KR20230076403A - high impact dry ice spray nozzle apparatus and dry ice nozzle for cleaning - Google Patents

Abstract

A dry ice nozzle applied to a high-impact dry ice spray nozzle device for cleaning is disclosed. The dry ice nozzle includes a transfer pipe through which liquid carbon dioxide (CO ₂ ) is transferred; a hollow needle extending from the inside of the transport pipe to the outside past the front end of the transport pipe, and ejecting liquid carbon dioxide while adiabatically expanding to generate dry ice crystals; a blocking portion blocking the gap between the outer circumference of the hollow needle and the inner circumference of the transfer pipe; an inner nozzle tube disposed to receive the shear of the hollow needle and in which dry ice crystals grow and agglomerate to form dry ice agglomerated particles; and an external nozzle tube discharging dry ice agglomerated particles formed while passing through the internal nozzle tube to the outside.

Description

High impact dry ice spray nozzle apparatus and dry ice nozzle for cleaning

The present invention relates to a cleaning technology using carbon dioxide (CO ₂ ) dry ice, and more particularly, to a high-impact dry ice spraying nozzle device and dry ice nozzle for cleaning.

In the manufacturing process of the camera module or the like, foreign substances such as particles or organic materials attached to the camera module or the substrate are highly likely to be attached to the surface of the lens or the like through transfer. The unwanted adhesion of these contaminants adversely affects the pixels of the camera module. Also, if the conductor particles get between the wires formed on the surface of the semiconductor substrate. cause a short circuit In addition, the electrical contact area may be contaminated by organic matter and corrode, and, seriously, a case in which electricity is not conducted occurs. In addition, in the process using a mold, there is a possibility that the shape and size of the molded product may change due to accumulated contaminants in the mold. In addition, the deposit of contaminants in the painting and plating lines causes deterioration of painting or plating quality and causes defects.

In contrast, a conventional dry cleaning technique has been proposed in which foreign substances are removed by generating dry ice crystals and spraying fine dry ice including the crystals on the surface of an object. The prior art consists of adiabatic expansion of liquid carbon dioxide to produce dry ice crystals and applying it to the surface of an object to clean the surface of the object. However, in the prior art, since dry ice is applied to the surface of an object in a state where the dry ice is not sufficiently grown, the impact force on the object surface is very small, so it is difficult to expect a cleaning effect by the impact force of the dry ice compared to the amount of liquid carbon dioxide consumed. As an alternative to this, the use of dry ice pellets for cleaning has been considered, but it takes too long to prepare the dry ice pellets, and also the impact force by the dry ice pellets is excessively large, which may cause product damage. .

In addition, as semiconductor substrates, semiconductor molds, and detailed parts requiring painting and plating are miniaturized and enlarged overall, the area to be cleaned is very large, and the size of the nozzle length is large with multiple arrangements of general nozzles, so empty space It is difficult to achieve perfect cleaning, such as the occurrence of this, and simply arranging nozzles in parallel to make a wide nozzle, CO ₂ gas consumption is too large, resulting in poor economic efficiency.

Domestic Registration No. 10-0751041 US Patent No. 5125979 Domestic Registration No. 10-0756640

The problem to be solved by the present invention is to provide a high-impact dry ice spraying nozzle device and dry ice nozzle for cleaning with excellent economic efficiency.

A dry ice nozzle according to an aspect of the present invention includes a transfer pipe through which liquid carbon dioxide (CO ₂ ) is transported; a hollow needle extending from the inside of the transport pipe to the outside past the front end of the transport pipe, and ejecting liquid carbon dioxide while adiabatically expanding to generate dry ice crystals; a blocking portion blocking the gap between the outer circumference of the hollow needle and the inner circumference of the transfer pipe; an inner nozzle tube disposed to receive the shear of the hollow needle and in which dry ice crystals grow and agglomerate to form dry ice agglomerated particles; and an external nozzle tube discharging dry ice agglomerated particles formed while passing through the internal nozzle tube to the outside.

At the front end of the hollow needle, liquid carbon dioxide Alternatively, an inclined surface guiding the dry ice crystals to collide with the inner wall surface of the inner nozzle tube is formed, the inner nozzle tube is made of a metal or ceramic material, and the outer nozzle tube is made of a synthetic resin material.

The hollow interior of the outer nozzle tube includes a rear section accommodating the inner nozzle tube and a front section not accommodating the inner nozzle tube, and the rear end of the inner nozzle tube protrudes out beyond the rear end of the outer nozzle tube. .

The blocking part includes a viscoelastic tube adhered to the inner circumferential surface of the transfer pipe while being coupled to the outer circumferential surface of the hollow needle by a bonding material.

The dry ice nozzle includes a first bonding part formed to cover the outer circumferential surface of the hollow needle at the front end of the transfer pipe and fixing the hollow needle to the transfer pipe, and the inner nozzle tube and the inner nozzle tube at the rear end of the inner nozzle tube. A second bonding unit for fixing between the hollow needles is further included.

The outer nozzle tube is arranged to accommodate the inner nozzle tube inside in a state in which the rear end of the inner nozzle tube protrudes to the outside, and further includes a fixing unit fixing the outer nozzle tube to the inner nozzle tube and the transfer pipe. include

The fixing part includes a third bonding part applied to cover the first bonding part, the second bonding part, a part of the front part of the transfer pipe, and a part of the rear part of the external nozzle tube, and the third bonding part and the transfer pipe. and a fixing tube inserted to cover a portion of the front portion and a portion of the rear portion of the external nozzle tube, and engaged with the transfer tube and the external nozzle tube by press-fitting to prevent separation of the transfer tube and the external nozzle tube. .

Liquid carbon dioxide is maintained at room temperature and at a pressure of 50 bar to 70 bar. The hollow cross-sectional size of the conveying pipe must be sufficiently large compared to the hollow cross-sectional size of the hollow needle to prevent condensation from forming in the conveying pipe, etc., and according to one embodiment, the inner diameter of the conveying pipe is 500 μm or more, Advantageously, the inner diameter of the hollow needle is less than or equal to 200 μm. In addition, the inner nozzle tube is made of a metal tube so that dry ice crystals collide and agglomerate to grow, and the metal tube has a length of about 5 mm or more.

A high-impact dry ice spraying nozzle apparatus according to the present invention accelerates at least one of the above-described dry ice nozzles and agglomerated dry ice particles generated, grown, and discharged in the dry ice nozzle with a gas having a certain pressure or higher and ejecting them to the outside. contains nozzles.

The accelerating nozzle includes a nozzle body having a rear accelerating gas passage surrounding the circumference of the dry ice nozzle in a rear section of the dry ice nozzle, connected to a gas injection part and a liquid carbon dioxide injection part, and a front end of the nozzle body. It may include a nozzle head detachably coupled and formed with a front accelerator gas passage connected to the rear accelerator gas passage, and a fitting unit airtightly coupling the transfer pipe to the liquid carbon dioxide injection unit.

The fitting unit includes a bolt-type fitting body into which the transfer pipe is inserted, a female screw portion provided in the nozzle body so as to communicate with the liquid carbon dioxide injection unit, and having a female screw thread corresponding to a male screw thread formed in the fitting body; and a paring unit interposed between the body and the female screw unit and compressing and tightening the transfer pipe between the fitting body and the female screw unit as the fitting body and the female screw unit are fastened, wherein the paring unit comprises an inner circumference of the fitting body. and a cone-shaped front parlum that is in close contact with the outer circumference of the transfer pipe and a back paral that is pressed between the front paral and the female threaded portion to additionally compress the transfer pipe.

In the accelerating nozzle, a rear accelerating gas passage surrounding the periphery of the plurality of dry ice nozzles is formed in a rear section, and a gas injection part connected to the rear gas passage is connected to a transfer pipe of the plurality of dry ice nozzles. A nozzle body connected to the liquid carbon dioxide injection unit, detachably coupled to the front end of the nozzle body, and a front accelerator gas passage connected to the rear accelerator gas passage, and a plurality of injection holes formed to expose the front end of each dry ice nozzle. A nozzle head including a nozzle head, and a fitting unit for airtightly and tightly fitting the transfer tubes of the plurality of dry ice nozzles to the liquid carbon dioxide injection unit.

The fitting unit is installed on a plurality of fitting holes formed at the rear end of the nozzle body to correspond to the plurality of dry ice nozzles and to communicate with the liquid carbon dioxide injection part, and to an outer circumferential surface of the transfer pipe of each of the plurality of dry ice nozzles, A conical sealing fixture inserted into the fitting hole from the outside of the fitting hole, an O-ring inserted into the transfer pipe of each dry ice nozzle so as to be in close contact with the rear surface of the sealing fixture, and coupled to the liquid carbon dioxide injection unit, A fitting pressing part interposed between the nozzle body and the liquid carbon dioxide injecting part and pressurizing the O-ring and the sealing fixture into the fitting hole may be included.

The accelerating nozzle extends forward while detachably coupled to a nozzle body having a rear accelerating gas flow path surrounding a plurality of dry ice nozzles and a front end of the nozzle body, and is formed in the plurality of dry ice nozzles. It may include a nozzle extension tube having an intermediate accelerator gas passage through which dry ice condensation particles discharged after post-growth further grow, and a nozzle head having a front accelerator gas passage connected to the intermediate accelerator gas passage.

A plurality of dry ice nozzles may be arranged in a row within the accelerator nozzle, and the accelerator nozzle has a plate-shaped nozzle body having an accelerator gas flow path accommodating the plurality of dry ice nozzles in a rear section of the plurality of dry ice nozzles. and a nozzle head detachably coupled to a front end of the nozzle body and having a plurality of spray holes exposing the plurality of dry ice nozzles formed in a row.

High-impact dry ice spray nozzle device according to another aspect of the present invention is a long and soft transfer pipe through which liquid carbon dioxide (CO ₂ ) is transported, and extends from the inside of the transfer tube through the front end of the transfer tube to the outside, A hollow needle for generating dry ice crystals by spraying liquid carbon dioxide while adiabatically expanding, a blocking portion for blocking a gap between an outer circumference of the hollow needle and an inner circumference of the transfer pipe, and disposed to receive a front end of the hollow needle, A dry ice nozzle including an inner nozzle tube in which dry ice crystals grow and agglomerate to form dry ice agglomerated particles, and a soft outer nozzle tube which discharges the dry ice agglomerated particles formed while passing through the inner nozzle tube to the outside; A nozzle body having a rear gas acceleration passage connected to the acceleration nozzle gas injection unit and the liquid carbon dioxide injection unit, and a long intermediate gas acceleration passage having a direction variable connected to the rear gas acceleration passage when combined with the nozzle body A flexible nozzle extension tube in which the dry ice nozzle is accommodated in the intermediate gas accelerating passage; and a nozzle head formed at a front end of the flexible nozzle extension tube and having a front gas acceleration passage surrounding the front end of the dry ice nozzle.

The present invention minimizes the amount of liquid carbon dioxide consumed by discharging the supplied liquid carbon dioxide using a fine hollow needle, and the liquid carbon dioxide discharged through the fine hollow needle sufficiently grows and aggregates in the inner nozzle tube to form dry ice agglomerated particles. It can be formed, and by spraying the dry ice agglomerated particles grown and sufficiently large through the inner nozzle tube and the outer nozzle tube accommodating the same, not only prevents damage to the outer nozzle tube, but also the dry ice agglomerated particles As a result, the impact force can be maximized to perform cleaning of the target surface. The impact force can be controlled by adjusting the velocity of gas such as air or inert gas to the accelerating nozzle surrounding the dry ice nozzle. In addition, since the present invention uses a dry ice nozzle smaller than 2 mm, the dry ice nozzles can be freely arranged in various arrangements, and thus can be easily used as a wide nozzle for cleaning a large area without gaps. In addition, even when applied to a wide nozzle suitable for cleaning a large area, cleaning is possible using a wide nozzle or a nozzle with a uniform distribution even with a small amount of CO2 by maximizing impact force while minimizing CO2 consumption.

1 is a cross-sectional view showing a dry ice nozzle applied to a high-impact dry ice spray nozzle device for cleaning according to an embodiment of the present invention;
2 to 9 are views for explaining various embodiments of an impact dry ice spray nozzle apparatus to which the dry ice nozzle shown in FIG. 1 is applied.

Hereinafter, the present invention will be described with reference to the accompanying drawings. Note that any structure, material, step or feature of any embodiment disclosed herein may constitute another embodiment along with any structure, material, step or other feature of any other embodiment that is part of the invention. do. Note that the detailed description and related drawings do not limit or define the protection scope of the present invention. The protection scope of the present invention is defined by the claims.

Referring to FIG. 1 , a dry ice nozzle 100 applied to a high-impact dry ice spraying nozzle device for cleaning will be described.

As shown in FIG. 1 , the dry ice nozzle 100 is configured to adiabatically expand liquid carbon dioxide to generate fine dry ice crystals, grow the dry ice crystals to have a sufficient size and density, and discharge the dry ice crystals. In addition, the dry ice nozzle 100 cooperates with an accelerating nozzle 200 (see FIGS. 2 to 9 ) to be described below, and is configured to spray dry ice agglomerated particles having a sufficiently grown size on the surface of an object to be cleaned.

The dry ice nozzle 100 extends outside the transport pipe 110 through which liquid carbon dioxide (CO ₂ ) is transported and passes through the front end of the transport pipe 110 in the middle of the transport pipe 110, and A hollow needle 120 for generating dry ice crystals by spraying while adiabatically expanding, a blocking part 130 for closing the gap between the outer circumference of the hollow needle 120 and the inner circumference of the transfer pipe, and the hollow needle 120 ), and the dry ice crystals are grown and agglomerated to form dry ice agglomerated particles, and the dry ice agglomerated particles formed while passing through the internal nozzle tube 140 are sent to the outside. It includes an external nozzle tube 150 for discharging to. Here, a structure in which the inner nozzle tube 140 and the outer nozzle tube 150 are combined is defined as a nozzle tube.

The transfer pipe 110 is connected to the liquid carbon dioxide injection unit 250 of the accelerating nozzle 200 described below, and has a constant inner diameter and a constant outer diameter. The transfer pipe 110 may be formed of a flexible material.

The hollow needle 120 is configured to have an outer diameter smaller than the inner diameter of the transfer pipe 110 . In addition, the hollow needle 120 has a hollow with an inner diameter of less than 200 μm, both ends of which are open. The rear end of the hollow needle 120 is located in the middle of the transfer pipe 110 and the front end of the hollow needle 120 passes through the front end of the transfer pipe 110 and is located outside. The hollow needle 120 discharges the liquid carbon dioxide transported at a pressure higher than a predetermined pressure through the transfer pipe 110 to the outside, and the liquid carbon dioxide discharged through the front end of the hollow needle 120 adiabatically expands to dry Creates ice crystals or seeds. The hollow needle 120 is formed of metal, more preferably, SUS steel material. In addition, at the front end of the hollow needle 120, liquid carbon dioxide Alternatively, an inclined surface 122 is formed to guide dry ice crystals generated by the adiabatic expansion of liquid carbon dioxide in a direction to collide with the inner wall surface of the inner nozzle tube 140 .

The blocking part 130 is installed to close the gap between the outer circumference of the hollow needle 120 and the inner circumference of the transfer pipe 110 . In this embodiment, the blocking portion 130 is made of a tube made of a viscoelastic material, preferably, a urethane tube, which is inserted to fit the outer circumference of the hollow needle 120. In a state in which the urethane tube is inserted into the outer circumferential surface of the hollow needle 120, the urethane tube is coupled to the outer circumferential surface of the hollow needle 120 with a bonding material 131 such as, for example, epoxy to form the above-described blocking portion 130 It can be.

The inner nozzle tube 140 serves to protect the outer nozzle tube 150, which will be described later, from liquid carbon dioxide and dry ice crystals generated therefrom, and at the same time promotes the growth of dry ice crystals that proceed forward after generation. Shiki serves as a growth tube. To promote aggregation and growth of dry ice crystals and to protect the outer nozzle tube 150, the inner nozzle tube 140 is formed of a metal or ceramic material. Preferably, the inner nozzle tube 140 may be formed of SUS steel material. The front end of the hollow needle 120, more specifically, the front end having the inclined surface 122 is located in the middle of the hollow of the inner nozzle tube 140. Increasing the distance from the front end of the hollow needle 120 to the front end of the inner nozzle tube 140 may contribute to promoting growth and aggregation (agglomeration) of dry ice.

The outer nozzle tube 150 is formed of synthetic resin, more preferably PEEK (Poly Ether Ether Kelton) material, which has a significantly lower heat transfer coefficient than the metal constituting the inner nozzle tube 140, and the inner nozzle tube 150 is in the middle. The inner nozzle tube 140 is accommodated so that the front end of the tube 140 is positioned. At this time, the rear end of the aforementioned hollow needle 120 protrudes behind the rear end of the inner nozzle tube 140, and the rear end of the inner nozzle tube 140 protrudes behind the rear end of the outer nozzle tube 150. Accordingly, the hollow interior of the outer nozzle tube 150 includes a rear section accommodating the inner nozzle tube 140 and a front section not accommodating the inner nozzle tube 140 . And, the inner nozzle tube 140 is fixed within the outer nozzle tube 150 . The inner diameter of the outer nozzle tube 150 is preferably constant, and the outer diameter of the outer nozzle tube 150 gradually decreases to secure a space inside the nozzle head converging forward of the accelerating nozzle 200 described below. it is desirable

Liquid carbon dioxide exposed into the inner nozzle tube 140 through the front end of the hollow needle 120 adiabatically expands due to a sudden increase in cross-sectional area of the passage and a decrease in pressure to form sublimable dry ice crystals. In particular, the liquid carbon dioxide is mainly guided toward the inner wall surface of the inner nozzle tube 140 by the shear inclined surface 122 of the hollow needle 120 and collides therewith to generate dry ice crystals. The dry ice crystals sufficiently grow and agglomerate while traveling through the inner nozzle tube 140, and additional agglomeration further occurs in the outer nozzle tube 150. And, through the front end of the external exposure tube 150, the dry ice agglomerated particles (or bundles) whose volume and density have increased are discharged to the outside. Since the external nozzle tube 150 is surrounded by the accelerating nozzle 200 through which gas flows at a certain pressure or higher, the dry ice agglomerated particles discharged through the external nozzle tube 150 are affected by the pressure of the gas flowing through the accelerating nozzle 200. It is accelerated to a certain speed or higher and sprayed toward the external cleaning object.

In addition, the dry ice nozzle 100 is formed to cover the outer circumferential surface of the hollow needle 120 at the front end of the transfer pipe 110 to fix the hollow needle 120 to the transfer pipe 110. 1 further includes a bonding part 161 and a second bonding part 162 fixing between the inner nozzle tube 140 and the hollow needle 120 at the rear end of the inner nozzle tube 140 . The outer nozzle tube 150 is arranged to accommodate the inner nozzle tube 140 inside in a state where the rear end of the inner nozzle tube 140 protrudes to the outside through the rear. In addition, a fixing part 170 for fixing the outer nozzle tube 150 to the inner nozzle tube 140 and the transfer pipe 110 is further provided. At this time, the fixing part 170 covers the first bonding part 161 and the second bonding part 162, a part of the front part of the transfer pipe 110, and a part of the rear part of the external nozzle tube 150. It is inserted to cover the applied third bonding portion 171, a portion of the front portion of the third bonding portion 171 and the transfer pipe 110, and a portion of the rear portion of the external nozzle tube 150, by press-fitting. A fixing tube 172 engaged with the transfer pipe 110 and the external nozzle tube 150 by the formed concave-convex structure to prevent separation of the transfer tube 110 and the external nozzle tube 150 is included.

On the other hand, in the transfer pipe 110, the liquid carbon dioxide is maintained at a pressure of 50 bar to 70 bar at room temperature, the inner diameter of the transfer pipe is 500 μm or more, and the inner diameter of the hollow needle 120 is 200 μm or less , The inner nozzle tube 140 is made of a metal tube so that the dry ice crystals collide and the dry ice crystals grow and aggregate, and the metal tube preferably has a length of about 5 mm or more.

A brief description of a mechanism for forming dry ice agglomerated particles that can collide with the surface of a cleaning object with high impact using the dry ice nozzle 100 described above is as follows.

First, the liquid carbon dioxide transported through the transfer pipe 110 is injected into the inner nozzle tube 140 having a larger inner diameter through the hollow needle 120 having an inner diameter of less than 200 μm, thereby forming dry ice crystals or dry ice seeds ) is generated, and then the speed is slowed down while passing through the inner nozzle tube 140 and the outer nozzle tube 150, and growth occurs while the dry ice crystals are agglomerated. Dry ice condensation particles formed by the growth and aggregation of dry ice only grow to a predetermined size due to the limitation of the inner diameter of the external nozzle tube 150, and the grown dry ice agglomeration particles block the outlet of the external nozzle tube 150, thereby As it is forcibly ejected by pressure, dry ice agglomerated particles of a certain size are created. At this time, the inner nozzle tube 140 is preferably made of a metal tube to prevent damage to the outlet side due to friction with dry ice crystals or dry ice seeds continuously ejected through the hollow needle 120 and promote growth. . By preventing the dry ice crystals or seeds from directly contacting the outer nozzle tube 150 made of synthetic resin (particularly, PEEK) having a discharge port formed thereon, it is possible to prevent regeneration and damage of contamination.

As the dry ice nozzle 100, which makes dry ice using liquid carbon dioxide, is repeatedly subjected to room temperature and approximately -78 ° C. . Therefore, the present invention provides bonding parts for fixing between the fixing part 170 of the above-described configuration and the components for separation between each component and consequent separation prevention. In addition, the fixing part 170 and the like are configured to minimize deformation due to temperature change.

In addition, since the dry ice nozzle 100 described above has a remarkably small diameter of less than 2 mm, it is possible to freely arrange and densely arrange the nozzle despite using a high-pressure liquid, and to have a nozzle configuration without empty space.

In particular, the dry ice nozzle 100 described above can create high-impact dry ice agglomerated particles with a minute consumption of liquid carbon dioxide.

A manufacturing method of the dry gas nozzle 100 is exemplarily described as follows.

First, the transfer pipe 110 and the hollow needle 120 are prepared. The transfer pipe 110 may have flexibility so as to be bendable. A blocking portion 130 made of a urethane tube is fixed to the outer circumferential surface of the hollow needle 120 by means of epoxy 131 at a rear portion of the hollow needle 120 . Next, the hollow needle 120 is inserted into a partial front section of the transfer pipe 110 together with the blocking part 130 . Accordingly, a rear part of the hollow needle 120 is accommodated in the transfer pipe 110 and a front part of the transfer pipe 110 passes through the front end of the transfer pipe 110 and comes out, and the blocking portion ( 130) closes the gap between the inner circumferential surface of the hollow needle 12 and the transfer pipe 110. In addition, a first bonding portion 161 made of an epoxy material is formed to cover the outer circumferential surface of the hollow needle 120 at the front end of the transfer pipe 110 to attach the hollow needle 120 to the transfer pipe 110. fix it The inner nozzle tube 140 is then coupled to the hollow needle 120 to receive the front portion and front end of the hollow needle 120 . At this time, the second bonding part 162 made of an epoxy material is formed to fix the inner nozzle tube 140 and the hollow needle 120 at the rear end of the inner nozzle tube 140 . Next, the outer nozzle tube 150 is arranged to accommodate the inner nozzle tube 140 inside in a state where the rear end of the inner nozzle tube 140 protrudes to the outside through the rear, and the outer nozzle tube 150 ) A fixing part 170 for fixing the inner nozzle tube 140 and the transfer pipe 110 is installed. At this time, the fixing part 170 covers the first bonding part 161 and the second bonding part 162, a part of the front part of the transfer pipe 110, and a part of the rear part of the external nozzle tube 150. is inserted to cover a portion of the front portion of the third bonding portion 171 and the transfer pipe 110 and a portion of the rear portion of the external nozzle tube 150, and a fixing tube 172 engaged with the transport pipe 110 and the external nozzle tube 150 to prevent separation of the transport pipe 110 and the external nozzle tube 150 by the concave-convex structure formed by .

Various embodiments of the high-impact dry ice spraying nozzle device will now be described.

As shown in FIGS. 2 to 4 , the high-impact dry ice spray nozzle device 1 according to an embodiment is a dry ice nozzle 100 and a dry ice nozzle 100 grown to a predetermined size. It includes an accelerating nozzle 200 for accelerating the dry ice agglomerated particles and ejecting them to the outside.

The accelerating nozzle 200 is connected to the nozzle body 210 having the rear accelerating gas passage 211 surrounding the dry ice nozzle 100 in the rear section of the dry ice nozzle 100 described above, for example by screwing. The nozzle head 230 is detachably coupled to the front end of the nozzle body 210 and has a front accelerator gas passage 231 connected to the rear accelerator gas passage 211 . When the nozzle body 210 and the nozzle head 230 are coupled, the rear accelerator gas passage 211 and the front accelerator gas passage 231 are connected to form one unified accelerator gas passage.

In addition, the accelerating nozzle 200 includes a gas injecting part 240 having a gas injection passage connected to the accelerating gas passage and a liquid carbon dioxide injecting part 250 formed at the rear end of the rear accelerating gas passage 211. The dry ice nozzle 100 includes a fitting unit 260 that airtightly and tightly fits the transfer pipe 110 provided behind the nozzle 100 . In addition, the accelerating nozzle 200 includes a support member 270 supporting the dry ice nozzle 100 in the accelerating gas passage so that the dry ice nozzle 100 is located at the center of the accelerating gas passage. . The support member 270 includes a central ring portion 271 into which the dry ice nozzle 100 is inserted almost snugly, an outer ring portion 272 coupled to an inner circumferential surface of the accelerator gas flow path, the central ring portion 271, and the outer ring portion 271. It is composed of a connection part 273 connecting between the ring parts 272, and a hole through which the accelerating gas passes is formed in the connection part 273.

In addition, the fitting unit 260 communicates with the bolt-type fitting body 261 into which the transfer pipe 110 of the dry ice nozzle 100 is inserted and the liquid carbon dioxide injection unit 250 so as to communicate with the accelerating nozzle 200. ) is provided in the nozzle body 210, and a female screw portion 262 having a female thread corresponding to the male thread formed on the fitting body 261 is interposed between the fitting body 261 and the female thread portion 262. As the fitting body 261 and the female screw part 262 are fastened, the transfer pipe 110 of the dry ice nozzle 100 is compressed and tightened between the fitting body 261 and the female screw part 162. As a result, a pall means for sealingly fitting the dry ice nozzle 100 to the liquid carbon dioxide injector 250 is included. In the present embodiment, the paring unit includes a cone-shaped front paral 264 that is in close contact with the inner circumference of the fitting body 261 and the outer circumference of the transfer pipe 110, the front paral 264, and the female screw part 262. ) may include a back parel 265 that is pressurized between them to additionally compress the transfer pipe 110.

A forward accelerating gas passage 231 is provided between the nozzle head 230 and the front part of the dry ice nozzle 100 to gradually converge toward the spray hole 232 to increase gas flow rate. The dry ice agglomerated particles discharged through the front end of 100 may be sprayed toward the external cleaning object at a high speed by the high-pressure accelerator gas flowing through the front accelerator gas passage 231 at high pressure.

As shown in FIGS. 5 and 6, the high-impact dry ice spray nozzle device 1 according to another embodiment includes a plurality of dry ice nozzles 100 arranged in a plurality of rows (more specifically, in parallel) and An accelerating nozzle 200 is included for accelerating the dry ice agglomerated particles grown to a predetermined size within the plurality of dry ice nozzles 100 and ejecting them to the outside. In this embodiment, the plurality of dry ice nozzles 100 are arranged in a zigzag pattern and two in each of two rows. However, it should be noted that the plurality of dry ice nozzles 100 may be arranged in various ways, such as single-column arrangement, multi-column arrangement, or radial arrangement.

The accelerating nozzle 200 includes a nozzle body 210 having a rear accelerating gas passage 211 surrounding the circumference of the dry ice nozzle 100 in the rear section of the plurality of dry ice nozzles 100, and the nozzle body ( 210) is detachably coupled to the front end of the nozzle head 230 and has a front accelerator gas passage 231 connected to the rear accelerator gas passage 211. When the nozzle body 210 and the nozzle head 230 are coupled, the rear accelerator gas passage 211 and the front accelerator gas passage 231 are connected to form one unified accelerator gas passage. In addition, the nozzle head 230 has a plurality of spray holes 232 exposing the front ends of the plurality of dry ice nozzles 100, and the plurality of spray holes 232 are the accelerator gas passages, in particular, It communicates with the front acceleration gas passage 231.

In addition, the accelerating nozzle 200 includes a gas injecting part 240 having a gas injection passage connected to the accelerating gas passage and a liquid carbon dioxide injecting part 250 formed at the rear end of the rear accelerating gas passage 211. It includes a fitting unit 260' that airtightly and tightly fits the transfer pipe 110 provided at the rear of the dry ice nozzle 100. In addition, the accelerating nozzle 200 includes a support member 270' for supporting the plurality of dry ice nozzles 100 in the accelerating gas passage. The support member 270' includes a plurality of holding holes 271' into which the plurality of dry ice nozzles 100 are inserted and maintained, and a circumference of the support member 270' is surrounded by the accelerating gas passage. all.

In addition, the fitting unit 260' has a plurality of fitting holes 261 formed at the rear end of the nozzle body 200 to correspond to the plurality of dry ice nozzles 100 and communicate with the liquid carbon dioxide injector 250. ') and a conical sealing fixture installed on the outer circumferential surface of the transfer pipe 110 of the plurality of dry ice nozzles 100 and inserted into the fitting hole 261' from the outside of the fitting hole 261' ( 262') and a plurality of O-rings 263' fitted into the transfer pipe 110 of each dry ice nozzle 100 so as to come into close contact with the rear surface of the sealing fixture 262', and the liquid carbon dioxide injector 250 ) is interposed between the nozzle body 210 and the liquid carbon dioxide injector 250 while being coupled to the plurality of O-rings 263' and the sealing fixture 262' to the tightening force of the bolt 264'. A fitting pressing part 265' for pressing the fitting hole 261' may be included.

As shown in FIG. 7, the high-impact dry ice spray nozzle device 1 according to another embodiment includes a plurality of dry ice nozzles 100 and a plurality of dry ice nozzles 100 grown to a predetermined size. It includes an accelerating nozzle 200 for accelerating the dry ice agglomerated particles and ejecting them to the outside.

The accelerating nozzle 200 is detachably coupled to a nozzle body 210 having a rear accelerating gas passage 211 surrounding the plurality of dry ice nozzles 100 and a front end of the nozzle body 210. a nozzle extension pipe 220 having an intermediate accelerating gas flow path 221 that extends forward and further grows dry ice agglomerated particles discharged after being generated and grown in the dry ice nozzle 100; A nozzle head 230 having a front accelerating gas passage 231 connected to the gas passage 221 is included.

When the nozzle extension pipe 220 is coupled to the nozzle body 210 and the nozzle head 230 is coupled to the nozzle extension pipe 220, the rear acceleration gas passage 211 and the elongated middle acceleration gas passage 221 ) and the front accelerator gas passage 231 are all connected to form one unified accelerator gas passage. In addition, the nozzle head 230 has one spray hole 232, and the spray hole 232 communicates with the accelerator gas passage, in particular, the front accelerator gas passage 231.

In addition, the accelerating nozzle 200 includes a gas injecting part 240 having a gas injection passage connected to the accelerating gas passage and a liquid carbon dioxide injecting part 250 formed at the rear end of the rear accelerating gas passage 211. It includes a fitting unit 260' that airtightly and tightly fits the transfer pipe 110 provided at the rear of the dry ice nozzles 100. In addition, the accelerating nozzle 200 includes a support member 270" for supporting the plurality of dry ice nozzles 100 in the accelerating gas flow path. The support member 270" includes the plurality of dry ice nozzles 100. It includes a plurality of holding holes 271" into which the nozzles 100 are inserted and maintained. The accelerating gas passage is formed on the front side with respect to the support member 270", and the gas injection part 240 is The support member 270 "is connected to the rear accelerating gas passage 210 from the front side.

In addition, the fitting unit 260' has a plurality of fitting holes 261 formed at the rear end of the nozzle body 210 to correspond to the plurality of dry ice nozzles 100 and communicate with the liquid carbon dioxide injection unit 250. ') and a conical sealing fixture installed on the outer circumferential surface of the transfer pipe 110 of the plurality of dry ice nozzles 100 and inserted into the fitting hole 261' from the outside of the fitting hole 261' ( 262') and a plurality of O-rings 263' fitted into the transfer pipe 110 of each dry ice nozzle 100 so as to come into close contact with the rear surface of the sealing fixture 262', and the liquid carbon dioxide injector 250 ) is interposed between the nozzle body 210 and the liquid carbon dioxide injector 250 while being coupled to the fitting hole ( 261') may include a fitting pressing part 265' that presses.

As shown in FIG. 8, the high-impact dry ice spray nozzle apparatus 1 according to another embodiment includes a plurality of dry ice nozzles 100 arranged in one row (serial) and the plurality of dry ice nozzles ( 100) includes an accelerating nozzle 200 for accelerating the dry ice agglomerated particles grown to a predetermined size and ejecting them to the outside. Note that in FIG. 9 , dry ice nozzles excluding some dry ice nozzles 100 located outside of the dry ice nozzles 100 are omitted to avoid complicating the drawing.

In this embodiment, a large number of dry ice nozzles 100 are linearly arranged in a row and long, so that linear dry ice cleaning using dry ice agglomerated particles sprayed through the linearly arranged dry ice nozzles 100 is possible. . The linear dry ice linear cleaning has the advantage of being able to clean a large area just by moving the high-impact dry eye nozzle device 1 in one direction (X-axis direction or Y-axis direction).

The accelerating nozzle 200 has a plate-shaped nozzle body 210 having a low depth and wide rear accelerating gas passage 211 accommodating the dry ice nozzles 100 in the rear section of the plurality of dry ice nozzles 100. ), and a plate-shaped nozzle head 230 detachably coupled to the front end of the nozzle body 210, connected to the rear acceleration gas passage 211, and having a low depth and wide front acceleration gas passage 231 formed therein. ). Each of the nozzle body 210 and the nozzle head 230 may have grooves into which the dry ice nozzle 100 is inserted and maintained. In particular, the nozzle head 230 may have a plurality of spray holes 232 that expose the plurality of dry ice nozzles 100 in a row.

In addition, the accelerating nozzle 200 includes a gas injecting part 240 having a gas injection passage connected to the accelerating gas passage and a liquid carbon dioxide injecting part 250 formed at the rear end of the rear accelerating gas passage 211. It includes a fitting unit 260' that airtightly and tightly fits the transfer pipe 110 provided at the rear of the dry ice nozzle 100. If only one gas injection unit 240' is installed, it may cause pressure unevenness in the accelerating gas passage, so it may be advantageous to install two or more gas injection units 240 and 240.

The configuration of the fitting unit 260' is substantially the same as that of the previous embodiment, and thus further description is omitted.

As shown in FIG. 9, the high-impact dry ice spray nozzle device 1 according to another embodiment includes a long and soft transfer pipe 110 and a soft external nozzle tube 150, etc., as a whole. It includes a dry ice nozzle 100 having a long and flexible string structure, and an accelerating nozzle 200 including a long flexible nozzle extension tube 220' accommodating the dry ice nozzle 100. Like the previous embodiments, the accelerating nozzle 200 includes a nozzle body 210 having a gas inlet 240 and a rear gas accelerating passage 211 connected to the liquid carbon dioxide injector 250. The long, soft transfer pipe 110 of the dry ice nozzle 100 is airtightly connected to the liquid carbon dioxide injection unit 250. A confidential access scheme may follow one of the foregoing embodiments. The flexible nozzle extension tube 220' includes an elongated, directionally variable middle gas acceleration passage 221', and the middle gas acceleration passage 221' is airtightly connected to the rear gas acceleration passage 211. It is coupled to the front end of the nozzle body 210 to connect. A front gas acceleration passage ( 231) can be formed. The high-impact dry ice spraying nozzle device 1 of the present embodiment can be advantageously used for dry ice cleaning by approaching only the nozzle head to a narrow space that is difficult to access, and the nozzle head ( ), the impact force on the surface of the cleaning object can be increased or decreased depending on the distance to the object.

100: dry ice nozzle 110: transfer pipe
120: hollow needle 130: blocking part
140: inner nozzle tube 150: outer nozzle tube
200: acceleration nozzle 210: nozzle body
230: nozzle head 240: gas inlet
250: liquid carbon dioxide injection unit

Claims (16)

A transfer pipe through which liquid carbon dioxide (CO ₂ ) is transferred;
a hollow needle extending from the inside of the transport pipe to the outside past the front end of the transport pipe, and ejecting liquid carbon dioxide while adiabatically expanding to generate dry ice crystals;
a blocking portion blocking the gap between the outer circumference of the hollow needle and the inner circumference of the transfer pipe;
an inner nozzle tube disposed to receive the shear of the hollow needle and in which dry ice crystals grow and agglomerate to form dry ice agglomerated particles; and
The dry ice nozzle comprising an external nozzle tube for discharging dry ice agglomerated particles formed while passing through the internal nozzle tube to the outside. The method according to claim 1, wherein the front end of the hollow needle is liquid carbon dioxide Alternatively, an inclined surface is formed to guide the dry ice crystals in a direction to collide with the inner wall surface of the inner nozzle tube, the inner nozzle tube is formed of a metal or ceramic material, and the outer nozzle tube is formed of a synthetic resin material. Characterized in that dry ice nozzle. The method according to claim 1, wherein the hollow interior of the outer nozzle tube includes a rear section accommodating the inner nozzle tube and a front section not accommodating the inner nozzle tube, and the rear end of the inner nozzle tube is the rear end of the outer nozzle tube. A dry ice nozzle, characterized in that it protrudes out through the. [4] The dry ice nozzle of claim 1, wherein the blocking part comprises a viscoelastic tube adhered to the inner circumferential surface of the transfer pipe while being coupled to the outer circumferential surface of the hollow needle by a bonding material. The method of claim 1,
A first bonding portion formed to cover the outer circumferential surface of the hollow needle at the front end of the transfer pipe and fixing the hollow needle to the transfer pipe;
The dry ice nozzle of claim 1, further comprising a second bonding part fixing between the inner nozzle tube and the hollow needle at a rear end of the inner nozzle tube. The method of claim 5,
The outer nozzle tube is disposed to accommodate the inner nozzle tube inside with the rear end of the inner nozzle tube protruding to the outside,
The dry ice nozzle further comprises a fixing part fixing the outer nozzle tube to the inner nozzle tube and the transfer pipe. The method of claim 6,
The fixing part,
a third bonding portion applied to cover the first bonding portion and the second bonding portion, a portion of the front portion of the transfer pipe, and a portion of the rear portion of the external nozzle tube;
It is inserted to cover the third bonding part, a part of the front part of the transfer pipe, and a part of the rear part of the external nozzle tube, and is engaged with the transfer pipe and the external nozzle tube by press-fitting, and the transfer pipe and the external nozzle tube A dry ice nozzle further comprising a fixing tube preventing the escape of the dry ice nozzle. The method of claim 1,
In the transfer pipe, liquid carbon dioxide is maintained at a pressure of 50 bar to 70 bar at room temperature, the inner diameter of the transfer pipe is 500 μm or more, the inner diameter of the hollow needle is 200 μm or less, and the inner nozzle tube is dry ice A dry ice nozzle, characterized in that the metal tube has a length of about 5 mm or more so that the crystals collide and the dry ice crystals aggregate and grow. at least one dry ice nozzle according to any one of claims 1 to 8; and
The high-impact dry ice spray nozzle device for cleaning, characterized in that it comprises an accelerator nozzle for accelerating the agglomerated dry ice particles generated, grown and discharged in the dry ice nozzle with a gas having a certain pressure or higher and ejecting them to the outside. The method according to claim 9, wherein the accelerating nozzle,
A nozzle body having a rear accelerating gas flow path surrounding the dry ice nozzle in a rear section of the dry ice nozzle and connected to a gas injection part and a liquid carbon dioxide injection part;
A nozzle head detachably coupled to the front end of the nozzle body and having a front accelerator gas passage connected to the rear accelerator gas passage;
High-impact dry ice spray nozzle device for cleaning, characterized in that it comprises a fitting unit for airtightly coupling the transfer pipe to the liquid carbon dioxide injection unit The method according to claim 10, wherein the fitting unit is provided in the nozzle body so as to communicate with the bolt-type fitting body into which the transfer pipe is inserted and the liquid carbon dioxide injection unit, and a female screw having a female screw thread corresponding to a male screw thread formed in the fitting body. and a paring unit interposed between the fitting body and the female screw unit and compressing and tightening the transfer pipe between the fitting body and the female screw unit as the fitting body and the female screw unit are fastened, the paring unit comprising: A cone-shaped front parlum that is in close contact with the inner circumference of the fitting body and the outer circumference of the transfer pipe, and a back paral that is pressed between the front parl and the female threaded portion to additionally compress the transfer pipe. High-impact dry ice spray nozzle device. The method of claim 9,
The acceleration nozzle,
In the rear section, a rear accelerating gas flow path surrounding the periphery of the plurality of dry ice nozzles is formed, and a gas injection unit connected to the rear gas flow path and a liquid carbon dioxide injection unit connected to the transfer pipe of the plurality of dry ice nozzles A connected nozzle body;
A nozzle head detachably coupled to the front end of the nozzle body and including a front acceleration gas passage connected to the rear acceleration gas passage and a plurality of injection holes formed to expose front ends of each dry ice nozzle;
and a fitting unit for airtightly and tightly fitting the transfer tubes of the plurality of dry ice nozzles to the liquid carbon dioxide injection unit. The method according to claim 12, wherein the fitting unit comprises a plurality of fitting holes formed at the rear end of the nozzle body to correspond to the plurality of dry ice nozzles and communicate with the liquid carbon dioxide injector, and a transfer pipe of each of the plurality of dry ice nozzles. A cone-shaped sealing fixture installed on the outer circumferential surface of the fitting hole and inserted into the fitting hole from the outside of the fitting hole, an O-ring inserted into and coupled to the transfer pipe of each dry ice nozzle so as to be in close contact with the rear surface of the sealing fixture, and the liquid carbon dioxide injection unit and a fitting pressurizing part interposed between the nozzle body and the liquid carbon dioxide injection part while being coupled to and pressurizing the O-ring and the sealing fixture into the fitting hole. The method according to claim 9, wherein the accelerating nozzle
A nozzle body having a rear accelerating gas flow path surrounding the periphery of the plurality of dry ice nozzles;
A nozzle extension tube detachably coupled to the front end of the nozzle body and extended forward, and having an intermediate accelerating gas flow path in which dry ice condensation particles discharged after being generated and grown from the plurality of dry ice nozzles further grow; and ,
High-impact dry ice spraying nozzle device for cleaning, characterized in that it comprises a nozzle head formed with a front accelerator gas passage connected to the intermediate accelerator gas passage. The method of claim 9,
A plurality of dry ice nozzles are arranged in a row within the accelerating nozzle;
The acceleration nozzle,
A plate-shaped nozzle body having an accelerating gas flow path accommodating the plurality of dry ice nozzles in a rear section of the plurality of dry ice nozzles;
and a nozzle head detachably coupled to the front end of the nozzle body and having a plurality of jetting holes exposing the plurality of dry ice nozzles formed in a row. A transport pipe through which long and soft liquid carbon dioxide (CO ₂ ) is transported, and a hollow space extending from the inside of the transport pipe to the outside past the front end of the transport pipe and spraying the liquid carbon dioxide while adiabatically expanding to create dry ice crystals. A needle, a blocking portion blocking a gap between an outer circumference of the hollow needle and an inner circumference of the transfer pipe, and disposed to receive a shear of the hollow needle, wherein the dry ice crystals grow and agglomerate to form dry ice agglomerated particles. a dry ice nozzle including an inner nozzle tube and a soft outer nozzle tube discharging dry ice agglomerated particles formed while passing through the inner nozzle tube to the outside;
A nozzle body formed with a rear gas acceleration passage connected to the acceleration nozzle gas injection unit and the liquid carbon dioxide injection unit, and a long intermediate gas acceleration passage having a direction changeability connected to the rear gas acceleration passage when combined with the nozzle body A flexible nozzle extension tube in which the dry ice nozzle is accommodated in the intermediate gas accelerating passage; and
and a nozzle head formed at a front end of the flexible nozzle extension tube and having a front gas acceleration passage surrounding the front end of the dry ice nozzle.

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