KR20230173525A - Seal plate apparatus of gate valve and gate valve - Google Patents

Abstract

The present invention relates to a gate valve and a seal plate device of a gate valve that allows the pressure of a pressurized table to be evenly distributed to the seal plate, and is formed in a shape corresponding to the passage so as to be in close contact with the passage and seal the passage. sill plate; a pressure bar that presses the seal plate in the passage direction; and a pressure distribution device installed between the sill plate and the pressure table and sequentially distributing pressure according to the magnitude of the pressing force of the pressure table.

Description

Seal plate apparatus of gate valve and gate valve}

The present invention relates to a seal plate device and a gate valve of a gate valve, and more particularly, to a seal plate device and a gate valve of a gate valve that enable the pressure of a pressurized table to be evenly distributed to the seal plate.

In general, a chamber is an industrial facility used to manufacture advanced semiconductor devices such as semiconductor chips, wafers, LCD panels, OLED panels, etc., display devices, or other medical devices that require a vacuum or highly clean working environment. The gate valve attached to the chamber serves as an entrance to the chamber and is a type of device that opens the door to move semiconductor chips or wafers into the chamber space and closes the door again to maintain airtightness in the chamber.

The basic configuration of such a conventional gate valve is that a seal plate, that is, a valve body, for opening and closing the chamber passage is mounted inside the valve housing, and the seal plate is pressurized from a pressure base by a drive cylinder or actuator to selectively open and close the passage of the valve housing. This is a configuration that can be done.

However, in a conventional gate valve, the seal plate and pressure bar are integrated and firmly fixed, so if the seal plate and pressure bar are abnormally twisted, used for a long time, or are deformed by external force, the seal plate may contact the valve housing. When this happens, there are many problems, such as uneven contact, causing only specific parts of the sealing member to be worn or damaged, or resulting in sealing failure.

The present invention is intended to solve various problems including the problems described above, and includes a seal plate device and gate for a gate valve that improves the durability of parts and prevents malfunction by distributing the pressure of the pressure bar equally to the seal plate. The purpose is to provide a valve. However, these tasks are illustrative and do not limit the scope of the present invention.

A seal plate device for a gate valve according to the spirit of the present invention for solving the above problems includes a seal plate formed in a shape corresponding to the passage so as to be in close contact with the passage and seal the passage; a pressure bar that presses the seal plate in the passage direction; and a pressure distribution device installed between the sill plate and the pressure table and sequentially distributing pressure according to the magnitude of the pressing force of the pressure table.

In addition, according to the present invention, the pressure distribution device includes: a pressure distribution body formed at the rear of the seal plate, having a press bar connection portion connected to the press bar, and at least a portion of which is made of an elastic member; a primary contact portion formed on a surface of the pressure distribution body opposite the seal plate and in contact with the seal plate when a first pressing force is applied from the pressing zone or when no pressing force is applied; and a secondary contact portion formed on a surface of the pressure distribution body opposite the seal plate and contacting the seal plate by deformation of the pressure distribution body when a second pressing force greater than the first pressing force is applied from the pressure zone. may include.

In addition, according to the present invention, the pressure distribution body of the pressure distribution device is bent overall like a bow so that the secondary contact portion is spaced apart from the seal plate by a first separation distance when no pressing force is applied from the press bar. can be formed.

Additionally, according to the present invention, the first contact portion includes a 1-1 protrusion located at a first distance from the press bar connection portion in a first direction; and a 1-2 protrusion located at the first distance from the press bar connection portion in the second direction.

Additionally, according to the present invention, the 1-1 protrusion includes: a 1-1 upper protrusion installed on the upper part of the pressure distribution body; and a 1-1 lower protrusion installed on the lower part of the pressure distribution body, wherein the 1-2 protrusion includes: a 1-2 upper protrusion installed on the upper part of the pressure distribution body; And it may include a 1-2 lower protrusion installed at the lower part of the pressure distribution body.

Additionally, according to the present invention, the primary contact portion includes: a 1-1 ball joint portion located at a first distance from the press bar connection portion in a first direction; and a 1-2 ball joint located at the first distance from the press bar connection portion in the second direction.

Additionally, according to the present invention, the 1-1 ball joint unit includes: a 1-1 upper ball joint unit installed on the upper part of the pressure distribution body; and a 1-1 lower ball joint portion installed at a lower portion of the pressure distribution body, wherein the 1-2 ball joint portion includes: a 1-2 upper ball joint portion installed at an upper portion of the pressure distribution body; and a 1-2 lower ball joint installed below the pressure distribution body.

Additionally, according to the present invention, the secondary contact portion includes a 2-1 protrusion located at a second distance smaller than the first distance from the pressure bar connection portion in the first direction; and a 2-2 protrusion located at the second distance from the press bar connection portion in the second direction.

Additionally, according to the present invention, the 2-1 protrusion includes: a 2-1 upper protrusion installed on the upper part of the pressure distribution body; and a 2-1 lower protrusion installed on the lower part of the pressure distribution body, wherein the 2-2 protruding part includes: a 2-2 upper protrusion installed on the upper part of the pressure distribution body; And a 2-2 lower protrusion installed at the lower part of the pressure distribution body.

In addition, according to the present invention, the pressure distribution device is formed on a surface of the pressure distribution body opposite the seal plate, and when a third pressing force greater than the second pressing force is applied from the pressing zone, the pressure distribution body is deformed. It may further include a tertiary contact part in contact with the seal plate.

In addition, according to the present invention, the tertiary contact portion is formed on a side of the press bar connection portion, and when no pressing force is applied from the press bar, the tertiary contact portion has a separation distance greater than the first separation distance between the seal plate and the seal plate. It may be a third protrusion formed to be spaced apart by a second separation distance.

Additionally, according to the present invention, the third protrusion includes: a third upper protrusion installed on the upper part of the pressure distribution body; And it may include a third lower protrusion installed at the lower part of the pressure distribution body.

Additionally, according to the present invention, the contact surface of the primary contact part or the secondary contact part may be a curved or spherical surface.

Additionally, according to the present invention, a sealing member may be installed on the front of the seal plate.

Meanwhile, a gate valve according to the spirit of the present invention for solving the above problems includes a valve housing in which a passage is formed to allow a substrate to pass through; a seal plate formed in a shape corresponding to the passage so as to be in close contact with the passage and seal the passage; a pressure bar that presses the seal plate in the passage direction; and a pressure distribution device installed between the sill plate and the pressure table and sequentially distributing pressure according to the magnitude of the pressing force of the pressure table.

According to some embodiments of the present invention as described above, the pressure of the pressure bar is evenly distributed to the seal plate, which has the effect of improving the performance of the equipment by increasing durability of parts and preventing malfunction. Of course, the scope of the present invention is not limited by this effect.

Figure 1 is a plan view showing step by step the operation process of the seal plate device of the gate valve according to some embodiments of the present invention.
Figure 2 is a front perspective view showing the seal plate device of the gate valve of Figure 1.
Figure 3 is a front view showing the seal plate device of the gate valve of Figure 1.
Figure 4 is a front view showing a seal plate device of a gate valve according to some other embodiments of the present invention.
Figure 5 is a plan view showing a seal plate device of a gate valve according to some further embodiments of the present invention.
Figure 6 is a side view showing the seal plate device and the gate valve of the gate valve of Figure 5.
Figure 7 is a cross-sectional view showing section II of the seal plate device of the gate valve of Figure 5.
Figure 8 is a cross-sectional view showing the II-II section of the seal plate device of the gate valve of Figure 5.
Figure 9 is a cross-sectional view showing the seal plate device of the gate valve of Figure 5.
Figure 10 is an enlarged view showing part A of the seal plate device of the gate valve of Figure 9.
Figure 11 is an enlarged view showing the separation state of part B of the seal plate device of the gate valve of Figure 9.
Figure 12 is an enlarged view showing the contact state of part B of the seal plate device of the gate valve of Figure 11.
Figure 13 is a rear perspective view showing the seal plate device of the gate valve of Figure 5.

Hereinafter, various preferred embodiments of the present invention will be described in detail with reference to the attached drawings.

The embodiments of the present invention are provided to more completely explain the present invention to those skilled in the art, and the following examples may be modified into various other forms, and the scope of the present invention is as follows. It is not limited to examples. Rather, these embodiments are provided to make the present disclosure more faithful and complete and to fully convey the spirit of the present invention to those skilled in the art. Additionally, the thickness and size of each layer in the drawings are exaggerated for convenience and clarity of explanation.

Throughout the specification, when referring to one component, such as a film, region, or substrate, being positioned “on,” “connected,” “stacked,” or “coupled” to another component, it refers to said component. It can be interpreted that an element may be directly “on,” “connected,” “stacked,” or “coupled” and in contact with another component, or there may be other components interposed between them. On the other hand, when a component is referred to as being located "directly on," "directly connected to," or "directly coupled" to another component, it is interpreted that there are no intervening components. do. Identical symbols refer to identical elements. As used herein, the term “and/or” includes any one and all combinations of one or more of the listed items.

Although the terms first, second, etc. are used herein to describe various members, parts, regions, layers and/or parts, these members, parts, regions, layers and/or parts are limited by these terms. It is obvious that does not work. These terms are used only to distinguish one member, component, region, layer or section from another region, layer or section. Accordingly, a first member, part, region, layer or portion described below may refer to a second member, part, region, layer or portion without departing from the teachings of the present invention.

Additionally, relative terms such as “top” or “over” and “bottom” or “under” may be used herein to describe the relationship of some elements to other elements as illustrated in the drawings. Relative terms may be understood as intended to include other orientations of the device in addition to the orientation depicted in the drawings. For example, if a device is turned over in the figures, elements depicted as being on the top side of other elements will have an orientation on the bottom side of the other elements. Therefore, the term "top" as an example may include both the "bottom" and "top" directions depending on the specific orientation of the drawing. If the device is oriented in a different direction (rotated 90 degrees relative to the other direction), the relative descriptions used herein may be interpreted accordingly.

The terms used herein are used to describe specific embodiments and are not intended to limit the invention. As used herein, the singular forms include the plural forms unless the context clearly indicates otherwise. Additionally, when used herein, “comprise” and/or “comprising” means specifying the presence of stated features, numbers, steps, operations, members, elements and/or groups thereof. and does not exclude the presence or addition of one or more other shapes, numbers, operations, members, elements and/or groups.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will now be described with reference to drawings that schematically show ideal embodiments of the present invention. In the drawings, variations of the depicted shape may be expected, for example, depending on manufacturing technology and/or tolerances. Accordingly, embodiments of the present invention should not be construed as being limited to the specific shape of the area shown in this specification, but should include, for example, changes in shape resulting from manufacturing.

Figure 1 is a plan view showing step by step the operation process of the seal plate device 100 of the gate valve according to some embodiments of the present invention, and Figure 2 is a front perspective view showing the seal plate device 100 of the gate valve of Figure 1. , and FIG. 3 is a front view showing the seal plate device 100 of the gate valve of FIG. 1.

First, as shown in FIGS. 1 to 3, the seal plate device 100 of a gate valve according to some embodiments of the present invention largely includes a seal plate 10, a pressure bar 20, and a pressure distribution device. (30) may be included.

For example, the seal plate 10 is in close contact with the passage 200a formed in the valve housing 1100 to allow substrates such as semiconductor chips, wafers, LCD panels, and OLED panels of FIG. 6 to pass through, thereby sealing the passage 200a. It may be a type of door structure formed in a shape corresponding to the passage 200a so that it can be opened.

Here, the seal plate 10 may be a rectangular plate structure installed on the side of the process chamber or vacuum chamber and formed elongated in the horizontal direction to selectively control the inflow and outflow of horizontal substrates, such as wafers or glass panels.

Additionally, for example, the seal plate 10 may be made of a hard metal material or an engineering plastic material so as to sufficiently withstand the vacuum pressure or process environment inside the chamber.

However, the shape of the sill plate 10 is not necessarily limited to the drawing, and various types of door structures can be applied depending on the shape of the passage 200a.

Also, for example, the pressure bar 20 may be a type of vertical swing bar for power transmission that is connected to a driving cylinder or actuator and receives the driving force of the driving cylinder or actuator and transmits it to the seal plate 10.

Accordingly, the pressure bar 20 can selectively pressurize the seal plate 10 in the direction of the passage 200a, and thereby selectively open and close the passage 200a.

However, the shape of the pressure bar 20 is not necessarily limited to the drawing, and in addition to the vertical swing bar, a horizontal bar or various other three-dimensional power transmission bars can be applied.

The pressure distribution device 30 is, for example, installed between the seal plate 10 and the pressure table 20, and sequentially moves according to the magnitude of the pressing force F1, F2, and F3 acting on the pressure table 20. It may be a device that distributes pressure.

More specifically, for example, the pressure distribution device 30 may include a pressure distribution body 31, a primary contact portion (P1), a secondary contact portion (P2), and a tertiary contact portion (P3).

The pressure distribution body 31 is, for example, formed at the rear of the seal plate 10, has a press bar connection portion C connected to the press bar 20, and at least a portion is made of an elastic member to be elastic like a bow. It may be a type of elastic body formed into a deformable shape.

The pressure distribution body 31 may be a relatively thin and long elastic metal body capable of elastic deformation, or a soft elastic resin body such as rubber, silicone, or synthetic resin.

The primary contact portion (P1), for example, as shown in (a) of FIG. 1, is formed on the seal plate opposing surface (F) of the pressure distribution body 31 and applies the first pressing force from the pressing table 20. When (F1) is applied or no pressing force is applied, it may be a contact portion that is in contact with the seal plate 10.

The secondary contact portion (P2), for example, as shown in (b) of FIG. 1, is formed on the seal plate opposing surface (F) of the pressure distribution body 31, and applies the first pressing force from the pressing table 20. When the second pressing force F2 greater than (F1) is applied, the pressure distribution body 31 may be deformed and may be in contact with the seal plate 10.

The tertiary contact portion P3 is formed on the seal plate opposing surface F of the pressure distribution body 31, for example, as shown in Figure 1 (c), and applies the second pressing force ( When the third pressing force F3 greater than F2) is applied, the pressure distribution body 31 may be deformed and may be in contact with the seal plate 10.

More specifically, as shown in FIG. 1, the pressure distribution body 31 of the pressure distribution device 30 has a secondary contact portion P2 when no pressing force is applied from the pressure base 20. It may be formed as a whole to be bent like a bow so as to be spaced apart from the sill plate 10 by the first separation distance D1.

The primary contact portion P1 includes a 1-1 protrusion T1-1 located at a first distance L1 in the first direction (leftward direction) from the pressure table connection portion C and a second direction from the pressure table connection portion. It may include a 1-2 protrusion T1-2 located at the first distance L1 in the right direction.

Therefore, as shown in (a) of FIG. 1, the first pressing force (F1) acting on the press bar connection portion (C) is applied to the 1-1 protrusions (1-1) each spaced apart by the same distance, that is, the first distance (L1) The pressure can be evenly distributed by evenly distributing 1/2 to the first and second protrusions (T1-1) and T1-2.

The secondary contact portion (P2) is a 2-1 protrusion (T2-1) located at a second distance (L2) smaller than the first distance (L1) in the first direction (left direction) from the press bar connection portion (C). ) and a 2-2 protrusion (T2-2) located at the second distance (L2) in the second direction (right direction) from the press bar connection portion (C).

Therefore, as shown in (b) of FIG. 1, the second pressing force (F2), which is greater than the first pressing force (F1) acting on the press bar connection portion (C), causes the pressure distribution body 31 to be elastically deformed and the second pressing force (F2) The 1-1 protrusion T2-1 and the 2-2 protrusion T2-2 are in contact with the seal plate 10 and are spaced apart from each other by the same distance, that is, the first distance L1. -1) and the 1-2 protrusion (T1-2), as well as the 2-1 protrusion (T2-1) and the 2-2 protrusion (T2-2), which are respectively spaced apart by the second distance (L2). It is distributed evenly so that the pressure can be distributed evenly.

The tertiary contact portion (P3) is formed on the side of the press bar connection portion (C), and when no pressing force is applied from the press bar (20), the tertiary contact portion (P3) is the first separation distance from the seal plate (10). (D1) may be a third protrusion (T3) formed to be spaced apart by a greater second separation distance (D2).

Therefore, as shown in (c) of FIG. 1, the third pressing force (F3), which is greater than the second pressing force (F2) acting on the press bar connection portion (C), causes the pressure distribution body 31 to be elastically deformed and the third pressing force (F3) Protrusion (T3) 1-1 protrusion (T1-1), 1-2 protrusion (T1-2), 2-1 protrusion (T2-1), 2-2 protrusion (T2-2) and third The pressure can be evenly distributed by being evenly distributed to the protrusion T3.

The primary contact portion (P1) or the secondary contact portion (P2) may have a curved or spherical contact surface to reduce wear or friction. Additionally, a sealing member (S) may be installed on the front of the seal plate 10 to seal it.

Therefore, the pressure of the press bar 20 can be distributed equally to the seal plate 10 by using the primary contact portion (P1), the secondary contact portion (P2), and the tertiary contact portion (P3). Through this, the durability of parts can be increased, malfunctions can be prevented, and equipment performance can be improved.

Figure 4 is a front view showing a seal plate device 200 of a gate valve according to some other embodiments of the present invention.

As shown in FIG. 4, the 1-1 protrusion (T1-1) of the seal plate device 200 of the gate valve according to some other embodiments of the present invention is such that the pressing force is applied to the upper part of the pressure distribution body 31. and a 1-1 upper protrusion (T1-1a) installed on the upper part of the pressure distribution body 31 and a 1-1 lower protrusion installed on the lower part of the pressure distribution body 31 so that they can be uniformly distributed to the lower part. It may include (T1-1b).

Likewise, the 1-2 protrusion T1-2 is a 1-2 protrusion installed on the upper part of the pressure distribution body 31 so that the pressing force can be uniformly distributed to the upper and lower parts of the pressure distribution body 31, respectively. It may include 2 upper protrusions (T1-2a) and a 1-2 lower protrusion (T1-2b) installed at the lower part of the pressure distribution body 31.

In addition, similarly, the 2-1 protrusion (T2-1) is installed on the upper part of the pressure distribution body 31 so that the pressing force can be uniformly distributed to the upper and lower parts of the pressure distribution body 31, respectively. It includes 1 upper protrusion (T2-1a) and a 2-1 lower protrusion (T2-1b) installed at the lower part of the pressure distribution body 31,

The 2-2 protrusion T2-2 is a 2-2 upper protrusion installed on the upper part of the pressure distribution body 31 so that the pressing force can be uniformly distributed to the upper and lower parts of the pressure distribution body 31, respectively. T2-2a) and a 2-2 lower protrusion (T2-2b) installed at the lower part of the pressure distribution body 31.

The third protrusion T3 is a third upper protrusion T3a installed on the upper part of the pressure distribution body 31 so that the pressing force can be uniformly distributed to the upper and lower parts of the pressure distribution body 31, respectively. It may include a third lower protrusion T3b installed at the lower part of the body 31.

Therefore, as shown in FIG. 4, the pressing forces acting on the press bar connection portion C cause the pressure distribution body 31 to elastically deform, for example, the 1-1 upper protrusion T1-1a and the 1-1 lower protrusion. Protrusion (T1-1b), 1-2 upper protrusion (T1-2a), 1-2 lower protrusion (T1-2b), 2-1 upper protrusion (T2-1a), 2-1 lower protrusion ( T2-1b), the 2-2nd upper protrusion (T2-2a), the 2-2nd lower protrusion (T2-2b), the third upper protrusion (T3a), and the third lower protrusion (T3b), a total of 10 protrusions. It can be distributed evenly.

Figure 5 is a plan view showing the seal plate device 300 of the gate valve according to some further embodiments of the present invention, and Figure 6 is a plan view showing the seal plate device 300 and the gate valve 1000 of the gate valve of Figure 5. It is a side view, and FIG. 7 is a cross-sectional view showing an II-I cross section of the seal plate device 300 of the gate valve of FIG. 5, and FIG. 8 is a cross-sectional view showing a II-II cross section of the seal plate device 300 of the gate valve of FIG. 5. , FIG. 9 is a cross-sectional view showing the seal plate device 300 of the gate valve of FIG. 5, FIG. 10 is an enlarged view showing part A of the seal plate device 300 of the gate valve of FIG. 9, and FIG. 11 is an enlarged view showing the separation state of part B of the seal plate device 300 of the gate valve of FIG. 9, and FIG. 12 is an enlarged view of the contact state of part B of the seal plate device 300 of the gate valve of FIG. 11. This is an enlarged view, and FIG. 13 is a rear perspective view showing the seal plate device 300 of the gate valve of FIG. 5.

As shown in FIGS. 5 to 13, the primary contact portion P1 of the seal plate device 300 of the gate valve according to some other embodiments of the present invention may have a ball joint portion instead of a protrusion portion, The primary contact portion is a 1-1 ball joint portion (B1-1) located at a first distance (L1) in the first direction (left direction) from the pressure table connection portion C and a second direction (right direction) from the pressure table connection portion. direction) and may include a 1-2 ball joint portion (B1-2) located at the first distance (L1).

More specifically, as shown in FIGS. 5 to 13, the 1-1 ball joint (B1-1) is a 1-1 upper ball joint (B1-1) installed on the upper part of the pressure distribution body 31. B1-1a) and a 1-1 lower ball joint (B1-1b) installed at the lower part of the pressure distribution body 31.

In addition, the 1-2 ball joint portion (B1-2) includes a 1-2 upper ball joint portion (B1-2a) installed on the upper portion of the pressure distribution body 31 and a lower portion of the pressure distribution body 31. It may include a 1-2 lower ball joint portion (B1-2b).

As shown in FIGS. 7, 9, and 10, these ball joint parts (B1-1a) (B1-1b) (B1-2a) (B1-2b) are the ball seat 12 installed on the seal plate 10. It is a type of spherical joint that allows free joint movement at various angles as well as in the up, down, left, and right directions, and this ball joint can be fixed to the pressure distribution body 31 with a fixture 32 such as a bolt or screw. .

As shown in FIGS. 8, 11, and 12, for example, the 2-1 protrusion T2-1 is formed on the seal plate opposing surface F of the pressure distribution body 31, and is shown in FIG. 11. As shown, when the pressing force is not applied from the pressure bar 20, the pressure bar 20 is spaced apart from the seal plate 10 by the first separation distance D1, and as shown in FIG. 12, the pressure bar 20 When the second pressing force F2 greater than the first pressing force F1 is applied, the pressure distribution body 31 may be deformed and come into contact with the seal plate 10.

At this time, when the 2-1 protrusion T2-1 comes into contact with the pressure transmission member 11, the pressure transmission member 11 can redistribute the pressure to a larger area and transmit it more uniformly.

Meanwhile, as shown in FIG. 6, the present invention may include a gate valve 1000 including the seal plate device 100, 200, and 300 of the gate valve described above, and some embodiments of the present invention The gate valve 1000 according to examples includes a valve housing 1100 in which a passage 200a is formed to allow a substrate to pass through, and a passage 200a that is in close contact with the passage 200a to seal the passage 200a. ) is installed between a seal plate 10 formed in a shape corresponding to the seal plate 10, a press bar 20 that presses the seal plate 10 in the direction of the passage 200a, and the seal plate 10 and the press bar 20. , It may include a pressure distribution device 30 that sequentially distributes pressure according to the magnitude of the pressing force of the pressure bar 20.

Here, the configuration and role of the valve housing 1100, the seal plate 10, the pressure bar 20, and the pressure distribution device 30 are similar to the seal plate device 100 of the gate valve of the present invention ( 200) may be the same as those of (300). Therefore, detailed description is omitted.

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true scope of technical protection of the present invention should be determined by the technical spirit of the attached patent claims.

10: Seal plate
11: Pressure transmission member
12: Ball seat
20: Pressure bar
30: pressure distribution device
31: pressure distribution body
32: fixture
C: pressure bar connection
P1: Primary contact
P2: Secondary contact
F: Sill plate opposing surface
F1: first pressing force
F2: Second pressing force
F3: Third pressing force
D1: first separation distance
D2: Second separation distance
T1-1: 1-1 protrusion
T1-1a: 1-1 upper protrusion
T1-1b: 1-1 lower protrusion
B1-1: 1-1 ball joint
B1-1a: 1-1 upper ball joint
B1-1b: 1-1 lower ball joint
B1-2: 1-2 ball joint
B1-2a: 1-2 upper ball joint
B1-2b: 1-2 lower ball joint
T1-2: 1-2 protrusion
T1-2a: 1-2 upper protrusion
T1-2b: 1-2 lower protrusion
L1: 1st distance
L2: 2nd distance
T2-1: 2-1 protrusion
T2-1a: 2-1 upper protrusion
T2-1b: 2-1 lower protrusion
T2-2: 2-2 protrusion
T2-2a: 2-2 upper protrusion
T2-2b: 2-2 lower protrusion
P3: Tertiary contact
T3: Third projection
T3a: Third upper projection
T3b: Third lower protrusion
S: Sealing member
100, 200, 300: Seal plate device
1100: valve housing
1100a: passage
1000: Gate valve

Claims (15)

a seal plate formed in a shape corresponding to the passage so as to be in close contact with the passage and seal the passage;
a pressure bar that presses the seal plate in the passage direction; and
a pressure distribution device installed between the sill plate and the pressure table and sequentially distributing pressure according to the magnitude of the pressing force of the pressure table;
A seal plate device for a gate valve, including a. According to claim 1,
The pressure distribution device,
a pressure distribution body formed at the rear of the seal plate, having a press bar connection portion connected to the press bar, and at least a portion of the pressure distribution body made of an elastic member;
a primary contact portion formed on a surface of the pressure distribution body opposite the seal plate and in contact with the seal plate when a first pressing force is applied from the pressing zone or when no pressing force is applied; and
a secondary contact portion formed on a surface of the pressure distribution body opposite the seal plate and contacting the seal plate by deformation of the pressure distribution body when a second pressing force greater than the first pressing force is applied from the pressing zone;
A seal plate device for a gate valve, including a. According to claim 2,
The pressure distribution body of the pressure distribution device is the seal of the gate valve, which is formed to be overall bent like a bow so that the secondary contact portion is spaced apart from the seal plate by a first separation distance when a pressing force is not applied from the press bar. plate device. According to claim 2,
The first contact part is,
a 1-1 protrusion located at a first distance from the press bar connection portion in a first direction; and
a 1-2 protrusion located at the first distance in a second direction from the press bar connection part;
A seal plate device for a gate valve, including a. According to claim 4,
The 1-1 protrusion includes: a 1-1 upper protrusion installed on the upper part of the pressure distribution body; And a 1-1 lower protrusion installed at the lower part of the pressure distribution body,
The 1-2 protrusion includes: a 1-2 upper protrusion installed on the upper part of the pressure distribution body; and a 1-2 lower protrusion installed at a lower portion of the pressure distribution body. According to claim 2,
The first contact part is,
a 1-1 ball joint located at a first distance from the press bar connection portion in a first direction; and
a 1-2 ball joint located at the first distance in a second direction from the press bar connection part;
A seal plate device for a gate valve, including a. According to claim 6,
The 1-1 ball joint unit includes: a 1-1 upper ball joint unit installed on the upper part of the pressure distribution body; And a 1-1 lower ball joint installed below the pressure distribution body,
The 1-2 ball joint unit includes a 1-2 upper ball joint unit installed on the upper part of the pressure distribution body; and a 1-2 lower ball joint installed below the pressure distribution body. According to claim 4 or 6,
The secondary contact part is,
a 2-1 protrusion located at a second distance smaller than the first distance in the first direction from the press bar connection part; and
a 2-2 protrusion located at the second distance from the press bar connection portion in the second direction;
A seal plate device for a gate valve, including a. According to claim 8,
The 2-1 protrusion includes: a 2-1 upper protrusion installed on the upper part of the pressure distribution body; And a 2-1 lower protrusion installed at the lower part of the pressure distribution body,
The 2-2 protrusion includes: a 2-2 upper protrusion installed on the upper part of the pressure distribution body; and a 2-2 lower protrusion installed at a lower portion of the pressure distribution body. According to claim 3,
The pressure distribution device,
a tertiary contact portion formed on a surface of the pressure distribution body opposite the sill plate and contacting the sill plate by deformation of the pressure distribution body when a third pressing force greater than the second pressing force is applied from the pressure zone;
A seal plate device for a gate valve, further comprising: According to claim 10,
The tertiary contact part is,
A third protrusion formed on a side of the press bar connection portion, and when a pressing force is not applied from the press bar, the tertiary contact portion is spaced apart from the seal plate by a second distance greater than the first distance. , Seal plate device of gate valve. According to claim 11,
The third protrusion is,
a third upper protrusion installed on the upper part of the pressure distribution body; and
a third lower protrusion installed at the lower part of the pressure distribution body;
A seal plate device for a gate valve, including a. According to claim 2,
A seal plate device for a gate valve, wherein the primary contact part or the secondary contact part has a contact surface that is curved or spherical. According to claim 1,
A seal plate device for a gate valve, wherein a sealing member is installed on the front of the seal plate. A valve housing in which a passage is formed to allow a substrate to pass through;
a seal plate formed in a shape corresponding to the passage so as to be in close contact with the passage and seal the passage;
a pressure bar that presses the seal plate in the passage direction; and
a pressure distribution device installed between the sill plate and the pressure table and sequentially distributing pressure according to the magnitude of the pressing force of the pressure table;
Including, gate valve.

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