KR20230071137A - Apparatus and method for relieving pressure in target material supply system - Google Patents

Abstract

The pressure relief device includes a pressure relief element formed of a compressible material and disposed on an inner surface of a structure in a target material supply system. The target material supply system is configured to deliver the target material. The inner surface of the structure defines a cavity within the target material supply system. The structure is formed of a rigid material and is configured to contain a target material within the cavity. The pressure relief element is configured to passively prevent the pressure within the cavity from exceeding a maximum allowable value.

Description

Apparatus and method for relieving pressure in target material supply system

This application claims priority to US Application Serial No. 63/082,234, filed on September 23, 2020, entitled Pressure Relief Apparatus and Method in Target Material Supply Systems, which is incorporated herein by reference in its entirety.

The present invention relates to a pressure relief device and method in a target material supply system.

In semiconductor lithography (or photolithography), a lithographic exposure apparatus (also referred to as a scanner) is a machine that applies a desired pattern onto a target area of a substrate. A patterning device, also called a mask or reticle, can be used to create the desired pattern to be formed. Transfer of the pattern is typically accomplished by imaging onto a layer of radiation-sensitive material (resist) provided on the substrate.

The substrate is irradiated with a beam of light having a wavelength in the ultraviolet range between visible light and x-rays and thus having a wavelength of about 10 nanometers (nm) to about 400 nm. Accordingly, the light beam may have a wavelength in the deep ultraviolet (DUV) range (eg, a wavelength of about 100 nm to about 400 nm) or an extreme ultraviolet (EUV) range (a wavelength of about 10 nm to about 100 nm). there is. These wavelength ranges are imprecise and may overlap between whether the light is considered DUV or EUV. For example, DUV excimer lasers are commonly used to create light beams. Examples of DUV excimer lasers include a 248 nm wavelength krypton fluoride (KrF) laser and a 193 nm wavelength argon fluoride (ArF) laser.

In some general aspects, the pressure relief device includes a pressure relief element formed of a compressible material and disposed on an inner surface of a structure within the target material supply system. The target material supply system is configured to deliver the target material. The inner surface defines a cavity within the target material supply system. The structure is formed of a rigid material and is configured to contain a target material within the cavity. The pressure relief element is configured to passively prevent the pressure within the cavity from exceeding a maximum allowable value.

Implementations may include one or more of the following features. For example, the pressure relief element can be a liner covering at least a portion of the inner surface of the structure. The structure is a hollow cylindrical tube, the cavity is cylindrical, and the liner may cover at least a portion of an inner surface of the hollow cylindrical tube. The pressure relief element may have a cylindrical shape with one or more grooves on the sides of the cylindrical shape, the grooves extending axially along the cylindrical shape, and the pressure relief element may fit into a cylindrical cavity of a hollow cylindrical tube. there is. The pressure relief element has a rectangular bar shape, a hexagonal bar shape or a polygonal bar shape, and the pressure relief element may fill at least a portion of the structure.

The structure is a separable connection connecting two separate separate fluid devices, and the pressure relief device may be a liner or sleeve extending at least partially over the separable connection.

The compressible material remains elastic at temperatures greater than the melting range of the target material, so the compressible material is compatible with the target material at pressures beyond the melting range of the target material and up to a maximum allowable pressure greater than 20 MPa (megapascals). .

The compressible material may have a modulus of elasticity that remains below 6 GPa at operating temperature. The ratio of the volume of the compressible material to the volume of the target material contained within the cavity of the structure may be related to the modulus of elasticity of the compressible material. The modulus of elasticity of the compressible material may be less than the modulus of elasticity of the structure. Compressible materials can remain in a linearly elastic state after being repeatedly compressed and decompressed. A compressible material may be configured to deform when compressed and decompressed, and the deformation of the compressible material may be non-permanent.

The compressible material may be a polymeric material. This polymeric material may be polyimide, polytetrafluoroethylene, polybenzimidazole or polyether ether ketone.

The pressure relief element may be a liner covering at least a portion of an interior surface of the structure, wherein the ratio of the volume of the liner covering the interior surface of the structure to the volume of the target material contained within the cavity of the structure is at least one. The compressible material is polyimide, so that the liner is formed of polyimide, the structure is formed of molybdenum, the volume of the liner occupies at least 80% of the cavity of the structure and the volume of the target material occupies the remainder of the cavity of the structure. can The polyimide liner undergoes elastic deformation and not permanent or plastic deformation.

The compressible material may be a rigid foam material with closed cells. The compressible material is compatible (eg, chemically and/or thermally compatible) with the target material.

In another general aspect, a target material supply system is configured to deliver particles of a target material to a target space inside a chamber. The target material supply system includes one or more structures, each structure configured to hold the target material within a cavity defined by an inner surface of the structure; and a pressure relief device associated with at least one of the structures. The pressure relief device includes a passive pressure relief device in fluid communication with the cavity and configured to passively change the pressure within the cavity. The compressible mechanism can expand the effective volume within the cavity to compensate for the increase in volume of the target material within the cavity.

Implementations may include one or more of the following features. For example, an increase in the volume of the target material within the cavity can be attributed to a change in the temperature of the target material. The material may be a fluid target material that emits ultraviolet rays (eg, extreme ultraviolet rays) in a plasma state.

The compressible appliance may be a liner covering at least a portion of the inner surface of the structure to which the pressure relief device is associated. The structure to which the pressure relief device is related is a hollow cylindrical tube having a cylindrical cavity, and the liner may cover at least a portion of the inner surface of the hollow cylindrical tube. The liner may occupy about 90% of the cavity of the structure to which the pressure relief device is associated.

The compressible device may be a polymeric material.

The compressible device may be or contain an inert gas that does not react with the target material, and may also be configured to come into physical contact with the target material. The inert gas may be argon (Ar), xenon (Xe), helium (He), nitrogen (N ₂ ), hydrogen (H ₂ ), or carbon monoxide (CO). The inert gas may occupy from about 2% to about 10% of the cavity of the structure to which the pressure relief device is associated.

The passive pressure relief device may be a pressure relief valve and the compressible mechanism may be a mechanical spring configured to passively change the effective volume within the cavity. The pressure relief valve may remain closed when the effective volume within the cavity changes. The pressure relief valve and mechanical spring may each be made of a material that is compatible (eg, chemically and/or thermally) with the target material at the relevant temperature and pressure above the melting range of the target material. The material may be a refractory metal or ceramic material.

The target material may be tin, lithium, xenon or a tin alloy.

A pressure relief device is associated with a plurality of cylindrical structures, each cylindrical structure being a hollow cylindrical tube having a cylindrical cavity for delivering a target material in fluid form.

Each cylindrical structure may be connected to one or more other structures by means of a detachable connector. The detachable connection may be associated with other pressure relief devices, including other passive pressure relief devices, including other compressible mechanisms.

The target material supply system may further include a source of target material configured to produce a target material from a solid target material, and a nozzle device configured to direct particles of the target material into interaction with the light beam, wherein the particles and the light beam The interaction generates plasma and ultraviolet rays (extreme ultraviolet rays) of the target material.

In another general aspect, an apparatus for a target material supply system is configured to deliver particles of a target material. The apparatus includes a pressure relief device comprising a compressible mechanism in fluid communication with an interior of a cavity in a structure of a target material supply system, wherein the cavity is configured to contain the target material within the interior of the cavity. The compressible mechanism of the pressure relief device is configured to passively change the effective volume within the cavity by absorbing or releasing energy associated with the pressure within the cavity.

In another general aspect, a method for regulating the pressure of a target material in a target material supply system is performed. The target material supply system includes one or more unrestricted zones and one or more unrestricted zones, each unrestricted zone being defined by an open cavity, which cavity is formed if the temperature of the unrestricted zone is greater than the melting range of the target material. It allows the pressure of the target material to be regulated, and each confining area is defined by a closed cavity. The method includes identifying one or more of the non-restricted regions; melting the target material in at least one of the identified unconstrained regions such that the at least one unconstrained region has a temperature greater than a melting range of the target material; and melting the target material in each confined region having a temperature lower than the melting range of the target material only when the confined region is adjacent to at least one of the non-confined regions having a temperature greater than the melting range of the target material, thereby reducing the target material within the confined region. It includes regulating the pressure.

Implementations may include one or more of the following features. For example, the target material of the unrestricted area can be melted by heating the target material so that the target material expands into the open cavity of the unrestricted area to adjust the pressure of the target material.

The target material of the confined area may be melted by heating the target material so that the target material expands into the at least one adjacent non-constrained area to adjust the pressure of the target material.

Each of the one or more restricted areas and the one or more non-restricted areas may be defined as a separate separate structure. Each structure that is a confinement area includes a pipe configured to transfer a target material between other structures; a freeze valve configured to separate two or more other structures; a droplet generator assembly configured to generate particles in the form of droplets of a target material; and a nozzle configured to generate ultraviolet light by directing particles of the target material to interact with a light beam irradiating the particles into a plasma state. At least one of the structures that is a non-limiting area may be a target material reservoir configured to hold a target material.

The method includes melting a target material in one or more other confined regions having a temperature less than the melting range of the target material only if the other confined regions are adjacent to at least one of the confined regions having a temperature greater than the melting range of the target material. contains more The target material in the confined regions is less than the melting range of the target material in a sequence such that each confined region is adjacent to at least one of the non-confined regions and/or confined regions having a temperature greater than the melting range of the target material at each step in the sequence. The target material may be heated and melted in each of the one or more confinement zones having a temperature.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, incorporated herein and forming part of this specification, illustrate the present disclosure and, together with the description, explain the principles of aspects of the present disclosure and enable those skilled in the art to make and use the aspects of the present disclosure. play a role
1 is a block diagram of a target material supply system that includes one or more structures configured to hold a target material and a pressure relief device associated with at least one of the structures.
2 is a block diagram of the pressure relief device of FIG. 1 associated with one of the structures of FIG. 1, the pressure relief device including a compressible mechanism configured to passively receive a changing volume of a target material in a cavity of the associated structure. Includes a passive pressure relief device.
FIG. 3A is a block diagram of the pressure relief device of FIG. 2, the pressure relief device providing additional volume to compensate for the increase in volume of the target material within the cavity of the associated structure.
FIG. 3B is a block diagram of the pressure relief device of FIG. 2, which fills in additional volume to compensate for the reduction in volume of the target material within the cavity of the associated structure.
4 is a block diagram of one embodiment of the pressure relief device of FIG. 2 associated with a structure configured to hold a target material, the pressure relief device including a liner formed of a compressible material as a compressible device.
5A is a block diagram of the pressure relief device of FIG. 4, the pressure relief device providing additional volume to compensate for the increased volume of target material within the cavity of the associated structure.
5B is a block diagram of the pressure relief device of FIG. 4, the pressure relief device filling the volume to compensate for the reduction in volume of the target material within the cavity of the associated structure.
FIG. 6A is a block diagram of another implementation of the pressure relief device of FIG. 4 that includes a liner formed of a compressible material as a compressible device, wherein the pressure relief device is associated with a cylindrical structure configured to hold a target material.
6B is a cross-sectional view of the pressure relief device of FIG. 6A taken along line 6B-6B.
6C is a cross-sectional view of another embodiment of the pressure relief device of FIG. 6A taken along line 6B-6B.
6D is a cross-sectional view of the pressure relief device of FIG. 6C with the liner compressed.
7 is a block diagram of a plurality of pressure relief devices each associated with one respective cylindrical structure, wherein the cylindrical structure is the cylindrical structure of FIG. 6A; other cylindrical structures that are pipes; and a cylindrical structure that is a detachable connecting part.
8 is a block diagram of another embodiment of the pressure relief device of FIG. 2 associated with the structure of FIG. 4, the pressure relief device including an inert gas in the form of a bubble as a compressible device.
9A is a block diagram of the pressure relief device of FIG. 8, the pressure relief device providing additional volume to compensate for the increased volume of target material within the cavity of the associated structure.
9B is a block diagram of the pressure relief device of FIG. 8, the pressure relief device filling the volume to compensate for the reduction in volume of the target material within the cavity of the associated structure.
9C is a block diagram of an implementation of the pressure relief device of FIG. 8, the pressure relief device providing additional volume to compensate for the increase in volume of the target material within the cavity of the associated structure.
9D is a block diagram of the FIG. 9C implementation of the pressure relief device of FIG. 8, the pressure relief device filling the volume to compensate for the reduction in volume of the target material within the cavity of the associated structure.
10 is a block diagram of another embodiment of the pressure relief device of FIG. 2 related to the structure of FIG. 4, the pressure relief device including a pressure relief valve as a passive pressure relief device and a mechanical spring as a compressible mechanism.
11A is a block diagram of the pressure relief device of FIG. 10, the pressure relief device providing additional volume to compensate for the increased volume of target material within the cavity of the associated structure.
FIG. 11B is a block diagram of the pressure relief device of FIG. 10, the pressure relief device filling the volume to compensate for the reduction in volume of the target material within the cavity of the associated structure.
12A is a flow chart of a procedure for regulating the pressure of a target material in a target material supply system that includes one or more non-restricted areas and one or more restricted areas.
12B is a flow diagram of another procedure that may be used in conjunction with the procedure of FIG. 12A to regulate the pressure of a target material in a target material supply system.
FIG. 13 is a block diagram of an extreme ultraviolet (EUV) light source that includes one embodiment of the target material supply system, structure, and pressure relief device of FIG. 1 .

Referring to FIG. 1 , a target material supply system 100 is configured to deliver particles 103p of a target material 103 to a target space 124 inside an interior 122i of a chamber 122 . The target material supply system 100 includes at least one structure 120 configured to hold a target material 103 within a cavity 120v defined by an inner surface 120s of a structure wall 120w of the structure 120. ). The structure 120 may be modular, which may contain a single component, or may be built from several interacting components. Structure 120 may be made of at least one rigid component. Moreover, any component of structure 120 that comes into physical contact with fluid target material 103 is made of a material compatible with target material 103 . That is, these components of the structure 120 must be non-chemically reactive with the target material 103 and can also withstand the pressures and temperatures at which the target material 103 is maintained.

The target material supply system 100 also includes a target material source 105 configured to create a fluid target material 103 from a solid target material, and form particles 103p of the target material 103 and toward the target space 124 and a nozzle arrangement 107 configured to direct. Structure 120 is within a fluid flow path defined between target material source 105 and nozzle arrangement 107 . In this way, nozzle arrangement 107 and target material source 105 are in fluid communication with cavity 120v of structure 120 . In one example, nozzle arrangement 107 and target material source 105 may be directly connected to structure 120 at their respective connection areas. The target material 103 in the target material supply system 100 may be in a solid state or in a fluid (liquid or gaseous) state at various locations or structures within the target material supply system 100 . Thus, in one case, target material 103 within target material supply system 100 may be in a fluid state at some locations, while at other locations within system 100 may be in a solid state. Moreover, the material state of the target material 103 may change at various locations and structures within the target material supply system 100 . Thus, for example, target material 103 in a particular structure within system 100 may change its material state over time from a fluid to a solid and back to a fluid.

A target material supply system (100) includes structures (121_1, 121_2) in fluid communication with at least one of a source of target material (105), a structure (120) and a nozzle arrangement (107) and maintaining a fluid target material (103). may contain one or more other structures such as Although only two other structures 121_1 and 121_2 are shown in FIG. 1 , there may be fewer or more than these two structures. Structures 121_1 and 121_2 may be storage systems, fluid flow pipes, and/or detachable connections in the fluid path between nozzle arrangement 107 and target material source 105 . Each of these structures (including structures 120, 121_1 and 121_2) may have different thermal masses and independent heating power supplies. Also, at certain times during operation of the target material supply system 100, one or more of the structures 120, 121_1, 121_2, the target material supply source 105, and the nozzle device 107 may be heated or cooled. Thermal gradients may be created within structure 120 or across different structures within target material supply system 100 (such as structures 121_1 and 121_2) due to different ambient environments and thermal masses. Additionally, the target material 103 in the nozzle arrangement 107 and the target material source 105 may be at a lower temperature than the cavity 120v of the structure 120 holding the target material 103 . Since structures 121_1 and 121_2, nozzle device 107 and target material source 105 are in fluid communication with cavity 120v of structure 120, then cavity 120v, structures 121_1 and 121_2 , a temperature gradient is formed between the target material source 105 and the nozzle device 107. Due to this temperature gradient, the target material may be solid in some regions of the system, while liquid in other regions where the temperature is higher. Regions where the target material is still solid cause the pressure in cavity 120v (and the pressure in each cavity of structures 121_1 and 121_2) to increase as the target material heats up. ) (and structures 121_1 and 121_2) as seals. The force generated by this increased pressure may cause leakage in the fluid connection area between structure 120 , structures 121_1 and 121_2 , nozzle device 107 and target material source 105 . If the target material 103 leaks in this fluid connection area, it is necessary to manually replace the components of the target material supply system 100, which would result in downtime during which the target material supply system 100 cannot be operated. this happens

Moreover, this increase in pressure within cavity 120v may be at least partially related to a change in pressure of target material 103 contained within cavity 120v. Specifically, the target material 103 expands in the cavity 120v (when changing state from a solid to a fluid such as a liquid), the structure wall 120w and the structure 120 form the structures 121_1, 121_2, A force may be imparted to a fluid connection region that is fluidly connected to the nozzle device 107 and/or the target material source 105 . For example, if the volume of the target material 103 expands by about 3%, the pressure within the cavity 120v can increase to about 200 MPa or more, and can also cause plastic deformation and even structural failure of the system. .

In embodiments where target material 103 is made of tin or a tin alloy, thermal gradients within cavity 120v can result in temperature differentials as large as 30°C as the system cools. Thus, a decrease in volume of tin during solidification (phase transition) in regions that are cold can be accommodated by adding tin in regions that are at higher temperatures and can still flow. As a result, certain localized areas of the system can be filled with solid tin and free of voids. During a heating cycle, if that local region heats up faster than its adjacent region or structure due to thermal mass differences or uncontrolled heating, the volume of tin in the local region can increase by a significant amount (e.g., about 3%) upon melting. , whereby very high pressures, for example exceeding 200 MPa, are created. Structures and areas that are fittings, such as joints that interconnect other assemblies or structures, are weak links in the fluid flow path from the target material source 105 to the nozzle device 107, where the pressure exceeds the rated pressure for that fitting. As soon as it increases, tin leaks from these fittings. For example, some fittings have pressure ratings as low as 80 MPa.

In view of the above concerns about excessive pressure that may be created within cavity 120v of structure 120 , a pressure relief device 110 is associated with at least one structure 120 . Pressure relief device 110 is configured to relieve pressure that builds up within cavity 120v of structure 120 . Specifically, pressure relief device 110 allows the volume within cavity 120v of structure 120 to be changed or modified to account for changes in pressure within cavity 120v. For example, the pressure relief device 110 is configured to increase the volume within the cavity 120v available for the target material 103, thereby relieving excessive pressure build-up within the cavity 120v. When the target material supply system 100 includes other structures, such as structures 121_1 and 121_2, the pressure relief device 110 is also configured to relieve excessive pressure build-up in the respective cavities of structures 121_1 and 121_2. It may be related to these structures 121_1 and 121_2.

Referring also to FIG. 2 , the pressure relief device 110 includes a passive pressure relief device 212 that includes a compressible mechanism 214 . Compressible mechanism 214 is in fluid communication with cavity 120v of structure 120 and is configured to passively change the pressure within cavity 120v of structure 120 . The action of the compressible mechanism 214 is passive in that it operates without an external energy source. That is, the compressible mechanism 214 operates only due to pressure changes within the cavity 120v to which it is fluidly connected.

Specifically, and referring to FIG. 3A , compressible mechanism 214 provides additional volume configured to compensate for the increase in volume of target material 103 upon heating and melting in cavity 120v of structure 120 . provided to passively change the pressure in the cavity 20v. In other words, if the pressure in the cavity 120v increases (eg, if the temperature of the cavity 120v increases and the density of the target material 103 decreases), the compressible device 214 moves in a fluid form. Alternatively, the target material 103 in the state provides additional volume to the expandable cavity 120v to passively reduce the pressure within the cavity 120v.

Additionally, from time to time during operation of the target material supply system 100, for example, the temperature of the target material 103 decreases or the fluid target material 103 (i.e., the target material in a fluid state) changes as shown in FIG. 3B. Flowing out of cavity 120v reduces cavity 120v of structure 120 . Specifically, the density of the target material 103 can increase as its temperature decreases, and this decrease in density causes a drop or decrease in the volume of the target material 103 within the cavity 120v. As such, the compressible mechanism 214 is also configured to recover its original shape and volume when this happens.

The pressure relief device 110 is self-contained, so that other components or structures of the target material supply system 100 are not affected by the increase or decrease in pressure within the cavity 120v. In this way, the pressure relief device 110 can be applied to the target material supply system 100, the nozzle device 107 and/or the structure 120 inside the target material source 105 and other structures (e.g., structures 121_1 and 121_2). )) passively mitigates leaks that may occur in the fluid connection area between, and thus the time during which the target material supply system 100 can be operated is increased.

Referring again to FIG. 1 , in operational use, nozzle arrangement 107 delivers a stream of particles or targets 103p along path 126 to target space 124 . The interaction of the radiation pulses of the light beam 106 with the particles 103p of the target material 103 in the target space 124 creates a plasma of the fluid target material 103 and also induces extreme ultraviolet (EUV) light 109 generate For example, light beam 106 may be produced by a light source, and EUV light 109 produced by interaction between light beam 106 and particles 103p may be supplied to a lithography tool.

Particles 103p may be, for example, droplets of liquid or molten fluid target material 103, portions of liquid streams of target material 103, solid particles or clusters formed from target material 103, droplets of target material 103 It may be a solid particle contained within, a foam produced from the target material 103, or a solid particle contained within a portion of a liquid stream of the target material 103. The target material 103 is any material that emits ultraviolet rays (eg, extreme ultraviolet rays) when converted to a plasma state. The target material 103 may include, for example, water, tin, lithium, xenon or a tin alloy. For example, elemental tin can be pure tin (Sn); tin compounds (eg, SnBr ₄ , SnBr ₂ , SnH ₄ ; tin alloys (eg, tin-gallium alloys, tin-indium alloys, tin-indium-gallium alloys; or any combination of these alloys). Particles 103p may be provided to the target space 124 by passing molten target material through a nozzle device 107 and allowing the particles 103p to enter the target space 124 along a path 126. In some implementations, the particle 103p may be forced into the target space 124. Additionally, a particle 103p interacting with a radiation pulse of the light beam 106 may also have one or more previous radiation pulses already Alternatively, a particle 103p interacting with a radiation pulse of light beam 106 may reach the target space 124 without interacting with any other radiation pulse.

Referring to FIG. 4 , an embodiment 410 of a pressure relief device 110 ( FIGS. 1 , 2 , 3A and 3B ) is associated with a structure 420 . Structure 420 may be any of structures 120 , 121_1 , and 121_2 as shown in FIG. 1 , and may be within target material supply system 100 . Structure 420 has target material 103 inside cavity 420v (which may be inside target material supply system 100) defined by interior surface 420s of wall 420w of structure 420. It is configured to hold or contain. The structure 420 may be a rectangular tube having a rectangular cross-sectional shape in the X-Y plane and extending along the Z direction. Structure 420 may have a cylindrical tube (as shown in FIGS. 6A and 6B ) or other cross-sectional shape such as a circle such that structure 420 is polygonal or elliptical.

Pressure relief device 410 is a passive pressure relief device that includes a compressible mechanism 414 in direct fluid communication with cavity 420v of structure 420 . Compressible mechanism 414 is a pressure relief element formed of a silver compressible material, and structure 420 is formed of a rigid material. One way to describe the properties of a compressible material is to describe the modulus of elasticity, which is a measure of the compressible material's resistance to elastic deformation. The modulus of elasticity of the compressible material should be less than the modulus of elasticity of structure 420 . In one example, the compressible material of compressible mechanism 414 has a modulus of elasticity less than 6 GPa.

Additionally, the compressible material forming the compressible device 414 (i.e., the pressure relief element) may be subjected to high temperatures within and/or above the melting range of the target material 103 during operation. It is configured to remain in the elastic region at temperatures above the melting range of 103 or after repeated compression and decompression. The deformation of a compressible material is not permanent, so it can be released after compression and vice versa. In this way, the compressible material remains in the elastic region when held at a temperature above the melting range of the target material 103 . For example, the compressible material may have a modulus of elasticity that remains below 6 GPa at its operating temperature, which may be within the melting range of the target material 103 and/or higher.

Moreover, the compressible material forming the compressible device 414 (which in this embodiment is a liner) is compatible with the target material 103, so that the compressible material does not react with the target material 103 within the cavity 420v. . For example, the compressible material may be a polymeric material such as polyimide, polytetrafluoroethylene, polybenzimidazole or polyether ether ketone. The compressible material may be a rigid foam material with closed cells.

In this implementation, the compressible device 414 (ie, the pressure relief element) is a liner covering at least a portion of the inner surface 420s of the structure 420 associated with the pressure relief device 410 . In other words, the liner 414 (ie, the pressure relief element) is disposed on the inner surface 420s of the structure 420 . The liner 414 is configured to passively change the pressure within the cavity 420v by decreasing or increasing in volume as the pressure within the cavity 420v increases or decreases. For example, when the pressure in cavity 420v is at a minimum, the liner may occupy at least 50% of the volume of cavity 420v of structure 420 to which pressure relief device 410 is associated. That is, the ratio of the volume of the liner 414 covering the inner surface 420s of the structure 420 to the volume of the target material 103 contained within the cavity 420v of the structure may be at least 1. Thus, as the pressure within the cavity increases, the liner decreases in volume and the liner occupies less than 50% of the volume of the cavity 420v, so the target material 103 (in the fluid state) expands to fill the cavity ( 420v) may occupy more than 50% of the volume. In another example, the liner 414 may occupy at least 80% or about 90% of the cavity 420v of the structure 420 when the pressure in the cavity 420v is at a minimum value.

Further, the ratio of the volume of the compressible material forming the compressible device 414 (i.e., pressure relief element) to the volume of the fluid target material 103 contained within the cavity 420v of the structure 420 is the compressibility It may be related (directly or indirectly) to the modulus of elasticity of the compressible material forming the mechanism 414 . As such, the lower the value of this ratio, the lower the elastic modulus of the compressible material should be.

In one example, the compressible material is polyimide, so liner 414 is formed of polyimide and structure 420 is formed of molybdenum. In this example, the volume of the liner 414 occupies at least 80% or about 90% of the cavity 420v of the structure 420, and the volume of the target material 103 occupies the cavity 420v of the structure 420. takes up the rest of During operation, the polyimide liner 414 undergoes elastic deformation as the polyimide is compressed or released as the volume of the polyimide changes due to a change in pressure in the cavity 420v. That is, the polyimide liner 414 is decompressed or returned to its original state after the polyimide is compressed to a deformed state (due to pressure changes in the cavity 420v), and is not permanently deformed. Further, the polyimide liner 414 does not undergo plastic deformation as the polyimide is subjected to cyclic loading (as the polyimide is periodically compressed and decompressed) due to pressure changes within the cavity 420v.

The same mechanism of pressure reduction within the cavity 420v can be achieved with a smaller relative volume of the liner material, where the stress associated with the volume increase of the target material 103 is the liner 414 having both elastic and plastic components. ) can be accommodated by the transformation of A disadvantage of allowing plastic deformation of the liner material is that over time, as the ratio of the volume of the liner 414 to the volume of the target material 103 decreases with each cycle, as the number of heating/cooling cycles increases. That is, the maximum pressure generated in the cavity 420v increases.

During operation, the liner 414 (ie, the pressure relief element) passively prevents the pressure within the cavity 420v from exceeding a maximum allowable value. The maximum allowable value may be correlated with the pressure value at which a leak may occur in the connection area of structure 420 . For example, if structure 420 is within target material supply system 100 and is connected to one or more other structures (eg, structures 121_1 and 121_2 of FIG. 1) at these connection areas, the maximum allowable value is the structure (structure (including 420) may be less than the value of the pressure at which leaks begin to occur in the connection area between them.

The maximum allowable pressure value in an area of the system that is physically located away from the connection (eg a pipe carrying tin from one element of the system to another) can be related to the burst pressure of this structure, which is determined at the operating temperature of the system. there is.

Referring also to FIG. 5A , when the pressure within cavity 420v increases (eg, as the temperature of cavity 420v increases and the density of target material 103 decreases), liner 414 increases the effective volume within the cavity 420v and passively reduces the pressure within the cavity 420v. Specifically, the liner 414 (formed of a compressible material) is passively compressed toward the inner surface 420s of the cavity 420 (indicated by the arrows in FIG. 5A ), thereby reducing the volume of the liner 414. Thus, the volume of the cavity 420v is increased. That is, the compressible material forming the liner 414 is non-permanently deformed when the compressible material is subjected to increasing pressure. In this way, the fluid target material 103 (target material 103 in fluid form) can expand to a larger volume, and thus the potential energy of the fluid target material 103 within the cavity 420v is reduced As such, the pressure in cavity 420v is passively reduced and does not exceed the maximum allowable value at which leakage may occur.

Referring also to FIG. 5B , when the pressure within cavity 420v is reduced (eg, when the temperature of cavity 420v is reduced and the density of target material 103 is increased), cavity 420v Since the pressure in ) is significantly lower than the maximum allowable value (leakage may occur), the cavity 420v does not need to have a larger volume. As such, liner 414 passively reduces the volume of cavity 420v. Specifically, the liner 414 (formed of a compressible material) is passively inflated away from the interior surface 420s of the cavity 420 (indicated by arrows in FIG. volume increases. In other words, the compressible material forming the liner 414 expands (and is also non-permanently deformed) when the compressive material is decompressed.

Because the compressible material compresses and decompresses as the volume of the compressible material changes due to pressure changes in the cavity 420v during operation, the compressible material forming the compressible mechanism 414 (i.e., the pressure relief element): It is configured to remain in a linear elastic state after being repeatedly compressed and decompressed. That is, a compressible material experiences elastic deformation. The compressible material, after being compressed to a deformed state (due to a pressure change within cavity 420v), is decompressed or returns to its original state, and is not permanently deformed. Additionally, when the pressure within cavity 420v increases during operation, the compressible material is subjected to high pressure. For example, the high pressure within cavity 420v may be greater than 20 megapascals (MPa). As such, the compressible material is configured to remain elastic at pressures greater than this high pressure.

Referring to FIGS. 6A and 6B , one embodiment 620 of a structure 420 is associated with a pressure relief device 610 that includes a compressible mechanism 214 or an embodiment 614 of a 414 . Structure 620 is a hollow cylindrical tube having a cylindrical cavity 620v defined by inner surface 620s of wall 620w of cylindrical structure 620 . Cylindrical structure 620 has a circular cross section in the X-Y plane and extends longitudinally along the Z direction. Cavity 620v holds target material 103 . In this implementation, the compressible device 614 is a liner (similar to the liner 414 of FIGS. 4, 5A and 5B). Liner 614 covers at least a portion of inner surface 620s of cylindrical structure 620 . As such, liner 614 has a cylindrical shape that matches the cylindrical shape of inner surface 620s. Liner 614 is in fluid communication with cavity 620v and passively changes the pressure within cavity 620v.

Cylindrical structure 620 may be in target material supply system 100 (FIG. 1). For example, any one of structures 120 , 121_1 , and 121_2 may be a cylindrical structure 620 . In addition, the cylindrical structure 620 may distribute the target material 103 (while in the form or state of a fluid) to any two of the structures 120, 121_1, 121_2, the target material source 105, and the nozzle device 107. It can be configured to pass between. That is, the cylindrical structure 620 can act as a pathway or pipe that conveys the fluid target material 103 between areas of the target material supply system 100 during operation. As such, the cylindrical structure 620 has an inlet 623i configured to receive the fluid target material 103 from a first region within the target material supply system 100 and a fluid target to a second region within the target material supply system 103. and an outlet 623o configured to direct material 103 therethrough. The cylindrical structure 620 is a structure or component (structures 120, 121_1, 121_2), a target material supply source ( 105), and nozzle arrangement 107).

During operation, fluid target material 103 moves into inlet 623i in direction 623d, passes through cavity 620v in direction 623d, and exits outlet 623o in direction 623d; The direction 623d is parallel to the longitudinal direction Z. Liner 614 passively stores energy associated with an increase in pressure in cavity 620v, thereby passively changing the pressure in cavity 620v. As the pressure within cavity 620v increases, liner 614 compresses, increasing the volume within cavity 620s. For example, the liner 614 may be radially compressed toward the inner surface 620s, as shown by line 611 with an arrow along the Y-direction in FIG. 6A. As another example, if a gap is formed between the liner 614 and the inner end face 620e, the liner 614 may be compressed along the longitudinal direction (Figs. 6A to Z direction). Thus, the fluid target material 103 can expand and the pressure within the cavity 620s is reduced. When the pressure within cavity 620v is reduced, liner 614 expands and moves (eg, radially away from interior surface 620s and/or longitudinally away from interior end face 620e). b) the volume within the cavity is reduced.

Moreover, in other implementations, any compressible elements associated with the pressure relief device may be of other shapes. For example, any compressible element may have a solid cylindrical shape with one or more grooves on the outer surface of the cylindrical shape, such grooves extending longitudinally/axially along the cylindrical shape to enclose target material 103. provides a path for This design is shown in FIG. 6C , where the liner 614 includes a groove 614g extending along the Z direction and pointing towards the inner surface 620s. In such implementations, target material 103 may occupy a volume defined between liner 614 and inner surface 620s. As the pressure within this volume increases, the liner 614 compresses, providing extra volume for the target material 103 to expand. For example, the liner 614 may be compressed radially away from the inner surface 620s (as shown in FIG. 6D) and or may be compressed longitudinally along the Z direction as described above. . The compressible element may have the shape of a liner, such as liner 614 of FIG. 6B, with one or more grooves extending outwardly from an inner surface of the cylindrical shape of the liner 614, the grooves being longitudinal/longitudinal along the cylindrical shape. It extends axially and provides a path for the target material (103).

Referring also to FIG. 7 , in some implementations, cylindrical structure 620 is fluidly connected to structure 720_1 , which is a detachable connection at outlet 623i of cylindrical structure 620 . Also, the detachable connector 720_1 is fluidly connected to another structure 720_2 which is another hollow cylindrical tube or pipe. In these implementations, the detachable connection 720_1 may be a pipe fitting or pipe connector configured to connect two pipes, such as, for example, a coupling fitting, adapter fitting, bushing fitting, or union fitting. The cylindrical structures 620 and 720_2 are individual and separate structures connected to each other by a detachable connection part 720_1. In some implementations, structures 620 and 720_2 are within target material supply system 100 (FIG. 1). In such an implementation, any two adjacent structures (including structures 120, 121_1 and 121_2) in the target material supply system 100 may be cylindrical structures 620 and 720_2. Cylindrical structures 620, 720_2) each can be a fluidic device and/or a fluidic target between any two other structures or components in the target material supply system 100 (including the target material source 105 and the nozzle device 107). It may be configured to deliver material 103 .

Structure 720_2 has a cylindrical cavity 720v_2 defined by inner surface 720s_2 of cylindrical structure 720_2. The cylindrical structure 720_2 has a circular cross section in the X-Y plane. It extends longitudinally along the Z direction (similar to the cross section of the cylindrical structure 620 shown in FIG. 6B). Cavity 720v_2 also holds target material 103 . In this implementation, pressure relief device 710_2 is associated with structure 720_2. As such, cylindrical structure 720_2 is also formed by liner 714_2 (ie, which is part of pressure relief device 710_2 and acts as compressible mechanism 714_2) on inner surface 720s_2 of cylindrical structure 720_s. at least partially covered Liner 714_2 is in fluid communication with cavity 720v_2 and passively changes the pressure within cavity 720v_2. The cylindrical structure 720_2 also has an inlet 723i_2 configured to receive the fluid target material 103 from the structure 620 via a detachable connection 720_1 and the fluid target material 103 to another part of the target material supply system 100. and an exit 723o_2 configured to send to the zone.

The separable connector 720_1 has a cavity 720v_1 defined by the inner surface 720s_1 of the separable connector 720_1. The cross section of the detachable connector 720_1 may also be circular, or other shapes such as rectangular or hexagonal, for example. Cavity 720v_1 also holds target material 103 . A detachable connection 720_1 is associated with a pressure relief device 710_1 that includes a compressible mechanism 714_1. In this example, compressible appliance 714_1 is a liner. Liner 714_1 is in fluid communication with cavity 720v_1 and is within cavity 720v_1 when fluid target material 103 is transferred from cylindrical structure 620 to cylindrical structure 720_2 via separable connection 720_1. change the pressure passively.

During operation, the fluid target material 103 enters the inlet 623i of the cylindrical structure 620 in a direction 723d parallel to the longitudinal direction Z, passes through the cavity 620v, and exits the outlet 623o. It goes into the cavity 720v_1 of the detachable connection 720_1 through this. The fluid target material 103 is then passed through the cavity 720v_1 of the separable connector 720_1 and into the cavity 720v_2 of the cylindrical structure 720_2 through the inlet 723i_2 of the cylindrical structure 720_2. do. The fluid target material 103 then moves in a direction 723d out of the cavity 720v_2 through the outlet 723i_2 of the cylindrical structure 720_2, thereby disposing the target material 103 into the third portion of the target material supply system 100. It is transmitted from area 1 (at the inlet 623i) to area 2 (at the outlet 723i_2).

Liners 614, 714_1, and 712_2, respectively, are present to avoid generating high pressure when the target material 103 melts (from a solid state to a fluid or liquid state). For example, when the cylindrical structure 620, 720_2 is at a temperature below the melting range of the target material 103 and the target material 103 melts (from the solid target material) within the separable joint 720_1, Expansion of the fluid target material 103 in the detachable connector 720_1 into these neighboring structures 620 and 720_2 is prevented. As such, the liner 714_1 is configured to passively compress against the interior surface 720s_1, thereby changing the volume of the liner 714_1, thereby passively changing the volume of the cavity 720v_1 and also the fluid target material 103 ) can expand. For example, the liner 714_1 may be compressed along a radial direction, as indicated by a line with an arrow 711_1 along the Y-direction associated with the structure 720_1 in FIG. 7 . Additionally, for example, if the fluid target material 103 has a through gap between the liner 714_1 and the inner end surface 720e_2 of the structure 720_2, the liner 714_1 may be compressed in the longitudinal direction.

Similarly, if either of structures 620 and 720_2 is surrounded by a structure having a temperature below the melting range of target material 103 and also target material 103 melts in either of structures 620 and 720_1 When, each liner 614, 714_2 is passively pressed against each inner surface 620s, 720s_2 (arrow 611, 711_2 along the Y direction associated with each structure 620, 720_2 in FIG. 7). ) or is configured to be passively compressed against the inner end face 720e_2, such that the volume of each liner 614, 714_2 changes so that the volume of each cavity 620v, 720v_2 It changes passively and also allows the fluid target material 103 to expand. In this way, as the target material 103 melts in the various structures of the target material supply system 100 (including structures 620, 720_1, and 720_2), damage to the target material supply system 100 is prevented or It is mitigated and the occurrence of high pressure inside the target material supply system 100 is avoided.

In other implementations, the pressure relief devices (eg, pressure relief devices 610 , 710_1 , 710_2 ) may be associated with other cylindrical structures that are hollow cylindrical tubes having cylindrical cavities that deliver the fluid target material 103 . For example, target material supply system 100 may include several cylindrical structures, each of which is involved in delivering target material 103 from target material source 105 to nozzle arrangement 107. Acting as a pipe, a pressure relief device may be associated with each hollow cylindrical tube. Moreover, each cylindrical structure within the target material supply system 100 may be fluidly connected to each of one or more adjacent cylindrical structures by a separable connection (such as separable connection 720_1). Each detachable joint may be associated with a different pressure relief device, including a different passive relief device, including a different compressible mechanism (such as liner 710_1). In such embodiments, the detachable connection may be a pipe fitting or pipe connector configured to connect two or more pipes in a connection area, such as for example a tee fitting, a wye fitting, a cross fitting or an elbow fitting. there is.

In another example, any compressible element may have a rectangular rod shape (so that a cross section of the compressible element has a rectangular shape). In this example, the compressible element may fill at least a portion of the inner surface of the cylindrical structure and extend longitudinally/axially along the inner surface of the structure. In another example, any compressible element may have a hexagonal bar shape or any other polygonal bar shape. In this example, the compressible element may or may not have a cross-sectional shape that matches the cross-sectional shape of the inner surface of the structure. Any of these other shapes may have one or more grooves on one side of the shape extending along the shape.

Referring to FIG. 8 , one embodiment 810 of a pressure relief device 110 ( FIGS. 1 , 2 , 3A and 3B ) is associated with a structure 420 . Structure 420 may be any of structures 120, 121_1, 121_2 (FIG. 1) or cylindrical structures 620, 720_1, 720_2 (FIGS. 6A, 6B and 7). Additionally, structure 420 may be within target material supply system 100 . As noted above, structure 420 holds or receives fluid target material 103 within cavity 420v defined by interior surface 420s of structure 420 .

Pressure relief device 810 is a passive pressure relief device that includes a compressible mechanism 814 in direct fluid communication with cavity 420v of structure 420 . In this implementation, the compressible device 814 is an inert gas formed as a bubble within the target material 103 . Inert gas 814 is configured to passively change the pressure within cavity 420v. The inert gas 814 is a gas that does not react with the target material 103 . For example, the inert gas 814 may be argon (Ar), xenon (Xe), helium (He), nitrogen (N ₂ ), hydrogen (H ₂ ), or carbon monoxide (CO). The inert gas 814 occupies a portion of the cavity 420v, so that if the pressure within the cavity 420v increases during operation, the inert gas 814 will sufficiently reduce the pressure within the cavity 420v. This results in a decrease in the density of the target material 103 as the temperature of the target material 103 increases (eg, when the target material 103 changes from a solid to a liquid and/or when the temperature of the liquid increases). may be caused by Moreover, the volume of the inert gas 814 does not result in a significant increase in the total volume within the target material supply system 100 that could result in detrimental effects within the target material supply system 100 . For example, inert gas 814 may occupy about 2% to about 10% of cavity 420v of structure 420 to which pressure relief device 810 is associated.

During operation, the inert gas 814 passively reduces the pressure within the cavity 420v of the structure 420 by reducing its volume in response to the increasing pressure as a result of expansion of the target material 103 within the cavity 420v. change to Referring also to FIG. 9A , when the pressure within cavity 420v increases (eg, as the temperature within cavity 420v increases and the density of target material 103 decreases), inert gas 814 passively reduces the pressure within cavity 420v by compressing and increasing the available volume of cavity 420v, where the available volume of cavity 420v is the volume outside the bubble of inert gas 814. Specifically, inert gas 814, which is a fluid gas bubble, is passively compressed by decreasing volume (indicated by arrows in FIG. 9A) and increasing density, thus increasing the usable volume of cavity 420v. In this way, the fluid target material 103 (i.e., the target material 103 in fluid form) can expand to a larger volume, so that the energy of the fluid target material 103 within the cavity 420v is reduced As such, the pressure in cavity 420v is passively reduced or maintained.

Referring also to FIG. 9B , when the pressure within cavity 420v is reduced (eg, when the temperature within cavity 420v is reduced and the density of target material 103 is increased), cavity 420v ) need not have a larger volume. As such, the fluid gas bubble, inert gas 814, passively reduces the usable volume of cavity 420v by expanding or increasing in volume (indicated by arrows in FIG. 9B) and decreasing in density. In this way, the inert gas 814 releases energy back to the target material 103 within the cavity 420v.

Referring to FIGS. 9C and 9D , inert gas 814 may be implemented when an external force F, such as gravity and/or other force, acts on structure 420 . In this example, the external force F is along the negative Y direction. Inert gas 814 is formed as a gas bubble inside extension 420e of structure 420 . Extension 420e of the structure acts as a pocket (or additional volume) occupied by inert gas 814. Since the inert gas 814 has a lower density than the target material 103 in the cavity 420v, the inert gas 814 flows in the positive Y direction (ie, opposite to the direction of the external force F) into the cavity ( It floats or rises to the top of the usable volume in 420v (which is part of cavity 420v associated with extension 420e of structure 420).

Referring to FIG. 9C , as similarly discussed in FIG. 9A , if the pressure in cavity 420v increases (e.g., if the temperature in cavity 420v increases and the density of target material 103 decreases), ), inert gas 814 passively reduces the pressure within cavity 420v by compression (indicated by arrows in FIG. 9C ), which increases the usable volume of cavity 420v, where ) is the volume below or outside the bubble of inert gas 814. As such, the pressure within cavity 420v is passively reduced or maintained when external force F also acts on structure 420 . Referring to FIG. 9D , as similarly described in FIG. 9B , when the pressure in cavity 420v decreases (e.g., the temperature of cavity 420v decreases and the density of target material 103 increases). ), the inert gas 814, which is a fluid gas bubble, passively reduces the usable volume of the cavity 420v either by expansion or increase in volume (indicated by arrows in FIG. 9D) or decrease in density.

In embodiments that include one or more structures (eg, structures 120, 121_1, 121_2, 620, 720_1, 720_2) in the target material supply system 100, the pressure relief device 810 may include the structures 120, 121_1, 121_2, 620, 720_1, 720_2) may be associated with any one or more. Specifically, inert gas 814 may be formed as one or more gas bubbles, each gas bubble formed inside a respective cavity of each structure associated with pressure relief device 810 . In this way, the inert gas 814 formed as gas bubbles in the cavities can passively change the pressure within each cavity of the structure during operation.

Referring to FIG. 10 , another embodiment 1010 of a pressure relief device 110 ( FIGS. 1 , 2 , 3A and 3B ) is associated with a structure 420 . Structure 420 may be any of structures 120, 121_1, 121_2 (FIG. 1) or cylindrical structures 620, 720_1, 720_2 (FIGS. 6A, 6B and 7). Additionally, structure 420 may be within target material supply system 100 . As noted above, structure 420 holds or contains target material 103 within cavity 420v defined by interior surface 420s of structure 420 .

Pressure relief device 1010 includes a passive pressure relief device 1012 that includes a compressible mechanism 1014 in direct fluid communication with cavity 420v of structure 420 . In this implementation, the passive pressure relief device 1012 is a pressure relief valve 1012 and the compressible mechanism 1014 is a mechanical spring configured to passively change the pressure within cavity 420v. Pressure relief valve 1012 remains closed when the pressure changes in cavity 420v. In other words, the pressure relief valve 1012 remains isolated and isolated from the external environment outside the cavity 420v.

Specifically, the pressure relief valve 1012 has a valve body 1012b that surrounds or supports a mechanical spring 1014, is attached to the valve body 1012b and acts as a stop for one end of the mechanical spring 1014 to pressure A cap 1012c configured to keep the relief valve 1012 closed, and a valve seat 1012s configured to move along the Y direction as the pressure in the cavity 420v changes. The mechanical spring 1014 is disposed between the cap 1012c and the valve seat 1012s, so that when the valve seat 1012s moves in the positive Y direction, the mechanical spring 1014 is compressed and the valve seat 1012s is moved in the negative Y direction. Compression is decompressed when moving in the Y direction. The pressure relief valve 1012 and the mechanical spring 1014 are each made of a material compatible with the target material 103 at the relevant temperature and pressure above the melting range of the target material 103 . Also, the material of the pressure relief valve 1012 (including the valve seat 1012s and the mechanical spring 1014) does not react with the target material 103. For example, the material of the pressure relief valve 1012 may be a refractory metal or ceramic material.

During operation, mechanical spring 1014 passively changes the pressure within cavity 420v of structure 420 by deforming elastically and providing additional volume to cavity 420v of structure 420 . Referring also to FIG. 11A , when the pressure within cavity 420v increases (eg, as the temperature of cavity 420v increases and the density of target material 103 decreases), mechanical spring 1014 moves through cavity 420v. It passively reduces the pressure in cavity 420v by increasing the usable volume of 420v. Specifically, the valve seal 1012s is forced along the positive Y direction by the increasing pressure in the cavity 420v to compress the mechanical spring 1014 (indicated by the arrow in FIG. 11A) and the cavity 420v ) increases the usable volume of In this way, the fluid target material 103 can expand to a larger volume, and thus the energy of the fluid target material 103 within the cavity 420v is reduced. As such, the pressure in cavity 420v is passively reduced. Also, mechanical spring 1014 can store this energy (and cap 1012c remains closed), so that energy is not lost to the external environment outside cavity 420v.

Referring also to FIG. 11B , when the pressure within cavity 420v is reduced (eg, when the temperature of cavity 420v is reduced and the density of target material 103 is increased), cavity 420v is There is no need to have a larger volume. Since the valve seal 1012s is not being forced along the positive Y direction, the mechanical spring 1014 is decompressed and the valve seal 1012s moves along the negative Y direction (indicated by the arrow in FIG. 11B) and thus The volume of cavity 420v is reduced. In this way, mechanical spring 1014 releases energy back to target material 103 in cavity 420v.

In embodiments that include one or more structures (eg, structures 120, 121_1, 121_2, 620, 720_1, 720_2) in the target material supply system 100, the pressure relief device 1010 may include structures 120, 121_1 , 121_2, 620, 720_1, 720_2) may be associated with any one or more. For example, the pressure relief valve 1012 can be a tee connector with a ball check valve that fluidly connects two adjacent structures in the target material supply system 100 .

Referring to FIG. 12A , procedure 1240 for regulating the pressure of target material 103 in the target material supply system is performed. This procedure may include one or more of structures 120, 121_1, 121_2, structures 420 (FIGS. 4, 8, and 10), and cylindrical structures 620, 720_1, 720_2 (FIGS. 6A, 6B, and 7). target material supply system 100 (FIG. 1) that can be performed. Each of the structures in the target material supply system 100 may be associated with a pressure relief device (eg, including a pressure relief device 110, 410, 610, 710_1, 710_2, 810, 1010), but procedure 1240 does not need to involve a pressure relief device to be performed. Procedure 1240 is now discussed for target material supply system 100, which includes target material supply source 105, nozzle arrangement 107, and structures 120, 121_1, 121_2 (FIG. 1). Procedure 1240 involves heating one or more portions or all of the target material supply system 100 to melt the target material 103 in solid form within or in a portion of the target material supply system 100, thereby causing the fluid to flow. It is performed whenever it is necessary to form the target material 103 (ie, the target material 103 in fluid or liquid form). Generally, the target material supply system 100 includes a set of zones, each zone defined by its own heater and independent temperature controller. At any particular moment, the target material supply system 100 may include one or more non-restricted areas and one or more restricted areas.

The unrestricted region is a region defined by open cavities capable of releasing the pressure of the target material 103 when the temperature of the unrestricted region is greater than the melting range of the target material 103 . An open cavity is a cavity that is fluidly connected to another volume outside the unrestricted area, and moreover, pressure within the unrestricted area can be released to the other volume. A confined region is defined by a closed cavity, i.e., a volume that is not fluidly connected (eg, temporarily) to other volumes outside the cavity. The cavity may be closed by a solid target material 103 contained on each side of the area and acting as a high pressure seal. Each of the one or more restricted areas and the one or more non-restricted areas is defined as an individual and distinct structure (e.g., structures 120, 121_1, 121_2, structures within target material source 105, and structures within nozzle arrangement 107). It can be.

Because the non-confined area is defined by the open cavity, the fluid target material 103 is designed so that the pressure from the expanding volume of the fluid target material 103 can escape to other volumes outside the non-confined area, so that each As the temperature of the unrestricted region increases to a temperature greater than the melting range of the target material 103, it can expand into the open volume of each open cavity. In this way, the pressure of the target material 103 is automatically adjusted when the temperature of each unrestricted region is greater than the melting range of the target material 103 .

Because the confinement area is defined by the closed cavity, the fluid target material 103 is not allowed to expand into the open volume. Thus, when the target material 103 is raised to a temperature greater than the melting range of the target material 103 within the closed cavity of the confined region, the pressure of the target material 103 does not expand into at least one adjacent region and cannot be controlled (each must be at a temperature greater than the melting range of the target material 103 in order for the fluid target material 103 to expand and regulate the pressure within the closed cavity).

Procedure 1240 includes identifying one or more unrestricted regions (1241). For example, target material source 105 may include at least one structure that is a non-limiting area, such as a target material reservoir configured to hold target material 103 . Specifically, the target material reservoir includes an open volume within the cavity of the target material reservoir that allows the fluid target material 103 to expand if the temperature of the target material reservoir is greater than the melting range of the target material 103 . The target material reservoir may also be configured to create a fluid target material 103 from a solid target material. As such, the target material reservoir within the target material source 105 may be identified as a non-restricted area.

Next, the target material 103 is melted ( 1242 ) in at least one of the identified unrestricted regions such that the at least one unrestricted region has a temperature greater than the melting range of the target material 103 . For example, a non-restricted area may be identified as a target material reservoir within a target material source 105 configured to produce a fluid target material 103 from a solid target material and to hold the fluid target material 103. Specifically, the solid target material in the target material storage (non-limiting area) can be melted by heating the solid target material (so that the fluid target material 103 is produced), so that the target material 103 is It expands into the open cavity of the unit (which is a non-restricted area) to regulate the pressure of the target material in the target material reservoir.

As such, the temperature of the target material reservoir (i.e., the non-restricted region) has a temperature greater than the melting range of the target material, allowing the target material to expand into the open volume of the cavity of the target material reservoir, so that the target material reservoir The pressure of the fluid target material 103 in the cavity is regulated. Additionally, leaks within the target material supply system 100 that may occur due to unregulated pressure of the fluid target material 103 (which may exceed maximum allowable values) are mitigated.

Next, the low-temperature confinement region is identified (1243). A low-temperature confined region is a confined region having a temperature less than the melting range of the target material (103). Once a cold confined region is identified (1243), a determination is made as to whether the identified cold confined region is adjacent to at least one of the non-confined regions having a temperature greater than the melting range of the target material 103 (1244). . If the cold confined region is adjacent to a non-confined region having a temperature greater than the melting range of the target material 103 (1244), the target material 103 within the cold confined region is melted (1245). If there are other cold confining regions (1246), steps 1243, 1244 and 1245 are repeated for each of the other cold confining regions, until all of the other cold confining regions have been heated and the target material 103 has melted. do.

For example, the limiting area may be the structures 120 , 121_1 , and 121_2 and the nozzle device 107 . Each structure (e.g., structures 120, 121_1, and 121_2), which is a confined area defined by a closed cavity, includes two or more other structures, a pipe configured to transfer the target material 103 between the other structures. a freeze valve configured to separate, and a droplet generator assembly configured to generate particles (eg, particles 103p ) in the form of droplets of target material 103 . Furthermore, the nozzle device 107 may include a structure defined as a confinement area. The nozzle arrangement 107 includes a nozzle that can be regarded as a non-restricted area, which nozzle directs particles 103p of the target material 103 into a light beam (a light beam in the interior 122i of the chamber 122) 106)), the light beam irradiating the particles 103p into a plasma state (eg, plasma 108) to generate EUV light (eg, EUV light 109). create

In one example, structure 121_1 may be a freeze valve in target material supply system 100 that separates the target material reservoir of target material supply 105 from structure 120 . Structure 120 is a pipe (similar to hollow cylindrical structure 620 of FIGS. 6A and 6B ) that delivers target material 103 from a target material reservoir in target material source 105 to structure 121_2 . can Structure 121_2 may be a droplet generator assembly that receives target material 103 via pipe 120 and generates particles 103p of target material 103 . A nozzle of the nozzle device 107 may receive the target material 103 from the drop generator assembly 121_2 and send the particles 103p to the target space 124 along the path 126 to interact with the light beam 106. send.

Thus, in this example, when the target material reservoir (i.e., unrestricted region) of the target material source 105 has a temperature greater than the melting range of the target material 103 (e.g., the target material in step 1243) By melting the material 103 to create a fluid), the target material 103 can be melted in the freeze valve 121_1 since the freeze valve 121_1 is now an unrestricted area. In the freezing valve 121_1 by heating the target material 103 in the freezing valve 121_1 (to melt the target material), the target material 103 expands into the adjacent unrestricted area (target material reservoir). The pressure of the target material 103 can be adjusted.

In other words, procedure 1240 causes each cold confinement region of target material supply system 100 to be heated so that each cold confinement region is heated to another temperature where the cold confinement region contains solid target material 103. It is heated only when not completely blocked by the area, which prevents expansion of the target material (103). In this way, leakage within the target material supply system 100 that may occur due to uncontrolled pressure of the fluid target material 103 (which may exceed the maximum allowable value) is mitigated or reduced, and the target material supply system ( 100) can be operated for a longer time.

Referring also to FIG. 12B , in some implementations, procedure 1240 determines at step 1244 that the low-temperature confined region is not adjacent to an unconstrained region having a temperature greater than the melting range of the target material 103. If so, additional steps performed after step 1244 may be further included. Specifically, procedure 1240 may include determining 1247 whether a confined zone of low temperature is adjacent to at least one of the confined zones having a temperature greater than a melting range of target material 103 , if If so, the target material 103 in the cold confinement region is melted (1248) before returning to step 1246.

In the above example, when the target material reservoir and the freezing valve 121_1 of the target material supply source 105 have a temperature greater than the melting range of the target material 103, the target material 103 is in one or more other confined regions. Adjacent to one of these target material reservoirs or freeze valves may be melted in one or more of the other confinement zones having a temperature below the melting range of the target material 103 . Specifically, for the target material supply system 100 of FIG. 1, since the pipe 120 is adjacent to the freeze valve 121_1 (ie, the confinement region) having a temperature greater than the melting range of the target material 103, the pipe At 120 (ie, the confinement zone) the target material 103 may be melted. If one or more confinement zones adjacent to the freeze valve 121_1 (ie, separate structures (not shown)) are also included in the target material supply system 100, the temperature of the freeze valve 121_1 is the target material 103 When greater than the melting range, the target material 103 in these other adjacent confinement regions may further melt.

Also, in this example, if the target material reservoir (in the target material source 105), the freeze valve 121_1 and the pipe 120 have a temperature greater than the melting range of the target material 103, the target material 103 may melt in the drop generator assembly 121_2 (ie, the confinement region adjacent to the pipe 120), so that the drop generator assembly also has a temperature greater than the melting range of the target material 103. Next, after the target material reservoir, the freezing valve 121_1, the pipe 120 and the droplet generator assembly 121_2 have a temperature greater than the melting range of the target material 103, the nozzle in the nozzle device 107 also targets the target material. It may be heated to a temperature greater than the melting range of material 103 . Since the target material 103 is melted in all areas before being melted in the nozzle device 107, the target material 103 can be appropriately controlled by the nozzle. In this way, by sequentially heating the target material 103 in each confinement region (having a temperature smaller than the melting range of the target material 103), the target material 103 can be melted in the confinement region, so that each The confined region is adjacent to at least one of the non-confined region and/or the confined region having a temperature greater than the melting range of the target material 103 at each step in the sequence. Thus, by regulating the pressure within each confinement zone at each step in the sequence, the pressure within the target material supply system 100 that may arise due to an uncontrolled pressure of the fluid target material 103 (which may exceed the maximum allowable value) Leakage may be mitigated or reduced.

In a further implementation, procedure 1240 may be performed when at least one of structures 120 , 121_1 , 121_2 , target material source 105 , and nozzle device 107 are also associated with a pressure relief device. In the example of FIG. 1 , structure 120 is associated with pressure relief device 110 . As such, when structure 120 is heated using procedure 1240, compressible mechanism 214 (FIG. 2) of pressure relief device 110 expands the volume of the cavity, thereby increasing the cavity of structure 120. The pressure within the unit can be further varied (and adjusted) manually. Thus, the fluid target material 103 simultaneously expands into a larger volume within the cavity of the structure 120 and at least one of the adjacent structures 121_1 and 121_2 having a temperature greater than the melting range of the target material 103. can expand into In this way, leakage within the target material supply system 100 that may occur due to uncontrolled pressure of the fluid target material 103 is further mitigated or reduced.

Referring to FIG. 13 , an embodiment 1360 of a UV light source is shown, where the EUV light source 1360 includes an embodiment 1300 of the target material supply system 100 . EUV light source 1360 includes one embodiment 1322 of chamber 122 . Target material supply system 1300 includes at least one structure (eg, structure 120 of target material supply system 100 or any other structure disclosed herein) 1320, which structure 1320 comprises: It is configured to hold the target material 1303. Pressure relief device 1310 is associated with structure 1320 as discussed above with respect to pressure relief device 110 . The target material supply system 1300 comprises a target material source 1305 configured to produce a fluid target material 1303 from a solid material 1361, and particles 1303p of the target material 1303 via a capillary device 1363. and a nozzle arrangement 1307 configured to form and direct. The pressure relief device 1310 may be a structure 1320 within the target material source 1300, within the nozzle arrangement 1307, or within another component of the target material supply system 1300 not shown in FIG. 13 (eg, a reservoir system). ) may be related.

A nozzle arrangement 1307 delivers target material 1303 in the form of a stream 1362 of particles 1303p to a target space 1324 within chamber 1322 of EUV light source 1360 . The interaction of the radiation pulses of the light beam 1364 in the target space 1324 with the particles 1303p of the target material 1303 creates a plasma 1365 that produces EUV light 1366. Light beam 1364 may be generated by optical source 1367 . The EUV light 1366 generated by the interaction between the radiation pulses of the light beam 1364 and the particles 1303p is collected by a collector 1368, which directs the EUV light 1366 to a lithographic exposure device 1369. supply to The collector 1368 is, for example, a first focal point in the target space 1324 and a second focal point at the midpoint 1370 where the EUV light 1366 is output from the EUV light source 1360 and input to the lithographic exposure device 1369. It may be in the shape of an ellipsoid with a focal point (also referred to as an intermediate focus). Lithographic exposure apparatus 1369 may be, for example, an integrated circuit lithography tool that uses EUV light 1366 to process silicon wafer workpiece 1371 in a known manner. The silicon wafer workpiece 1371 is then further processed in a known manner to obtain an integrated circuit device.

Other embodiments are within the scope of the following clauses.

1. A pressure relief device for a target material supply system configured to deliver target material, comprising:

a pressure relief element formed of a compressible material and disposed on an inner surface of the structure;

the inner surface defines a cavity in the target material supply system, the structure being formed of a rigid material and configured to contain the target material within the cavity;

wherein the pressure relief element is configured to passively prevent the pressure within the cavity from exceeding a maximum allowable value.

2. The pressure relief device of claim 1, wherein the pressure relief element is a liner covering at least a portion of an inner surface of the structure.

3. The pressure relief device of clause 2, wherein the structure is a hollow cylindrical tube, the cavity is cylindrical, and the liner covers at least a portion of an inner surface of the hollow cylindrical tube.

4. The pressure relief element of item 3, wherein the pressure relief element has a cylindrical shape having one or more grooves on the sides of the cylindrical shape, the grooves extending axially along the cylindrical shape, the pressure relief element comprising a hollow cylindrical tube A pressure relief device that fits into the cylindrical cavity of the

5. The pressure relief device according to item 2, wherein the pressure relief element has a rectangular bar shape, a hexagonal bar shape or a polygonal bar shape, and the pressure relief element fills at least a portion of the structure.

6. The pressure relief device of claim 1, wherein the structure is a separable connection connecting two separate separate fluid devices, and wherein the pressure relief device is a liner or sleeve extending at least partially over the separable connection.

7. The compressible material according to point 1, wherein the compressive material remains elastic at a temperature greater than the melting range of the target material, so that the compressible material exceeds the melting range of the target material and has a maximum allowable pressure greater than 20 MPa (MegaPascals). A pressure relief device compatible with the target material at pressures ranging from

8. The pressure relief device of item 1, wherein the compressible material has a modulus of elasticity that remains less than 6 GPa at operating temperature.

9. The pressure relief device of point 1 wherein the ratio of the volume of the compressible material to the volume of the target material contained within the cavity of the structure is related to the modulus of elasticity of the compressible material.

10. The pressure relief device of item 1, wherein the compressible material has a modulus of elasticity less than the modulus of elasticity of the structure.

11. The pressure relief device of item 1, wherein the compressible material remains in a linear elastic state after being repeatedly compressed and decompressed.

12. The pressure relief device of item 1, wherein the compressible material is configured to deform when compressed and decompressed, wherein the compressible material's deformation is non-permanent.

13. The pressure relief device of item 1, wherein the compressible material is a polymeric material.

14. Pressure relief device according to item 13, wherein the polymeric material is polyimide, polytetrafluoroethylene, polybenzimidazole or polyether ether ketone.

15. The pressure relief element of clause 1, wherein the pressure relief element is a liner covering at least a portion of an interior surface of the structure, and the volume of the liner covering the interior surface of the structure relative to the volume of target material contained within the cavity of the structure. wherein the ratio of is at least 1.

16. The method of clause 15, wherein the compressible material is polyimide, so that the liner is formed of polyimide, the structure is formed of molybdenum, the volume of the liner occupies at least 80% of the cavity of the structure, and the target material of the volume occupies the remainder of the cavity of the structure, wherein the polyimide liner undergoes elastic deformation and not permanent or plastic deformation.

17. The pressure relief device of item 1, wherein the compressible material is a rigid foam material with closed cells.

18. The pressure relief device of item 1, wherein the compressible material is formed of polyimide.

19. A target material supply system configured to deliver particles of a target material to a target space inside the chamber, comprising:

one or more structures, each structure configured to hold the target material within a cavity defined by an inner surface of the structure; and

a pressure relief device associated with at least one of the structures;

wherein the pressure relief device includes a passive pressure relief device, the pressure relief device including a compressible mechanism in fluid communication with the cavity and configured to passively change a pressure within the cavity;

wherein the compressible mechanism expands an effective volume within the cavity to compensate for an increase in volume of the target material within the cavity.

20. The target material supply system according to item 19, wherein the increase in volume of the target material within the cavity is due to a change in the temperature of the target material.

21. The target material supply system according to item 20, wherein the target material is configured to emit extreme ultraviolet rays in a plasma state.

22. The target material supply system of clause 19, wherein the compressible mechanism is a liner covering at least a portion of the inner surface of the structure to which the pressure relief device is associated.

23. The target material supply system of clause 22, wherein the structure to which the pressure relief device is associated is a hollow cylindrical tube having a cylindrical cavity, and wherein the liner covers at least a portion of an inner surface of the hollow cylindrical tube.

24. The target material supply system of clause 22, wherein the liner occupies about 90% of the cavity of the structure to which the pressure relief device is associated.

25. A target material supply system according to clause 19, wherein the compressible mechanism is a polymeric material.

26. The target material supply system according to item 19, wherein the compressible mechanism is an inert gas that does not react with the target material and is configured to come into physical contact with the target material.

27. The target material supply system according to item 26, wherein the inert gas is argon (Ar), xenon (Xe), helium (He), nitrogen (N ₂ ), hydrogen (H ₂ ) or carbon monoxide (CO).

28. The target material supply system of clause 26, wherein the inert gas occupies about 2% to about 10% of the cavity of the structure to which the pressure relief device is associated.

29. The method of point 19, wherein the passive pressure relief device is a pressure relief valve, the compressible mechanism is a mechanical spring configured to passively change an effective volume within the cavity, and wherein the effective volume within the cavity is and wherein the pressure relief valve remains closed when changed.

30. The target material supply system of clause 29, wherein the pressure relief valve and mechanical spring are each made of a material that is compatible with the target material at a relevant temperature and pressure above the melting range of the target material.

31. The target material supply system according to item 30, wherein the material is a refractory metal or ceramic material.

32. The target material supply system according to item 19, wherein the target material is tin, lithium, xenon or a tin alloy.

33. The target material supply system of clause 19, wherein the pressure relief device is associated with a plurality of cylindrical structures, each cylindrical structure being a hollow cylindrical tube having a cylindrical cavity for delivering the target material in fluid form.

34. The target material supply system according to clause 33, wherein each cylindrical structure is connected to one or more other structures by a detachable connection.

35. The target material supply system according to clause 34, wherein the detachable connection is associated with another pressure relief device comprising another passive pressure relief device comprising another compressible mechanism.

36. The method of clause 19, further comprising a target material source configured to produce a target material from a solid target material, and a nozzle device configured to direct particles of the target material into interaction with the light beam, wherein the particles and the light beam A target material supply system in which plasma and extreme ultraviolet rays of the target material are generated by the interaction of .

37. Apparatus for a target material supply system configured to deliver particles of a target material, comprising:

a pressure relief device comprising a compressible mechanism in fluid communication with an interior of a cavity in a structure of a target material supply system;

the cavity is configured to contain the target material within the interior of the cavity;

wherein the compressible mechanism of the pressure relief device is configured to passively change an effective volume within the cavity by absorbing or releasing energy related to pressure within the cavity.

38. A method for regulating the pressure of a target material in a target material supply system comprising one or more non-restricted zones and one or more confined zones, each non-restricted zone being defined by an open cavity that is not fluid-sealed, wherein: Each confinement area is defined by a closed cavity, the method comprising:

identifying one or more of the non-restricted areas;

melting the target material in at least one of the identified unconstrained regions such that the at least one unconstrained region has a temperature greater than a melting range of the target material; and

The target material is melted in each confined area having a temperature lower than the melting range of the target material only when the confined area is adjacent to at least one of the non-confined areas having a temperature greater than the melting range of the target material, and the confined area A method for regulating the pressure force of a target material in a target material supply system comprising the step of regulating the pressure of the target material within the system.

39. The method of clause 38, wherein melting the target material in the unrestricted area comprises heating the target material such that the target material expands into an open cavity of the unrestricted area.

40. The method of clause 38, wherein melting the target material in the confinement zone comprises heating the target material so as to adjust the pressure of the target material by expanding the target material into the at least one adjacent non-confinement zone. method.

41. The method of clause 38, wherein each of the one or more restrictive regions and the one or more non-restrictive regions is defined as a separate separate structure.

42. The structure of item 41, wherein each structure that is a confinement area comprises: a pipe configured to transfer a target material between other structures; a freeze valve configured to separate two or more other structures; a droplet generator assembly configured to generate particles in the form of droplets of a target material; and a nozzle configured to generate ultraviolet light by directing particles of the target material to interact with a light beam irradiating the particles into a plasma state.

43. The method of clause 41, wherein at least one of the structures that is a non-restricted area is a target material reservoir configured to hold a target material.

44. The method of clause 38, wherein at least one of the confining regions having a temperature greater than the melting range of the target material only if the other confining region is adjacent to at least one of the confining regions having a temperature greater than the melting range of the target material. The method further comprising melting the target material.

45. The method of point 44, wherein the step of melting the target material in the confined zones comprises at least one of the non-confined zones and/or the confined zones where each confined zone has a temperature greater than the melting range of the target material at each step in the sequence. heating the target material in a contiguous sequence, each of the one or more confinement zones having a temperature less than a melting range of the target material.

Claims (45)

A pressure relief device for a target material supply system configured to deliver a target material, comprising:
a pressure relief element formed of a compressible material and disposed on an inner surface of the structure;
the inner surface defines a cavity in the target material supply system, the structure being formed of a rigid material and configured to contain the target material within the cavity;
wherein the pressure relief element is configured to passively prevent the pressure within the cavity from exceeding a maximum allowable value. According to claim 1,
wherein the pressure relief element is a liner covering at least a portion of an inner surface of the structure. According to claim 2,
wherein the structure is a hollow cylindrical tube, the cavity is cylindrical, and the liner covers at least a portion of an inner surface of the hollow cylindrical tube. According to claim 3,
wherein the pressure relief element has a cylindrical shape having one or more grooves on the sides of the cylindrical shape, the grooves extending axially along the cylindrical shape, the pressure relief element fitting into a cylindrical cavity of a hollow cylindrical tube. , pressure relief device. According to claim 2,
The pressure relief device of claim 1 , wherein the pressure relief element has a rectangular bar shape, a hexagonal bar shape, or a polygonal bar shape, and the pressure relief element fills at least a portion of the structure. According to claim 1,
wherein the structure is a separable connection connecting two separate distinct fluid devices, and wherein the pressure relief device is a liner or sleeve extending at least partially over the separable connection. According to claim 1,
The compressive material remains elastic at temperatures greater than the melting range of the target material, so that the compressible material adheres to the target material at pressures beyond the melting range of the target material and up to a maximum allowable pressure greater than 20 MPa (megapascals). Compatible, pressure relief device. According to claim 1,
wherein the compressible material has a modulus of elasticity that remains less than 6 GPa at operating temperature. According to claim 1,
wherein the ratio of the volume of compressible material to the volume of target material contained within the cavity of the structure is related to the modulus of elasticity of the compressible material. According to claim 1,
wherein the modulus of elasticity of the compressible material is less than the modulus of elasticity of the structure. According to claim 1,
wherein the compressible material remains in a linear elastic state after being repeatedly compressed and decompressed. According to claim 1,
wherein the compressible material is configured to deform when compressed and decompressed, wherein the deformation of the compressible material is non-permanent. According to claim 1,
wherein the compressible material is a polymeric material. According to claim 13,
wherein the polymeric material is polyimide, polytetrafluoroethylene, polybenzimidazole or polyether ether ketone. According to claim 1,
The pressure relief element is a liner covering at least a portion of an interior surface of the structure, wherein a ratio of the volume of the liner covering the interior surface of the structure to the volume of the target material contained within the cavity of the structure is at least one. Device. According to claim 15,
The compressible material is polyimide, so that the liner is formed of polyimide, the structure is formed of molybdenum, the volume of the liner occupies at least 80% of the cavity of the structure, and the volume of the target material is the cavity of the structure. A pressure relief device, wherein the polyimide liner undergoes elastic deformation and no permanent or plastic deformation. According to claim 1,
wherein the compressible material is a rigid foam material with closed cells. According to claim 1,
wherein the compressible material is formed of polyimide. A target material supply system configured to deliver particles of a target material to a target space inside a chamber, comprising:
one or more structures, each structure configured to hold the target material within a cavity defined by an inner surface of the structure; and
a pressure relief device associated with at least one of the structures;
wherein the pressure relief device includes a passive pressure relief device, the pressure relief device including a compressible mechanism in fluid communication with the cavity and configured to passively change a pressure within the cavity;
wherein the compressible mechanism expands an effective volume within the cavity to compensate for an increase in volume of the target material within the cavity. According to claim 19,
The target material supply system of claim 1 , wherein the increase in volume of the target material within the cavity is due to a change in temperature of the target material. 21. The method of claim 20,
The target material supply system, wherein the target material is configured to emit extreme ultraviolet rays in a plasma state. According to claim 19,
wherein the compressible mechanism is a liner covering at least a portion of an inner surface of the structure to which the pressure relief device is associated. 23. The method of claim 22,
wherein the structure to which the pressure relief device is associated is a hollow cylindrical tube having a cylindrical cavity, and wherein the liner covers at least a portion of an inner surface of the hollow cylindrical tube. 23. The method of claim 22,
wherein the liner occupies about 90% of the cavity of the structure to which the pressure relief device is associated. According to claim 19,
The target material supply system of claim 1 , wherein the compressible mechanism is a polymer material. According to claim 19,
The target material supply system, wherein the compressible mechanism is an inert gas that does not react with the target material and is formed to come into physical contact with the target material. 27. The method of claim 26,
The inert gas is argon (Ar), xenon (Xe), helium (He), nitrogen (N ₂ ), hydrogen (H ₂ ) or carbon monoxide (CO), target material supply system. 27. The method of claim 26,
wherein the inert gas occupies about 2% to about 10% of the cavity of the structure to which the pressure relief device is associated. According to claim 19,
The passive pressure relief device is a pressure relief valve, the compressible mechanism is a mechanical spring configured to passively change an effective volume within the cavity, and the pressure relief valve closes when the effective volume within the cavity changes. A system for supplying target materials, which remains in place. The method of claim 29,
wherein the pressure relief valve and mechanical spring are each made of a material compatible with the target material at a relevant temperature and pressure above a melting range of the target material. 31. The method of claim 30,
wherein the material is a refractory metal or ceramic material. According to claim 19,
The target material supply system, wherein the target material is tin, lithium, xenon or tin alloy. According to claim 19,
A target material supply system, wherein the pressure relief device is associated with a plurality of cylindrical structures, each cylindrical structure being a hollow cylindrical tube having a cylindrical cavity for delivering a target material in fluid form. 34. The method of claim 33,
wherein each cylindrical structure is connected to one or more other structures by a detachable connection. 35. The method of claim 34,
wherein the detachable connecting portion is associated with another pressure relief device comprising another passive pressure relief device comprising another compressible mechanism. According to claim 19,
Further comprising a source of target material configured to produce target material from a solid target material, and a nozzle device configured to direct particles of the target material into interaction with the light beam, wherein interaction of the particles with the light beam results in the release of the target material. A target material supply system in which plasma and extreme ultraviolet rays are generated. An apparatus for a target material supply system configured to deliver particles of a target material, comprising:
a pressure relief device comprising a compressible mechanism in fluid communication with an interior of a cavity in a structure of a target material supply system;
the cavity is configured to contain the target material within the interior of the cavity;
wherein the compressible mechanism of the pressure relief device is configured to passively change an effective volume within the cavity by absorbing or releasing energy related to pressure within the cavity. A method for regulating the pressure of a target material in a target material supply system comprising at least one non-restricted area and at least one restricted area, each non-restricted area being defined by an open cavity that is not fluid sealed, said confined area each defined by a closed cavity, the method comprising:
identifying one or more of the non-restricted areas;
melting the target material in at least one of the identified unconstrained regions such that the at least one unconstrained region has a temperature greater than a melting range of the target material; and
The target material is melted in each confined area having a temperature lower than the melting range of the target material only when the confined area is adjacent to at least one of the non-confined areas having a temperature greater than the melting range of the target material, and the confined area A method for regulating the pressure force of a target material in a target material supply system comprising the step of regulating the pressure of the target material within the system. 39. The method of claim 38,
wherein melting the target material in the unrestricted area comprises heating the target material such that the target material expands into an open cavity of the unrestricted area. 39. The method of claim 38,
wherein melting the target material in the confinement zone comprises heating the target material such that the target material expands into the at least one adjacent non-confinement zone to adjust the pressure of the target material. 39. The method of claim 38,
wherein each of the one or more restricted areas and one or more non-restricted areas is defined as a separate separate structure. 42. The method of claim 41,
Each structure, which is a restricted area,
a pipe configured to convey the target material between the other structures;
a freeze valve configured to separate two or more other structures;
a droplet generator assembly configured to generate particles in the form of droplets of a target material; and
At least one of the nozzles configured to direct particles of a target material to interact with a light beam irradiating the particles into a plasma state to generate ultraviolet light. 42. The method of claim 41,
wherein at least one of the structures that is a non-limiting area is a target material reservoir configured to hold a target material. 39. The method of claim 38,
melting the target material in one or more other confined regions having a temperature less than the melting range of the target material only if the other confined regions are adjacent to at least one of the confined regions having a temperature greater than the melting range of the target material. Further comprising a method. 45. The method of claim 44,
The step of melting the target material in the confined regions is such that each confined region is adjacent to at least one of the non-confined regions and/or the confined regions having a temperature greater than the melting range of the target material at each step in the sequence. heating the target material in each of the one or more confinement zones having a temperature less than a melting range of

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