KR20220166503A - Stage - Google Patents

Abstract

The present invention provides a stage (10) of which the inside is shielded using a seal (410). Specifically, the stage (10) includes: a base (100); a magnet part (300) located on the upper surface of the base (100) and formed in a "c" shape; a slider (200) coupled to both ends of the magnet part (300) and installed to interact in a linear reciprocating manner; and a shielding part (500) installed between the slider (200) and the magnet part (300) to prevent inflow of foreign substances. The shielding part (500) is installed to surround the magnet part (300) with the seal (410), thereby preventing the inflow of foreign substances from being mixed.

Description

stage {Stage}

[0001] The present invention relates to a stage, and more particularly, to a stage that precisely controls the position of a tool positioned at an upper portion by linearly reciprocating motion by feeding a slider.

In general, a stage is a driving device that directly generates a linear driving force, unlike a rotary motor, and is composed of a stator and a mover, and the mover moves by electromagnetic force generated between them.

In addition, there is no need for a mechanical conversion device, there is little energy loss or noise due to friction, and high-speed response and precise position control can be performed with a relatively simple configuration.

Regarding the stage, according to the linear motor stage of Republic of Korea Patent Registration No. 10-0896819, foreign matter is shielded through a cover. It is possible to effectively block the inflow of various foreign substances such as dust, magnetic substances, and fluid components into the space between the cover and the base.

However, although foreign substances generated during the assembly process are removed through cleaning, foreign substances entering the inside cannot be completely blocked. Accordingly, when foreign matter flows into the gap, foreign matter adheres to various parts such as sliders and magnets having stators and movers, which not only adversely affects the stage requiring precision, but also causes serious damage by causing malfunctions. There are problems it can bring.

An object of the present invention was invented to improve the above problems. The purpose is to shield the inflow of foreign substances by installing it so as to wrap the magnet part with a seal.

A stage according to the present invention includes a base; A slider installed to reciprocate linearly on the upper surface of the base; A magnet part that provides magnetic force and forms a transfer space in the longitudinal direction therein and is coupled to both ends of the slider, moves along the transfer space of the magnet part, and provides force for the transfer of the slider in cooperation with the magnetic force. Conveying unit configured to include a part; The magnet unit may include a shielding unit for shielding an open side surface of the transfer space.

The shielding unit may include a seal formed in a string shape having a predetermined width and in close contact with a side surface of the magnet unit to shield the transfer space; It may include; a guide roller unit for guiding transfer of the seal in contact with one surface of the seal.

In addition, by applying pressure to a portion of the seal, it may further include a tension holding unit for maintaining the tension of the seal.

In addition, the tension holding unit, while rotating in contact with the seal tension roller for transmitting the tension to the seal; a roller coupling portion to which the roller is rotatably coupled to one end; a housing in which the roller coupling part is movably installed; a detent coupled to the other end of the roller coupling part and provided with an elastic member providing tension; A tension control bolt may be included to control the elastic force by pushing the detent to adjust the pressure on the elastic member.

In addition, the guide roller portion rotates together with the seal in contact with the seal, the guide roller in which the separation prevention guide is formed protruding at the upper and lower ends so that the seal does not escape; a shaft formed in a rod shape and to which the roller is rotatably coupled; a spacer coupled to the lower surface of the roller to adjust the height of the roller; can include

In addition, the shielding portion is formed in a rectangular plate shape of a certain length, the body plate coupled to the side surface of the seal in the magnet portion; A cover plate coupled to an upper surface of the body plate and having a guide groove through which the seal passes is formed between the cover plate and the body plate.

In addition, the magnet part may include a protective cover that is formed to protrude further from the upper side of the seal and shields the material flowing upward.

In addition, the slider may include a plate-shaped main plate coupled to both ends of the coil unit, and the seals may be coupled to both ends of the coil unit and surround a side surface of the magnet unit.

In addition, a fixing block including a rectangular parallelepiped fixing body on a side surface of the coil part and a protruding part further protruding from the fixing body toward the magnet part; It may further include a fixing cover formed in a shape corresponding to the side surface of the fixing block and coupled to the side surface of the fixing block with the seal interposed therebetween.

According to the present invention, foreign substances are prevented from being introduced into the inside by enclosing the seal to cover the opened magnet, thereby reducing the probability of failure during operation and facilitating maintenance.

1 is a perspective view of a stage according to an embodiment of the present invention.
2 is an exploded perspective view showing the configuration of a slider constituting an embodiment of the present invention.
3 is a cross-sectional side view of a stage according to an embodiment of the present invention.
4 and 5 are perspective views of a shield constituting an embodiment of the present invention.
6 is an exploded perspective view showing the configuration of a guide roller unit constituting an embodiment of the present invention.
7 is an exploded perspective view showing the configuration of a tension holding unit constituting an embodiment of the present invention.
8 is an operating state diagram showing how a stage is operated according to an embodiment of the present invention.

Hereinafter, preferred embodiments according to the present invention will be described in detail with reference to the accompanying drawings.

Advantages and features of the present invention, and methods for achieving them, will become clear with reference to the embodiments described below in detail in conjunction with the accompanying drawings.

However, the present invention is not limited by the embodiments disclosed below, but will be implemented in a variety of different forms, and only these embodiments make the disclosure of the present invention complete, and common knowledge in the art to which the present invention pertains. It is provided to completely inform the person who has the scope of the invention, and the present invention is only defined by the scope of the claims.

In addition, in the description of the present invention, if it is determined that related known technologies may obscure the gist of the present invention, a detailed description thereof will be omitted.

1 is a perspective view of a stage according to an embodiment of the present invention, FIG. 2 is an exploded perspective view showing the configuration of a slider constituting an embodiment of the present invention, and FIG. 3 is a side cross-sectional view of a stage according to an embodiment of the present invention. , Figures 4 and 5 are perspective views of a shield constituting an embodiment of the present invention, Figure 6 is an exploded perspective view showing the configuration of a guide roller unit constituting an embodiment of the present invention, Figure 7 is a perspective view constituting an embodiment of the present invention It is an exploded perspective view showing the configuration of the tension holding unit, and FIG. 8 is an operating state diagram showing the operation of the stage according to the embodiment of the present invention.

Referring to Figure 1, the stage 10 according to the present invention includes a base 100; A slider 200 installed to reciprocate linearly on the upper surface of the base 100; It is coupled to both ends of the magnet part 300 and the slider 200, which provides magnetic force and forms a transfer space 310 in the longitudinal direction therein, and moves along the transfer space 310 of the magnet part 300, a transfer unit including a coil unit 400 providing force for transfer of the slider 200 in cooperation with the magnetic force; And it may include a shielding part 500 for shielding the open side of the transfer space 310 in the magnet part 300 .

The base 100 is formed in a plate shape having a thickness, and the transfer part, the slider 200 and the shielding part 500 are installed on the upper surface.

The magnet part 300 constituting the transfer part is installed on the upper surface of the base 100 . More specifically, the conveying part is coupled to both ends of the slider 200, and the magnet part 300 is installed along the conveying direction of the slider 200.

The magnet part 300 is formed in a "c" shape with an empty middle in its cross section, and a transfer space 310 through which the coil part 400 can transfer is formed inside along its length.

Although not shown, a magnetic force portion providing magnetic force is formed along the length of the portion where the transfer space 310 is formed in the magnet portion 300 .

The magnet part 300 together with the coil part 400 forms a coreless motor to provide power for the slider 200 to move.

The slider 200 includes a plate-shaped main plate 210; And the coil part 400 is coupled to both ends of the main plate 210 . As shown in FIG. 2 , the coil unit 400 may be connected to the main plate 210 by a connection bracket 215 .

The main plate 210 forms the skeleton of the slider 200 and has a plate shape.

A transfer rail 220 may be provided on a lower surface of the main plate 210 . The transfer rail 220 may include a first transfer rail 221 and a second transfer rail 223 that is installed and guides the first transfer rail 221 to be transportable.

The second transfer rail 223 may be installed parallel to the transfer direction of the slider 200 on the upper surface of the base 100 .

As shown in FIG. 4 , the shielding unit 500 includes a seal 510 formed in a string shape having a certain width and closely adhered to the side surface of the magnet unit 300 to shield the transfer space 310; A guide roller unit 550 that comes into contact with one surface of the seal 510 and guides the transfer of the seal 510; may be included.

As shown in FIG. 1 , the seal 510 is configured to surround the entire side surface of the magnet part 300 and serves to shield the transfer space 310 of the magnet part 300 .

The magnet part 300 is formed longer than the slider 200, and the slider 200 is transported along the magnet part 300.

At this time, if the slider 200 is not positioned, the transfer space 310 of the magnet part 300 is open to the outside so that foreign substances can easily flow in there. In particular, in the case of parts made of iron, they can be easily introduced into the magnet part 300 by magnetic force. In this case, the slider 200 cannot be smoothly transported along the transport space 310 of the magnet unit 300 and causes a failure.

In the present invention, the seal 510 is placed in the transfer space 310 of the magnet part 300, more specifically, in the transfer space 310 of the magnet part 300, the opening where the slider 200 is not located. This space is selectively shielded to prevent foreign substances from entering the transfer space 310 .

4 shows a state in which the shielding part 500 is installed in the magnet part 300, and both ends 510a and 510b of the seal 510 are expressed as floating in the air, but between them The connection bracket 215 is located.

Therefore, as the connection bracket 215 moves, the seal 510 moves along the side circumference of the magnet part 300, and the transfer space 310 of the magnet part 300 can always be shielded. .

The seal 510 has a string shape, and as shown in FIG. 4, both ends are coupled to both ends of the slider 200 (more specifically, both ends of the connection bracket 215), and the magnet part 300 It is installed to surround and surround the entire side of the

The seal 510 rotates along the circumference of the magnet part 300 when the slider 200 moves so that the transfer space 310 of the magnet part 300 is always shielded.

As shown in FIG. 2 , the seal 510 may be coupled to both ends of the connecting bracket 215 of the slider 200 by a fixing block 250 . A fixing block 250 including a rectangular parallelepiped fixing body 251 on the side of the coil part 400 and a protruding part 253 further protruding from the fixing body 251 toward the magnet part 300, and ; A fixing cover 255 formed in a shape corresponding to the side surface of the fixing block 250 and coupled to the side surface of the fixing block 250 with the seal 510 therebetween may be further included.

The fixing block 250 is composed of a fixing body 251 formed in a rectangular parallelepiped shape and a protruding part 253 further protruding in the direction of the magnet part 300.

The fixing block 250 adheres the seal 510 to the inner surface of the magnet part 300 to more stably shield it. More specifically, the seal 510, which moves to the side of the magnet part 300 due to the driving of the slider 200, is brought into closer contact with the inner surface of the magnet part 300 so that it can be stably shielded. do. In particular, it is possible to prevent metal-like parts from flowing into the inner surface of the magnet part 300 by magnetic force.

The seal 510 may be fixed to the side of the fixing block 250 by the fixing cover 255 (see FIG. 8).

The guide roller unit 550 may be provided in plural in a guiding configuration to facilitate the transfer of the seal 510 . In this embodiment, as shown in FIG. 1, four magnets are provided near both end corners of the magnet part 300, but it is obvious to those skilled in the art that the position can be changed.

The guide roller unit 550 rotates together with the seal 510 in contact with it, and the guide roller 551 protrudes from the upper and lower ends of the guide roller 551a to prevent the seal 510 from escaping; a shaft 553 formed in a rod shape and to which the guide roller 551 is rotatably coupled; a spacer 555 coupled to the lower surface of the guide roller 551 to adjust the height of the guide roller 551; can include

As shown in FIG. 6, the guide roller 551 is formed in a cylindrical shape, and at both ends, detachment prevention guides 551a protrude to prevent the seal 510 from escaping. The seal 510 is transported between the separation prevention guides 551a.

The shaft 553 serves as a rotational center of the departure prevention guide 551a, and the spacer 555 is coupled to the lower end so that the guide roller 551 can be installed at an accurate height.

As shown in FIGS. 4 and 5 , according to the stage 10 according to the present invention, a tension holding unit 530 may be provided. The tension maintaining part 530 serves to keep the tension of the seal 510 constant by pushing the seal 510 toward the magnet part 300 .

As shown in FIG. 7, the tension holding unit 530 includes a tension roller 531 that rotates in contact with the seal 510 and transmits tension to the seal 510; and the tension roller 531 at one end. A roller coupling part 533 rotatably coupled; a housing 535 in which the roller coupling part 533 is movably installed; a detent 537 coupled to the other end of the roller coupling part 533 and having an elastic member 537a providing tension; A tension control bolt (b) may be included to control the elastic force by pushing the detent 537 and adjusting the pressure on the elastic member 537a.

The tension maintaining part 530 serves to apply pressure to the seal 510 so that the seal 510 can have a constant tension.

The tension roller 531 is rotatably coupled to an upper surface of one end of the roller coupling part 533 by means of a shaft 531a. The roller coupling part 533 is composed of a rectangular plate-shaped roller body 533a and a roller coupling plate 533b protruding from the roller body 533a with a preset length.

The roller coupling part 533 is slidably coupled to the housing 535 . The center of the housing 535 is penetrated to form a through space 535a.

On one side of the housing 535, an insertion groove 535b is formed by being recessed in a shape corresponding to the roller body 533a, and the roller coupling part 533 is slidably movable in the insertion groove 535b. it will be combined

The roller coupling part 533 may be coupled to the housing 535 with the detent 537 and the elastic member 537a interposed therebetween. The detent 537 prevents the roller coupling portion 533 from moving within a certain range of force, and the roller coupling portion 533 is elastically attached to the housing 535 by the elastic force of the elastic member 537a. It is coupled so that it slides on.

A bottom plate 538 may be coupled to a lower surface of the housing 535 . A coupling block 538a protrudes from the upper surface of the bottom plate 538, and a tension adjusting bolt b is screwed to the coupling block 538a to be movably coupled.

The tension control bolt (b) is configured to adjust the degree of protrusion of the roller coupling part 533 by pushing the detent 537, and the tension control bolt (b) pushes the detent 537 to When the elastic member 537a is further pressed, the roller coupling part 533 protrudes toward the seal 510 by that amount.

Conversely, when the tension control bolt (b) slides so that the detent 537 retreats from the seal 510, the roller coupling part 533 moves away from the seal 510 by that amount.

Through this, the tension maintaining part 530 pushes the seal 510 so that the tension of the seal 510 is maintained, and the seal 510 can come into close contact with the magnet part 300 by that much.

The through space 535a may be shielded by a cover 538b.

The shielding part 500 is formed in a rectangular plate shape with a certain length and is coupled to a body plate 570 coupled to a side surface of the seal 510 in the magnet part 300 and an upper surface of the body plate, A cover plate 571 having a guide groove 571a through which the seal 510 passes may be formed between the cover plate 571 and the body plate.

As shown in FIG. 5 , the body plate 570 and the cover plate 571 are installed on a surface facing inward from the magnet part 300 and serve to guide the seal 510 to be transported safely.

In addition, as shown in FIG. 2, the magnet part 300 further includes a protective cover 511, which is formed to protrude further from the top of the seal 510 and shields foreign substances flowing upward. can The protective cover 511 serves to prevent foreign matter falling from the upper side of the seal 510 into the transfer space 310 .

Hereinafter, the operation process of the stage 10 according to an embodiment of the present invention will be described with reference to the drawings.

Referring to FIG. 8 , although not shown, equipment constituting the stage 10 may be installed on the upper surface of the slider 200 .

The slider 200 can linearly reciprocate on the upper surface of the base 100 by the transfer unit. More specifically, along the transfer space 310 of the magnet unit 300, the coil unit 400 is transferred while the slider 200 performs a linear reciprocating motion.

The slider 200, more specifically, both ends of the seal 510 are coupled to both ends of the connection bracket 215 of the slider 200, and are installed around the magnet part 300.

Therefore, even when the slider 200 is transported, the transport space 310 remains blocked by the seal 510 at all times.

The tension maintaining part 530 uniformly pushes the seal 510 so that the seal 510 can be transported in close contact with the transfer space 310, and through this, foreign substances are removed from the transfer space 310. can be more effectively prevented from entering the

The present invention has been described above with reference to the embodiment (s) shown in the drawings, but this is only exemplary, and various modifications can be made thereto by those skilled in the art, and the above-described embodiments It will be appreciated that all or part of (s) may be configured in selective combinations. Therefore, the true technical protection scope of the present invention should be defined by the technical spirit of the appended claims.

10: Stage 100: Base
200: slider 300: magnet part
400: coil part 500: shield part

Claims (9)

Base;
A slider installed to reciprocate linearly on the upper surface of the base;
A magnet part that provides magnetic force and forms a transfer space in the longitudinal direction therein and is coupled to both ends of the slider, moves along the transfer space of the magnet part, and provides force for the transfer of the slider in cooperation with the magnetic force. Conveying unit configured to include a part;
A stage including a shielding part shielding an open side surface of the transfer space in the magnet part. According to claim 1,
the shield,
a seal formed in a string shape having a certain width and in close contact with a side surface of the magnet part to shield the transfer space;
A stage comprising a; guide roller unit that comes into contact with one surface of the seal and guides the transfer of the seal.
According to claim 2,
The stage further comprises a tension holding unit for maintaining tension of the seal by applying pressure to a portion of the seal.
According to claim 3,
The tension holding unit,
a tension roller that transmits tension to the seal while rotating in contact with the seal;
a roller coupling part to which the tension roller is rotatably coupled to one end;
a housing in which the roller coupling part is movably installed;
A detent coupled to the other end of the roller coupling part and provided with an elastic member providing tension;
The stage characterized in that it comprises a tension control bolt for controlling the elastic force by pushing the detent to adjust the pressure on the elastic member.
According to claim 2,
The guide roller part
Guide rollers in which the seal rotates together in contact with each other, and anti-separation guides are protruded at upper and lower ends so that the seal does not separate;
a shaft formed in a rod shape and to which the roller is rotatably coupled;
a spacer coupled to the lower surface of the roller to adjust the height of the roller; A stage containing
According to claim 1,
the shield,
a body plate formed in a rectangular plate shape having a predetermined length and coupled to a side surface of the seal in the magnet part;
The stage further includes a cover plate coupled to an upper surface of the body plate and having a guide groove through which the seal passes is formed between the cover plate and the body plate.
According to claim 2,
The magnet part,
A stage including a protective cover that is formed to protrude further from the upper side of the seal and shields the material flowing upward.
According to claim 2,
The slider is
The coil part includes a plate-shaped main plate coupled to both ends,
The stage characterized in that the seals are coupled to both ends of the coil part and installed to surround the circumference of the side surface of the magnet part.
According to claim 8,
a fixing block including a rectangular parallelepiped-shaped body on a side surface of the coil unit and a protruding part further protruding toward the magnet unit from the body;
The stage further comprises a fixing cover formed in a shape corresponding to a side surface of the fixing block and coupled to a side surface of the fixing block with the seal interposed therebetween.

Images