KR20230135421A - Signal improvement system of tof-meis - Google Patents

Abstract

It is located at the front of the particle detector that detects ions scattered from the sample, and when power is supplied, it applies force in a direction that disrupts the direction in which the ions move, including a signal removal unit that prevents the ions from reaching the particle detector. A TOF-MEIS signal improvement system is disclosed.

Description

TOF-MEIS signal improvement system {SIGNAL IMPROVEMENT SYSTEM OF TOF-MEIS}

This technology relates to a signal improvement system that can remove unwanted signals generated in TOF-MEIS for analyzing samples.

TOF-MEIS stands for TIME OF FLIGHT-MEDIUM ENERGY ION SCATTERING. It measures the flight time of scattered particles (He) after ion beams in the form of broken (discontinuous) pulses in the medium energy region are incident on the sample at regular intervals (periods). This is a technology that analyzes the composition and thickness of a sample by measuring it and converting it into energy. In other words, it is a technology that analyzes the sample by measuring the time the scattered particles reach the particle detector and converting it into an energy spectrum based on this.

This technology has the problem of continuously measuring low-energy scattering particles during the repeated measurement process.

In theory, scattered ions are generated according to the order in which they are incident on the sample and reach the particle detector, but in reality, particles that collide with nuclear particles multiple times have a reduced speed and sometimes reach the particle detector late. As a result, particles (energy) with a relatively long flight time are detected.

This particle is a low-energy particle and is not suitable for MEIS analysis, so it is excluded from the analysis target.

Additionally, these particles increase BACK GROUND and distort data.

Due to the nature of TOF-MEIS, signals are collected with periodicity, and after one cycle is completed, the measurement of the next cycle is performed. However, the particles with the low energy mentioned above were not detected by the particle detector after one cycle was completed, but were detected by the particle detector during the next cycle, causing a problem of increased BACK GROUND in sample analysis.

Domestic patent registration number "10-1766838" 2017.08.23.

The purpose of the present invention according to one embodiment is to solve the above-mentioned problem.

That is, the purpose of the present invention according to one embodiment is to provide a TOF-MEIS signal improvement system that makes data analysis easy and efficient by efficiently securing effective analysis data in TOF-MEIS.

Additionally, the present invention according to one embodiment aims to reduce BACK GROUND noise.

The TOF-MEIS signal improvement system according to one embodiment is located at the front of the particle detector that detects ions scattered from the sample, and when power is supplied, a force is applied in a direction that disrupts the direction in which the ions move, so that the ions It includes a signal removal unit that prevents the particle from reaching the detector.

The signal removal unit is characterized as an electrode unit that generates voltage when power is supplied.

The electrode unit includes a first electrode unit and a second electrode unit disposed at a position symmetrical to the first electrode unit, and the first electrode unit and the second electrode unit generate non-identical electrodes.

It further includes a power supply unit that applies power to the signal removal unit.

The power supply unit applies power to operate the signal removal unit at a first time and turns off the power at a second time.

The power unit is characterized in that the operation of applying and cutting off power is repeated for a set period.

It is characterized in that a filter part that allows the ions to pass only within a set diameter is disposed in front of the particle detector.

The filter unit has a passage of a first diameter through which the ions pass and is disposed opposite to the particle detector, and a passage of a second diameter smaller than the first diameter, and is located within the first filter unit. It includes a second filter unit disposed opposite to the particle detector.

The present invention according to one embodiment can solve the above-mentioned problem by providing a signal removal unit that can change the direction of movement of ions by generating an electrode when power is applied between the particle detector and the sample.

In other words, by operating the signal removal unit at a specific time, ions scattered from the sample can be prevented from reaching the particle detector. Therefore, the BACK GROUND signal problem can be solved.

1 shows data that can be obtained through the present invention according to an embodiment.
Figure 2 shows the present invention according to the first embodiment.
Figure 3 shows the present invention according to a second embodiment.
Figure 4 is a front view of the first electrode unit and the second electrode unit of the present invention according to one embodiment.
Figure 5 shows the operation of the power supply unit of the present invention and data that can be obtained according to the operation of the power supply unit according to one embodiment.
Figure 6 shows the present invention according to a third embodiment.
Figure 7 shows the present invention according to a fourth embodiment.
Figure 8 shows the present invention according to the fifth embodiment.

Hereinafter, an embodiment of the present invention will be described in detail through exemplary drawings. However, this is not intended to limit the scope of the present invention.

When adding reference numerals to components in each drawing, it should be noted that identical components are given the same reference numerals as much as possible even if they are shown in different drawings. Additionally, in describing the present invention, if it is determined that a detailed description of a related known configuration or function may obscure the gist of the present invention, the detailed description will be omitted.

Additionally, the size or shape of components shown in the drawings may be exaggerated for clarity and convenience of explanation. In addition, terms specifically defined in consideration of the configuration and operation of the present invention are only for describing embodiments of the present invention and do not limit the scope of the present invention.

1 shows data that can be obtained through the present invention according to an embodiment.

The present invention can obtain data as shown in FIG. 1. That is, the present invention can prevent ions with low energy from being detected by preventing ions from reaching the particle detector (200 - shown in FIG. 2, which will be described later) after a specific time period. That is, when ions are detected with a period of 3 μs as shown in FIG. 1, BACK GROUND noise can be removed by preventing particles scattered after 3 μs from reaching the particle detector 200. Therefore, accurate data can be obtained.

Figure 2 shows the present invention according to the first embodiment.

The present invention according to the first embodiment may include an ion irradiator 100, a particle detector 200, a signal removal unit 300, and a power supply unit 400.

The ion irradiator 100 irradiates ions to the sample. The ion irradiator 100 is arranged to be spaced apart from the sample and irradiates ions to the sample for a preset time. The particle detector 200 detects particles scattered from the sample. A signal removal unit 300 may be disposed between the particle detector 200 and the sample, that is, at the front of the particle detector 200. The signal removal unit 300 may apply a force to the ions to change the direction of movement of the ions. The signal removal unit 300 may be the electrode unit 300, for example. That is, the signal removal unit 300 can form a + pole or - pole when power is supplied. The power supply unit 400 is connected to the signal removal unit 300 and operates the signal removal unit 300 at a specific time to prevent scattered ions from reaching the particle detector 200.

That is, for example, the power supply unit 400 does not operate from 0 to 3 ㎲, but operates from 3 ㎲ to 5 ㎲ to operate the electrode unit 300, thereby obtaining data as shown in FIG. 1. (For reference, it should be noted that the values in Figure 1 are examples and are applied as appropriate values depending on the analysis element)

Figure 3 shows the present invention according to a second embodiment.

The present invention according to the second embodiment may include an ion irradiator 100, a particle detector 200, a first electrode unit 310, a second electrode unit 320, and a power supply unit 400.

The ion irradiator 100 and the particle detector 200 of the present invention according to the second embodiment are the same as the ion irradiator 100 and the particle detector 200 of the present invention according to the first embodiment, and the description is omitted hereinafter. I will do it.

The present invention according to the second embodiment includes a first electrode unit 310 and a second electrode unit 320, each of which can be connected to the power supply unit 400.

The first electrode unit 310 and the second electrode unit 320 may be disposed opposite to the front end of the particle detector 200. The first electrode unit 310 and the second electrode unit 320 may form a + pole and a - pole, respectively, depending on the operation of the power supply unit 400. Therefore, by forming a field between the first electrode unit 310 and the second electrode unit 320, the direction of movement of ions moving between the first electrode unit 310 and the second electrode unit 320 can be changed. Here, the first electrode unit 310 and the second electrode unit 320 may be disposed to face each other, or as shown in FIG. 3, the first electrode unit 310 and the second electrode unit 320 may not face each other, but the first electrode unit 320 may be disposed between the sample and the particle detector 200. 310 and the second electrode unit 320 may be arranged sequentially.

That is, the first electrode unit 310 may be located closer to the ion irradiator 100 than the second electrode unit 320.

Here, the first electrode unit 310 and the second electrode unit 320 can obtain data as shown in FIG. 1 by operating according to the operation of the power supply unit 400 as in the first embodiment described above.

Figure 4 is a front view of the first electrode unit and the second electrode unit of the present invention according to one embodiment.

The first electrode unit 310 and the second electrode unit 320 may be formed in various shapes. For example, it may have a flat shape as shown in (a) of FIG. 4, or it may have a round shape as shown in (b) of FIG. 4. That is, the first electrode unit 310 and the second electrode unit 320 may have various shapes, their number may vary, and their arrangement may also vary.

That is, the first electrode unit 310 and the second electrode unit 320 may be arranged symmetrically or may be arranged side by side. Additionally, the first electrode unit 310 and the second electrode unit 320 may or may not be operated simultaneously.

Figure 5 shows the operation of the power supply unit of the present invention and data that can be obtained according to the operation of the power supply unit according to one embodiment.

The power supply unit 400 may be operated at a set cycle.

The power supply unit 400 may operate at the first time and not operate at the second time. For example, if the operation cycle of the power unit 400 is 5 ㎲, the first time may be 3 ㎲ to 5 ㎲, and the second time may be 0 to 3 ㎲. At the first time when the power supply unit 400 is operating, the direction of movement of ions scattered from the sample may change and may not reach the particle detector 200, and at the second time, they may not reach the particle detector 200. . Therefore, the density of ions detected by the particle detector 200 at the time corresponding to the first time may be very low, and a high ion density can be obtained at the second time. The power supply unit 400 may periodically repeat the first time and the second time to obtain accurate data.

Meanwhile, it is natural that the first time and the second time may change depending on the sample, the distance between the ion irradiator 100 and the sample, the distance between the sample and the particle detector 200, and the operation cycle of the ion irradiator 100. something to do.

Figure 6 shows the present invention according to a third embodiment.

The present invention according to the third embodiment further includes an ion irradiator 100, a particle detector 200, a first electrode unit 310, a second electrode unit 320, a power supply unit 400, and a filter unit 500. can do.

The ion irradiator 100, particle detector 200, first electrode unit 310, second electrode unit 320, and power supply unit 400 of the present invention according to the third embodiment are the same as those described above, so description will be given below. I will omit it.

Meanwhile, even if the first electrode unit 310 and the second electrode unit 320 are operated to change the direction of movement of the ions, elastic collision between other structures or ions causes the movement direction to be set again toward the particle detector 200. There are cases where it is detected by the particle detector 200. To prevent this, a filter unit 500 may be disposed.

The filter unit 500 may be disposed at the front of the particle detector 200. The filter unit 500 may be formed in a predetermined shape (for example, a circular hole, a cylindrical shape, or a cone shape). The filter unit 500 may be formed in a shape that has penetrating left and right sides with respect to FIG. 6 . Accordingly, the filter unit 500 can prevent ions whose movement direction has changed due to the first electrode unit 300 and the second electrode unit 320 from reaching the particle detector 200 again.

Figure 7 shows the present invention according to a fourth embodiment.

The present invention according to the fourth embodiment includes an ion irradiator 100, a particle detector 200, a first electrode unit 310, a second electrode unit 320, a power supply unit 400, a first filter unit 510, It may include a second filter unit 520.

The ion irradiator 100, particle detector 200, first electrode unit 310, second electrode unit 320, and power supply unit 400 of the present invention according to the fourth embodiment are the same as those described above, so description will be given below. I will omit it.

Meanwhile, even if the filter unit 500 of the present invention according to the third embodiment of FIG. 6 is disposed, ions whose movement direction is not sufficiently changed are drawn into the filter unit 500 and are not detected by the particle detector 200. You can.

To prevent this, as shown in FIG. 7, the filter unit 500 of the present invention according to the fourth embodiment may be composed of a first filter unit 510 and a second filter unit 520.

The first filter unit 510 may have a passage of a first diameter, and the second filter unit 520 may have a passage of a second diameter. Here, the first diameter may be larger than the second diameter. The second filter unit 520 may be located within the first filter unit 510. In this way, the first filter unit 510 and the second filter unit 520 are arranged so that ions whose movement direction changes due to the operation of the first electrode unit 310 and the second electrode unit 320 are transmitted to the particle detector 200. It may be more likely that you will not be able to reach .

For example, the movement direction is changed due to the operation of the first electrode unit 310 and the second electrode unit 320, but ions whose movement direction is not sufficiently changed may be moved into the first filter unit 510. However, even if it enters the first filter unit 510, ions must enter the passage of the second filter unit 520, but since there is a high possibility that this will not be possible, these ions may not be detected by the particle detector 200. In addition, even if the ions collide with the inside of the first filter unit 510 and bounce off and change direction again, the ions can be prevented from being detected by the particle detector 200 by the second filter unit 520.

Figure 8 shows the present invention according to the fifth embodiment.

The present invention according to the fifth embodiment includes an ion irradiator 100, a particle detector 200, a first electrode unit 310, a second electrode unit 320, a power supply unit 400, a first filter unit 510, It may include a second filter unit 520 and a third filter unit 530.

The ion irradiator 100, particle detector 200, first electrode unit 310, second electrode unit 320, and power supply unit 400 of the present invention according to the fifth embodiment are the same as those described above, so description will be given below. I will omit it.

On the other hand, even if the first filter unit 510 and the second filter unit 520 of the present invention according to the fourth embodiment of FIG. 7 are arranged, the direction of movement cannot be sufficiently changed or the ions reflected after impact are not transmitted to the particle detector. It can be detected at (200).

In order to prevent this, as shown in FIG. 8, the filter unit 500 of the present invention according to the fifth embodiment may be composed of a first filter unit 510, a second filter unit 520, and a third filter unit 530. .

The first filter unit 510 may be formed in a cylindrical shape, the second filter unit 520 may be formed in the shape of a circular plate, and the third filter unit 530 may be formed in a cone shape. .

The first filter unit 510 may be placed at the front of the particle detector 200, and the second filter unit 520 may be placed at the front of the first filter unit 510. In addition, the third filter unit 530 may be inserted and disposed at the rear end of the second filter unit 520 and the front end of the first filter unit 510. Accordingly, the movement direction is changed due to the operation of the first electrode unit 310 and the second electrode unit 320, but the ion whose movement direction is not sufficiently changed or the ion 1 moving in the wrong direction is filtered by the second filter unit 520. Ions that are primarily filtered by and pass through the second filter unit 520, but move in the wrong direction may be filtered by the third filter unit 530. Naturally, the first filter unit 510 can also filter ions that are moved in the wrong direction or bounced around.

Although the present invention has been shown and described in relation to specific embodiments, it is known in the art that various improvements and changes can be made to the present invention without departing from the technical spirit of the present invention as provided by the following claims. This will be self-evident to those with ordinary knowledge.

100: Ion irradiator
200: particle detector
300: Signal removal unit (electrode unit)
310: first electrode unit
320: second electrode unit
400: power unit
500: Filter part
510: first filter unit
520: Second filter unit
530: Third filter unit

Claims (8)

In the TOF-MEIS signal improvement system,
A signal removal unit is located at the front of the particle detector that detects ions scattered from the sample and, when power is supplied, applies force in a direction that disrupts the direction in which the ions move, thereby preventing the ions from reaching the particle detector. TOF-MEIS signal improvement system. According to paragraph 1,
TOF-MEIS signal improvement system, characterized in that the signal removal unit is an electrode unit that generates voltage when power is supplied. According to paragraph 2,
The electrode unit includes a first electrode unit and a second electrode unit disposed in a position symmetrical to the first electrode unit, and the TOF-characterized in that the first electrode unit and the second electrode unit generate non-identical electrodes. MEIS Signal Improvement System. According to paragraph 1,
TOF-MEIS signal improvement system further comprising a power supply unit that applies power to the signal removal unit. According to paragraph 4,
The TOF-MEIS signal improvement system, wherein the power unit applies power to operate the signal removal unit at the first time and turns off the power at the second time. According to clause 5,
A TOF-MEIS signal improvement system, wherein the power unit repeats the operation of applying and blocking power for a set period. According to paragraph 1,
A TOF-MEIS signal improvement system, characterized in that a filter part that passes the ions only within a set diameter is disposed in front of the particle detector. In clause 7,
The filter unit has a passage of a first diameter through which the ions pass and is disposed opposite to the particle detector, and a passage of a second diameter smaller than the first diameter, and is located within the first filter unit. A TOF-MEIS signal improvement system including a second filter unit disposed opposite the particle detector.