되는 것을 특징으로 하는 마그네시아 제조 방법.(a) Step of controlling charge (+, -) in dry/wet method using MgO powder
(b) mixing the charge-controlled MgO powder with a borate-based compound in a dry/wet manner
(c) mixing borate compounds with different charges into the powder
The borate compound includes one or more borate compounds or borate glass compositions containing alkali metal and alkaline earth metal,
(d) Granulating the mixed powder by adjusting the stirring time and drying conditions in a wet and dry manner.
(e) Mixing the granule particles with a different material with high thermal conductivity.
The high thermal conductivity material includes one or more of nitrate-based compounds such as BN, AlN, Si 3 N 4 , and carbide-based compounds such as SiC and ZrC.
(f) heat treating the powder:
A method of producing magnesia, characterized in that the magnesia details are densified without pores by heat treatment, and a glass film forming layer and a highly thermally conductive material are formed on the surface of the magnesia granule.
(a) 단계의 전하 조절제로는 마그네시아 분말 전체 100 중량%에 대해 0.01 ~ 10 중량%를 포함하는 마그네시아 제조 방법.According to clause 1,
A method for producing magnesia, wherein the charge control agent in step (a) includes 0.01 to 10% by weight based on 100% by weight of the total magnesia powder.
(b) 단계의 보레이트계 화합물로는 마그네시아 분말 전체 100 중량%에 대해 0.01 ~ 10 중량 %를 포함하는 마그네시아 제조 방법.According to clause 1,
A method for producing magnesia including 0.01 to 10% by weight of the borate-based compound in step (b) based on 100% by weight of the total magnesia powder.
(c) 단계의 보레이트계 유리조성물로는 마그네시아 분말 전체 100 중량%에 대해 0.01 ~ 10 중량%를 포함하는 마그네시아 제조 방법.According to clause 1,
A method of producing magnesia containing 0.01 to 10% by weight of the borate-based glass composition in step (c) based on 100% by weight of the total magnesia powder.
(d) 단계의 보레이트계 화합물로는 마그네시아 분말 전체 100 중량 %에 대해 0.01 ~ 10 중량 %를 포함하는 마그네시아 제조 방법.According to clause 1,
A method for producing magnesia including 0.01 to 10% by weight of the borate-based compound in step (d) based on 100% by weight of the total magnesia powder.
혼합하는 단계는 습식 또는 건식으로 1분에서 72시간 혼합하여 혼합물을 형성하는 마그네시아 제조방법.According to clause 1,
A magnesia manufacturing method in which the mixing step is wet or dry mixing for 1 minute to 72 hours to form a mixture.
습식 혼합 후 건조시 건조 온도는 상온~100℃ 1분에서 24시간 건조하는 마그네시아 제조방법.According to clause 1,
A magnesia manufacturing method in which the drying temperature is between room temperature and 100°C for 1 minute for 24 hours after wet mixing.
(e) 단계의 그레뉼입자의 크기는 0.5㎛ ~ 500㎛을 갖는 마그네시아 제조 방법.According to clause 1,
A method of producing magnesia in which the granule particles in step (e) have a size of 0.5 μm to 500 μm.
(f) 단계에서 열처리 온도는 800 ~ 1800℃에서 열처리하는 마그네시아 제조 방법.According to clause 1,
In step (f), the heat treatment temperature is 800 to 1800°C.
(g) 단계의 보레이트계 화합물로는 마그네시아 분말 전체 100 중량%에 대해 0.01 ~ 10 중량 %를 포함하는 마그네시아 제조 방법.According to clause 1,
A method for producing magnesia including 0.01 to 10% by weight of the borate-based compound in step (g) based on 100% by weight of the total magnesia powder.
(f)단계에서 마그네시아 그레뉼 표면에 유리피막 형성층이 형성되는 마그네시아 제조 방법.According to clause 1,
A magnesia manufacturing method in which a glass film formation layer is formed on the surface of the magnesia granule in step (f).
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