KR20230119762A - Turbo molecular pump - Google Patents

Abstract

The present invention relates to a turbo molecular pump, and more particularly, to a turbo molecular pump capable of improving assembly efficiency and convenience by configuring a plurality of stators and spacers as a single module.

Description

Turbo molecular pump {Turbo molecular pump}

The present invention relates to a turbo molecular pump, and more particularly, to a turbo molecular pump capable of improving assembly efficiency and convenience by configuring a plurality of stators and spacers as a single module.

The turbo molecular pump is a vacuum pump device used for high vacuum and high-speed exhaust in various manufacturing industries by rotating multi-stage rotor blades at high speed.

The turbo molecular pump has a structure in which a rotor rotates at high speed inside a case having an intake port and an exhaust port. The stator is installed in multiple stages inside the case, and on the other hand, rotating blades are radially provided in the rotor, and the rotating blades are installed in multiple stages.

In this structure, when the rotor rotates at high speed, gas is drawn into the intake port by the action of the rotating blades and the stator, and is exhausted through the exhaust port.

The turbo molecular pump includes a turbo part including rotating blades and a stator from an intake port to an exhaust port, and a drag part including a screw groove passage downstream of the turbo part.

On the other hand, the conventional stator necessarily requires a spacer for each stage for fixation in the case. That is, when assembling stators step by step, spacers are disposed between adjacent stators. The spacer performs a function of spaced apart stators for each stage at a predetermined interval and maintaining a distance from the end of the rotating blade. As described above, the number of parts inevitably increases due to the multiple stages of stators and spacers, and as a result, minute differences in steps may occur due to tolerances for each part.

In addition, when the pump is operated, there is only restraint in the height direction without directly fixing the outer ring of the stator, so fine slippage may occur, and there are many externally similar parts during assembly, making it difficult to distinguish the exact location and requiring a lot of man-hours.

An object of the present invention is to provide a turbo molecular pump capable of improving assembly efficiency and convenience by configuring a plurality of stators and spacers as a single module.

In addition, the present invention is to fix the stator and the spacer with a binding member such as a pin to prevent collision between the rotor and the stator due to vibration, and to solve the problem of providing a turbo molecular pump capable of preventing slipping between parts. make it a task

In addition, an object of the present invention is to provide a turbo molecular pump capable of easily distinguishing left and right and upper/lower surfaces of a stator composed of a plurality of divided pieces.

In order to solve the above problems, according to one aspect of the present invention, a case having an inlet and an exhaust port, a rotating shaft disposed in the case, a rotor unit supported by the rotating shaft and including a plurality of stages of rotating blades along the axial direction of the rotating shaft. , Arranged between two adjacent rotary blades along the axial direction of the rotary shaft, and a stator divided into a plurality of first divided pieces along the rotational direction of the rotary shaft, disposed between two adjacent stators along the axial direction of the rotary shaft It includes a spacer divided into a plurality of second divided pieces along the rotational direction of the rotation shaft, and a binding member for binding adjacent stators and spacers along the axial direction of the rotation shaft, wherein the first divided piece has a binding member inserted. It has one or more first holes, and the second split piece has one or more second holes into which a binding member is inserted.

As described above, the turbo molecular pump related to at least one embodiment of the present invention has the following effects.

By configuring a plurality of stators and spacers as a single module through a binding member such as a pin, assembly efficiency and convenience can be improved.

In addition, by fixing the stator and the spacer together with a binding member, collision between the rotor unit and the stator due to vibration can be prevented, and slipping between parts can be prevented.

In addition, since it is easy to distinguish the left and right sides and upper/lower surfaces of a stator composed of a plurality of divided pieces, assembly efficiency can be improved.

1 is a schematic diagram showing a turbo molecular pump related to an embodiment of the present invention.
2 is a plan view of a stator composed of two divided pieces.
3 is a perspective view showing a state in which stators and spacers are stacked.
4 and 5 are schematic cross-sectional views of a state in which stators and spacers are stacked.
Fig. 6 is a plan view showing a divided piece of the stator.
Fig. 7 is a plan view showing a partial region of a divided piece of the stator.

Hereinafter, a turbo molecular pump according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

In addition, regardless of the reference numerals, the same or corresponding components are assigned the same or similar reference numerals, and duplicate descriptions thereof will be omitted. For convenience of description, the size and shape of each component shown is exaggerated or reduced. It can be.

1 is a schematic diagram showing a turbo molecular pump 1 related to an embodiment of the present invention, FIG. 2 is a plan view of a stator composed of two divided pieces, and FIG. 3 is a perspective view showing a state in which a stator and a spacer are stacked. , FIGS. 4 and 5 are schematic cross-sectional views of a state in which stators and spacers are stacked.

The turbo molecular pump according to this document may be installed in, for example, a semiconductor or display manufacturing apparatus, and may be used when discharging a process gas from a vacuum chamber.

Referring to FIG. 1 , the turbo molecular pump 1 includes a case 10 having an intake port 11 and an exhaust port 12 and a rotating shaft 20 disposed in the case. The case 10 constitutes an external body of the turbo molecular pump 1 and may have a substantially cylindrical shape. In addition, the case 10 may have a structure in which a plurality of housings, for example, two or more housings 13 and 14 are assembled.

In addition, a gas transport unit for transporting gas molecules is provided inside the case 10 to exhaust gas molecules, and the gas transport unit includes a turbo unit T and a drag unit D. The turbo unit T includes rotating blades 31 to 37 rotatably supported by an axis and a stator 40 fixed in the case 10 .

Referring to FIG. 1, the turbo molecular pump 1 includes rotating blades 31 to 37 and stators 40: 41 to 47, and the turbo molecular pump 1 includes a turbo unit ( T), and an exhaust drag part D disposed downstream of the turbo part T along the exhaust direction of the gas molecules and exhausting the gas molecules through the screw groove passage part 50.

In addition, the turbo part (T) is supported on the rotating shaft 20, and the rotor unit 30 including a plurality of stages of rotating blades 31 to 37 along the axial direction (y-axis direction) of the rotating shaft 20 include Each of the plurality of stages of rotating blades extends along the radial direction (x-axis direction) with respect to the rotating shaft 20 .

In addition, the stator 40 includes a ring-shaped inner ring 410, an outer ring 430 disposed concentrically with the inner ring 410 and having a larger diameter than the inner ring 410, and the inner ring 410 and the outer ring 430. It may include a plurality of fixed blades 420 to connect. In addition, the stator 40 is composed of a plurality of stages along the axial direction (y-axis direction) of the rotating shaft 20, and each is positioned between two adjacent rotating blades along the axial direction (y-axis direction) of the rotating shaft 20. will be located That is, along the axial direction (y-axis direction) of the rotating shaft 20, the rotating blade, the stator, the rotating blade, and the stator may be sequentially arranged. 1 shows a case where a total of seven stages of rotating blades 31 to 37 and stators 41 to 47 are disposed, the present invention is not limited thereto.

In addition, the turbo unit T includes a spacer 90 arranged to maintain a gap between two adjacent stators along the axial direction (y-axis direction) of the rotation shaft 20 .

In addition, the turbo unit T may further include guides 900 and 901 that surround the stator and the spacer together on the outside. The guide may have a hollow cylindrical shape. In addition, the plurality of guides may have a structure in which they are stacked along the axial direction of the rotation shaft. The guides 900 and 901 may be provided to surround a plurality of stators and a plurality of spacers disposed adjacent to each other along the axial direction (y-axis direction) of the rotation shaft 20 from the outside.

In addition, the case 10 of the turbo molecular pump 1 includes a first housing 13 surrounding the turbo part T and a second housing surrounding the drag part D and equipped with an exhaust pipe 80. (14) included. In addition, the turbo molecular pump 1 includes a guide spacer 60 disposed between the first and second housings 13 and 14 on which the turbo unit T is seated.

Referring to FIG. 4 , the first housing 13 may have a first insertion groove 13a into which a portion of the uppermost guide 900 is inserted along the axial direction of the rotation shaft 20 . The first insertion groove 13a may be formed by having an inner circumferential surface of the first housing 13 having a stepped structure. Accordingly, the alignment position of the uppermost guide 900 along the axial direction of the rotation shaft 20 may be determined by the first insertion groove 13a of the first housing 13 .

Referring to FIG. 4 , a partial region of the lowermost guide 901 along the axial direction of the rotating shaft 20 may be inserted into the guide spacer 60 and the position may be fixed. That is, the guide spacer 60 may have a second insertion groove 60a into which a partial area of the lowermost guide 901 is inserted along the axial direction of the rotation shaft 20 . Accordingly, the alignment position of the lowermost guide 901 along the axial direction of the rotation shaft 20 may be determined by the second insertion groove 60a of the guide spacer 60 . In addition, the lowermost spacer 90 may be seated on the guide spacer 60 along the axial direction of the rotation shaft 20 .

The turbo molecular pump 1 includes an exhaust pipe 12 connected to the drag unit D and a buffer chamber 100 connected to allow fluid movement with a connection passage connecting the turbo unit T and the drag unit D. .

The buffer chamber 100 is disposed so that at least some of the gas molecules that have passed through the turbo part T are introduced into the buffer chamber 100 before being introduced into the drag part D. That is, the buffer chamber 100 is provided on a connection passage between the turbo part T and the drag part D, and prevents the pressure between the turbo part and the drag part from temporarily increasing due to the process gas flow rate load. can do. That is, in the present invention, when the pump is combined with other mechanisms such as the turbo part (T) and the drag part (D), a buffer chamber for buffering the area in order to relieve the momentary high pressure in the area where the rotation mechanism is changed. (100) is provided.

The connection passage refers to a space between an area below the lowermost blade 37 of the rotary shaft 20 in the axial direction and an inlet of the screw groove passage part 50 .

In one embodiment, the buffer chamber 100 may be provided between the guide spacer 60 and the drag unit (D). Specifically, the buffer chamber 100 may be provided between the guide spacer 60 and the screw groove passage part 60 .

Referring to FIG. 1 , the turbo molecular pump 1 may include a bypass passage 110 connecting the buffer chamber 100 and the exhaust pipe 80 . The airflow introduced into the buffer chamber 100 may flow to the exhaust pipe 80 through the bypass passage 110 .

In addition, the turbo molecular pump 1 may include a check valve 110 disposed in the bypass passage 110 to allow only flow in a direction from the buffer chamber 100 toward the exhaust pipe 80 . The check valve 110 is for preventing reverse flow in the bypass flow path, and allows only flow in the direction from the buffer chamber 100 toward the exhaust pipe 80, and flows toward the buffer chamber 100 from the exhaust pipe 80 side. It does not allow directional flow.

In addition, a temperature controller 70 may be disposed between the guide spacer 60 and the second housing 14 in the turbo molecular pump 1 . In one embodiment, the temperature control device 70 is a device for cooling, and may be, for example, a water cooling tube.

In addition, in the turbo molecular pump 1, the rotor unit 30 is fixed to the rotating shaft 20 and rotates together, and the rotating shaft 20 may be rotated by a motor.

In particular, the turbo molecular pump 1 supports the rotor unit 100 in a non-contact manner with magnetic bearings when the rotor unit 100 rotates, and in a rotating state, two radial magnetic bearings disposed close to the outer circumferential surface of the rotating shaft 20 and It is supported in a non-contact state in a magnetic levitation state by a pair of axial magnetic bearings disposed above and below the flange portion integrally formed with the rotating shaft 20.

In addition, the turbo molecular pump 1 includes a touchdown bearing 200, which includes a radial magnetic bearing and an axial magnetic bearing with the rotary shaft 20 when the rotary shaft 20 stops and when the control is abnormal. It is a rolling bearing to protect it from contact damage.

The distance between the touchdown bearing 200 and the outer circumferential surface of the rotary shaft 20 is smaller than the distance between each magnetic bearing and the outer circumferential surface of the rotary shaft 20 . In this structure, in a state in which the rotating shaft 20 is rotationally supported by the magnetic bearing in a magnetic levitation state, the rotating shaft 20 maintains a non-contact state with respect to the touchdown bearing 200, but when the rotating shaft 20 is stopped , or when the control is abnormal due to the action of an external force, the rotating shaft 20 contacts the touchdown bearing 200 before contacting each magnetic bearing and is supported for rotation. The touchdown bearing 200 may be disposed at upper and lower ends of the rotation shaft in the axial direction, respectively.

In addition, the touchdown bearing 200 may include an inner ring provided to contact the rotation shaft 20 when the rotation shaft stops rotating or when control is abnormal, a plurality of balls supported by the inner ring, and an outer ring surrounding the balls. The inner wheel may be provided to perform the function of the rotating wheel. The balls are provided in plurality, and may include ferromagnetic balls (eg, stainless steel balls) and ceramic balls.

The touchdown bearing 200 may be disposed at upper and lower ends of the rotation shaft in the axial direction, respectively. In addition, it may include an upper housing 16 supporting the outer ring of the touch down bearing 200, and may include a magnetized member 300 inserted into the upper housing 16 and provided to pull the ball toward the outer ring. . The magnetized member 300 is a member processed to have a force to attract a magnetic material, and may include a permanent magnet. Also, reference numeral 17 denotes a lower housing coupled to the upper housing.

Referring to FIGS. 1 to 4 , the turbo molecular pump 1 is disposed between two adjacent rotating blades along the axial direction of the rotating shaft 20. It includes the stator 40 divided into one divided piece 40-1, 40-2. As described above, the stator 40 includes an inner race 410, an outer race 420, and a plurality of fixed blades 430 fixed between the inner race and the outer race. At this time, the inner ring has a ring shape having a predetermined diameter, and the outer ring has a ring shape having a larger diameter than the inner ring. The rotating shaft 20 passes through the inner ring.

The stator 40 may be divided into a plurality of first divided pieces 40-1 and 40-2 along the direction of rotation of the rotation shaft 20 in order to improve assembly, and as shown in FIG. , It can be divided into two first divided pieces 40-1 and 40-2 along the direction of rotation of the rotating shaft 20, and the two first divided pieces 40-1 and 40-2 have the same size. It may have a semicircular shape. At this time, the pair of first divided pieces 40-1 and 40-2 constitute one stator 40.

In addition, the turbo molecular pump 1 includes a plurality of stators 40: 41 to 47 to form a plurality of stages along the axial direction (y-axis direction) of the rotation shaft 20, from top to bottom with reference to FIG. The first to seventh stators 41 to 47 may be sequentially arranged in a direction toward . The first to seventh stators 41 to 47 each include an inner ring, an outer ring, and a fixed blade, and the diameter and number of fixed blades may vary for each stage. 1 shows an exemplary stator structure having 7 stages.

In addition, the turbo molecular pump 1 is disposed between two adjacent stators 41 to 47 along the axial direction of the rotation shaft and divides the spacer 90 into two second divided pieces along the rotation direction of the rotation shaft. include The spacer 90 is formed in a hollow ring shape, and maintains a gap between two adjacent stators in the direction of a rotation axis. The rotating shaft 20 passes through the hollow. The spacer 90 supports the outer rings of two adjacent stators, for example, the lower surface of the outer ring of the stator disposed above the spacer 90 and the upper surface of the outer ring of the stator disposed below the spacer 90 support in contact with

The spacer 90 may be divided into a plurality of second divided pieces 90-1 and 90-2 along the direction of rotation of the rotation shaft 20 in order to improve assembly, and as shown in FIG. , It can be divided into two second divided pieces 90-1 and 90-2 along the direction of rotation of the rotating shaft 20, and the two second divided pieces 90-1 and 90-2 have the same size. It may have a semicircular shape. At this time, the pair of second divided pieces 90 - 1 and 90 - 2 constitute one spacer 90 . The number of spacers 90 may be provided equal to the number of stators.

Referring to FIG. 3 , the turbo molecular pump 10 includes a binding member 410 for binding the stator 40 and the spacer 90 adjacent to each other along the axial direction of the rotating shaft 20 . The binding member 410 may include a pin.

3 and 5, the first divided pieces 40-1 and 40-2 have one or more first holes 401 and 402 into which the binding member 410 is inserted, and the second divided pieces 90 -1 and 90-2 may have one or more second holes 901 and 902 into which the binding member 410 is inserted.

In addition, the first holes 401 and 402 of the stator are formed in the outer race.

The binding member 410 may have a diameter less than or equal to that of the first holes 401 and 402 and the second holes 901 and 902, and may be assembled, for example, in a fit-fitting manner. The binding member is inserted into the first holes 401 and 402 and the second holes 901 and 902 together, and the first divided pieces 40-1 and 40-2 and the second divided pieces 90-1 and 90- 2) can be combined.

In the case 10, when the stator is disposed on the spacer, that is, when the first divided pieces 40-1 and 40-2 are seated on the second divided pieces 90-1 and 90-2, binding is performed. The positions of the first holes 401 and 402 and the second holes 901 and 902 are aligned so that the member 410 can pass therethrough. In addition, the diameters of the first holes 401 and 402 and the second holes 901 and 902 into which the single binding member 410 is inserted may be the same. Alternatively, the diameters of the first holes 401 and 402 and the second holes 901 and 902 may be different. For example, the diameters of the first holes 401 and 402 may be different from those of the second holes 901 and 902 ) may be larger or smaller than the diameter of

Referring to FIGS. 3 and 4 , the binding member 410 may be provided to bind one stator and one spacer together, or may be provided to bind a plurality of stators and a plurality of spacers together. For example, three spacers disposed between the fourth to seventh stators 44 to 47 and two adjacent stators and a spacer disposed below the seventh stator 47 may be provided to bind together. That is, by binding together the four stators 44 to 47 and the four spacers 90 along the axial direction of the rotation shaft, it can be assembled in the case 10 in a module form. In another embodiment, two spacers 90 disposed between the fourth to sixth stators 44 to 46 and two adjacent stators and the spacer 90 disposed under the sixth stator 46 are bound together. can be arranged to do so. That is, by binding together the three stators 44 to 46 and the three spacers 90 at the lower end along the axial direction of the rotation shaft, it can be assembled in the case 10 in a module form.

6 is a plan view showing a divided piece of the stator, and FIG. 7 is a plan view showing a partial area of the divided piece of the stator.

At least one of the diameter, number, and location of the first holes 401 and 402 provided in the plurality of first divided pieces 40-1 and 40-2 constituting the stator may be different from each other. For example, at least one of the diameter, number, and location of the first holes 401 and 402 provided in the pair of first split pieces 40-1 and 40-2 constituting the stator may be different from each other. According to this structure, it is possible to easily distinguish left/right split pieces according to the diameter, number, and position of the first holes 401 and 402 .

For example, referring to FIG. 2 , the positions of the first holes 401 and 402 respectively provided in the pair of first divided pieces 40-1 and 40-2 may be different, and referring to FIG. 5 , The diameters of the first holes 401 and 402 respectively provided in the pair of first divided pieces 40-1 and 40-2 may be different, and referring to FIG. 6, the pair of first divided pieces ( The number of first holes 401 and 402 respectively provided in 40-1 and 40-2 may be different.

Referring to FIG. 7 , a first mark 420 may be provided on one of the first divided pieces 40 - 1 of the plurality of first divided pieces constituting the stator 40 . The first mark 420 may be formed by surface treatment of a partial area of the outer ring, for example, it may be an embossed angle, and through this, the upper surface and the lower surface of the stator 40 may be visually distinguished.

Similar to the stator, one or more of the diameter, number, and position of the second holes respectively provided in the plurality of second divided pieces 90-1 and 90-2 constituting the spacer 90 may be different from each other. For example, at least one of the diameter, number, and position of the second holes respectively provided in the pair of second divided pieces 90 - 1 and 90 - 2 constituting the spacer 90 may be different from each other. Referring to FIG. 5 , the second holes 901 and 902 respectively provided in the pair of second divided pieces 90 - 1 and 90 - 2 constituting the spacer 90 may have different diameters.

Similarly, a second mark may be provided on one of the pair of second divided pieces constituting the spacer. The second mark may be formed by surface treatment of a partial region of the second divided piece, for example, it may be an embossed mark, and through this, the upper surface and the lower surface of the spacer 40 may be visually distinguished.

Referring to FIG. 4 , the turbo molecular pump 1 may include guides 900 and 901 adjacent to the rotation shaft 20 in the axial direction and surrounding the stator and the spacer bound together through a coupling member from the outside. there is. The guides 900 and 901 may have a cylindrical shape, and are disposed to surround edges (outer ring side) of the stator and the spacer.

In addition, the turbo molecular pump 1 includes a guide 901 that surrounds at least three stators 44 to 46 and at least three spacers adjacent to each other along the axial direction of the rotating shaft but bound together through a binding member, and at least three spacers. can include The guide 901 may have a cylindrical shape and is arranged to surround edges (outer ring side) of a plurality of stators and spacers.

Preferred embodiments of the present invention described above have been disclosed for illustrative purposes, and those skilled in the art having ordinary knowledge of the present invention will be able to make various modifications, changes, and additions within the spirit and scope of the present invention, and such modifications and changes and additions are intended to fall within the scope of the following claims.

1: turbo molecular pump
30: rotor part
40: stator
90: spacer

Claims (11)

A case having an inlet and an exhaust outlet;
a rotation shaft disposed within the case;
a rotor unit supported on the rotating shaft and including a plurality of stages of rotating blades along the axial direction of the rotating shaft;
a stator disposed between two adjacent rotary blades along the axial direction of the rotary shaft and divided into a plurality of first divided pieces along the rotational direction of the rotary shaft;
a spacer disposed between two adjacent stators along the axial direction of the rotation shaft and divided into a plurality of second divided pieces along the rotation direction of the rotation shaft; and
Includes a binding member for binding adjacent stators and spacers along the axial direction of the rotating shaft,
The first split piece has one or more first holes into which a binding member is inserted,
The second split piece has at least one second hole into which a binding member is inserted. According to claim 1,
The stator includes an inner race, an outer race, and a fixed blade fixed between the inner race and the outer race,
The first hole is formed in the outer ring of the turbo molecular pump. According to claim 1,
A turbo molecular pump that binds the first divided piece and the second divided piece together by inserting a binding member into the first hole and the second hole. According to claim 3,
A first hole and a second hole into which a single coupling member is inserted have the same diameter. According to claim 1,
The turbo molecular pump of claim 1 , wherein at least one of a diameter, number, and location of first holes provided in a pair of first divided pieces constituting the stator is different from each other. According to claim 1,
A turbo molecular pump in which a first mark is provided on one of a plurality of first divided pieces constituting a stator. According to claim 1,
The turbo molecular pump of claim 1 , wherein at least one of the diameter, number, and position of the second holes provided in the plurality of second divided pieces constituting the spacer is different from each other. According to claim 1,
A turbo molecular pump in which a second mark is provided on one of the plurality of second divided pieces constituting the spacer. According to claim 1,
A turbo molecular pump further comprising a guide that surrounds a stator and a spacer that are adjacent to each other along an axial direction of the rotation shaft but are bound through a coupling member, and the spacer is coupled from the outside. According to claim 1,
A turbo molecular pump further comprising a guide that surrounds at least three stators and at least three spacers adjacent to each other along an axial direction of the rotating shaft, but bound together through a coupling member, from an outer circumference thereof. According to claim 1,
The fastening member includes a pin turbo molecular pump.

Images