KR20230174253A - Triazine ring-containing polymer and composition for pattern formation - Google Patents

Abstract

It contains a repeating unit structure represented by the following formula (1), has at least one triazine ring terminal, a portion of the triazine ring terminal is sealed with an amino group having a crosslinking group, and another portion is sealed with a hydroxyl group-substituted arylamino group. A triazine ring-containing polymer characterized in that:

(In the formula, R and R' independently represent a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, or an aralkyl group, and Q represents a divalent group of 3 to 30 carbon atoms having a ring structure. * represents a bond. .)

Description

Triazine ring-containing polymer and composition for pattern formation

The present invention relates to a triazine ring-containing polymer and a composition for pattern formation.

In recent years, liquid crystal displays, organic electroluminescence (EL) displays, touch panels, optical semiconductor (light-emitting diode (LED), etc.) devices, solid-state imaging devices, organic thin-film solar cells, dye-sensitized solar cells, and organic thin-film transistors (TFT) When developing electronic devices such as high-performance polymer materials have been required.

Specific characteristics required include 1) heat resistance, 2) transparency, 3) high refractive index, 4) high solubility, 5) low volumetric shrinkage, 6) high temperature and high humidity resistance, and 7) tympanic membrane hardness.

Taking this into account, the present applicant believes that a polymer containing repeating units having a triazine ring and an aromatic ring has a high refractive index, and that the polymer alone can achieve high heat resistance, high transparency, high refractive index, high solubility, and low volumetric shrinkage. It has already been found that it is suitable as a composition for forming a film when manufacturing an electronic device (Patent Document 1).

However, organic light-emitting device displays generally have a problem in that light extraction efficiency, that is, the efficiency with which generated light exits the device, is low.

As a light extraction method to solve this problem, various technologies have been developed in the past, and one of them is a high refractive index layer or Techniques using refractive index patterns are known.

Many negative photosensitive compositions have been proposed for this high refractive index pattern, and the present applicant has also reported various materials capable of forming a negative high refractive index pattern (see Patent Documents 2 to 4).

However, in the case of negative materials, since the portion cured by light irradiated from the top remains and a pattern is formed, not only does the shape after development generally tend to be reverse tapered, but undercuts are also likely to occur.

International Publication No. 2010/128661 International Publication No. 2016/024613 International Publication No. 2016/114337 International Publication No. 2019/093203

In addition, in the above-described prior art, there was room for improvement with respect to solvent resistance.

Therefore, there is a demand for a composition that has excellent solvent resistance and can form a negative high refractive index pattern.

The present invention was made in view of the above circumstances, and its purpose is to provide a triazine ring-containing polymer that is excellent in solvent resistance, has a high refractive index, and can form a pattern with excellent transparency.

The present inventor has conducted extensive studies to achieve the above object, and as a result, a triazine ring-containing polymer in which part of the triazine ring terminal is sealed with an amino group having a crosslinking group and another part is sealed with a hydroxyl group-substituted arylamino group, It was found that a fine pattern with excellent solvent resistance, high refractive index, and excellent transparency could be formed.

That is, the present invention

[1] It contains a repeating unit structure represented by the following formula (1), has at least one triazine ring terminal, a portion of the triazine ring terminal is sealed with an amino group having a crosslinking group, and another portion is a hydroxyl group-substituted aryl A triazine ring-containing polymer characterized by being sealed with an amino group.

(In formula (1), R and R' independently represent a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, or an aralkyl group, and Q represents a divalent group of 3 to 30 carbon atoms having a ring structure. * is a bond Shows hand.)

[2] The triazine ring-containing polymer according to [1], wherein Q in the formula (1) represents at least one member selected from the group represented by formulas (2) to (13) and formulas (102) to (115). .

(In formulas (2) to (13), R ¹ to R ⁹² are each independently selected from a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group with 1 to 10 carbon atoms, a halogenated alkyl group with 1 to 10 carbon atoms, or a carbon atom of 1 to 10. Represents an alkoxy group of 10,

R ⁹³ and R ⁹⁴ represent a hydrogen atom or an alkyl group having 1 to 10 carbon atoms,

W ¹ and W ² are independently a single bond, CR ⁹⁵ R ⁹⁶ (R ⁹⁵ and R ⁹⁶ are independently a hydrogen atom and an alkyl group having 1 to 10 carbon atoms (however, they may form a ring together), or represents a halogenated alkyl group having 1 to 10 carbon atoms), C=O, O, S, SO, SO ₂ or NR ⁹⁷ (R ⁹⁷ represents a hydrogen atom, an alkyl group or phenyl group having 1 to 10 carbon atoms),

X ¹ and X ² are each independently a single bond, an alkylene group having 1 to 10 carbon atoms, or formula (14)

(In formula (14), R ⁹⁸ to R ¹⁰¹ independently represent a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group with 1 to 10 carbon atoms, a halogenated alkyl group with 1 to 10 carbon atoms, or an alkoxy group with 1 to 10 carbon atoms, ,

Y ¹ and Y ² independently represent a single bond or an alkylene group having 1 to 10 carbon atoms.

* indicates a combined hand.]

(In formulas (102) to (115), R ¹ and R ² independently represent an alkylene group having 1 to 5 carbon atoms that may have a branched structure. * represents a bond.)

[3] In the formulas (2) to (13), R ¹ to R ⁹² and R ⁹⁸ to R ¹⁰¹ are each independently a hydrogen atom, a halogen atom, or a halogenated alkyl group having 1 to 10 carbon atoms. The triazine ring-containing polymer described in .

[4] The triazine ring-containing polymer according to any one of [1] to [3], wherein the amino group having the crosslinking group is represented by formula (15).

(In formula (15), R ¹⁰² represents a crosslinking group. * represents a bonding hand.)

[5] The triazine ring-containing polymer according to [4], wherein the amino group having the crosslinking group is represented by formula (16).

(In formula (16), R ¹⁰² has the same meaning as above. * represents a bond.)

[6] The triazine ring-containing polymer according to [4] or [5], wherein R ¹⁰² is a hydroxy-containing group or a (meth)acryloyl-containing group.

[7] The triazine ring-containing polymer according to [6], wherein R ¹⁰² is a hydroxyalkyl group, a (meth)acryloyloxyalkyl group, or a group represented by the formula (i) below.

(In formula (i), A ¹ represents an alkylene group having 1 to 10 carbon atoms, and A ² represents a single bond or the following formula (j)

represents a group represented by , A ³ represents an (a+1) valent aliphatic hydrocarbon group which may be substituted with a hydroxy group, A ⁴ represents a hydrogen atom or a methyl group, a represents 1 or 2, and * represents a bond. )

[8] R ¹⁰² is a hydroxymethyl group, 2-hydroxyethyl group, (meth)acryloyloxymethyl group, (meth)acryloyloxyethyl group, and the following formulas (i-2) to (i-5) The triazine ring-containing polymer described in [7], which is a group selected from groups represented by .

(In formulas (i-2) to (i-5), * represents a bond.)

[9] The triazine ring-containing polymer according to any one of [1] to [8], wherein the hydroxyl group-substituted arylamino group is represented by formula (17).

(In equation (17), * represents a bond.)

[10] The triazine ring-containing polymer according to any one of [1] to [9], wherein the hydroxyl group-substituted arylamino group is represented by formula (18).

(In equation (18), * represents a bond.)

[11] A composition for forming a pattern containing the triazine ring-containing polymer according to any one of [1] to [10].

[12] The composition for forming a pattern according to [11], further comprising an organic solvent.

[13] The composition for pattern formation according to [12], wherein the organic solvent includes at least one selected from glycol ester-based solvents, ketone-based solvents, and ester-based solvents.

[14] The composition for forming a pattern according to any one of [11] to [13], further comprising a crosslinking agent.

[15] The composition for forming a pattern according to [14], wherein the crosslinking agent is a polyfunctional (meth)acrylic compound.

[16] The composition for forming a pattern according to any one of [11] to [15], which is for a light extraction layer of an organic electroluminescent element.

[17] A cured product produced from the composition for forming a pattern according to any one of [11] to [16].

[18] An electronic device comprising a substrate and the cured product according to [17] formed on the substrate.

[19] The electronic device according to [18], which is an organic electroluminescence.

[20] An optical member comprising a base material and the cured product according to [17] formed on the base material.

[21] The composition for forming a pattern according to any one of [11] to [16] is applied to a substrate, the organic solvent is evaporated, the composition is irradiated with light through a mask on which a pattern is formed, and then developed and fired. How to make a pattern.

The triazine ring-containing polymer of the present invention has excellent solvent resistance and provides a fine pattern with a high refractive index and excellent transparency.

The composition of the present invention is masked, exposed, and cured, subjected to alkali development, and then fired to give a fine pattern that has excellent solvent resistance, a high refractive index, and excellent transparency.

Since the pattern produced from the composition of the present invention can exhibit the characteristics of solvent resistance, high heat resistance, high refractive index, and low volumetric shrinkage due to the triazine ring-containing polymer, it can be used in liquid crystal displays, organic electroluminescence (EL) displays, Electronic devices such as touch panels, optical semiconductor devices, solid-state imaging devices, organic thin-film solar cells, dye-sensitized solar cells, organic thin-film transistors, lenses, prisms, cameras, binoculars, microscopes, and some components used in the production of semiconductor exposure equipment, etc. It can be suitably used in the field of optical materials.

Figure 1 is a ¹ H-NMR spectrum diagram of compound P-1 (polymer compound [4]) obtained in Example 1-1.
Figure 2 is an optical micrograph of the patterning film produced in Example 4-1.
Figure 3 is an electron micrograph of the patterning film produced in Example 4-1.

Hereinafter, the present invention will be described in more detail.

(Triazine ring-containing polymer)

The triazine ring-containing polymer according to the present invention contains a repeating unit structure represented by the following formula (1).

Triazine ring-containing polymers are, for example, so-called hyperbranched polymers. A hyperbranched polymer is a highly branched polymer with an irregular branching structure. Irregularity here means that the branching structure is more irregular than that of dendrimer, which is a highly branched polymer with a regular branching structure.

For example, a triazine ring-containing polymer, which is a hyperbranched polymer, has a structure larger than the repeating unit structure represented by formula (1), and each of the three bonding hands of the repeating unit structure represented by formula (1) has the formula ( It includes a structure (structure In the triazine ring-containing polymer, which is a hyperbranched polymer, structure

In the triazine ring-containing polymer that is a hyperbranched polymer, the repeating unit structure may consist essentially of only the repeating unit structure represented by formula (1).

<Equation (1)>

* indicates a binding hand.

<<R and R'>>

In the above formula, R and R' independently represent a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, or an aralkyl group. However, from the viewpoint of further increasing the refractive index, it is preferable that both are hydrogen atoms.

In the present invention, the number of carbon atoms in the alkyl group is not particularly limited, but is preferably 1 to 20. Considering the higher heat resistance of the polymer, the number of carbon atoms in the alkyl group is more preferably 1 to 10, and even more preferably 1 to 3. It is more desirable. In addition, the structure of the alkyl group is not particularly limited, and may be, for example, linear, branched, cyclic, or a combination of two or more thereof.

Specific examples of alkyl groups include methyl, ethyl, n-propyl, isopropyl, cyclopropyl, n-butyl, isobutyl, s-butyl, t-butyl, cyclobutyl, 1-methyl-cyclopropyl, and 2-methyl-cyclopropyl. , n-pentyl, 1-methyl-n-butyl, 2-methyl-n-butyl, 3-methyl-n-butyl, 1,1-dimethyl-n-propyl, 1,2-dimethyl-n-propyl, 2 ,2-dimethyl-n-propyl, 1-ethyl-n-propyl, cyclopentyl, 1-methyl-cyclobutyl, 2-methyl-cyclobutyl, 3-methyl-cyclobutyl, 1,2-dimethyl-cyclopropyl, 2,3-dimethyl-cyclopropyl, 1-ethyl-cyclopropyl, 2-ethyl-cyclopropyl, n-hexyl, 1-methyl-n-pentyl, 2-methyl-n-pentyl, 3-methyl-n-pentyl , 4-methyl-n-pentyl, 1,1-dimethyl-n-butyl, 1,2-dimethyl-n-butyl, 1,3-dimethyl-n-butyl, 2,2-dimethyl-n-butyl, 2 ,3-dimethyl-n-butyl, 3,3-dimethyl-n-butyl, 1-ethyl-n-butyl, 2-ethyl-n-butyl, 1,1,2-trimethyl-n-propyl, 1,2 ,2-trimethyl-n-propyl, 1-ethyl-1-methyl-n-propyl, 1-ethyl-2-methyl-n-propyl, cyclohexyl, 1-methyl-cyclopentyl, 2-methyl-cyclopentyl, 3-Methyl-cyclopentyl, 1-ethyl-cyclobutyl, 2-ethyl-cyclobutyl, 3-ethyl-cyclobutyl, 1,2-dimethyl-cyclobutyl, 1,3-dimethyl-cyclobutyl, 2,2- Dimethyl-cyclobutyl, 2,3-dimethyl-cyclobutyl, 2,4-dimethyl-cyclobutyl, 3,3-dimethyl-cyclobutyl, 1-n-propyl-cyclopropyl, 2-n-propyl-cyclopropyl, 1-Isopropyl-cyclopropyl, 2-isopropyl-cyclopropyl, 1,2,2-trimethyl-cyclopropyl, 1,2,3-trimethyl-cyclopropyl, 2,2,3-trimethyl-cyclopropyl, 1 -ethyl-2-methyl-cyclopropyl, 2-ethyl-1-methyl-cyclopropyl, 2-ethyl-2-methyl-cyclopropyl, 2-ethyl-3-methyl-cyclopropyl, etc.

The number of carbon atoms in the alkoxy group is not particularly limited, but is preferably 1 to 20. Considering the higher heat resistance of the polymer, the number of carbon atoms in the alkoxy group is more preferably 1 to 10, and even more preferably 1 to 3. do. In addition, the structure of the alkyl portion is not particularly limited, and may be, for example, linear, branched, cyclic, or a combination of two or more thereof.

Specific examples of alkoxy groups include methoxy, ethoxy, n-propoxy, isopropoxy, n-butoxy, isobutoxy, s-butoxy, t-butoxy, n-pentoxy, and 1-methyl-n-. Butoxy, 2-methyl-n-butoxy, 3-methyl-n-butoxy, 1,1-dimethyl-n-propoxy, 1,2-dimethyl-n-propoxy, 2,2-dimethyl-n -Propoxy, 1-ethyl-n-propoxy, n-hexyloxy, 1-methyl-n-pentyloxy, 2-methyl-n-pentyloxy, 3-methyl-n-pentyloxy, 4-methyl- n-pentyloxy, 1,1-dimethyl-n-butoxy, 1,2-dimethyl-n-butoxy, 1,3-dimethyl-n-butoxy, 2,2-dimethyl-n-butoxy, 2 ,3-dimethyl-n-butoxy, 3,3-dimethyl-n-butoxy, 1-ethyl-n-butoxy, 2-ethyl-n-butoxy, 1,1,2-trimethyl-n-prop Poxy, 1,2,2-trimethyl-n-propoxy, 1-ethyl-1-methyl-n-propoxy, 1-ethyl-2-methyl-n-propoxy groups, etc. are mentioned.

The number of carbon atoms in the aryl group is not particularly limited, but is preferably 6 to 40. Considering the higher heat resistance of the polymer, the number of carbon atoms in the aryl group is more preferably 6 to 16, and even more preferably 6 to 13. do.

In the present invention, the aryl group includes an aryl group having a substituent. Examples of the substituent include a halogen atom, an alkyl group with 1 to 6 carbon atoms, an alkoxy group with 1 to 6 carbon atoms, a nitro group, and a cyano group.

Specific examples of aryl groups include phenyl, o-chlorophenyl, m-chlorophenyl, p-chlorophenyl, o-fluorophenyl, p-fluorophenyl, o-methoxyphenyl, p-methoxyphenyl, and p-nitro. Phenyl, p-cyanophenyl, α-naphthyl, β-naphthyl, o-biphenylyl, m-biphenylyl, p-biphenylyl, 1-anthryl, 2-anthryl, 9-anthryl , 1-phenanthryl, 2-phenanthryl, 3-phenanthryl, 4-phenanthryl, 9-phenanthryl groups, etc.

The number of carbon atoms of the aralkyl group is not particularly limited, but is preferably 7 to 20 carbon atoms, and the structure of the alkyl portion is not particularly limited, and may be, for example, straight chain, branched, cyclic, or a combination of two or more thereof.

In the present invention, the aralkyl group includes an aralkyl group having a substituent. Examples of the substituent include a halogen atom, an alkyl group with 1 to 6 carbon atoms, an alkoxy group with 1 to 6 carbon atoms, a nitro group, and a cyano group.

Specific examples thereof include benzyl, p-methylphenylmethyl, m-methylphenylmethyl, o-ethylphenylmethyl, m-ethylphenylmethyl, p-ethylphenylmethyl, 2-propylphenylmethyl, 4-isopropylphenylmethyl, and 4-isopropylphenylmethyl. Butylphenylmethyl, α-naphthylmethyl group, etc. are mentioned.

<<Q>>

Q in formula (1) is not particularly limited as long as it is a divalent group having a ring structure and having 3 to 30 carbon atoms.

The ring structure may be an aromatic ring structure or an alicyclic structure.

The above Q preferably represents at least one type selected from the group represented by formulas (2) to (13).

* indicates a binding hand.

R ¹ to R ⁹² independently represent a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group with 1 to 10 carbon atoms, a halogenated alkyl group with 1 to 10 carbon atoms, or an alkoxy group with 1 to 10 carbon atoms,

R ⁹³ and R ⁹⁴ represent a hydrogen atom or an alkyl group having 1 to 10 carbon atoms,

W ¹ and W ² are independently a single bond, CR ⁹⁵ R ⁹⁶ (R ⁹⁵ and R ⁹⁶ are independently a hydrogen atom and an alkyl group having 1 to 10 carbon atoms (however, they may form a ring together), or represents a halogenated alkyl group having 1 to 10 carbon atoms), C=O, O, S, SO, SO ₂ or NR ⁹⁷ (R ⁹⁷ represents a hydrogen atom, an alkyl group or phenyl group having 1 to 10 carbon atoms).

Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.

In addition, examples of the alkyl group and alkoxy group include those similar to the above.

The halogenated alkyl group having 1 to 10 carbon atoms is one in which at least one hydrogen atom in the alkyl group having 1 to 10 carbon atoms is replaced with a halogen atom, and specific examples include trifluoromethyl, 2,2,2-trifluoro. Ethyl, perfluoroethyl, 3,3,3-trifluoropropyl, 2,2,3,3,3-pentafluoropropyl, 2,2,3,3-tetrafluoropropyl, 2,2, 2-Trifluoro-1-(trifluoromethyl)ethyl, perfluoropropyl, 4,4,4-trifluorobutyl, 3,3,4,4,4-pentafluorobutyl, 2,2 ,3,3,4,4,4-heptafluorobutyl, perfluorobutyl, 2,2,3,3,4,4,5,5,5-nonafluoropentyl, 2,2,3, 3,4,4,5,5-octafluoropentyl, perfluoropentyl, 2,2,3,3,4,4,5,5,6,6,6-undecafluorohexyl, 2, 2,3,3,4,4,5,5,6,6-decafluorohexyl, 3,3,4,4,5,5,6,6,6-nonafluorohexyl and perfluorohexyl You can listen to practical skills. In the present invention, considering maintaining the refractive index and increasing the solubility of the triazine ring-containing polymer in low polar solvents, etc., a perfluoroalkyl group having 1 to 10 carbon atoms is preferable, and in particular, a perfluoroalkyl group having 1 to 5 carbon atoms is more preferred. preferred, and trifluoromethyl group is even more preferred.

Additionally, X ¹ and X ² independently represent a single bond, an alkylene group having 1 to 10 carbon atoms, or a group represented by formula (14).

The structures of these alkyl groups, halogenated alkyl groups, alkoxy groups, and alkylene groups are not particularly limited, and may be, for example, linear, branched, cyclic, or combinations of two or more thereof.

* indicates a binding hand.

R ⁹⁸ to R ¹⁰¹ independently represent a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group with 1 to 10 carbon atoms, a halogenated alkyl group with 1 to 10 carbon atoms, or an alkoxy group with 1 to 10 carbon atoms,

Y ¹ and Y ² independently represent a single bond or an alkylene group having 1 to 10 carbon atoms.

Examples of these halogen atoms, alkyl groups, halogenated alkyl groups, and alkoxy groups include those similar to the halogen atoms, alkyl groups, halogenated alkyl groups, and alkoxy groups for R ¹ to R ⁹² .

The structure of the alkyl group and alkoxy group in R ⁹⁸ to R ¹⁰¹ is not particularly limited, and may be, for example, straight-chain, branched, cyclic, or a combination of two or more thereof.

The structure of the alkylene group in Y ¹ and Y ² is not particularly limited, and may be, for example, linear, branched, cyclic, or a combination of two or more thereof.

Examples of alkylene groups having 1 to 10 carbon atoms include methylene, ethylene, propylene, trimethylene, tetramethylene, and pentamethylene groups.

The structure of the alkylene group is not particularly limited, and may be, for example, linear, branched, cyclic, or a combination of two or more thereof.

In particular, as Q, at least one type represented by formulas (2), (5) to (13) is preferable, and formulas (2), (5), (7), (8), (11) to (13) At least one type represented by is more preferable. Specific examples of the aryl groups represented by the above formulas (2) to (13) include those represented by the following formulas, but are not limited to these.

“Ph” represents a phenyl group. * indicates a binding hand.

Among these, an aryl group represented by the following formula is more preferable for Q since a polymer with a higher refractive index can be obtained.

* indicates a binding hand.

In particular, considering the possibility of increasing the solubility of the triazine ring-containing polymer in highly safe solvents such as resist solvents, an m-phenylene group is preferable as Q.

In addition, Q in formula (1) represents at least one type selected from the group represented by formulas (102) to (115), for example.

* indicates a binding hand.

In formulas (102) to (115), R ¹ and R ² independently represent an alkylene group having 1 to 5 carbon atoms which may have a branched structure.

Examples of such alkylene groups include methylene, ethylene, propylene, trimethylene, tetramethylene, and pentamethylene groups. However, in consideration of further increasing the refractive index of the obtained polymer, alkylene groups having 1 to 3 carbon atoms are preferable, and alkylene groups having 1 to 3 carbon atoms are preferable. To 2 alkylene groups, specifically methylene and ethylene groups, are more preferable, and methylene groups are optimal.

<Amino group having a crosslinking group>

Additionally, the triazine ring-containing polymer of the present invention has at least one triazine ring terminal, and a part of this triazine ring terminal is sealed with an amino group having a crosslinking group.

The triazine ring-containing polymer of the present invention has at least one triazine ring terminal, and the triazine ring at this terminal usually has two halogen atoms that can be substituted with the amino group having the crosslinking group. Therefore, the amino group having the crosslinking group may be bonded to the same triazine ring terminal, and when there are multiple triazine ring terminals, each may be bonded to a different triazine ring terminal.

In addition, in this specification, hydroxyaryl group (hydroxyl group substituted aryl group) is not included in the crosslinking group in the present invention.

The number of crosslinking groups in the amino group having a crosslinking group is not particularly limited and can be any number, but considering the balance of solvent resistance and solubility in organic solvents, 1 to 4 are preferable, and 1 to 2 are preferred. It is more preferable, and one is even more preferable.

When the amino group having a crosslinking group has a plurality of crosslinking groups, the plurality of crosslinking groups may have the same structure or different structures.

The amino group having a crosslinking group is represented by the following formula (X), for example.

(In the formula, Z represents a group having a crosslinking group. * represents a bonding hand.)

In formula (X), Z may be the crosslinking group itself.

The crosslinking group is preferably bonded to the amino group by an arylene group.

And the amino group having a crosslinking group is more preferably represented by the following formula (15), and especially preferably is represented by the following formula (16).

(In the formula, R ¹⁰² represents a crosslinking group. * represents a bonding hand.)

(In the formula, R ¹⁰² has the same meaning as above. * represents a bond.)

Examples of the crosslinking group include hydroxy-containing group, vinyl-containing group, epoxy-containing group, oxetane-containing group, carboxy-containing group, sulfo-containing group, thiol-containing group, (meth)acryloyl-containing group, etc., and triazine ring Considering that it improves the heat resistance of the containing polymer and the solvent resistance (crack resistance) of the resulting film, a (meth)acryloyl-containing group is preferable.

Examples of the hydroxy-containing group include hydroxy groups and hydroxyalkyl groups, but a hydroxyalkyl group with 1 to 10 carbon atoms is preferable, a hydroxyalkyl group with 1 to 5 carbon atoms is more preferable, and a hydroxyalkyl group with 1 to 3 carbon atoms is more preferable. is even more preferable.

Examples of hydroxyalkyl groups having 1 to 10 carbon atoms include hydroxymethyl, 2-hydroxyethyl, 3-hydroxypropyl, 4-hydroxybutyl, 5-hydroxypentyl, 6-hydroxyhexyl, 7-hydroxyheptyl, 8-hydroxyoctyl, 9-hydroxynonyl, 10-hydroxydecyl, 2-hydroxy-1-methylethyl, 2-hydroxy-1,1-dimethylethyl, 3-hydroxy-1-methylpropyl, 3-hydroxy-2-methylpropyl, 3-hydroxy-1,1-dimethylpropyl, 3-hydroxy-1,2-dimethylpropyl, 3-hydroxy-2,2-dimethylpropyl, 4-hydroxy -1-methylbutyl, 4-hydroxy-2-methylbutyl, 4-hydroxy-3-methylbutyl, etc., where the carbon atom to which the hydroxy group is bonded is a primary carbon atom; 1-hydroxyethyl, 1-hydroxypropyl, 2-hydroxypropyl, 1-hydroxybutyl, 2-hydroxybutyl, 1-hydroxyhexyl, 2-hydroxyhexyl, 1-hydroxyoctyl, 2- The carbon atom to which the hydroxy groups such as hydroxyoctyl, 1-hydroxydecyl, 2-hydroxydecyl, 1-hydroxy-1-methylethyl, and 2-hydroxy-2-methylpropyl groups are bonded is secondary or tertiary. One example is a carbon atom.

In particular, considering improving heat resistance and high temperature and high humidity resistance, it is preferable that the carbon atom to which the hydroxy group is bonded is a primary carbon atom, and among these, a hydroxyalkyl group having 1 to 5 carbon atoms is more preferable, and a hydroxyalkyl group having 1 to 3 carbon atoms is more preferable. A hydroxyalkyl group is more preferable, a hydroxymethyl group and a 2-hydroxyethyl group are more preferable, and a 2-hydroxyethyl group is most preferable.

Examples of the (meth)acryloyl-containing group include (meth)acryloyl group, (meth)acryloyloxyalkyl group, and group represented by the following formula (i), but include an alkylene group having 1 to 10 carbon atoms. A (meth)acryloyloxyalkyl group having a group and a group represented by the following formula (i) are preferable, and a group represented by the following formula (i) is more preferable.

(In the formula, A ¹ represents an alkylene group having 1 to 10 carbon atoms, and A ² represents a single bond or the following formula (j)

represents a group represented by , A ³ represents an (a+1) valent aliphatic hydrocarbon group which may be substituted with a hydroxy group, A ⁴ represents a hydrogen atom or a methyl group, a represents 1 or 2, and * represents a bond. )

Examples of the alkylene group contained in the (meth)acryloyloxyalkyl group having an alkylene group (alkanediyl group) having 1 to 10 carbon atoms include methylene, ethylene, trimethylene, propane-1,2-diyl, tetramethylene, and butane-1. , 3-diyl, butane-1,2-diyl, 2-methylpropane-1,3-diyl, pentamethylene, hexamethylene, heptamethylene, octamethylene, nonamethylene, and decamethylene groups. Considering improving heat resistance and high temperature and high humidity resistance, among these, those having an alkylene group having 1 to 5 carbon atoms are preferable, those having an alkylene group having 1 to 3 carbon atoms are preferable, and those having an alkylene group having 1 or 2 carbon atoms are preferable. It is more preferable.

Specific examples of the (meth)acryloyloxyalkyl group include, for example, (meth)acryloyloxymethyl group, 2-(meth)acryloyloxyethyl group, 3-(meth)acryloyloxypropyl group, 4- A (meth)acryloyloxybutyl group can be mentioned.

In formula (i), A ¹ is an alkylene group having 1 to 10 carbon atoms. An alkylene group having 1 to 5 carbon atoms is preferable, and a methylene group, an ethylene group, and a propylene group are more preferable. Examples of the alkylene group having 1 to 10 carbon atoms include those similar to the alkylene group contained in the (meth)acryloyloxyalkyl group above.

A ² represents a single bond or a group represented by formula (j), and a group represented by formula (j) is preferred.

A ³ is an (a+1) aliphatic hydrocarbon group that may be substituted with a hydroxy group. Specific examples thereof include, for example, an alkylene group having 1 to 5 carbon atoms, and the following formulas (k-1) to (k-3):

(In the formula, * is the same as above.)

Examples of groups represented include, an alkylene group having 1 to 5 carbon atoms is preferable, an alkylene group having 1 to 3 carbon atoms is more preferable, and a methylene group and an ethylene group are even more preferable. Examples of the alkylene group for A ³ include alkylene groups having 1 to 5 carbon atoms among the alkylene groups exemplified for A ¹ .

a represents 1 or 2, but 1 is preferred.

Suitable embodiments of the group represented by formula (i) include those represented by the following formula (i-1).

(In the formula, A ¹ , A ³ , A ⁴ and * are the same as above.)

More suitable embodiments of the group represented by formula (i) include those represented by the following formulas (i-2) to (i-5).

(In the formula, * is the same as above.)

Examples of the vinyl-containing group include alkenyl groups having 2 to 10 carbon atoms and having a vinyl group at the terminal. Specific examples include ethenyl, 1-propenyl, allyl, isopropenyl, 1-butenyl, 2-butenyl, and 2-pentenyl groups.

Examples of the epoxy-containing group include epoxy, glycidyl, and glycidyloxy groups. Specific examples include glycidyl methyl, 2-glycidyl ethyl, 3-glycidyl propyl, and 4-glycidyl butyl groups.

Examples of oxetane-containing groups include oxetan-3-yl, (oxetan-3-yl)methyl, 2-(oxetan-3-yl)ethyl, 3-(oxetan-3-yl)propyl, 4-( Oxetan-3-yl)butyl group, etc. can be mentioned.

Examples of the carboxy-containing group include a carboxy group and a carboxyalkyl group having 2 to 10 carbon atoms. As the carboxyalkyl group having 2 to 10 carbon atoms, it is preferable that the carbon atom to which the carboxyl group is bonded is a secondary carbon atom, and specific examples include carboxymethyl, 2-carboxyethyl, 3-carboxypropyl and 4-carboxybutyl groups. You can.

Examples of the sulfo-containing group include a sulfo group and a sulfoalkyl group having 1 to 10 carbon atoms. As a sulfoalkyl group having 1 to 10 carbon atoms, it is preferable that the carbon atom to which the sulfo group is bonded is a primary carbon atom, and specific examples include sulfomethyl, 2-sulfoethyl, 3-sulfopropyl and 4-sulfobutyl groups. I can hear it.

Examples of thiol-containing groups include thiol groups and mercaptoalkyl groups having 1 to 10 carbon atoms. As a mercaptoalkyl group having 1 to 10 carbon atoms, it is preferable that the carbon atom to which the thiol group is bonded is a primary carbon atom, and specific examples include mercaptomethyl, 2-mercaptoethyl, 3-mercaptopropyl and 4-mercapto. Butyl group etc. are mentioned.

The amino group having a (meth)acryloyloxyalkyl group can be prepared by using a corresponding (meth)acryloyloxyalkylamino compound, or by introducing an amino group having a hydroxyalkyl group into a triazine ring-containing polymer. The hydroxy group contained in the hydroxyalkyl group can be introduced by a method of reacting (meth)acrylic acid halide or glycidyl (meth)acrylate.

The amino group having the group represented by formula (i) can be obtained by using an amino compound having the target crosslinking group, or by introducing an amino group having a hydroxyalkyl group into a triazine ring-containing polymer, and then adding the amino group contained in the hydroxyalkyl group. It can be introduced by a method of reacting a (meth)acrylic acid ester compound having an isocyanate group represented by the following formula (i') with respect to the hydroxy group.

(In the formula, A ³ , A ⁴ and a are the same as above.)

Specific examples of the (meth)acryloyloxyalkylamino compound include, for example, ester compounds obtained by reacting the hydroxy group of the above-mentioned hydroxyalkylamino compound with (meth)acrylic acid halide or glycidyl (meth)acrylate.

Examples of the (meth)acrylic acid halide include (meth)acrylic acid chloride, (meth)acrylic acid bromide, and (meth)acrylic acid iodide.

Specific examples of the (meth)acrylic acid ester compound having an isocyanate group represented by the formula (i') include, for example, 2-isocyanatoethyl acrylate, 2-isocyanatoethyl methacrylate, and 1,1-(bis). Acryloyloxymethyl) ethyl isocyanate can be mentioned. In the present invention, 2-isocyanatoethyl acrylate is preferred from the viewpoint of a simple synthesis method.

<Hydroxyl substituted arylamino group>

In the triazine ring-containing polymer used in the present invention, part of the terminal of the triazine ring is sealed with a hydroxyl group-substituted arylamino group in order to improve the solubility of the film or cured film obtained by using it in an alkaline developer. The hydroxyl group is a hydroxyl group directly bonded to an aryl group, and is a so-called phenolic hydroxyl group.

Examples of this aryl group include those similar to those exemplified above, but a phenyl group is particularly preferable.

The number of hydroxyl groups on the aryl group is not particularly limited, but considering the balance between developability with an alkaline developer and solubility in organic solvents, one is suitable.

From these viewpoints, in the present invention, as the hydroxyl group substituted arylamino group, a hydroxyl group substituted phenylamino group represented by formula (17) is preferable, and a phenylamino group having a hydroxyl group at the meta position of the amino group represented by formula (18) is more preferable. .

(In the formula, * represents the bonding hand.)

(In the formula, * represents the bonding hand.)

The molar ratio (S ₁ :S ₂ ) of the amino group having a crosslinking group ( _S 1 ) and the hydroxyl group-substituted arylamino group (S ₂ ) in the triazine ring-containing polymer is not particularly limited, but is 0.5 from the viewpoint of curability and residue suppression. :0.5 to 0.1:0.9 is preferable, and 0.4:0.6 to 0.2:0.8 is more preferable.

The triazine ring-containing polymer of the present invention has at least one triazine ring terminal, and the triazine ring at this terminal usually has two halogen atoms that can be substituted with the amino group having the crosslinking group and the hydroxyl group-substituted arylamino group.

In the triazine ring-containing polymer of the present invention, the sealing mode is not particularly limited as long as it has both the crosslinking group-containing amino group and the hydroxyl group-substituted arylamino group as the group for sealing the triazine ring terminal. Examples of the aspect in which the amino group having the crosslinking group and the hydroxyl group-substituted arylamino group seal the triazine ring terminal include the following aspects.

(1) One triazine ring terminal is sealed with two amino groups having the crosslinking group, and the other triazine ring terminal is sealed with two hydroxyl group-substituted arylamino groups.

(2) One triazine ring terminal is sealed with one amino group having the crosslinking group and one hydroxyl group-substituted arylamino group.

(3) Both sealing modes of (1) and (2) above exist in triazine ring-containing polymers.

The weight average molecular weight of the triazine ring-containing polymer in the present invention is not particularly limited, but is preferably 500 to 500,000, and more preferably 500 to 100,000, in that it further improves heat resistance and lowers the shrinkage rate. , 2,000 or more is preferable, and from the viewpoint of further increasing solubility and lowering the viscosity of the obtained composition, 50,000 or less is preferable, 30,000 or less is more preferable, 15,000 or less is even more preferable, and 10,000 or less is further preferable.

In addition, the weight average molecular weight in the present invention is the average molecular weight obtained by standard polystyrene conversion by gel permeation chromatography (hereinafter referred to as GPC) analysis.

<Method for producing triazine ring-containing polymer>

The triazine ring-containing polymer (hyperbranched polymer) of the present invention can be produced according to the method disclosed in International Publication No. 2010/128661 described above.

For example, as shown in Scheme 1 below, the triazine ring-containing polymer having structures (25) and (26) is obtained by reacting triazine compound (21) and diamino compound (22) in an appropriate organic solvent. It can be obtained by reacting an amino compound (23) having a group (Z) having a crosslinking group, which is an end capping agent, and a hydroxyl group-substituted arylamino compound (24).

(In the formula,

In Scheme 1, the input ratio of diamino compound (22) is arbitrary as long as the target polymer is obtained, but 0.01 to 10 equivalents of diamino compound (22) is preferable for 1 equivalent of triazine compound (21), 0.7 to 5 equivalents is more preferred.

The diamino compound (22) may be added neat or as a solution dissolved in an organic solvent, but considering ease of operation and ease of reaction control, the latter method is preferable.

The reaction temperature may be appropriately set within the range from the melting point of the solvent used to the boiling point of the solvent, but is preferably about -30 to 150°C, and -10 to 100°C is more preferable.

Another embodiment includes the method shown in Scheme 2 below. In this method, the triazine ring-containing polymer having structure (36) and structure (38) is prepared by reacting the triazine compound (31) and the diamino compound (32) in an appropriate organic solvent, followed by the hydroxyalkyl group ( A arylamino compound (33) having A ¹ ') and a hydroxyl group-substituted arylamino compound (34) are reacted to obtain a triazine ring-containing polymer having structures (35) and (36) (first step), and then It can also be obtained by reacting a (meth)acrylic acid ester compound (37) having an isocyanate group with the hydroxyl group of the hydroxyalkyl group contained in the triazine ring-containing polymer (second step).

(In ^the formula ^, (a+1) represents an aliphatic hydrocarbon group that may be substituted, A ⁴ represents a hydrogen atom or a methyl group, and A ¹ represents an alkylene group having 1 to 10 carbon atoms.)

In Scheme 2, the input ratio and addition method of the diamino compound (32) in the first step, and the reaction temperature in the reaction until obtaining the triazine ring-containing polymer having structures (35) and (36) are , can be done in the same way as described in Scheme 1.

In addition, in the second step, the input ratio of the (meth)acrylic acid ester compound (37) having an isocyanate group to the triazine ring-containing polymer having structure (35) and structure (36) is the hydroxyalkyl group (A ¹ ') It can be set arbitrarily depending on the ratio of the isocyanate group, and is preferably 0.1 to 10 equivalents, more preferably 0.5 to 5 equivalents, and even more preferably 1 equivalent of the arylamino compound (33) having a hydroxyalkyl group used. 0.7 to 3 equivalents, more preferably 0.9 to 1.5 equivalents. For example, when all of the hydroxyalkyl groups (A ¹ ') contained in the triazine ring-containing polymer having structures (35) and (36) are groups represented by formula (i), the input ratio is the hydroxyl group used. Preferably 1.0 to 10 equivalents of the above-mentioned (meth)acrylic acid ester compound (37), more preferably 1.0 to 5 equivalents, and even more preferably 1.0 to 3 equivalents, relative to 1 equivalent of the arylamino compound (33) having an alkyl group. equivalent, more preferably 1.0 to 1.5 equivalents.

The reaction temperature in this reaction is the same as that in the reaction for obtaining the triazine ring-containing polymer having structures (35) and (36), but the (meth)acryloyl group is kept from polymerizing during the reaction. Considering this, 30 to 80°C is preferable, 40 to 70°C is more preferable, and 50 to 60°C is even more preferable.

In the second step of Scheme 2, the reaction may be performed in the presence of a polymerization inhibitor to prevent the (meth)acryloyl group from polymerizing during the reaction.

Examples of the polymerization inhibitor include N-methyl-N-nitrosoaniline, N-nitrosophenylhydroxyamine or its salts, benzoquinones, phenol-based polymerization inhibitors, and phenothiazine. Among these, N-nitrosophenylhydroxyamine or its salts are preferable because it has an excellent polymerization inhibition effect.

Examples of N-nitrosophenylhydroxyamine salts include N-nitrosophenylhydroxyamine ammonium salt and N-nitrosophenylhydroxyamine aluminum salt.

Examples of benzoquinones include p-benzoquinone, 2-methyl-1,4-benzoquinone, and the like.

Examples of phenolic polymerization inhibitors include hydroquinone, p-methoxyphenol, 4-t-butylcatechol, 2-t-butylhydroquinone, 2,6-di-t-butyl-4-methylphenol, etc. You can.

The amount of the polymerization inhibitor used is not particularly limited, but may be, for example, 1 to 200 ppm, or 10 to 100 ppm, in mass ratio to the (meth)acrylic acid ester compound having an isocyanate group represented by formula (i').

Even if the reaction temperature is raised to about 60 to 80°C by using a polymerization inhibitor, polymerization of the (meth)acryloyl group can be suppressed and the second stage reaction can be performed.

As the organic solvent, various solvents commonly used in this type of reaction can be used, such as tetrahydrofuran, dioxane, and dimethyl sulfoxide; N,N-dimethylformamide, N-methyl-2-pyrrolidone, tetramethylurea, hexamethylphosphoramide, N,N-dimethylacetamide, 3-methoxy-N,N-dimethylpropanamide, 3 -Butoxy-N,N-dimethylpropanamide, N-methyl-2-piperidone, N,N'-dimethylethyleneurea, N,N,N',N'-tetramethylmalonic acid amide, N-methylcapro Lactam, N-acetylpyrrolidine, N,N-diethylacetamide, N-ethyl-2-pyrrolidone, N,N-dimethylpropionic acid amide, N,N-dimethylisobutylamide, N-methylformamide , N,N'-dimethylpropylene urea, amide-based solvents, and mixed solvents thereof.

Among them, N,N-dimethylformamide, dimethylsulfoxide, N-methyl-2-pyrrolidone, N,N-dimethylacetamide, 3-methoxy-N,N-dimethylpropanamide, 3-butoxy- N,N-dimethylpropanamide and mixtures thereof are preferred, especially N,N-dimethylacetamide, N-methyl-2-pyrrolidone, 3-methoxy-N,N-dimethylpropanamide, and 3-butoxy. -N,N-dimethylpropanamide is suitable.

Additionally, in the reaction of Scheme 1 above, various commonly used bases may be added during or after polymerization.

Specific examples of this base include potassium carbonate, potassium hydroxide, sodium carbonate, sodium hydroxide, sodium hydrogen carbonate, sodium ethoxide, sodium acetate, lithium carbonate, lithium hydroxide, lithium oxide, potassium acetate, magnesium oxide, calcium oxide, barium hydroxide, Trilithium phosphate, trisodium phosphate, tripotassium phosphate, cesium fluoride, aluminum oxide, ammonia, n-propylamine, trimethylamine, triethylamine, diisopropylamine, diisopropylethylamine, N-methylpiperidine, 2,2,6,6-tetramethyl-N-methylpiperidine, pyridine, 4-dimethylaminopyridine, N-methylmorpholine, 2-aminoethanol, ethyldiethanolamine, diethylaminoethanol, etc. there is.

The amount of base added is preferably 1 to 100 equivalents, more preferably 1 to 10 equivalents, per 1 equivalent of triazine compound (18). Additionally, these bases may be used as an aqueous solution.

It is preferable that no raw material components remain in the obtained polymer, but some raw materials may remain as long as the effect of the present invention is not impaired.

After completion of the reaction, the product can be easily purified by reprecipitation or the like.

As an end-blocking method using an amino compound having a crosslinking group and an arylamino compound substituted with a hydroxyl group, a known method may be adopted.

In this case, the amount of the end cap agent used is preferably about 0.05 to 10 equivalents, more preferably 0.1 to 5 equivalents, and 0.5 to 2 equivalents, based on 1 equivalent of the halogen atom derived from the excess triazine compound not used in the polymerization reaction. Equivalent weight is even more preferable.

The reaction solvent and reaction temperature include the same conditions as those described in the reaction of Scheme 1 or the first step of Scheme 2, and the end capping agent is used simultaneously with the diamino compound (22) or (32). You can put it in.

Additionally, an unsubstituted amino compound without a crosslinking group may be used, and end capping may be performed with three or more types of groups.

Additionally, in addition to end-capping using an amino compound having a crosslinking group and a hydroxyl group-substituted arylamino compound, end-capping may be performed using an arylamino compound having a specific heteroatom-containing substituent. By capping the ends with an arylamino group having a specific heteroatom-containing substituent, the refractive index of the resulting film can be further increased.

Specific heteroatom-containing substituents include cyano group, alkylamino group, arylamino group, nitro group, alkyl mercapto group, aryl mercapto group, alkoxycarbonyl group, and alkoxycarbonyloxy group.

Examples of the arylamino group having a specific heteroatom-containing substituent include those represented by the following formula (41).

In the formula, Y is a “specific heteroatom-containing substituent” and represents a cyano group, an alkylamino group, an arylamino group, a nitro group, an alkylmercapto group, an arylmercapto group, an alkoxycarbonyl group, or an alkoxycarbonyloxy group. m represents an integer of 1 to 5. When m is 2 or more, Y may be the same or different. * indicates a binding hand.

Among these, Y is preferably a cyano group or a nitro group. m is preferably 1. When m is 1, Y is preferably substituted at the para or meta position.

In addition, when introducing an arylamino group having a specific hetero atom-containing substituent, the ratio of the amino compound having a crosslinking group and the arylamino compound having a specific hetero atom-containing substituent is adjusted from the viewpoint of achieving a good balance of solvent resistance and high refractive index. , 0.1 to 1.0 mol of the arylamino compound having a specific hetero atom-containing substituent is preferable, 0.1 to 0.5 mol is more preferable, and 0.1 to 0.3 mol is even more preferable, per 1 mol of the amino compound having a crosslinking group.

(Composition for pattern formation)

The composition for forming a pattern of the present invention contains at least the triazine ring-containing polymer of the present invention and, if necessary, a crosslinking agent, etc.

The content of the triazine ring-containing polymer in the composition for pattern formation is not particularly limited, but is preferably 1 to 50 mass%, and more preferably 5 to 30 mass%.

<Cross-linking agent>

The crosslinking agent used in the present invention is not particularly limited as long as it is a compound that can cause a crosslinking reaction alone or together with the above-mentioned triazine ring-containing polymer to form a crosslinked structure.

Such compounds include melamine-based compounds having crosslinking substituents such as methylol groups and methoxymethyl groups (e.g., phenoplast compounds, aminoplast compounds, etc.), substituted urea compounds, and crosslinking compounds such as epoxy groups or oxetane groups. Compounds containing forming substituents (e.g., polyfunctional epoxy compounds, polyfunctional oxetane compounds, etc.), compounds containing a block isocyanato group, compounds having an acid anhydride group, compounds having a (meth)acrylic group, etc. However, from the viewpoint of heat resistance and storage stability, compounds containing an epoxy group, a block isocyanate group, and a (meth)acryl group are preferable, and in particular, compounds containing a block isocyanate group or polyfunctional compounds that provide a composition that can be photocured even without using an initiator Epoxy compounds and/or polyfunctional (meth)acrylic compounds are preferred.

The polyfunctional epoxy compound is not particularly limited as long as it has two or more epoxy groups per molecule.

Specific examples include tris(2,3-epoxypropyl)isocyanurate, 1,4-butanediol diglycidyl ether, 1,2-epoxy-4-(epoxyethyl)cyclohexane, glycerol triglycidyl ether, Diethylene glycol diglycidyl ether, 2,6-diglycidylphenylglycidyl ether, 1,1,3-tris[p-(2,3-epoxypropoxy)phenyl]propane, 1,2- Cyclohexanedicarboxylic acid diglycidyl ester, 4,4'-methylenebis(N,N-diglycidylaniline), 3,4-epoxycyclohexylmethyl-3,4-epoxycyclohexanecarboxylate, Trimethylolethane triglycidyl ether, bisphenol-A-diglycidyl ether, pentaerythritol polyglycidyl ether, etc. are mentioned.

Additionally, commercially available products include YH-434 and YH434L (manufactured by Nittetsu Chemical & Materials Co., Ltd.), which are epoxy resins having at least two epoxy groups, and Epolid GT-401, which is an epoxy resin with a cyclohexene oxide structure. GT-403, GT-301, GT-302, Celoxide 2021, 3000 (made by Daicel Co., Ltd.), bisphenol A type epoxy resin, jER1001, 1002, 1003, 1004, 1007, etc. 1009, 1010, 828 (manufactured by Mitsubishi Chemical Corporation), jER807 (manufactured by Mitsubishi Chemical Corporation), a bisphenol F-type epoxy resin, jER152, 154 (above, a phenol novolak-type epoxy resin, Mitsubishi Chemical Co., Ltd. product, EPPN201, Copper 202 (above, Nippon Kayaku Co., Ltd. product), cresol novolac type epoxy resin, EOCN-102, Copper 103S, Copper 104S, Copper 1020, Copper 1025, Copper 1027. (above, manufactured by Nippon Kayaku Co., Ltd.), jER180S75 (manufactured by Mitsubishi Chemical Co., Ltd.), alicyclic epoxy resin, Denacol EX-252 (manufactured by Nagase Chemtex Co., Ltd.), CY175, CY177, CY179 (above) , manufactured by CIBA-GEIGY A.G.), Araldite CY-182, CY-192, CY-184 (manufactured by CIBA-GEIGY A.G.), Epiclon 200, 400 (manufactured by DIC Co., Ltd.), jER871, 872 (above, manufactured by Mitsubishi Chemical Co., Ltd.), ED-5661, ED-5662 (above, manufactured by Celanese Coatings Co., Ltd.), aliphatic polyglycidyl ether, Denacol EX-611, same EX -612, EX-614, EX-622, EX-411, EX-512, EX-522, EX-421, EX-313, EX-314, EX-321 (Nagase Chem) (manufactured by Tex Co., Ltd.) can also be used.

The polyfunctional (meth)acrylic compound is not particularly limited as long as it has two or more (meth)acrylic groups per molecule.

Specific examples include ethylene glycol diacrylate, ethylene glycol dimethacrylate, polyethylene glycol diacrylate, polyethylene glycol dimethacrylate, ethoxylated bisphenol A diacrylate, ethoxylated bisphenol A dimethacrylate, and ethoxylated trimethyl. All-propane triacrylate, ethoxylated trimethylolpropane trimethacrylate, ethoxylated glycerin triacrylate, ethoxylated glycerin trimethacrylate, ethoxylated pentaerythritol tetraacrylate, ethoxylated pentaerythritol tetramethacrylate, Ethoxylated dipentaerythritol hexaacrylate, polyglycerol monoethylene oxide polyacrylate, polyglycerol polyethylene glycol polyacrylate, dipentaerythritol hexaacrylate, dipentaerythritol hexamethacrylate, neopentyl glycol diacrylate , neopentyl glycol dimethacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, trimethylolpropane triacrylate, trimethylolpropane trimethacrylate, tricyclodecane dimethanol diacrylate, tricyclo Examples include decanedimethanol dimethacrylate, 1,6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, and polybasic acid-modified acrylic oligomer.

In addition, polyfunctional (meth)acrylic compounds are available as commercial products, and specific examples thereof include NK ester A-200, A-400, A-600, A-1000, and A-9300 (isocyanurate Santris (2-acryloyloxyethyl)), A-9300-1CL, A-TMPT, UA-53H, 1G, 2G, 3G, 4G, 9G, 14G, 23G , Copper ABE-300, Copper A-BPE-4, Copper A-BPE-6, Copper A-BPE-10, Copper A-BPE-20, Copper A-BPE-30, Copper BPE-80N, Copper BPE-100N , copper BPE-200, copper BPE-500, copper BPE-900, copper BPE-1300N, copper A-GLY-3E, copper A-GLY-9E, copper A-GLY-20E, copper A-TMPT-3EO, copper A-TMPT-9EO, AT-20E, ATM-4E, ATM-35E, A-DPH, A-TMPT, A-DCP, A-HD-N, TMPT, DCP, NPG , HD-N, A-DPH-12E, A-DPH-48E, A-DPH-96E, NK Oligo U-15HA, NK Polymer Banana Resin GH-1203 (Shinnakamura Chemical High School Co., Ltd. ), KAYARAD (registered trademark) DPHA, NPGDA, PET30, DPEA-12, PEG400DA, THE-330, RP-1040, DN-0075 (manufactured by Nippon Kayaku Co., Ltd.), Aronics M-210, M-303, M-305, M-306, M-309, M-306, M-310, M-313, M-315, M-321 , M-350, M-360, M-400, M-402, M-403, M-404, M-405, M-406, M-408, M-450. , M-452, M-460 (manufactured by Toagosei Co., Ltd.), DPGDA, HDDA, TPGDA, HPNDA, PETIA, PETRA, TMPTA, TMPEOTA, EBECRYL11, 40, 135, 140, 145. , Building 150, Building 180, Building 1142, Building 204, Building 205, Building 210, Building 215, Building 220, Building 230, Building 244, Building 245, Building 265, Building 270, Building 280/15IB, Building 284, Building 294 /25HD, East 303, East 436, East 438, East 446, East 450, East 524, East 525, East 600, East 605, East 645, East 648, East 767, East 770, East 800, East 810, East 811 , Dong 812, Dong 846, Dong 851, Dong 852, Dong 853, Dong 860, Dong 884, Dong 885, Dong 1259, Dong 1290, Dong 1606, Dong 1830, Dong 1870, Dong 3500, Dong 3603, Dong 3608, Dong 3700, 3701, 3702, 3703, 3708, 4820, 4858, 5129, 6040, 8210, 8454, 8301R, 8307, 8311, 8402, 8405, 8411, Dong 8465, Dong 8701, Dong 8800, Dong 8804, Dong 8807, Dong 9270, Dong 9227EA, Dong 936, Dong 8200, Dong 8200AE, Dong 7735, Dong 8296, Dong 08452, Dong 8904, Dong 8528, Dong 8912, OTA480, IRR2 14 -K, 616, 679, 742, 793, PEG400DA-D(ACA)Z200M, Z230AA, Z250, Z251, Z300, Z320, Z254F (above, Daicell Allnex Co., Ltd. )J) etc. can be mentioned.

The polybasic acid-modified acrylic oligomer can also be obtained as a commercial item, and specific examples thereof include Aronix M-510 and 520 (manufactured by Toagosei Co., Ltd.).

The compound having an acid anhydride group is not particularly limited as long as it is a carboxylic acid anhydride obtained by dehydration condensation of two molecules of carboxylic acid. Specific examples include phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, and methyltetrahydrophthalic anhydride. Those having one acid anhydride group in the molecule, such as phthalic acid, methylhexahydrophthalic anhydride, nadic anhydride, methylnadic anhydride, maleic anhydride, succinic anhydride, octylsuccinic anhydride, and dodecenylsuccinic anhydride; 1,2,3,4-cyclobutane tetracarboxylic dianhydride, pyromellitic acid anhydride, 3,4-dicarboxy-1,2,3,4-tetrahydro-1-naphthalenesuccinic dianhydride, bicyclo[3.3 .0]octane-2,4,6,8-tetracarboxylic dianhydride, 5-(2,5-dioxotetrahydro-3-furanyl)-3-methyl-3-cyclohexene-1,2- Dicarboxylic acid anhydride, 1,2,3,4-butanetetracarboxylic dianhydride, 3,3',4,4'-benzophenone tetracarboxylic dianhydride, 3,3',4,4'-bi Phenyltetracarboxylic dianhydride, 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride, 1,3-dimethyl-1,2,3,4-cyclobutanetetracarboxylic dianhydride, etc. and those having two acid anhydride groups in the molecule.

As a compound containing a blocked isocyanate group, the isocyanate group (-NCO) has two or more blocked isocyanate groups per molecule blocked by an appropriate protecting group, and when exposed to high temperatures during heat curing, the protecting group (block portion) is thermally dissociated. There is no particular limitation as long as the isocyanate group generated is one that causes a urethane bond reaction between the phenolic hydroxyl group of the triazine ring-containing polymer of the present invention, for example, two or more groups in one molecule (also, These groups may be the same or different from each other).

(In the formula, R _b represents an organic group in the block portion.)

Such compounds can be obtained, for example, by reacting a compound having two or more isocyanate groups per molecule with an appropriate blocking agent.

Examples of compounds having two or more isocyanate groups in one molecule include polyisocyanates such as isophorone diisocyanate, 1,6-hexamethylene diisocyanate, methylenebis(4-cyclohexylisocyanate), and trimethylhexamethylene diisocyanate. dimers, trimers, and reactants of these with diols, triols, diamines, or triamines.

Examples of blocking agents include alcohols such as methanol, ethanol, isopropanol, n-butanol, 2-ethoxyhexanol, 2-N,N-dimethylaminoethanol, 2-ethoxyethanol, and cyclohexanol; Phenols such as phenol, o-nitrophenol, p-chlorophenol, o-, m-, or p-cresol; Lactams such as ε-caprolactam, oximes such as acetone oxime, methyl ethyl ketone oxime, methyl isobutyl ketone oxime, cyclohexanone oxime, acetophenone oxime, and benzophenone oxime; pyrazoles such as pyrazole, 3,5-dimethylpyrazole, and 3-methylpyrazole; Thiols such as dodecanethiol and benzenethiol can be mentioned.

Compounds containing a block isocyanate group are also available as commercial products, and specific examples thereof include Takenate (registered trademark) B-830, B-815N, B-842N, B-870N, B-874N, B-882N, B -7005, B-7030, B-7075, B-5010 (above, manufactured by Mitsui Chemicals Co., Ltd.), Duranate (registered trademark) 17B-60PX, TPA-B80E, MF-B60X, MF-K60X , E402-B80T (above, manufactured by Asahi Kasei Co., Ltd.), Karenz MOI-BM (registered trademark) (above, manufactured by Showa Denko Co., Ltd.), TRIXENE (registered trademark) BI7950, 7951, 7960, Examples include 7961, 7982, 7990, 7991, and 7992 (manufactured by Baxenden Chemical).

The aminoplast compound is not particularly limited as long as it has two or more methoxymethylene groups per molecule, for example, hexamethoxymethylmelamine CYMEL (registered trademark) 303, tetrabutoxymethylglycoluril Copper 1170, tetra Cymel series such as methoxymethylbenzoguanamine Copper 1123 (above, manufactured by Nippon Scitec Industries Co., Ltd.), Nickalac (registered trademark) methylated melamine resin, Copper MW-30HM, Copper MW-390, Copper MW-100LM, Melamine-based compounds such as MX-750LM, methylated urea resins such as MX-270, MX-280, and MX-290 (manufactured by Sanwa Chemical Co., Ltd.) are included.

The oxetane compound is not particularly limited as long as it has two or more oxetanyl groups per molecule, for example, OXT-221, OX-SQ-H, OX-SC (above, Doa) containing an oxetanyl group. Made by Kose Co., Ltd.) etc. can be mentioned.

The phenoplast compound has two or more hydroxymethylene groups per molecule, and when exposed to high temperatures during heat curing, a crosslinking reaction occurs between the phenolic hydroxyl groups of the triazine ring-containing polymer of the present invention by a dehydration condensation reaction. It's going on.

Examples of phenoplast compounds include 2,6-dihydroxymethyl-4-methylphenol, 2,4-dihydroxymethyl-6-methylphenol, and bis(2-hydroxy-3-hydroxymethyl- 5-methylphenyl)methane, bis(4-hydroxy-3-hydroxymethyl-5-methylphenyl)methane, 2,2-bis(4-hydroxy-3,5-dihydroxymethylphenyl)propane, bis(3) -Formyl-4-hydroxyphenyl)methane, bis(4-hydroxy-2,5-dimethylphenyl)formylmethane, α,α-bis(4-hydroxy-2,5-dimethylphenyl)-4 -Formyltoluene, etc. can be mentioned.

Fenoplast compounds are also available as commercial products, and specific examples include 26DMPC, 46DMOC, DM-BIPC-F, DM-BIOC-F, TM-BIP-A, BISA-F, BI25X-DF, BI25X-TPA ( The above, manufactured by Asahi Yukizai Co., Ltd., etc. can be mentioned.

Among these, polyfunctional (meth)acrylic compounds are suitable because they can suppress the decrease in refractive index due to crosslinking agent and the curing reaction progresses quickly, and among them, Dipenta is suitable in terms of controlling the shape of fine patterns. Erythritol hexaacrylate and its EO adduct are preferred.

Examples of such polyfunctional (meth)acrylic compounds include NK ester A-DPH and A-DPH-12E (all manufactured by Shinnakamura Chemical Industries, Ltd.).

The above-mentioned crosslinking agents may be used individually or in combination of two or more types.

The content of the crosslinking agent in the composition for pattern formation is preferably 1 to 200 parts by mass relative to 100 parts by mass of the triazine ring-containing polymer, but considering solvent resistance, the lower limit is preferably 2 parts by mass, more preferably 2 parts by mass. It is 5 parts by mass, and considering controlling the refractive index and residues in the unexposed area, the upper limit is preferably 150 parts by mass, more preferably 100 parts by mass, and even more preferably 90 parts by mass.

<Organic solvent>

The composition for pattern formation of the present invention may contain an organic solvent.

Specific examples of organic solvents include toluene, p-xylene, o-xylene, m-xylene, ethylbenzene, styrene, ethylene glycol dimethyl ether, propylene glycol monomethyl ether, ethylene glycol monomethyl ether, propylene glycol, and propylene glycol monoethyl ether. , ethylene glycol monoethyl ether, ethylene glycol monoisopropyl ether, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol dimethyl ether, propylene glycol monobutyl ether, ethylene glycol mono. Butyl ether, diethylene glycol diethyl ether, dipropylene glycol monomethyl ether, diethylene glycol monomethyl ether, dipropylene glycol monoethyl ether, diethylene glycol monoethyl ether, triethylene glycol dimethyl ether, diethylene glycol monoethyl ether Acetate, diethylene glycol, 1-octanol, ethylene glycol, hexylene glycol, trimethylene glycol, 1-methoxy-2-butanol, cyclohexanol, diacetone alcohol, furfuryl alcohol, tetrahydrofurfuryl alcohol, propylene Glycol, benzyl alcohol, 1,3-butanediol, 1,4-butanediol, 2,3-butanediol, γ-butyrolactone, acetone, methyl ethyl ketone, methyl isopropyl ketone, diethyl ketone, methyl isobutyl ketone, methyl n-butyl ketone, cyclopentanone, cyclohexanone, ethyl acetate, isopropyl acetate, n-propyl acetate, isobutyl acetate, n-butyl acetate, ethyl lactate, methanol, ethanol, isopropanol, tert-butanol, allyl alcohol, n-propanol, 2-methyl-2-butanol, isobutanol, n-butanol, 2-methyl-1-butanol, 1-pentanol, 2-methyl-1-pentanol, 2-ethylhexanol, 1-methyl Toxy-2-propanol, tetrahydrofuran, 1,4-dioxane, N,N-dimethylformamide, N,N-dimethylacetamide (DMAc), N-methyl-2-pyrrolidone, 1,3- Examples include dimethyl-2-imidazolidinone, dimethyl sulfoxide, and N-cyclohexyl-2-pyrrolidinone, and these may be used individually or in combination of two or more types.

At this time, the solid content concentration in the composition is not particularly limited as long as it is within a range that does not affect storage stability, and may be set appropriately according to the thickness of the target film. Specifically, from the viewpoint of solubility and storage stability, the solid content concentration is preferably 0.1 to 50% by mass, more preferably 0.1 to 40% by mass.

<Initiator>

An initiator corresponding to each crosslinking agent may be blended in the pattern forming composition of the present invention. In addition, as described above, when a polyfunctional epoxy compound and/or a polyfunctional (meth)acrylic compound is used as a crosslinking agent, photocuring proceeds and a cured film is provided even without using an initiator, but in that case, even if an initiator is used, There is no problem.

When using a polyfunctional epoxy compound as a crosslinking agent, a photoacid generator or a photobase generator can be used.

The photoacid generator may be appropriately selected from known ones and used, for example, onium salt derivatives such as diazonium salt, sulfonium salt, or iodonium salt.

Specific examples thereof include aryldiazonium salts such as phenyldiazonium hexafluorophosphate, 4-methoxyphenyldiazonium hexafluoroantimonate, and 4-methylphenyldiazonium hexafluorophosphate; Diaryliodonium salts such as diphenyliodonium hexafluoroantimonate, bis(4-methylphenyl)iodonium hexafluorophosphate, and bis(4-tert-butylphenyl)iodonium hexafluorophosphate; Triphenylsulfonium hexafluoroantimonate, tris(4-methoxyphenyl)sulfonium hexafluorophosphate, diphenyl-4-thiophenoxyphenylsulfonium hexafluoroantimonate, diphenyl-4- Thiophenoxyphenylsulfonium hexafluorophosphate, 4,4'-bis(diphenylsulfonio)phenyl sulfide-bishexafluoroantimonate, 4,4'-bis(diphenylsulfonio) Phenyl sulfide-bishexafluorophosphate, 4,4'-bis[di(β-hydroxyethoxy)phenylsulfonio]phenyl sulfide-bishexafluoroantimonate, 4,4'-bis[ di(β-hydroxyethoxy)phenylsulfonio]phenyl sulfide-bis-hexafluorophosphate, 4-[4'-(benzoyl)phenylthio]phenyl-di(4-fluorophenyl)sulfonium hexa and triarylsulfonium salts such as fluoroantimonate and 4-[4'-(benzoyl)phenylthio]phenyl-bis(4-fluorophenyl)sulfonium hexafluorophosphate.

These onium salts may be commercially available, and specific examples thereof include San Aid SI-60, SI-80, SI-100, SI-60L, SI-80L, SI-100L, SI-L145, SI-L150, SI- L160, SI-L110, SI-L147 (above, manufactured by Sanshin Kagaku Kogyo Co., Ltd.), UVI-6950, UVI-6970, UVI-6974, UVI-6990, UVI-6992 (above, manufactured by Union Carbide), CPI -100P, CPI-100A, CPI-200K, CPI-200S (above, manufactured by San-Apro Co., Ltd.), Adeka Optomer SP-150, SP-151, SP-170, SP-171 (above, Asahi Denka High School) (manufactured by Nippon Soda Co., Ltd.), Irgacure 261 (manufactured by BASF Co., Ltd.), CI-2481, CI-2624, CI-2639, CI-2064 (above, manufactured by Nippon Soda Co., Ltd.), CD-1010, CD-1011, CD -1012 (above, manufactured by Sartomer), DS-100, DS-101, DAM-101, DAM-102, DAM-105, DAM-201, DSM-301, NAI-100, NAI-101, NAI-105, NAI-106, SI-100, SI-101, SI-105, SI-106, PI-105, NDI-105, BENZOIN TOSYLATE, MBZ-101, MBZ-301, PYR-100, PYR-200, DNB-101 , NB-101, NB-201, BBI-101, BBI-102, BBI-103, BBI-109 (above, manufactured by Midori Chemical Co., Ltd.), PCI-061T, PCI-062T, PCI-020T, PCI- Examples include 022T (manufactured by Nippon Kayaku Co., Ltd.), IBPF, and IBCF (manufactured by Sanwa Chemical Co., Ltd.).

On the other hand, the photobase generator may be appropriately selected and used from known ones, for example, Co-amine complex type, oxime carboxylic acid ester type, carbamic acid ester type, quaternary ammonium salt type photobase generator, etc. can be used.

Specific examples include 2-nitrobenzylcyclohexylcarbamate, triphenylmethanol, O-carbamoylhydroxylamide, O-carbamoyloxime, [[(2,6-dinitrobenzyl)oxy]carbonyl] Cyclohexylamine, bis[[(2-nitrobenzyl)oxy]carbonyl]hexane 1,6-diamine, 4-(methylthiobenzoyl)-1-methyl-1-morpholinoethane, (4-morpholino Benzoyl)-1-benzyl-1-dimethylaminopropane, N-(2-nitrobenzyloxycarbonyl)pyrrolidine, hexaamminecobalt(III)tris(triphenylmethylborate), 2-benzyl-2-dimethylamino -1-(4-morpholinophenyl)-butanone, 2,6-dimethyl-3,5-diacetyl-4-(2'-nitrophenyl)-1,4-dihydropyridine, 2,6- and dimethyl-3,5-diacetyl-4-(2',4'-dinitrophenyl)-1,4-dihydropyridine.

Additionally, commercially available photobase generators may be used, and specific examples thereof include TPS-OH, NBC-101, and ANC-101 (all product names, manufactured by Midori Chemical Co., Ltd.).

When using a mineral acid or base generator, it is preferably used in the range of 0.1 to 15 parts by mass, more preferably in the range of 1 to 10 parts by mass, per 100 parts by mass of the polyfunctional epoxy compound.

Additionally, if necessary, an epoxy resin curing agent may be added in an amount of 1 to 100 parts by mass based on 100 parts by mass of the polyfunctional epoxy compound.

On the other hand, when using a polyfunctional (meth)acrylic compound, a radical photopolymerization initiator can be used.

The radical photopolymerization initiator may be appropriately selected from known ones and used, for example, acetophenones, benzophenones, Michler's benzoyl benzoate, amyloxime ester, oxime ester, tetramethylthiuram monosulfide. and thioxanthone types.

In particular, a photocleavage type photoradical polymerization initiator is preferable. The photocleavage type photoradical polymerization initiator is described in the latest UV curing technology (page 159, publisher: Kazuhiro Takasuski, publisher: Technical Information Association Co., Ltd., published in 1991).

Commercially available radical photopolymerization initiators include, for example, BASF brand names: Irgacure 127, 184, 369, 379, 379EG, 651, 500, 754, 819, 903, 907, 784, 2959, CGI1700, CGI1750, CGI1850. , CG24-61, OXE01, OXE02, OXE03, OXE04, Darocure 1116, 1173, MBF, BASF product name: Lucirin TPO, UCB product name: Evecryl P36, Furatesuri Lamberti product name: Ezacure KIP150, Examples include KIP65LT, KIP100F, KT37, KT55, KTO46, KIP75/B, etc.

When using a radical photopolymerization initiator, it is preferably used in the range of 0.1 to 200 parts by mass, and more preferably in the range of 1 to 150 parts by mass, based on 100 parts by mass of the polyfunctional (meth)acrylate compound.

<Other additives>

The pattern forming composition of the present invention contains other components other than the triazine ring-containing polymer, crosslinking agent, and solvent, such as leveling agent, surfactant, silane coupling agent, polymerization inhibitor, and oxidizing agent, as long as the effect of the present invention is not impaired. Additives such as anti-corrosion agents, rust inhibitors, mold release agents, plasticizers, anti-foaming agents, thickeners, dispersants, antistatic agents, anti-settling agents, pigments, dyes, ultraviolet absorbers, and light stabilizers may be included.

Examples of the surfactant include polyoxyethylene alkyl ethers such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene cetyl ether, and polyoxyethylene oleyl ether; Polyoxyethylene alkyl allyl ethers such as polyoxyethylene octyl phenol ether and polyoxyethylene nonyl phenol ether; Polyoxyethylene/polyoxypropylene block copolymers; Sorbitan fatty acid esters such as sorbitan monolaurate, sorbitan monopalmitate, sorbitan monostearate, sorbitan monooleate, sorbitan trioleate, and sorbitan tristearate; Polyoxyethylene sorbents such as polyoxyethylene sorbitan monolaurate, polyoxyethylene sorbitan monopalmitate, polyoxyethylene sorbitan monostearate, polyoxyethylene sorbitan trioleate, and polyoxyethylene sorbitan tristearate. Non-ionic surfactants such as non-carbonated fatty acid esters, brand names Ftop EF301, EF303, EF352 (Mitsubishi Material Denshi Kasei Co., Ltd. (formerly Zemuco Co., Ltd.)), brand names Megapak F171, F173, R- 08, R-30, R-40, R-41, F-114, F-410, F-430, F-444, F-477, F-552, F-553, F-554, F-555, F-556, F-557, F-558, F-559, F-561, F-562, F-563, RS-75, RS-72-K, RS-76-E, RS-76NS, RS- 77 (manufactured by DIC Co., Ltd.), Florad FC430, FC431 (manufactured by Sumitomo 3M Co., Ltd.), brand name Asahi Guard AG710, Suplon S-382, SC101, SC102, SC103, SC104, SC105, SC106 (AGC Co., Ltd. ), fluorine-based surfactants such as), organosiloxane polymer KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), BYK-302, BYK-307, BYK-322, BYK-323, BYK-330, BYK-333 , BYK-370, BYK-375, BYK-378 (made by Big Chemi Japan Co., Ltd.), etc.

These surfactants may be used individually or in combination of two or more types. The amount of surfactant used is preferably 0.0001 to 5 parts by mass, more preferably 0.001 to 1 part by mass, and even more preferably 0.01 to 0.5 parts by mass, per 100 parts by mass of the triazine ring-containing polymer.

(Pattern production method and hardened product)

In the method of producing a pattern using the composition of the present invention, the composition can be applied to a substrate, heated as necessary to evaporate the solvent, and then heated or irradiated with light to form a desired cured film, and the cured film is produced by irradiating light. In doing so, a fine pattern can be formed by irradiating light through a mask on which a desired pattern is formed and then developing it with a developer. Additionally, a cured product can be obtained by using the composition for forming a pattern of the present invention.

At this time, the application method of the composition is arbitrary, for example, spin coating method, dipping method, flow coating method, inkjet method, jet dispenser method, spray method, bar coating method, gravure coating method, slit coating method, roll coating method. , transfer printing method, brush application method, blade coating method, air knife coating method, etc. can be adopted.

In addition, the substrate includes silicon, glass with indium tin oxide (ITO), glass with indium zinc oxide (IZO), polyethylene terephthalate (PET), plastic, glass, quartz, ceramics, etc. For example, a flexible substrate having flexibility may be used.

The calcination temperature is not particularly limited for the purpose of evaporating the solvent, and can be performed at, for example, 70 to 400°C.

The calcination time may be any time for the solvent to evaporate, and may be, for example, 1 to 600 seconds.

The firing method is not particularly limited, and may be evaporated under an appropriate atmosphere such as air, an inert gas such as nitrogen, or vacuum using a hot plate or oven.

As for the firing temperature and firing time, conditions suitable for the process of the target electronic device can be selected, and firing conditions where the physical properties of the resulting film are suitable for the required characteristics of the electronic device can be selected.

Conditions for light irradiation are not particularly limited, and appropriate irradiation energy and time may be adopted depending on the triazine ring-containing polymer and crosslinking agent used.

Development after exposure can be performed, for example, by immersing the exposure resin in an organic solvent developer or an aqueous developer.

Specific examples of organic solvent developers include PGME, PGMEA, mixed solvents of PGME and PGMEA, NMP, γ-butyrolactone, DMSO, etc., while specific examples of aqueous developers include sodium carbonate, potassium carbonate, sodium hydroxide, and hydroxide. Alkaline aqueous solutions such as potassium and tetramethylammonium hydroxide can be mentioned.

Additionally, the composition of the present invention may further contain an oxirane ring-containing compound and a photocurable catalyst.

Examples of oxirane ring-containing compounds include those having one or more, preferably two or more, oxirane rings in the molecule, and specific examples thereof include glycidyl ether type epoxy resin, glycidyl ester type epoxy resin, and alicyclic Formulated epoxy resin, epoxy-modified polybutadiene resin, oxetane compound, etc. are mentioned. These may be used individually or in combination of two or more types.

The amount of the oxirane ring-containing compound is not particularly limited, but can be about 10 to 400 parts by mass per 100 parts by mass of the triazine ring-containing polymer.

Examples of photocurable catalysts include photocation generators. Specific examples of photocation generators include triarylsulfonium salts such as triphenylsulfonium hexafluorophosphate and triphenylsulfonium hexafluoroantimonate; triaryl selenium salt; and diaryliodonium salts such as diphenyliodonium hexafluorophosphate and diphenyliodonium hexafluoroantimonate. These may be used individually or in combination of two or more types.

The amount of the photocurable catalyst is not particularly limited, but can be about 0.1 to 100 parts by mass per 100 parts by mass of the triazine ring-containing polymer.

These oxirane ring-containing compounds and photocurable catalysts can be blended with each component constituting the composition of the present invention in any order. Additionally, at that time, the organic solvent mentioned above may be used.

The composition containing these can also be applied by the above-described method and then cured by, for example, irradiating with ultraviolet light at 1 to 4000 mj/cm ² . Light irradiation may be performed using various known methods such as a high-pressure mercury lamp, metal halide lamp, xenon lamp, LED, and laser light.

Additionally, if necessary, heating may be performed at approximately 110 to 180°C before and after exposure.

Development after exposure can be performed by immersing the exposure resin in the organic solvent developer or aqueous developer described above.

Since the cured product obtained as described above can achieve high heat resistance, high refractive index, and low volumetric shrinkage, it is widely used in liquid crystal displays, organic electroluminescence (EL) displays, touch panels, optical semiconductor (LED) devices, and solid-state imaging. It is suitable for use in the fields of electronic devices and optical materials, such as parts used in manufacturing devices, organic thin-film solar cells, dye-sensitized solar cells, organic thin-film transistors (TFTs), lenses, prism cameras, binoculars, microscopes, and semiconductor exposure equipment. You can.

Example

Hereinafter, the present invention will be described in more detail through examples, but the present invention is not limited to the following examples. In addition, each measuring device used in the examples is as follows.

[ ^1H -NMR]

Device: Bruker NMR System AVANCE III HD 500 (500 MHz)

Measurement solvent: DMSO-d6

Reference material: tetramethylsilane (TMS) (δ0.0ppm)

[GPC]

Device: HLC-8200 GPC manufactured by Tosoh Co., Ltd.

Column: Tosoh TSKgel α-3000 +Tosoh TSKgel α-4000

Column temperature: 40℃

Solvent: Dimethylformamide (DMF)

Detector: UV (271nm)

Calibration curve: standard polystyrene

[Elipsometer]

Apparatus: Multiple incident angle spectroscopic ellipsometer VASE manufactured by J.A. Uram Japan

[Spectroscopic colorimeter]

Device: Konica Minolta CM-3700A

[Turbidimeter]

Device: HAZE METER NDH 5000 manufactured by Nippon Denshoku High School Co., Ltd.

[Optical microscope]

Device: OLYMPUS BX51 manufactured by Olympus Kogaku Kogyo Co., Ltd.

[Electron Microscope]

Device: JSM-7400F manufactured by Nippon Electronics

[Exposure]

Device: Mask Aligner MA6 manufactured by SUSS

[phenomenon]

Device: Small developing device ADE-3000S manufactured by Acutes Kyosan Co., Ltd.

[1] Synthesis of triazine ring-containing polymer

[Example 1-1] Synthesis of polymer compound [5]

In a 3,000 mL four-neck flask, 1,3-phenylenediamine [2] (41.05 g, 0.380 mol, manufactured by Amino-Chem) and 583.01 g of 3-methoxy-N, N-dimethylpropanamide (KJCMPA-100, KJ (manufactured by Chemicals Co., Ltd.) was added, purged with nitrogen, and stirred to dissolve 1,3-phenylenediamine [2] in KJCMPA-100. Afterwards, it was cooled to -5°C in an ethanol-dry ice bath, and 2,4,6-trichloro-1,3,5-triazine [1] (70.00 g, 0.380 mol, Tokyo Kasei Kogyo Co., Ltd.) 1) was added while making sure that the internal temperature did not exceed 5°C, and washed with 16.60g of KJCMPA-100100. After stirring for 30 minutes, the entire reaction vessel was transferred to an oil bath, and when the internal temperature reached 80°C, 60.67 g of ethyldiethanolamine (0.456 mol, manufactured by Tokyo Kasei Kogyo Co., Ltd.) was slowly added dropwise so as not to exceed 90°C. did. After dropwise addition, it was stirred at 85°C±5°C for 2 hours. After stirring for 2 hours, 3-aminophenol [3] (34.80 g, 0.319 mol, manufactured by Tokyo Chemical Industry Co., Ltd.) and 2-(4-amino) were dissolved in 5.30 g of KJCMPA-1008 (manufactured by Kanto Chemical Co., Ltd.). Phenyl)ethanol [4] (18.75 g, 0.137 mol, manufactured by Tokyo Kasei Kogyo Co., Ltd.) was added dropwise, and then ethyldiethanolamine (40.45 g, 0.304 mol, manufactured by Tokyo Kasei Kogyo Co., Ltd.) was further added dropwise, Washed with KJCMPA-10015.55 and stirred for 3 hours. After stirring for 3 hours, 2-aminoethanol (23.19 g, 0.380 mol, manufactured by Tokyo Kasei Kogyo Co., Ltd.) was added dropwise, and after stirring for 30 minutes, stirring was stopped. Tetrahydrofuran (THF, 261.4 g), ammonium acetate (452.5 g), and ion-exchanged water (452.5 g) were added to the reaction solution, and stirred for 30 minutes. After the stirring was stopped, the solution was transferred to a separatory funnel, divided into an organic layer and an aqueous layer, and the organic layer was recovered. The recovered organic layer was reprecipitated by dropping it into a mixed solution of methanol (1,006 g) and ion-exchanged water (1,508 g). The obtained precipitate was separated by filtration and dried in a reduced pressure dryer at 150°C for 8 hours to obtain 104.6 g of the target polymer compound [5] (hereinafter referred to as P-1).

The weight average molecular weight Mw of compound P-1 measured in polystyrene conversion by GPC was 7,973, and the polydispersity Mw/Mn was 3.5. The measurement results of the ¹ H-NMR spectrum of compound P-1 are shown in Figure 1.

[Example 1-2] Synthesis of polymer compound [6]

In a 300 mL four-necked flask, P-1[5] (32.00 g) obtained in Example 1-1 and 85.01 g of cyclopentanone (CPN, manufactured by Nippon Zeon Co., Ltd.) were added, purged with nitrogen, and stirred. dissolved. Thereafter, the solution was heated until the internal temperature reached 70°C, and 0.0032 g of N-nitrosophenylhydroxyamine aluminum salt (Q-1301, manufactured by Fujifilm Wako Pure Chemical Industries, Ltd.) and 2-isocyanatoethyl acrylic were added. 4.43 g of rate (AOI-VM, manufactured by Showa Denko Co., Ltd.) was added dropwise and stirred at an internal temperature of 70°C ± 5°C for 1 hour to prepare a CPN solution containing 30% by mass of polymer compound [6] (hereinafter referred to as , called P-2 solution).

[2] Preparation of composition for pattern formation and production of pattern

[Example 2-1]

P-2 solution (21.567 g) obtained in Example 1-2, 7.279 g of A-DPH-12E (manufactured by Shinnakamura Chemical Co., Ltd.) in 80% by mass propylene glycol monomethyl ether (PGME) solution as a crosslinking agent, and optical radical generator As a surfactant, 1.941 g of OXE-04 (manufactured by BASF) as a 10 mass% CPN solution, 0.129 g of Megapak R-40 (manufactured by DIC Corporation) as a 10 mass% PGME solution as a surfactant, and PGME (19.08 g) were mixed together. It was confirmed that it was dissolved, and a varnish with a solid content of 25% by mass was prepared (hereinafter referred to as SP-1 solution).

(1) Check the physical properties of the cured film

[Example 3-1]

This SP-1 solution was spin coated on an alkali-free glass substrate of 50 mm Using Mask Aligner MA6 manufactured by SUSS, an exposure dose of 200 mJ/cm ² was irradiated with light with a wavelength of 365 nm.

After UV irradiation, it was developed for 40 seconds using a 2.38% tetramethylammonium hydroxide (hereinafter abbreviated as TMAH) solution, and then rinsed with ultrapure water for 30 seconds. After rinsing, it was dried at 85°C for 10 minutes using a hot plate to obtain a cured film.

For the cured film obtained above, the refractive index, film thickness, b*, transmittance of 400 to 800 nm, and haze were measured. The results are shown in Table 1. Additionally, regarding the transmittance, an average transmittance of 400 to 800 nm was calculated.

From these results, it can be seen that the cured film obtained from the SP-1 solution has an excellent effect of maintaining a high refractive index, high transmittance, and low haze value even after washing with an alkaline aqueous solution.

(2) Fabrication of patterning film

[Example 4-1]

The SP-1 solution prepared in Example 2-1 was spin coated on an alkali-free glass substrate of 50 mm After temporary drying for 10 minutes, using mask aligner MA6 manufactured by SUSS, apply a mask with circular openings with a diameter of 10 ㎛ arranged at 10 ㎛ intervals and a space (ultraviolet ray shielding area) corresponding to the remainder other than the openings. It was installed on the surface, and an exposure dose of 200 mJ/cm ² was irradiated with light with a wavelength of 365 nm.

After UV irradiation, it was developed for 40 seconds using a 2.38% TMAH solution, and then rinsed with ultrapure water for 30 seconds. After rinsing, it was dried at 85°C for 10 minutes using a hot plate to obtain a patterning film.

Optical micrographs and electron micrographs of the obtained patterning film are shown in Figs. 2 and 3.

From these results, it can be seen that the cured film obtained from the SP-1 solution has excellent patterning characteristics.

Claims (21)

It contains a repeating unit structure represented by the following formula (1), has at least one triazine ring terminal, a portion of the triazine ring terminal is sealed with an amino group having a crosslinking group, and another portion is sealed with a hydroxyl group-substituted arylamino group. A triazine ring-containing polymer characterized in that:

(In formula (1), R and R' independently represent a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, or an aralkyl group, and Q represents a divalent group of 3 to 30 carbon atoms having a ring structure. * is a bond Shows hand.) The triazine ring-containing polymer according to claim 1, wherein Q in the formula (1) represents at least one member selected from the group represented by formulas (2) to (13) and formulas (102) to (115).

(In formulas (2) to (13), R ¹ to R ⁹² are each independently selected from a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group with 1 to 10 carbon atoms, a halogenated alkyl group with 1 to 10 carbon atoms, or a carbon atom of 1 to 10. Represents an alkoxy group of 10,
R ⁹³ and R ⁹⁴ represent a hydrogen atom or an alkyl group having 1 to 10 carbon atoms,
W ¹ and W ² are independently a single bond, CR ⁹⁵ R ⁹⁶ (R ⁹⁵ and R ⁹⁶ are independently a hydrogen atom and an alkyl group having 1 to 10 carbon atoms (however, they may form a ring together), or represents a halogenated alkyl group having 1 to 10 carbon atoms), C=O, O, S, SO, SO ₂ or NR ⁹⁷ (R ⁹⁷ represents a hydrogen atom, an alkyl group or phenyl group having 1 to 10 carbon atoms),
X ¹ and X ² are each independently a single bond, an alkylene group having 1 to 10 carbon atoms, or formula (14)

(In formula (14), R ⁹⁸ to R ¹⁰¹ independently represent a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group with 1 to 10 carbon atoms, a halogenated alkyl group with 1 to 10 carbon atoms, or an alkoxy group with 1 to 10 carbon atoms, ,
Y ¹ and Y ² independently represent a single bond or an alkylene group having 1 to 10 carbon atoms.
* indicates a combined hand.]

(In formulas (102) to (115), R ¹ and R ² independently represent an alkylene group having 1 to 5 carbon atoms that may have a branched structure. * represents a bond.) The method according to claim 2, wherein R ¹ to R ⁹² and R ⁹⁸ to R ¹⁰¹ in the formulas (2) to (13) are each independently a hydrogen atom, a halogen atom, or a halogenated alkyl group having 1 to 10 carbon atoms. Triazine ring-containing polymer. The triazine ring-containing polymer according to claim 1, wherein the amino group having the crosslinking group is represented by formula (15).

(In formula (15), R ¹⁰² represents a crosslinking group. * represents a bonding hand.) The triazine ring-containing polymer according to claim 4, wherein the amino group having the crosslinking group is represented by formula (16).

(In formula (16), R ¹⁰² has the same meaning as above. * represents a bond.) The triazine ring-containing polymer according to claim 4, wherein R ¹⁰² is a hydroxy-containing group or a (meth)acryloyl-containing group. The triazine ring-containing polymer according to claim 6, wherein R ¹⁰² is a hydroxyalkyl group, a (meth)acryloyloxyalkyl group, or a group represented by the following formula (i).

(In formula (i), A ¹ represents an alkylene group having 1 to 10 carbon atoms, and A ² represents a single bond or the following formula (j)

represents a group represented by , A ³ represents an (a+1) valent aliphatic hydrocarbon group which may be substituted with a hydroxy group, A ⁴ represents a hydrogen atom or a methyl group, a represents 1 or 2, and * represents a bond. ) The method of claim 7, wherein R ¹⁰² is a hydroxymethyl group, 2-hydroxyethyl group, (meth)acryloyloxymethyl group, (meth)acryloyloxyethyl group, and the following formula (i-2) to formula (i) A triazine ring-containing polymer comprising a group selected from the groups represented by -5).

(In formulas (i-2) to (i-5), * represents a bond.) The triazine ring-containing polymer according to claim 1, wherein the hydroxyl group-substituted arylamino group is represented by formula (17).

(In equation (17), * represents a bond.) The triazine ring-containing polymer according to claim 1, wherein the hydroxyl group-substituted arylamino group is represented by formula (18).

(In equation (18), * represents a bond.) A composition for forming a pattern, comprising the triazine ring-containing polymer according to any one of claims 1 to 10. The composition for forming a pattern according to claim 11, further comprising an organic solvent. The composition for forming a pattern according to claim 12, wherein the organic solvent includes at least one selected from a glycol ester solvent, a ketone solvent, and an ester solvent. The composition for forming a pattern according to claim 11, further comprising a cross-linking agent. The composition for forming a pattern according to claim 14, wherein the crosslinking agent is a polyfunctional (meth)acrylic compound. The composition for forming a pattern according to claim 11, which is used for the light extraction layer of an organic electroluminescence element. A cured product produced from the composition for forming a pattern according to claim 11. An electronic device comprising a base material and the cured product according to claim 17 formed on the base material. 19. The electronic device according to claim 18, which is organic electroluminescence. An optical member comprising a base material and the cured product according to claim 17 formed on the base material. A method for producing a pattern, comprising applying the composition for forming a pattern according to claim 11 to a substrate, evaporating the organic solvent, irradiating light through a mask on which a pattern is formed, developing, and then baking.