KR20230173514A - Indirect temperature control apparatus for liquid using multiple tube - Google Patents

Abstract

This application relates to an IPA indirect temperature control device. The IPA indirect temperature control device according to the present disclosure includes a housing in which a heat transfer medium is received and comprising a plurality of pores on one side and the other side, and at least one porous tube penetrating the pores of the housing and through which the IPA passes. It includes an IPA passing part, a medium temperature control part that controls the temperature of the heat transfer medium, and a porous tube fixing part that fixes the porous tube, wherein the cavity is a first cavity that supplies IPA to the IPA passing part, and It may include a second cavity discharging IPA from the IPA passage part.

Description

Liquid indirect heating control device using a porous tube {INDIRECT TEMPERATURE CONTROL APPARATUS FOR LIQUID USING MULTIPLE TUBE}

This application relates to a liquid indirect heating control device, and specifically, an indirect temperature control device that can indirectly control the temperature of a solution, liquid, chemical, etc. such as IPA using a porous tube, and a system that can supply IPA, etc. using the same. It's about.

In general, among the semiconductor manufacturing processes, wafer processing processes include photoresist coating, developing & baking, etching, chemical vapor deposition, and ashing. There is a wet cleaning process using chemicals (chemical substances) or pure water (DI water, deionized water) to remove various contaminants attached to the substrate during each multi-step process. .

In addition, after the cleaning process is performed, there is a drying process to dry the chemical or pure water remaining on the surface of the semiconductor substrate. The drying process may include spin drying, which dries the semiconductor substrate using mechanical rotational force, and IPA drying, which dries the semiconductor substrate using the chemical reaction of IPA (isopropyl alcohol). However, in order to dry IPA, high temperature IPA is required, so it is necessary to heat IPA to high temperature with an IPA heating device.

In this regard, the conventional IPA heating device directly heated the IPA in the housing by filling the housing with IPA and directly heating the housing. However, in this case, it was difficult to precisely control the IPA temperature and problems of contamination of the IPA solution occurred. In addition, in the case of flammable substances such as IPA, when directly heated as in the past, there was always a risk of fire or an accident that could threaten safety. Additionally, this problem may equally apply to similar chemical substances and solutions other than IPA.

The technology behind this application is disclosed in Korean Patent Publication No. 2011-0057679.

The purpose of this application is to solve the problems of the prior art described above, and to provide an IPA indirect temperature control device to solve the problems that occur when directly heating IPA.

The purpose of the present application is to solve the problems of the prior art described above, and to provide an IPA indirect temperature control device that can control the temperature of IPA more precisely and accurately and prevent contamination of IPA.

The purpose of this application is to solve the problems of the prior art described above, and to provide an IPA indirect temperature control device that can minimize the risk of fire and improve safety when controlling the temperature of flammable materials such as IPA. .

The present application is intended to solve the problems of the above-described prior art, and is an indirect IPA including a porous tube fixing part capable of fixing the porous tube to suppress breakage during the heating process of the chemical substance or solution and to facilitate temperature control. The purpose is to provide a temperature control device.

The present application is intended to solve the problems of the prior art described above, and is a liquid indirect temperature control device that can more precisely and accurately control the temperature of a chemical substance or solution requiring temperature control and prevents contamination of the chemical substance or solution. The purpose is to provide an IPA supply system.

However, the technical challenges sought to be achieved by the embodiments of the present application are not limited to those described above, and other technical challenges may exist.

As a technical means for achieving the above-described technical problem, the IPA indirect temperature control device according to the first aspect of the present application includes: a housing accommodating a heat transfer medium and including a plurality of pores on one side and the other side; an IPA passage portion penetrating through a cavity of the housing and including at least one porous tube through which IPA passes; a medium temperature control unit that controls the temperature of the heat transfer medium; And a porous tube fixing part that fixes the porous tube; It relates to an IPA indirect temperature control device, including a first cavity supplying IPA to the IPA passage part, and a second cavity discharging IPA from the IPA passage part.

According to one embodiment of the present application, the medium temperature control unit includes a heating unit that controls the temperature of the heat transfer medium; a first medium supply pipe part that communicates with the heating unit and the housing, receives the heat transfer medium from the heating unit, and supplies it to the housing; and a second medium supply pipe that communicates with the heating unit and the housing, receives the heat transfer medium from the housing, and supplies the heat transfer medium to the heating unit, but is not limited thereto.

According to one embodiment of the present application, the heating unit may include an internal heater unit accommodated inside the housing or an external heater unit formed outside the housing, but is not limited thereto.

According to one embodiment of the present application, the medium temperature control unit may further include a heat transfer medium tank that communicates the first medium supply pipe portion and the second medium supply pipe portion and receives the heat transfer medium discharged from the housing. However, it is not limited to this.

According to one embodiment of the present application, the first medium supply pipe portion and the second medium supply pipe portion may be in communication with a hole formed on one side or the other side of the housing, but are not limited thereto.

According to one embodiment of the present application, the first hole may be formed on one side of the housing, and the second hole may be formed on one side or the other side of the housing, but are not limited thereto.

According to one embodiment of the present application, an IPA storage unit that passes through the porous tube and is discharged from the IPA passage unit may further be included, but is not limited thereto.

According to one embodiment of the present application, the porous tube fixing unit includes a plurality of guide holes through which the porous tube passes, at least one guide panel in which the plurality of guide holes are formed, and a wave penetrating one side and the other side of the guide panel. It may include, but is not limited to, studying.

According to one embodiment of the present application, the at least one guide panel may have a structure combined to share one side or an overlapped structure to form one intersection, but is not limited thereto.

According to one embodiment of the present application, the porous tube fixing unit includes a cylindrical panel, a plurality of guide holes through which the porous tube passes, a plurality of guide panels in which the plurality of guide holes are formed, and one surface of the cylindrical panel and the guide panel. It is possible to make a hole penetrating through the surface of the face, but it is not limited to this.

According to one embodiment of the present application, the guide panel may be formed on the surface of the cylindrical panel, but is not limited thereto.

According to one embodiment of the present application, the porous tube fixing part may include, but is not limited to, a guide substrate formed by being attached to the upper or lower part of the housing, and a guide tube in contact with the porous tube.

According to one embodiment of the present application, a separator formed between the medium temperature adjustment control unit and the IPA passage unit may be further included, but is not limited thereto.

According to one embodiment of the present application, an insulating portion formed on the outer surface of the housing may be further included, but is not limited thereto.

Additionally, a second aspect of the present disclosure provides a liquid indirect temperature control device, comprising: a housing in which a heat transfer medium is received and including a plurality of pores on one side and the other side; a liquid passage part penetrating a cavity of the housing and including at least one porous tube through which liquid passes; a medium temperature control unit that controls the temperature of the heat transfer medium; and a porous tube fixing part for fixing the porous tube, wherein the pore includes a first pore for supplying liquid to the liquid passage part, and a second pore for discharging liquid from the liquid passage part. , for liquid indirect temperature control devices.

In addition, the third aspect of the present application is an IPA supply unit; Heat transfer medium supply section; At least one IPA indirect temperature control device in communication with the IPA supply unit and the heat transfer medium supply unit; and at least one chamber in communication with the IPA indirect temperature control device and supplied with the IPA; It is about an IPA supply system, including.

According to one embodiment of the present application, the IPA supply system communicates the IPA indirect temperature control device and the at least one chamber, receives IPA from the IPA indirect temperature control device, and supplies IPA to the at least one chamber. It may further include an IPA supply control unit, but is not limited thereto.

The above-described means of solving the problem are merely illustrative and should not be construed as intended to limit the present application. In addition to the exemplary embodiments described above, additional embodiments may be present in the drawings and detailed description of the invention.

According to the means for solving the problem of the present application described above, IPA can be heated by receiving heat from a heat transfer medium in the process of passing through the pipe member of the IPA passage portion, so IPA can be heated indirectly, so when IPA is directly heated Problems caused by contamination caused by heating heaters can be prevented.

In addition, the IPA indirect temperature control device according to the present application can minimize risks such as fire that may occur when controlling the temperature of a flammable material such as IPA by direct heating and ensure safety.

In addition, since the IPA indirect temperature control device according to the present application includes a fixing part internally that suppresses the flow of the pipe through which IPA passes, damage due to the flow of the pipe can be suppressed and heat transfer efficiency can be improved.

According to the means for solving the problem of the present application described above, the liquid can be heated by receiving heat from the heat transfer medium in the process of passing through the pipe member of the liquid passage part, so the liquid can be heated indirectly, so when the liquid is directly heated Problems caused by contamination caused by the heating heater can be prevented.

Figure 1 is a schematic diagram of an IPA indirect temperature control device according to an embodiment of the present application.
Figure 2a is a schematic diagram of a housing according to an embodiment of the present application.
Figure 2b is a schematic diagram of a housing according to an embodiment of the present application.
Figure 3a is a schematic diagram of a fixing part according to an embodiment of the present application.
Figure 3b is a schematic diagram of a fixing part according to an embodiment of the present application.
Figure 3c is a schematic diagram of a fixing part according to an embodiment of the present application.
Figure 3d is a schematic diagram of a fixing part according to an embodiment of the present application.
Figure 4 is a schematic diagram of a porous pipe according to an embodiment of the present application.
Figure 5a is a schematic diagram of an IPA indirect temperature control device according to an embodiment of the present application.
Figure 5b is a schematic diagram of an IPA indirect temperature control device according to an embodiment of the present application.
Figure 5c is a schematic diagram of an IPA indirect temperature control device according to an embodiment of the present application.
Figure 5d is a schematic diagram of an IPA indirect temperature control device according to an embodiment of the present application.
Figure 5e is a schematic diagram of an IPA indirect temperature control device according to an embodiment of the present application.
Figure 6a is a schematic diagram of an IPA supply system according to an embodiment of the present application.
Figure 6b is a schematic diagram of an IPA supply system according to an embodiment of the present application.

Below, with reference to the attached drawings, embodiments of the present application will be described in detail so that those skilled in the art can easily implement them.

However, the present application may be implemented in various different forms and is not limited to the embodiments described herein. In order to clearly explain the present application in the drawings, parts that are not related to the description are omitted, and similar reference numerals are assigned to similar parts throughout the specification.

Throughout this specification, when a part is said to be “connected” to another part, this includes not only the case where it is “directly connected,” but also the case where it is “electrically connected” with another element in between. do

Throughout this specification, when a member is said to be located “on”, “above”, “at the top”, “below”, “at the bottom”, or “at the bottom” of another member, this means that a member is located on another member. This includes not only cases where they are in contact, but also cases where another member exists between two members.

Throughout the specification of the present application, when a part "includes" a certain component, this means that it may further include other components rather than excluding other components unless specifically stated to the contrary.

As used herein, the terms “about,” “substantially,” and the like are used to mean at or close to a numerical value when manufacturing and material tolerances inherent in the stated meaning are presented, and to aid understanding of the present application. It is used to prevent unscrupulous infringers from unfairly exploiting disclosures in which precise or absolute figures are mentioned. Additionally, throughout the specification herein, “a step of” or “a step of” does not mean “a step for.”

Throughout this specification, the term "combination thereof" included in the Markushi format expression means a mixture or combination of one or more components selected from the group consisting of the components described in the Markushi format expression, It means including one or more selected from the group consisting of.

Throughout this specification, description of “A and/or B” means “A or B, or A and B.”

Hereinafter, the liquid indirect heating control device using a porous tube of the present application will be described in detail with reference to implementation examples, examples, and drawings. However, the present application is not limited to these embodiments, examples, and drawings.

As a technical means for achieving the above-described technical problem, in the IPA indirect temperature control device 10 according to the first aspect of the present application, the heat transfer medium is accommodated and the housing includes a plurality of pores on one side and the other side ( 100); an IPA passage portion 110 that penetrates the cavity of the housing 100 and includes at least one porous tube 111 through which IPA passes; a medium temperature control unit that controls the temperature of the heat transfer medium; And a porous tube fixing part 120 that fixes the porous tube 111; It includes a first cavity (1010) for supplying IPA to the IPA passage unit (110), and a second cavity (1020) for discharging IPA from the IPA passage unit (110). , for the IPA indirect temperature control device (10).

The IPA indirect temperature control device 10 according to the present application is designed not to heat the IPA directly, but to heat the IPA by using a heat transfer medium (e.g., water), etc., so that the heat from the heat source passes through the heat transfer medium. It is a device. When the IPA is heated directly, it is difficult to control the temperature, and there are problems such as the IPA's temperature rises quickly and evaporates quickly. However, indirect heating has the advantage of easy temperature control.

FIGS. 1, 2A, 2B, and 5A to 5E are schematic diagrams of the IPA indirect temperature control device 10 according to an embodiment of the present application, and FIGS. 3A to 3C are schematic diagrams of a fixing unit according to an embodiment of the present application. This is a schematic diagram. In this regard, FIGS. 5A to 5E relate to the IPA indirect temperature control device 10 reflecting FIGS. 1 to 3C. FIG. 1 shows only the position of the housing 100 and the medium temperature control unit, and FIG. 2A and 2B show only the inside of the housing 100, that is, the IPA passage part 110, and FIGS. 3A to 3D show the fixing part installed in the housing 100. That is, FIGS. 2A and 2B specifically represent only the IPA passage part 110 within the housing 100, and FIGS. 3A to 3D specifically represent only the porous tube fixing portion 120 within the housing 100. .

In addition, in FIGS. 1 to 5E, the IPA passing part 110 includes at least one porous tube 111, and one or two or more porous tubes 111 are collectively referred to as the IPA passing part 110. The two descriptions may be used interchangeably unless otherwise specified.

The housing 100 according to the present application is a space in which the heat transfer medium is accommodated. As will be described later, the heat transfer medium is controlled by the medium temperature control unit and can be further introduced and discharged by the medium temperature control unit.

According to one embodiment of the present application, the housing 100 may include a plurality of pores on one side and the other side, but is not limited thereto. The hole not only connects the porous tube 111 of the IPA passage portion 110 and the interior of the housing 100, but also serves for the inflow and discharge of the heat transfer medium. As will be described later, the plurality of pores may include at least five, and the pores may be arranged only on one side or the other side of the housing 100, or may be arranged in equal numbers on the one side and the other side.

According to one embodiment of the present application, the medium temperature control unit includes a heater unit 130 that controls the temperature of the heat transfer medium; A first medium supply pipe 170 that communicates with the heater unit 130 and the housing 100 and receives the heat transfer medium from the heater unit 130 and supplies it to the housing 100; And it may include a second medium supply pipe part 180 that communicates the heater unit 130 and the housing 100, receives the heat transfer medium from the housing 100, and supplies it to the heater unit 130. However, it is not limited to this.

According to one embodiment of the present application, the heater unit 130 may include an internal heater unit accommodated inside the housing 100 or an external heater unit formed outside the housing 100, but is not limited thereto. .

According to one embodiment of the present application, the internal heater unit may not contact the at least one porous tube 111, but is not limited thereto.

According to one embodiment of the present application, the internal heater may have a rod shape or a coil shape, but is not limited thereto. As will be described later, the internal heater portion does not directly contact the porous tube 111.

The internal heater unit is disposed inside the housing 100 and can control the temperature of the heat transfer medium accommodated inside the housing 100. On the other hand, the external heater unit is located outside the housing 100, and communicates the first medium supply pipe part 170 and the second medium supply pipe part 180, or operates the first medium supply pipe part 170. ) can be formed on

According to one embodiment of the present application, the medium temperature control unit communicates the first medium supply pipe portion 170 and the second medium supply pipe portion 180 and receives the heat transfer medium discharged from the housing 100. A heat transfer medium tank 160 may be additionally included, but is not limited thereto.

According to one embodiment of the present application, the heat transfer medium tank 160 may include the external heater unit, or may exist separately from the external heater unit, but is not limited thereto.

Specifically, when the IPA indirect temperature control device 10 according to the present application includes a heat transfer medium tank 160, the heat transfer medium discharged through the second medium supply pipe 180 is the heat transfer medium tank 160. ), and the heat transfer medium can be supplied from the heat transfer medium tank 160 to the first medium supply pipe 170. The heater unit 130 is disposed inside the heat transfer medium tank 160 or between the heat transfer medium tank 160 and the first medium supply pipe part 170 and is located within the housing 100. The temperature of the incoming heat transfer medium can be adjusted (external heater unit), or the temperature of the heat transfer medium introduced by being disposed inside the housing 100 can be adjusted (internal heater unit).

On the other hand, when the IPA indirect temperature control device 10 according to the present application does not include the heat transfer medium tank 160, the heat transfer medium introduced through the first medium supply pipe 170 is supplied to the second medium supply pipe. It may be discharged to the outside of the housing 100 through 180, or may have a structure connected to the second medium supply pipe 180 and the first medium supply pipe 170 without a separate heat transfer medium tank 160. there is. At this time, the heater unit 130 is formed on a specific section of the first medium supply pipe 170, or is located between the first medium supply pipe 170 and the second medium supply pipe 180. Alternatively, it may be placed inside the housing 100.

According to one embodiment of the present application, the first medium supply pipe 170 and the second medium supply pipe 180 may be in communication with a hole formed on one side or the other side of the housing 100. It is not limited.

According to one embodiment of the present application, the cavity includes a first cavity 1010 for supplying IPA into the housing 100, a second cavity 1020 for discharging IPA within the housing 100, and the housing 100. ) may include a third cavity 1030 for supplying a heat transfer medium within the housing 100, and a fourth cavity 1040 for discharging the heat transfer medium within the housing 100, but is not limited thereto.

According to one embodiment of the present application, the plurality of pores may further include pores other than the first pores 1010 to 4th pores 1040.

In this regard, the positions of the first to fourth holes 1010 to 1040 in FIGS. 2A and 2B are arbitrarily determined, and the positions of the first to fourth holes 1010 to 1040 may change.

The plurality of pores may supply a heat transfer medium within the housing 100 or IPA into the plurality of porous tubes 111. At this time, in order to control the amount of heat transfer medium supplied into the housing 100 and/or the amount of IPA supplied into the porous tube 111, the plurality of cavities are the first pores 1010 to the fourth pores. (1040) may include a number of public bodies that can perform the role, and their sizes may all be different.

For example, the housing 100 may have a plurality of pores of different sizes or the same size on one side and the other side, and among these, pores of the same size communicate with each other to form the first pore 1010 and the second pore 1010. There may be a second cavity (1020), a third cavity (1030) and a fourth cavity (1040), and voids not selected as the first cavity (1010) to the fourth cavity (1040) may be sealed. .

According to one embodiment of the present application, the first hole 1010 may be formed on one side of the housing 100, and the second hole 1020 may be formed on one side or the other side of the housing 100. However, it is not limited to this.

One side of the housing 100 refers to the direction in which IPA is supplied to at least one porous tube 111 constituting the IPA passing part 110, and the other side of the housing 100 represents the direction of the IPA. It means any side other than one side. For example, in the IPA indirect temperature control device 10 of FIG. 2A, IPA is supplied through the first hole 1010 formed on one surface of the housing 100, and the IPA moves to the 6 o'clock direction and then again It may be discharged through the second hole 1020 formed on one surface of the housing 100. For example, IPA flowing into the IPA indirect temperature control device 10 of FIG. 2B is formed in the first hole 1010 on one surface of the housing 100, the porous tube 111, and the housing. It may have a movement path of the second cavity 1020 formed on the other surface of 100.

The first medium supply pipe 170 and the second medium supply pipe 180 have other voids except the first cavity 1010 and the second cavity 1020, and the third cavity 1030 and the fourth cavity, respectively. Connected to the cavity 1040, the heat transfer medium is supplied into the housing 100 from a cavity formed on one side of the housing 100, like the first cavity 1010 and the second cavity 1020, and is supplied to the housing 100 in the direction of one side or the other side. It can be discharged within the housing 100 through the hole formed in. In this regard, unlike IPA, the heat transfer medium may be supplied and discharged from a direction different from that of the IPA.

In this regard, the public connected to the first media supply pipe 170 may be referred to as the third public 1030, and the public connected to the second medium supply pipe 180 may be referred to as the fourth public 1040, but are limited thereto. It doesn't work.

Based on the fact that the first hole 1010 is formed on one side of the housing 100, the IPA indirect temperature control device 10 when the second hole 1020 is formed on one side of the housing 100 ) can be called an IPA return type, and when the second hole 1020 is formed on the other side of the housing 100, it can be called an IPA straight type. In addition, based on the fact that the third cavity 1030 is formed on one surface of the housing 100, the case where the fourth cavity 1040 is formed on one surface of the housing 100 is considered a heat transfer medium return type. , when the fourth cavity 1040 is formed on the other surface of the housing 100, the heat transfer medium may be referred to as a straight type.

In the case of the IPA return type, the IPA discharge speed is slower than the IPA straight type, so it is easy to control the temperature of the IPA. In the case of the IPA straight type, the heat exchange effect can be increased by increasing the flow rate and preventing eddy currents.

In this regard, in the case of the heat transfer medium return type, the first medium supply pipe 170 connected to the third cavity 1030 and the second medium supply pipe 180 connected to the second cavity 1020 are directly connected to each other. ·Can have an indirectly connected structure.

According to one implementation of the present application, the plurality of pores may additionally include a return pore 1011, but are not limited thereto. At this time, when the IPA indirect temperature control device 10 includes a return cavity 1011, an IPA intermediate portion is formed between the return cavity 1011 and the first cavity 1010 and the IPA passage part 110. (1012) may be located, and the IPA middle portion 1012 receives IPA from the first cavity 1010 and the return cavity 1011 and enters the porous pipe 111 of the IPA passage portion 110. The IPA can be supplied.

The return cavity 1011, like the first cavity 1010, is a cavity for supplying IPA inside the housing 100, and, like the first cavity 1010, is located on one side of the housing 100. You can.

According to one embodiment of the present application, the plurality of pores include a temperature sensor 140 that measures the temperature of the heat transfer medium in the housing 100, and/or an internal heater that heats the heat transfer medium in the housing 100. It may be connected to wealth, but is not limited to this.

The porous pipe 111 according to the present application may be composed of a plurality of tubules 112, but is represented as one unified pipe in FIGS. 1 to 5D. Since the diameter of the tubules 112 is small, IPA can be heated at a faster rate when passing IPA through the tubules 112 compared to passing IPA through a single large diameter pipe.

At least one porous tube 111 formed in the housing 100 may be formed so as not to contact each other. As will be described later, when the porous tubes 111 are in contact with each other, problems may occur in heat exchange between the IPA and the heat transfer medium passing through the porous tube 111, so the porous tubes 111 are attached to the porous tube fixing part ( 120) or a separator 191 may be spaced apart from each other.

The porous pipe 111 is formed between the first cavity 1010 and the second cavity 1020. At this time, as shown in FIGS. 2A and 2B, the first cavity 1010, the second cavity 1020, and the porous pipe 111 may be directly connected, but as shown in FIG. 5A, the first cavity 1010 and the porous pipe ( 111), an IPA middle portion 1012 may be formed between the two, and the porous tube 111 may extend from the receiving portion. At this time, the IPA middle portion 1012 is required when IPA is supplied from multiple pores, such as the first pore 1010, and IPA flows out between the IPA middle portion 1012 and the porous pipe 111. It doesn't work.

According to one embodiment of the present application, the porous tube 111 may have a coil-type structure, but is not limited thereto. When the porous pipe 111 connects the first hole 1010 and the second hole 1020 in a straight line, IPA passing through the porous pipe 111 may not be sufficiently heated.

According to one embodiment of the present application, an IPA storage unit 150 that passes through the porous tube 111 and is discharged from the IPA passage unit 110 may be further included, but is not limited thereto.

In this regard, the IPA discharged from the IPA passage part 110 is indirectly heated and discharged within the housing 100, and the IPA storage unit 150 is a place where the indirectly heated IPA is stored before use. It can mean.

As will be described later, there may be a plurality of IPA storage units 150 as needed, and the IPA stored in the plurality of IPA storage units 150 may all have different temperatures.

According to one embodiment of the present application, the IPA storage unit 150 may exist inside or outside the housing 100, but is not limited thereto.

When the IPA storage unit 150 is located inside the housing 100, it is advantageous for maintaining the temperature of the heated IPA, but may occupy a large volume. On the other hand, when the IPA storage unit 150 is present outside the housing 100, the distance between the IPA storage unit 150 and the IPA passing unit 110 becomes long, so the IPA storage unit 150 ) The temperature of the IPA to be stored may be lowered, but the housing 100 and the IPA storage unit 150 can be separated, so it can occupy less space.

To prevent this problem, the passage connecting the IPA storage unit 150 and the IPA passage unit 110 may be coated with an insulating material, but is not limited thereto.

In the process of indirectly heating the at least one porous tube 111 within the housing 100, as described above, the fluid supplied by the first hole 1010 to the fourth hole 1040 and the fluid The porous tube 111 may move during the heating process. In this process, if the porous tube 111 contacts the internal heater unit or contact between the porous tubes 111, problems may occur in heating the IPA passing through the porous tube 111. It is necessary to minimize the movement of the pipe 111.

According to one embodiment of the present application, the porous tube fixing part 120 includes a plurality of guide holes 1211 through which the porous tube 111 passes, and at least one guide panel in which the plurality of guide holes 1211 are formed. It may include (1210), and a perforated portion (1212) penetrating one side and the other side of the guide panel (1210), but is not limited thereto.

According to one embodiment of the present application, the at least one guide panel 1210 may have a structure in which the at least one guide panel 1210 is combined to share one side or has an overlapped structure to form one intersection, but is not limited thereto.

Referring to FIG. 3A, the porous pipe fixing part 120 has a rectangular shape, and two guide panels 1210 including a plurality of guide holes 1211 overlap so as to have intersecting lines, or 4 guide panels 1210 It may be that the dogs are combined to share one stool.

At this time, since the guide hole 1211 is through which the porous pipe 111 passes, heat transfer located on one side of the guide panel 1210 is performed when the guide panel 1210 includes only the guide hole 1211. Since heat exchange between the medium and the heat transfer medium located on the other side is not smooth, problems may occur in heating the IPA passing through the porous tube 111. To prevent this, the guide panel 1210 may include a perforated portion 1212 formed to penetrate one side and the other side.

According to one embodiment of the present application, the porous tube fixing part 120 includes a central panel 1220, a plurality of guide holes 1211 through which the porous tube 111 passes, and the plurality of guide holes 1211. It may include a plurality of guide panels 1210 formed, and a perforated portion 1212 penetrating one side and the other side of the central panel 1220 and the guide panel 1210, but is not limited thereto.

In this regard, the central panel 1220 refers to a panel in the form of a cylinder or polygonal pillar.

According to one embodiment of the present application, the guide panel 1210 may be formed on the surface of the central panel 1220, but is not limited thereto.

According to one embodiment of the present application, the radius of the central panel 1220 and the guide panel 1210 are adjusted so that the porous pipe 111 passing through the guide hole 1211 surrounds the circumference of the central panel 1220. The angle formed by one side of ) may not be vertical.

The guide panel 1210 and the porous tube 110 of the IPA passage portion 111 may be disposed on the surface of the center panel 1220 in FIG. 3b. For the sake of explanation, in the case of FIG. 3b, the center panel 1220 and the guide panel are (1210) is separated.

Referring to FIG. 3B, the porous tube fixing part 120 has a guide panel 1210 formed on the center panel 1220, and the guide hole 1211 formed in the guide panel 1210 is connected to the porous tube 111. It can have a structure that passes through it. In this regard, in order to minimize the temperature difference between one side and the other side of the central panel 1220 and the guide panel 1210, the two panels may include a perforated portion 1212.

According to one embodiment of the present application, the porous tube fixing part 120 includes a guide substrate 1230 formed by being attached to the upper or lower part of the housing 100, and a guide tube in contact with the porous tube 111 ( 1240), but is not limited thereto.

According to one embodiment of the present application, the guide tube 1240 is in contact with the outside of the porous tube 111, or is disposed between two areas of the porous tube 111 and is spaced apart from the porous tube 111. It may be, but is not limited to this.

At this time, the guide tube 1240 and the porous tube 111 may simply be in contact, may be fixed by an adhesive material, or may be fixed by a separate member after contact.

The guide tube 1240 is in contact with the outside of the porous tube 111 of the IPA passage part 110, or is spaced between the porous tubes 111 to prevent contact between the porous tubes 111. It may have been placed. Specifically, Figure 3C shows a structure in which the guide tube 1240 is arranged between the porous tubes 111, and Figure 3D shows the guide tube 1240 arranged around the inner circumference of the porous tube 111. At this time, in the case of FIGS. 3C and 3D, a guide tube 1240 identical to the pillar-shaped porous tube 111 formed at the 9 o'clock direction is hidden, but is omitted.

Referring to FIGS. 3C and 3D, the guide substrate 1230 may be formed at the top or bottom of the housing 100 and may be fixed to prevent movement of the guide tube 1240. In addition, the guide tube 1240 is formed inside or outside the porous tube 111 to suppress the flow of the porous tube 111, and is disposed adjacent to the outside of the porous tube 111. , is represented by a dotted line in Figures 3c and 3d.

That is, in Figure 3C, the guide tube 1240 is arranged spaced apart from the lower part of the porous tube 111, and in Figure 3D, the guide tube 1240 is arranged along the inner circumference of the porous tube 111. At this time, Figure 3d is a view of the housing 100 from the front, showing that the porous tube 111 is visible from the front and the guide tube 1240 is disposed inside.

3C, the porous tube 111 and the guide tube 1240 may have a structure in contact with each other, but are not limited thereto.

The guide tube 1240 may be made of a metal material such as Fe or Al, or may be a hard material that is not mechanically or chemically damaged by IPA, a heat transfer medium, or heat.

According to one embodiment of the present application, the IPA indirect temperature control device 10 prevents the IPA supplied to the at least one pipe from entering the space between the porous pipe 111 and the housing 100. The space between one end of the porous tube 111, the first hole 1010, and the housing 100 may be fused to each other, but is not limited thereto.

According to one embodiment of the present application, the IPA indirect temperature control device 10 is configured to prevent IPA discharged from the at least one pipe from being discharged into the space between the porous pipe 111 and the housing 100. The space between the other end of the porous tube 111, the second cavity 1020, and the housing 100 may be fused to each other, but is not limited thereto.

The at least one porous tube 111 is formed to penetrate the first cavity 1010 and the second cavity 1020, and IPA can be introduced into and discharged from the inside of the tube. In this regard, since loss of the IPA may occur if the IPA leaks into the space formed between the housing 100 and the porous tube 111, the housing 100, the first cavity 1010 (or The space formed between the second cavity 1020 and the porous pipe 111 can be fused together to suppress the outflow of IPA.

According to one embodiment of the present application, in the IPA indirect temperature control device 10, the IPA passage portion 110 includes one cap member receiving one end of the at least one porous tube 111; And it may further include a cap member on the other side in which the other end of the at least one porous tube 111 is accommodated, but is not limited thereto.

According to one embodiment of the present application, the porous tubes 111 may be fused together and deformed and attached so that there is no space between the porous tubes 111, but the present invention is not limited thereto.

According to one embodiment of the present application, the IPA indirect temperature control device 10 may include a plurality of temperature sensors 140, but is not limited thereto.

As mentioned earlier, the IPA indirect temperature control device 10 can control the temperature of the heat transfer medium by including a temperature sensor 140 in the housing 100. However, in addition to this, the temperature of the supplied or discharged IPA and the temperature of the supplied or discharged heat transfer medium can be measured.

According to one embodiment of the present application, the discharged IPA may be stored in different IPA storage units 150 according to arbitrary temperatures, but is not limited thereto.

IPA discharged from within the housing 100 has a higher temperature the closer it is to the housing 100, and a lower temperature the further away it is from the housing 100. That is, the temperature sensor 140 is placed on the IPA discharge passage between the IPA storage unit 150 and the housing 100, and when IPA of a certain temperature is detected, a portion of the IPA is sent to the separately formed IPA storage unit 150. By doing so, the heated IPA can be classified according to purpose and the temperature can be maintained.

In addition to this, the IPA indirect temperature control device 10 may further include one selected from the group consisting of a separator 191, an insulator 193, a level sensor 194, and combinations thereof. , but is not limited to this.

In this regard, additional parts for improving the heat exchange efficiency of the IPA indirect temperature control device 10, such as the separator 191, the insulation part 193, and the level sensor 194, may be referred to as the additional part 190. The additional part 190 refers to a concept that integrates the separator 191, the insulation part 193, and the level sensor 194 of FIGS. 5A to 5E.

According to one embodiment of the present application, a separator 191 formed between the medium temperature control unit and the IPA passage unit 110 may be further included, but is not limited thereto. In this regard, the separator 191 can perform the same role as the guide panel 1210 of the fixing part, and contacts the heater unit 130 formed inside the housing 100 with the porous tube 111. This is to prevent.

According to one embodiment of the present application, the separator 191 may include a perforated portion 1212, but is not limited thereto.

In addition, when the IPA storage unit 150 is present inside the housing 100, the IPA storage unit 150 may be present between the porous tube 111 and the second cavity 1020, and the IPA storage unit 150 may be present between the porous tube 111 and the second cavity 1020. An IPA storage separator 192 may be formed between the portion 150 and the porous tube 111. For example, a heat transfer medium and the IPA passage portion 110 may be disposed on the upper part of the IPA storage membrane 192, and the IPA storage portion 150 may be disposed on the lower portion of the IPA storage membrane 192. At least two penetration pipes 195 may be formed to penetrate the IPA storage separator 192. At this time, at least one of the through pipes 195 connects the IPA passage portion 110 and the IPA storage portion 150, and the remaining through pipes 195 transfer heat to the upper part of the IPA storage separator 192. The medium can be moved to the lower part of the IPA storage separator 192, and the area divided by the IPA storage separator 192 and where the IPA storage unit 150 is located can be called a storage separator. When the housing 100 includes an IPA storage unit 150 and an IPA storage separator 192 therein, IPA is transmitted through the first cavity 1010, the IPA passage unit 110, and the IPA storage unit 150. ), and the second cavity 1020, and the heat transfer medium can pass through the third cavity 1030, the housing 100, the storage separator, and the fourth cavity 1040. there is.

At this time, the IPA storage separator 192 may be formed with a porous portion 1212 instead of the through pipe 195 through which the heat transfer medium passes.

According to one embodiment of the present application, an insulating portion 193 formed on the outer surface of the housing 100 may be further included, but is not limited thereto.

Since the housing 100 accommodates a heat transfer medium and indirectly heats the IPA, the heat of the heat transfer medium must be supplied to the IPA without being discharged to the outside. For this purpose, an insulating portion 193 may be formed on the outer surface of the housing 100.

According to one embodiment of the present application, the IPA storage unit 150, the heat transfer medium tank 160, and/or the housing 100 may have a level sensor 194 attached, but are not limited thereto. no. The level sensor 194 is for controlling the amount or temperature of the IPA or heat transfer medium located in the IPA storage unit 150, the heat transfer medium tank 160, and the housing 100, and can be adjusted as necessary. The first public (1010) to the fourth public (1040) can be opened or closed.

Figure 5e is an example of the IPA indirect temperature control device 10, showing a top perspective view and a front perspective view. Referring to Figure 5e, a coil-shaped porous tube 111 is formed in the center of the housing 100, and a porous tube fixing part 120 and a temperature sensor ( 140) may be present, and the porous tubes 111 may be separated so as not to contact the coil-shaped internal heater unit.

According to one embodiment of the present application, the IPA indirect temperature control device 10 may include a pressure sensor, but is not limited thereto. The pressure sensor is for controlling the amount of IPA or heat transfer medium flowing into or out of the IPA indirect temperature control device 10.

The IPA indirect temperature control device 10 according to the present disclosure may have the structure depicted in FIGS. 5A to 5E, but the structure may be changed as needed.

In addition, a second aspect of the present disclosure provides a liquid indirect temperature control device, comprising: a housing (100) accommodating a heat transfer medium and including a plurality of pores on one side and the other side; a liquid passage portion penetrating through the pores of the housing 100 and including at least one porous tube 111 through which liquid passes; a medium temperature control unit that controls the temperature of the heat transfer medium; and a porous tube fixing part 120 for fixing the porous tube 111, wherein the hole is a first hole 1010 for supplying liquid to the liquid passing part, and discharging liquid from the liquid passing part. It relates to a liquid indirect temperature control device (not shown), which includes a second cavity 1020.

Regarding the liquid indirect temperature control device according to the second aspect of the present application, detailed description of parts overlapping with the first aspect of the present application has been omitted. However, even if the description is omitted, the content described in the first aspect of the present application is the same as the first aspect of the present application. The same can be applied to both sides.

The liquid indirect temperature control device uses another liquid instead of IPA in the IPA indirect temperature control device 10 according to the first aspect, except that another liquid passes instead of IPA. and its composition may be the same.

The liquid may include various chemicals other than IPA, distilled water, etc.

In addition, the third aspect of the present application includes an IPA supply unit 20; Heat transfer medium supply unit (30); At least one IPA indirect temperature control device (10) in communication with the IPA supply unit (20) and the heat transfer medium supply unit (30); and at least one chamber (40) in communication with the IPA indirect temperature control device (10) and supplied with the IPA; It is about an IPA supply system, including.

In this regard, the IPA indirect temperature control device 10 corresponds to the IPA indirect temperature control device 10 according to the first aspect and, if necessary, can be replaced with a liquid indirect temperature control device according to the second aspect.

According to one embodiment of the present application, the IPA supply system communicates with the IPA indirect temperature control device 10 and the at least one chamber 40, and receives IPA from the IPA indirect temperature control device 10. An IPA supply control unit 60 that supplies IPA to the at least one chamber 40 may be additionally included, but is not limited thereto.

According to one embodiment of the present application, the IPA supply system may include an IPA supply pipe 21, an IPA return pipe 22, and a heat transfer medium supply pipe 31. In this regard, the IPA supply pipe 21, the IPA return pipe 22, and the heat transfer medium supply pipe 31 may be protected by a heat insulating material or an insulating material.

In this regard, the IPA supply unit 20 and the heat transfer medium supply unit 30 may be present in the raw material supply unit 50, which may be present in the same device as the chamber 40 or in a separate device. The chamber 40 is located in a module such as an equipment front end module (EFEM), and the IPA indirect temperature control device 10 may be placed on the EFEM or the raw material supply unit 50.

Figures 6a and 6b are for an IPA supply system according to an embodiment of the present application. Specifically, Figure 6a shows a plurality of chambers 40 connected to each IPA indirect temperature control device 10, and the IPA indirect temperature control device 10 includes an IPA supply unit 20 and a heat transfer medium supply unit 30, The IPA supply pipe 21 and the heat transfer medium supply pipe 31 are connected, and the IPA is heated in the IPA indirect temperature control device 10 and supplied to the chamber 40 through the IPA supply pipe 21 and then supplied to the IPA return pipe. This is the structure recovered by (22). In addition, FIG. 6B is the same as FIG. 6A in that the IPA indirect temperature control device 10 is connected to the IPA supply unit 20 and the heat transfer medium supply unit 30, but the IPA indirect temperature control device 10 is connected to the IPA supply unit 20 and the heat transfer medium supply unit 30. It is not directly connected to the chamber 40. IPA and heat transfer medium that have passed through the IPA indirect temperature control device 10 of FIG. 6B are preferentially supplied to the IPA supply control unit 60, and then the IPA supply control unit 60 supplies the IPA to the chamber 40. can be supplied.

That is, in Figure 6a, the IPA indirect temperature control device 10 is located within the module, and the influence of the external environment can be minimized and IPA can be supplied to at least one chamber 40. On the other hand, Figure 6b shows that the IPA indirect temperature control device 10 exists in the raw material supply unit 50, and the heat transfer medium and IPA discharged from the IPA indirect temperature control device 10 move to the IPA supply control unit 60. After that, IPA can be supplied to the plurality of chambers 40.

The description of the present application described above is for illustrative purposes, and those skilled in the art will understand that the present application can be easily modified into other specific forms without changing its technical idea or essential features. Therefore, the embodiments described above should be understood in all respects as illustrative and not restrictive. For example, each component described as unitary may be implemented in a distributed manner, and similarly, components described as distributed may also be implemented in a combined form.

The scope of the present application is indicated by the claims described below rather than the detailed description above, and all changes or modified forms derived from the meaning and scope of the claims and their equivalent concepts should be construed as being included in the scope of the present application.

10: IPA indirect temperature control device
100: housing
1010: 1st public
1011: return public
1012: IPA middle part
1020: 2nd public
1030: 3rd public
1040: 4th public
110: IPA pass section
111: porous pipe
112: Customs
120: porous pipe fixture
1210: Guide panel
1211: Guide Hall
1212: Pagongbu
1220: Central panel
1230: Guide substrate
1240: Guide tube
130: heater unit
140: temperature sensor
150: IPA storage unit
160: heat transfer medium tank
170: first medium supply pipe
180: Second medium supply tube
190: Additional part
191: Separator
192: IPA storage separator
193: insulation part
194: level sensor
195: penetration pipe
20: IPA supply department
21: IPA supply pipe
22: IPA return pipe
30: Heat transfer medium supply part
31: Heat transfer medium supply pipe
40: chamber
50: Raw material supply department
60: supply control unit

Claims (15)

In the IPA indirect temperature control device,
a housing containing a heat transfer medium and including a plurality of pores on one side and the other side;
an IPA passage portion penetrating through a cavity of the housing and including at least one porous tube through which IPA passes;
a medium temperature control unit that controls the temperature of the heat transfer medium; and
A porous tube fixing part that fixes the porous tube;
Including,
The pore includes a first pore that supplies IPA to the IPA passage portion, and a second pore that discharges IPA from the IPA passage portion,
IPA indirect thermostat.
According to claim 1,
The medium temperature control unit includes a heating unit that controls the temperature of the heat transfer medium;
a first medium supply pipe part that communicates with the heating unit and the housing, receives the heat transfer medium from the heating unit, and supplies it to the housing; and
An IPA indirect temperature control device comprising a second medium supply pipe that communicates with the heating unit and the housing, receives the heat transfer medium from the housing, and supplies it to the heating unit.
According to claim 2,
The heating unit includes an internal heater unit accommodated inside the housing or an external heater unit formed outside the housing.
According to claim 2,
The medium temperature control unit communicates the first medium supply pipe part and the second medium supply pipe part, and further includes a heat transfer medium tank for receiving the heat transfer medium discharged from the housing.
According to claim 2,
The first medium supply pipe portion and the second medium supply pipe portion are in communication with a hole formed on one side or the other side of the housing.
According to claim 1,
The first hole is formed on one surface of the housing,
The second hole is formed on one side or the other side of the housing, IPA indirect temperature control device.
According to claim 1,
An IPA indirect temperature control device further comprising an IPA storage unit that passes through the porous tube and stores IPA discharged from the IPA passage unit.
According to claim 1,
The porous tube fixing unit includes a plurality of guide holes through which the porous tube passes, at least one guide panel in which the plurality of guide holes are formed, and a perforated portion penetrating one side and the other side of the guide panel,
IPA indirect temperature control device, wherein the at least one guide panel has a structure combined to share one side, or an overlapped structure to form one intersection.
According to claim 1,
The porous tube fixing unit includes a cylindrical panel, a plurality of guide holes through which the porous tube passes, a plurality of guide panels in which the plurality of guide holes are formed, and a corrugated hole penetrating one side and the other side of the cylindrical panel and the guide panel. Contains,
IPA indirect temperature control device, wherein the guide panel is formed on the surface of the cylindrical panel so that the porous tube passes through the plurality of guide holes.
According to claim 1,
The porous tube fixing unit includes a guide substrate formed by being attached to the upper or lower part of the housing, and a guide tube in contact with the porous tube.
According to claim 1,
IPA indirect temperature control device further comprising a separator formed between the medium temperature control control unit and the IPA passage unit.
According to claim 1,
IPA indirect temperature control device further comprising an insulating portion formed on the outer surface of the housing.
In the liquid indirect temperature control device,
a housing containing a heat transfer medium and including a plurality of pores on one side and the other side;
a liquid passage part penetrating a cavity of the housing and including at least one porous tube through which liquid passes;
a medium temperature control unit that controls the temperature of the heat transfer medium; and
A porous tube fixing part that fixes the porous tube;
Including,
The pore includes a first pore for supplying liquid to the liquid passage portion, and a second pore for discharging liquid from the liquid passage portion.
Liquid indirect thermostat.
IPA Supply Department;
Heat transfer medium supply section;
At least one IPA indirect temperature control device in communication with the IPA supply unit and the heat transfer medium supply unit; and
At least one chamber in communication with the IPA indirect temperature control device and supplied with the IPA;
Including,
IPA supply system.
According to clause 145,
The IPA supply system communicates the IPA indirect temperature control device and the at least one chamber,
An IPA supply system further comprising an IPA supply control unit that receives IPA from the IPA indirect temperature control device and supplies IPA to the at least one chamber.