KR20230130415A - A Module Type Probe Unit Based on MEMS Beam - Google Patents

Abstract

The present invention relates to a probe unit, and more specifically, to insert and connect MEMS beams and insulating sheets to a support block in a modular manner so that the production of the unit and replacement of parts can be easily performed, and the connection between MEMS beams is facilitated. This relates to a MEMS beam-based modular probe unit that allows the unit to be manufactured by stacking insulating sheets and inserting them into a support block so that the gap between MEMS beams can be accurately formed and maintained.

Description

A modular probe unit based on MEMS Beam {A Module Type Probe Unit Based on MEMS Beam}

The present invention relates to a probe unit, and more specifically, to insert and connect MEMS beams and insulating sheets to a support block in a modular manner so that the production of the unit and replacement of parts can be easily performed, and the connection between MEMS beams is facilitated. This relates to a MEMS beam-based modular probe unit that allows the unit to be manufactured by stacking insulating sheets and inserting them into a support block so that the gap between MEMS beams can be accurately formed and maintained.

Display panels, which are generally used as substrates for electronic devices, are assembled and used in display devices such as LCD, LED, OLED, and MICRO LED, cameras, and mobile phones.

After manufacturing, these display panels essentially go through a process of inspecting whether each pixel is operating normally. After the panel is modularized, a board-to-board (b-to-b) connector is installed on the panel to connect to the main board, and each An electrical signal is transmitted to the connector to check whether each pixel is operating normally.

At this time, the panel is inspected through a probe unit with pins that contact the connector. The types of pins commonly used include the MEMS type using the semiconductor MEMS (Micro-Electro Mechanical System) process and the pogo pin using spring tension. POGO type made of materials and Blade type made of nickel or beryllium copper are used.

However, recently, as the clarity of the display panel has increased and the resolution has become higher, the density of pixels has increased, and as a result, the pitch between pins has become very narrow, increasing the demand for accuracy of pin contact with the connector.

However, in the case of the POGO type, it is generally impossible to respond to microscopic dimensions (less than 300㎛), and in the case of the blade type, there is a limit due to the lack of elasticity due to the material, so a MEMS type with excellent elasticity and electrical conductivity is required as shown in the patent document below. Probe units with pins are mainly used.

However, even in the case of MEMS type pins such as those in the patent document below, as the pitch between pins becomes extremely narrow, pin misses increase due to lack of positioning power, and there is a problem of short circuits between pins due to misalignment. .

(Patent Document) Registered Patent Publication No. 10-1008084 (registered on January 6, 2011) “Method and system for providing job ranking service”

The present invention was devised to solve the above problems,

The present invention makes it easy to manufacture units and replace parts by inserting and combining MEMS beams and insulating sheets into support blocks in a modular manner, and inserting them into the support blocks while stacking insulating sheets between MEMS beams. The purpose is to provide a probe unit that allows the unit to be manufactured in such a way that the gap between MEMS beams can be accurately formed and maintained.

The purpose of the present invention is to provide a probe unit that allows easy and economical production of a unit capable of responding to various pitches by adjusting the thickness and number of insulating sheets according to the spacing between the MEMS beams and inserting them between the MEMS beams. There is.

The present invention allows a pair of MEMS beams to be inserted and coupled to the support blocks on both sides, and ensures that the MEMS beams inserted into the support blocks on both sides are fixed by the central core block, so that the MEMS beams are fixed at the correct position and the fixed state is stable. The purpose is to provide a probe unit that can be maintained.

The present invention forms a fixed slit in the core block that matches the gap between the MEMS beams so that both MEMS beams are inserted into the fixed slit, so that the gap between the MEMS beams is maintained more stably and pin misses and short circuits can be prevented. The purpose is to provide a probe unit that allows

The purpose of the present invention is to provide a probe unit that minimizes shaking of the MEMS beam by inserting a beam stopper between the MEMS beam and the core block to block movement of the MEMS beam in both left and right directions.

In order to achieve the above-described object, the present invention is implemented by an embodiment having the following configuration.

According to one embodiment of the present invention, the probe unit according to the present invention is formed of a conductive material and is in contact with a connector and a PCB plate that provides an electrical signal, and includes a plurality of MEMS beams inserted at regular intervals; an insulating sheet inserted between the MEMS beams to maintain a constant gap between the MEMS beams and made of an insulating material; and support blocks formed on both sides of the MEMS beam and the insulating sheet to accommodate and support the MEMS beam and the insulating sheet, wherein the MEMS beam and the insulating sheet are alternately inserted into the support blocks and stacked.

According to another embodiment of the present invention, in the probe unit according to the present invention, the support block includes a receiving groove into which the MEMS beam and the insulating sheet are inserted, and the number of insulating sheets fits the gap between the MEMS beams. , It is characterized in that it is inserted between MEMS beams due to its thickness.

According to another embodiment of the present invention, in the probe unit according to the present invention, the support blocks are formed in pairs on both left and right sides and combined, and a MEMS beam and an insulating sheet are inserted symmetrically into each support block. It is characterized by

According to another embodiment of the present invention, in the probe unit according to the present invention, the MEMS beam has a bent portion that is bent into a 'ㄷ' shape and is inserted into a support block, and protrudes downward from the inner end of the bent portion. It is characterized in that it includes a PCB contact end in contact with the PCB plate, and a connector contact end that protrudes upward from the inner end of the bent portion and contacts the connector.

According to another embodiment of the present invention, the probe unit according to the present invention is inserted and coupled between the support blocks on both sides, and includes a core block into which each MEMS beam inserted into the support blocks on both sides is inserted and fixed. Do it as

According to another embodiment of the present invention, in the probe unit according to the present invention, fixing slits are formed on both sides of the core block into which both MEMS beams are inserted and fixed, and the fixing slits are spaced at regular intervals according to the spacing of the MEMS beams. It is characterized in that it includes a pinching hole that is invaded so as to be spaced apart.

According to another embodiment of the present invention, in the probe unit according to the present invention, the probe unit includes a beam stopper that is inserted between the MEMS beam and the core block to block movement of the MEMS beam in both left and right directions. Do it as

According to another embodiment of the present invention, in the probe unit according to the present invention, the MEMS beam includes a support end that protrudes on the bent portion and is in close contact with the beam stopper, and the core block is recessed on one side. It is characterized in that it includes an indentation groove into which the beam stopper is inserted.

According to another embodiment of the present invention, the probe unit according to the present invention is detachably coupled to the upper part of the support block and a guide block that guides the connector of the display module to find the correct contact position with the probe unit. It is characterized by

According to another embodiment of the present invention, in the probe unit according to the present invention, the guide block is characterized in that it includes a magnetic material exposed at the top.

The present invention can achieve the following effects by combining the above-mentioned embodiment with the configuration, combination, and use relationship described below.

The present invention makes it easy to manufacture units and replace parts by inserting and combining MEMS beams and insulating sheets into support blocks in a modular manner, and inserting them into the support blocks while stacking insulating sheets between MEMS beams. This has the effect of allowing the unit to be manufactured in such a way that the gap between the MEMS beams can be accurately formed and maintained.

The present invention has the effect of making it easy and economical to manufacture units that can respond to various pitches by adjusting the thickness and number of insulating sheets according to the spacing between the MEMS beams and inserting them between the MEMS beams.

The present invention allows a pair of MEMS beams to be inserted and coupled to the support blocks on both sides, and ensures that the MEMS beams inserted into the support blocks on both sides are fixed by the central core block, so that the MEMS beams are fixed at the correct position and the fixed state is stable. It has the effect of allowing it to be maintained.

The present invention forms a fixed slit in the core block that matches the gap between the MEMS beams so that both MEMS beams are inserted into the fixed slit, so that the gap between the MEMS beams is maintained more stably and pin misses and short circuits can be prevented. It has the effect of allowing it to happen.

The present invention has the effect of minimizing the shaking of the MEMS beam by inserting a beam stopper between the MEMS beam and the core block to block the movement of the MEMS beam in both left and right directions.

1 is a perspective view of a probe unit according to an embodiment of the present invention.
Figure 2 is an exploded perspective view of Figure 1
Figure 3 is a perspective view of the MEMS beam (a) and the insulating sheet (b)
Figure 4 is an exploded perspective view of the MEMS beam, insulating sheet, and support block.
Figure 5 is a perspective view showing the state in which the MEMS beam and insulation sheet are inserted into the support block.
Figure 6 is a perspective view of the core block
Figure 7 is an exploded perspective view of the core block and support block
Figure 8 is a perspective view showing a state in which the core block and the support block are combined
Figure 9 is an exploded perspective view of the beam stopper
Figure 10 is a perspective view showing the beam stopper inserted state
Figure 11 is a plan view of Figure 10
Figure 12 is a cross-sectional view taken along line AA of Figure 11
Figure 13 is an exploded perspective view of the guide block

Hereinafter, preferred embodiments of the MEMSbeam-based modular probe unit according to the present invention will be described in detail with reference to the attached drawings. In the following description of the present invention, if a detailed description of a known function or configuration is judged to unnecessarily obscure the gist of the present invention, the detailed description will be omitted. Throughout the specification, when a part "includes" a certain component, this means that it may further include other components rather than excluding other components, unless specifically stated to the contrary.

When a MEMSbeam-based modular probe unit according to an embodiment of the present invention is described with reference to FIGS. 1 to 13, the probe unit is a device that contacts the connector of the display panel module to check whether it is operating normally, and is conductive. MEMS beams (1) formed of a material and in contact with a PCB plate that provides connectors and electrical signals, and in which a plurality of MEMS beams are inserted at regular intervals; an insulating sheet (2) inserted between the MEMS beams (1) to maintain a constant gap between the MEMS beams (1) and made of an insulating material; Support blocks (3) formed on both sides of the MEMS beam (1) and the insulating sheet (2) to accommodate and support the MEMS beam (1) and the insulating sheet (2); A core block (4) which is inserted and coupled between the support blocks (3) on both sides, and into which each MEMS beam (1) inserted into the support blocks (3) on both sides is inserted and fixed; a beam stopper (5) inserted between the MEMS beam (1) and the core block (4) to block movement of the MEMS beam (1) in both left and right directions; It includes a guide block (6) that is detachably coupled to the upper part of the support block (3) and guides the connector of the display module to find the correct contact position with the probe unit.

In particular, the probe unit is formed in a module form to insert the MEMS beam (1) and the insulating sheet (2) into the support block (3), and the MEMS beam (1) and the insulating sheet (2) are inserted into the support block (3). By manufacturing by alternately inserting and stacking the MEMS beams 1 at regular intervals, it is possible to accurately and easily install the MEMS beams 1. In addition, even if damage occurs to the MEMS beam 1, only the damaged MEMS beam 1 can be separated and replaced, thereby extending the life of the probe unit and saving time and costs for management.

For reference, hereinafter, for convenience of explanation, the directions A, B, C, D, E, and F of FIG. 1 are assumed to be up, down, left, right, front and back directions, respectively.

The MEMS beam 1 is configured to apply an electrical signal for inspection by contacting a connector (not shown) of the display panel module, and is made of a thin plate-shaped conductive material. One end of the MEMS beam (1) is in contact with the connector, and the other end is in contact with a PCB plate (not shown) that provides an electrical signal, so that the electrical signal provided from the PCB plate is transmitted to the connector, so that each pixel of the display panel is normally operated. Allows you to check whether it is working or not. The MEMS beam 1 can be made of various conductive materials, but is preferably made by plating Au on NiCo or NiB material, and through this, it can have excellent elasticity and electrical conductivity. The MEMS beam (1) is inserted and fixed into the support block (3), and is inserted symmetrically into the support blocks (3) on both left and right sides, respectively, and a plurality of them are inserted at regular intervals so that they can contact each of the connectors. do. In addition, as previously explained in the background technology, as the clarity of the display increases and the resolution becomes higher, the MEMS beam (1) must also be able to respond to fine pitch. Accordingly, the gap between the MEMS beams (1) narrows, and the MEMS beam (1) ) In order to maintain a certain distance between the MEMS beams (1) and prevent short circuits from occurring when the MEMS beams (1) come in contact with each other, an insulating sheet (2) is inserted between the MEMS beams (1) so that they can be stacked. The MEMS beams (1) are alternately inserted into the later-described receiving grooves (31) of the support block (3) with the insulating sheets (2), and are provided with insulating sheets (2) having a thickness and number appropriate for the gap between the MEMS beams (1). ) are inserted and stacked so that a certain gap is maintained. The MEMS beam 1 may include a bent portion 11, a PCB contact end 13, and a connector contact end 15, as shown in FIG. 3(a).

The bent portion 11 is formed by bending in a 'ㄷ' shape and is inserted into the receiving groove 31 of the support block 3. An insulating sheet 2 is inserted between the bent portions 11 to maintain a certain gap, and a connector contact end 15 protruding upward and a PCB contact end 13 protruding downward are formed at the inner end. . Therefore, the bent portion 11 is bent by pressing the connector contact end 15 and the PCB contact end 13 when the MEMS beam 1 is pressed in contact with the PCB plate and the connector, and when the contact is released, the elastic force It returns to its original position. In addition, the connector contact end 15 and the PCB contact end 13 formed inside the bent portion 11 are inserted into the fixing slit 41, which will be described later, of the core block 4 and are maintained at a certain distance from the PCB plate. And even when pressed by the connector, a certain gap between the MEMS beams 1 can be maintained. Additionally, a support end 111 may be formed to additionally protrude from the upper end of the bent portion 11.

The support end 111 is formed to protrude inward from the top of the bent portion 11, and is supported by the beam stopper 5 as shown in FIG. 12. Therefore, the support end 111 can be supported according to the insertion of the beam stopper 5 to maintain the state in which the MEMS beam 1 is inserted into the receiving groove 31, and is stably fixed without shaking to both left and right sides. It can be done as much as possible.

The PCB contact end 13 is formed to protrude downward from the inner end of the bent part 11, and is in contact with the PCB plate so that the electrical signal provided from the PCB plate is transmitted to the bent part 11 and the connector contact end 15. ) to be transmitted to the connector. The PCB contact end 13 can be formed to be divided into a plurality of pieces, and through this, the contact resistance can be lowered as much as possible. The PCB contact end 13 is inserted into the fixing slit 41 of the core block 4, and through this, contact between the PCB contact ends 13 can be blocked and a certain gap can be maintained.

The connector contact end 15 is formed to protrude upward from the inner end of the bent portion 11, and can contact the connector of the display panel to transmit an electrical signal provided from the PCB board to the connector. The end of the connector contact end (15) is formed in a shape corresponding to the connector to ensure stable contact, and is inserted into the fixing slit (41) like the PCB contact end (13) to maintain a certain distance. .

The insulating sheet 2 is sandwiched between the MEMS beams 1 to maintain a constant distance between the MEMS beams 1, thereby preventing contact between the MEMS beams 1. The insulating sheet 2 may be formed in the form of a thin plate made of an insulating material, and is inserted into the receiving groove 31 of the support block 3 like the MEMS beam 1. The insulating sheets (2) can be inserted into the receiving grooves (31) alternately with the MEMS beams (1) and stacked according to the spacing between the MEMS beams (1). Therefore, the insulating sheet 2 can be laminated between the MEMS beams 1 with a thickness and number that matches the spacing between the MEMS beams 1 to keep the gap between the MEMS beams 1 constant, and various MEMS beams 1 can be formed. It is possible to manufacture a probe unit corresponding to the gap between the beams 1. Since the display panel may have various sharpness and image quality, and the spacing between connectors may be different accordingly, the spacing between the MEMS beams 1 must be able to be formed in various ways in order to inspect various display panels. Therefore, this probe unit can variously adjust the gap between the MEMS beams (1) by adjusting the thickness and number of the insulating sheets (2) inserted between the MEMS beams (1), and through this, the gap between the connectors of the display panel can be adjusted. The correct probe unit can be easily changed and manufactured.

The support block 3 is configured to accommodate the MEMS beams 1 and insulating sheets 2, and allows a plurality of MEMS beams 1 and insulating sheets 2 to be alternately stacked and inserted. The support block 3 may include a receiving groove 31 that is recessed to a certain depth, and the MEMS beam 1 and the insulating sheet 2 are inserted into the receiving groove 31. The bent portion 11 of the MEMS beam 1 is inserted into the receiving groove 31, and the insulating sheet 2 is inserted between the bent portions 11 so as to be in close contact to maintain a constant distance between the MEMS beams 1. Make sure it stays fixed. In addition, as the receiving groove 31 is fully filled with the MEMS beam 1 and the insulating sheet 2, the MEMS beam 1 can be fixed without moving in the forward and backward directions, and a plurality of MEMS beams can be installed in the receiving groove 31. (1) can be fixed at the exact position where they contact the connector. The support block 3 has a first block 3' and a second block 3'' formed on both left and right sides to accommodate the MEMS beam 1 and the insulating sheet 2, respectively. The block 3' and the second block 3'' are coupled while facing each other. In addition, a core block 4 is inserted between the first block 3' and the second block 3'' to fix the MEMS beams 1 on both sides. Therefore, the same receiving groove 31 is formed in each of the first block 3' and the second block 3'' so that the MEMS beam 1 and the insulating sheet 2 can be inserted, and the MEMS beam With (1) inserted facing each other, the first block (3') and the second block (3'') can be combined. In addition, an inlet groove 33 into which the core block 4 can be inserted may be formed in the first block 3' and/or the second block 3'', as shown in FIG. 7. It can also be formed only in the first block 3'.

The recess 33 is formed by being recessed to a certain depth inside the first block 3' and/or the second block 3'', into which the core block 4 is inserted and fixed. Therefore, with the core block 4 inserted into the lead-in groove 33, the first block 3' and the second block 3'' can be combined on both sides to form a unit, and the lead-in groove 33 (33) A receiving groove 31 is formed on the inside to accommodate the MEMS beam (1) and the insulating sheet (2).

The core block 4 is inserted between the first block 3' and the second block 3'' and is inserted into the first block 3' and the second block 3'', respectively. 1), the PCB contact end (13) and connector contact end (15) of both MEMS beams (1) are inserted and fixed. To this end, the core block 4 can have fixing slits 41 formed on both left and right sides into which the PCB contact end 13 and the connector contact end 15 are inserted.

The fixing slit 41 is configured to support the MEMS beams 1 on both sides by inserting them, and allows the PCB contact end 13 and the connector contact end 15 to be inserted. In particular, the fixing slit 41 is formed with a fitting groove 411 that is recessed to have the same distance as the gap between the MEMS beams 1, so that a plurality of PCB contact ends 13 and a connector are formed in the fitting groove 411. The contact ends 15 are each inserted and supported. Therefore, the fixing slit 41 blocks contact between the PCB contact end 13 and the connector contact end 15 while maintaining a certain gap, so that the connector contact end 15 can contact the connector at the correct position. While doing so, it is possible to prevent the occurrence of a short circuit through contact between the MEMS beams 1. Additionally, as shown in FIG. 6, the fixing slit 41 may include recessed grooves 413 that are recessed inward at a certain depth from the upper portions of both sides. As shown in FIGS. 9 to 12, the beam stopper 5 can be inserted into the depression groove 413 to be supported, and the beam stopper 5 inserted into the depression groove 413 is the MEMS beam (1). Press the support end 111 to support it to prevent the MEMS beam 1 from shaking in both left and right directions.

In addition, the core block 4 may include a seating groove 43 that is recessed to a certain depth at the top, and a magnetic material 61, which will be described later, of the guide block 6 is inserted into the seating groove 43 and fixed thereto. It can be done as much as possible.

The beam stopper 5 is inserted between the MEMS beam 1 and the core block 4 to limit the left and right movement of the MEMS beam 1. As shown in FIGS. 9 to 12, the MEMS beam (5) is inserted between the MEMS beam 1 and the core block 4. It is inserted between the support end 111 and the core block 4 of 1). The beam stopper (5) is an indentation groove of the core block (4) when the MEMS beam (1) inserted into the first block (3') and the second block (3'') is inserted into the core block (4). It is inserted into (413) so that it can be supported on the support end 111 of the MEMS beam (1). The beam stopper (5) is inserted into the recessed grooves (413) on both sides of the core block (4) to limit the left and right movement of the membs beams (1) on both sides. Therefore, the beam stopper 5 can block the left-right shaking of the MEMS beam 1 and allow the connector contact end 15 to contact the connector at the correct position.

The guide block 6 is coupled to the upper side of the support block 3 and may be formed to cover the upper side of the core block 4. Preferably, the guide block 6 can be detachably coupled to the support block 3, and through this, even when replacing the MEMS beam 1, etc., the guide block 6 can be opened to prevent damage to the MEMS beam (1). 1) can be easily replaced. In addition, the guide block 6 can be formed so that the magnetic material 61 is exposed upward, and through this, the connector of the display module can be guided to find an accurate contact position with the probe unit. The guide block 6 may have an insertion hole 63 through which the magnetic material 61 is inserted to expose the magnetic material 61 upward, and the magnetic material 61 inserted into the insertion hole 63 may be formed through the guide block 6. It can be inserted into the seating groove 43 of the core block 4 and fixed.

In the above, the applicant has described various embodiments of the present invention, but such embodiments are only embodiments that embody the technical idea of the present invention, and any changes or modifications are not permitted in the present invention as long as they embody the technical idea of the present invention. It should be interpreted as falling within the scope of.

1: Memsbeam 11: Bend part
111: support end 13: PCB contact end
15: Connector contact end 2: Insulating sheet
3: Support block 3': 1st block
3'': 2nd block 31: receiving groove
33: Inlet groove 4: Core block
41: fixed slit 411: insertion groove
413: recessed groove 43: seating groove
5: Beam stopper 6: Guide block
61: magnetic material 63: insertion hole

Claims (10)

In the probe unit that contacts the connector of the display panel module to check whether it is operating normally,
MEMS beams formed of a conductive material and in contact with a connector and a PCB board that provides electrical signals, and in which a plurality of MEMS beams are inserted at regular intervals;
an insulating sheet inserted between the MEMS beams to maintain a constant gap between the MEMS beams and made of an insulating material;
It includes support blocks formed on both sides of the MEMS beam and the insulating sheet to accommodate and support the MEMS beam and the insulating sheet,
A probe unit characterized in that the MEMS beam and the insulating sheet are stacked while being alternately inserted into the support block. The method of claim 1, wherein the support block is
It includes a receiving groove into which the MEMS beam and insulating sheet are inserted,
The insulation sheet is,
A probe unit characterized in that it is inserted between the MEMS beams in a number and thickness that matches the gap between the MEMS beams. The method of claim 1, wherein the support block is
A probe unit characterized in that a pair is formed and combined on both left and right sides, and a MEMS beam and an insulating sheet are inserted symmetrically into each support block. The method of claim 3, wherein the Memsbeam
A bent part bent into a 'ㄷ' shape and inserted into the support block, a PCB contact end that protrudes downward from the inner end of the bent part and contacts the PCB plate, and a PCB contact end that protrudes upward from the inner end of the bent part and contacts the connector. A probe unit comprising a connector contact end. The method of claim 4, wherein the probe unit
A probe unit comprising a core block that is inserted and coupled between the support blocks on both sides, and in which each MEMS beam inserted into the support blocks on both sides is inserted and fixed. The method of claim 5, wherein the core block is
Fixing slits are formed on both sides into which the two MEMS beams are inserted and fixed.
The fixed slit is a probe unit characterized in that it includes inserts that are recessed at regular intervals in accordance with the spacing of the MEMS beams. The method of claim 5, wherein the probe unit
A probe unit comprising a beam stopper inserted between the MEMS beam and the core block to block movement of the MEMS beam in both left and right directions. The method of claim 7, wherein the Memsbeam
It includes a support end that protrudes from the bent portion and is in close contact with the beam stopper,
The probe unit is characterized in that the core block includes a recessed groove formed on one side into which the beam stopper is inserted. The method of claim 1, wherein the probe unit
A probe unit comprising a guide block that is detachably coupled to the upper part of the support block and guides the connector of the display module to find an accurate contact position with the probe unit. The method of claim 9, wherein the guide block is
A probe unit comprising a magnetic material exposed at the top.

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