KR20220146732A - Inspection apparatus using optical system - Google Patents

Abstract

The present invention relates to an inspection apparatus using an optical system. A vision device is mounted in a device frame where a captured portion is oriented toward a lower side. A mirror allows light received from an object to be inspected to be reflected to a vision device. An angle controller enables the mirror to be vertically tilted based on a horizontal shaft to control an angle of the mirror with respect to the object to be inspected for each stage. A vertical distance controller lifts the angle controller as much as a vertical distance of the mirror set according to phased angle control of the mirror while mounted in the device frame to control the vertical distance of the mirror with respect to the object to be inspected for each stage.

Description

Inspection apparatus using optical system

The present invention relates to a device for inspecting an object to be inspected, such as an OLED cell (Organic Light Emitting Diodes cell) using an optical system.

Among flat panel display devices, OLED devices have the advantages of wide viewing angles, excellent contrast, and fast response speed.

In general, in an OLED panel manufacturing process, a TFT (Thin Film Transistor) layer is formed on a mother substrate made of glass or the like, and an organic layer comprising a lower electrode, an organic film layer and an upper electrode on the TFT layer. After the light emitting layer is formed, the mother substrate having the TFT layer and the organic light emitting layer is encapsulated with an encapsulation substrate, thereby completing the OLED panel.

At this time, the mother substrate is put into the OLED panel manufacturing process in a large size in consideration of production efficiency, etc., and then goes through the manufacturing process and is cut into OLED cells to fit the size required for the final product. After the OLED cell is put into the module process, a polarizing plate, a protective film, and a flexible circuit board on which a driving chip is mounted are attached through the module process, thereby completing an OLED module that can be driven in the final product.

On the other hand, if an OLED device has image quality defects such as color non-uniformity as well as electrical defects, its performance is fatally affected. Therefore, it is necessary to check the image quality defect for the OLED device. When the inspection process is performed on the OLED module on which the module process has been completed, the loss due to the OLED module determined as a defective product is large. Therefore, a method for effectively and accurately inspecting the image quality defect of the OLED cell before the module process is required.

It is an object of the present invention to provide an inspection apparatus using an optical system that can be advantageous for installation space utilization and can accurately inspect a defect of an object to be inspected with various imaging viewing angles.

An inspection apparatus using an optical system according to the present invention for achieving the above object includes a device frame, at least one or more vision devices, a mirror, an angle adjuster, and a vertical distance adjuster. The vision device is mounted on the device frame with the imaging part facing downward. The mirror reflects the light received from the object to be inspected to the vision device. The angle adjuster adjusts the angle of the mirror with respect to the object to be inspected step by step by tilting the mirror up and down about the horizontal axis. The vertical distance adjuster adjusts the vertical distance of the mirror to the object to be inspected step by step by raising and lowering the angle adjuster as much as the vertical distance of the mirror set according to the step-by-step angle adjustment of the mirror while it is mounted on the device frame.

According to the present invention, it is configured to transmit light between the inspection target and the vision device by means of a mirror, so it can be advantageous to use the installation space, and accurate inspection regardless of the defect type by acquiring images of the inspection target with various imaging viewing angles make it possible

1 is a perspective view of an inspection apparatus using an optical system according to an embodiment of the present invention.
FIG. 2 is a perspective view showing the rear of the inspection device shown in FIG. 1 .
3 is a perspective view showing an upper part of the vision device in FIG. 1 .
4 is a view for explaining an operation example of the inspection device.
5 is a perspective view of the angle adjuster and the vertical distance adjuster.
6 is an exploded perspective view of the angle adjuster.
7 is an exploded perspective view of the vertical distance adjuster.

The present invention will be described in detail with reference to the accompanying drawings as follows. Here, the same reference numerals are used for the same components, and repeated descriptions and detailed descriptions of well-known functions and configurations that may unnecessarily obscure the gist of the present invention will be omitted. Embodiments of the present invention are provided in order to more completely explain the present invention to those of ordinary skill in the art. Accordingly, the shapes and sizes of elements in the drawings may be exaggerated for clearer description.

1 is a perspective view of an inspection apparatus using an optical system according to an embodiment of the present invention. FIG. 2 is a perspective view showing the rear of the inspection device shown in FIG. 1 . 3 is a perspective view showing an upper part of the vision device in FIG. 1 . 4 is a view for explaining an operation example of the inspection device.

1 to 4 , an inspection apparatus using an optical system according to an embodiment of the present invention includes a device frame 100 , at least one vision device 200 , a mirror 300 , and an angle adjuster 400 . ), and a vertical distance adjuster 500 .

The device frame 100 is supported by mounting the vision device 200 and the vertical distance controller 500 . The vision device 200 is mounted on the device frame 100 with the imaging part facing downward. The vision device 200 acquires an image by receiving light reflected from the object 10 through a mirror.

Here, the object 10 to be inspected may correspond to a display cell such as an OLED cell. The OLED cell may be imaged by the vision device 200 in a lit state, and image quality defects such as color non-uniformity may be inspected. The OLED cell can be inspected by being seated on a stage (not shown) in a horizontal position.

The vision device 200 may include a lens 210 for focusing incident light, and a camera 220 for acquiring an image by receiving the light focused by the lens 210 . A plurality of vision devices 200 may be provided for inspection efficiency.

Here, the focal length adjuster 230 may adjust the focal length by elevating the vision device 200 . The focal length adjuster 230 may include various linear actuators to elevate the vision device 200 in the Z-axis direction perpendicular to the XY horizontal plane.

For example, the focal length adjuster 230 is supported by the lens 210 of the vision device 200 via the bracket 236 in a state where the elevator body can be raised and lowered by the elevator guide, and the screw is screwed to the elevator body. The vision device 200 can be raised and lowered by raising and lowering the elevating body as it is rotated by the rotary motor in the state.

In an additional aspect, the tilt mechanism 240 tilts the vision device 200 around an axis parallel to the angle adjustment axis of the mirror 300 to satisfy the Scheimpflug condition according to the step-by-step angle adjustment of the mirror 300 . can

The tilt mechanism 240 may be configured to tilt the camera 220 about an axis parallel to the angle adjustment axis of the mirror 300 by the rotation actuator 241 . The camera 220 may be tilted by the rotation actuator 241 in a state supported by the support block 221 . In addition, the support block 221 supports the lens 210 . The bracket 236 may be configured to guide the tilt of the lens 210 .

The tilt mechanism 240 may include a tilt sensor 242 for detecting a tilt angle of the camera 220 . The tilt sensor 242 may be made of an optical sensor and the like and fixed to the support block 221 . The tilt sensor dog 243 is rotatably supported on the support block 221 coaxially with the tilt axis, and maintains the posture by its own weight.

The tilt sensor 242 may detect the tilt angle of the camera 240 by detecting the tilt sensor dog 243 while being tilted together with the support block 221 . The tilt sensor 242 may provide the detected tilt angle information of the camera 220 to the control panel. The control panel may tilt the camera 220 by controlling the rotation actuator 241 to satisfy the Scheimplug condition according to the step-by-step angle adjustment of the mirror 300 .

The mirror 300 reflects the light received from the target object 10 to the vision device 200 . The mirror 300 receives light emitted from the object 10 to be inspected, such as an OLED cell in a lit state, and reflects it to the vision device 200 . When there are a plurality of vision devices 200 , the number of mirrors 300 equal to the number of vision devices 200 may be allocated. Alternatively, one mirror 330 may be provided to be used together with a plurality of vision devices 200 .

Since the mirror 300 is disposed between the object to be inspected 10 and the vision device 200 to transmit light, it can be easily installed even if the installation space of the inspection apparatus is narrow, thereby advantageous in space utilization.

The angle adjuster 400 tilts the mirror 300 up and down about the horizontal axis to adjust the angle of the mirror 300 with respect to the inspection object 10 step by step.

The vertical distance adjuster 500 raises and lowers the angle adjuster 400 in the Z-axis direction as much as the vertical distance of the mirror 300 set according to the step-by-step angle adjustment of the mirror 300 in a state of being mounted on the device frame 100 to elevate the object to be inspected. The vertical distance of the mirror 300 with respect to (10) can be adjusted step by step.

Defects may not be detected when the inspected object 10, for example, an OLED cell, is inspected with one imaging viewing angle depending on the defect type. In this embodiment, as shown in FIG. 3 , the OLED cell can be inspected at various imaging viewing angles θ by adjusting the angle and vertical distance of the mirror 300 step by step, regardless of the defect type. Defects can be accurately detected.

The imaging viewing angle θ is an angle formed by the direction of light traveling from the inspection object 10 to the center of the mirror 300 with respect to the vertical direction of the inspection object 10 . The imaging viewing angle θ may be set to 60 degrees, 65 degrees, 70 degrees, or 75 degrees. The mirror 300 has an angle and a vertical distance adjusted by the angle controller 400 and the vertical distance controller 500 according to the imaging viewing angle θ, so that the inspection object 10 passes through the mirror 300 and the vision device 200 ) to set the optical path length to the same value.

As described above, the inspection apparatus using the optical system according to an embodiment of the present invention is configured to transmit light between the inspection target 10 and the vision device 200 by the mirror 300, so that it can be advantageous to use the installation space. Rather, it is possible to accurately inspect the object 10 irrespective of the defect type by acquiring an image of the object 10 at various imaging viewing angles θ.

5 is a perspective view of the angle adjuster and the vertical distance adjuster. 6 is an exploded perspective view of the angle adjuster. 7 is an exploded perspective view of the vertical distance adjuster.

5 and 6 , the angle adjuster 400 includes an angle adjustment moving base 410 , an angle adjusting base 420 , and a fixing mechanism 430 for adjusting the angle.

The angle adjustment moving table 410 supports the mirror 300 on the upper side. The mirrors 300 are fixed to the mirror frame 310 in a one-to-one correspondence with the vision devices 200 . The angle adjustment moving table 410 may fix both sides of the mirror frame 310 on both sides of the upper side by bolting or the like. The angle adjustment moving table 410 is equipped with operation levers 411 on both sides of the lower side. The operation levers 411 allow the user to pivot the angle adjustment moving table 410 while holding it by hand.

The angle adjusting base 420 supports the angle adjusting moving base 410 to be pivotally coaxial with the angle adjusting axis of the mirror 300 . The angle adjustment moving table 410 may have hinge shafts 412 protruding coaxially with the angle adjustment axis of the mirror 300 on both sides, respectively. The angle adjustment base 420 has shaft support holes for supporting each of the hinge shafts 412 of the angle adjustment moving table 410 on both sides of the upper side.

The angle adjustment base 420 has guide holes 421 for guiding the movement of the operation levers 411 according to the pivot operation of the angle adjustment movement base 410 . The guide holes 421 extend long according to the pivoting trajectory of the angle-adjusting moving table 410 . The guide holes 421 guide the movement of the operation levers 411 according to the pivot operation of the angle adjustment moving table 410 in a state in which the operation levers 411 are inserted, respectively.

The angle adjustment base 420 is lifted and lowered by the vertical distance adjuster 500 . Accordingly, the angle adjuster 400 enables the vertical distance of the mirror 300 to be adjusted as the vertical distance adjuster 500 lifts and lowers.

The angle adjustment fixing mechanism 430 fixes the angle adjustment movable base 410 to the angle adjustment base 420 in a state where the angle of the mirror 300 is adjusted. For example, the fixing mechanism 430 for angle adjustment may include fixing holes 431 for angle adjustment and a plunger 432 for angle adjustment.

The angle adjustment fixing holes 431 are formed in the angle adjustment moving table 410 to correspond to the plunger mounting hole of the angle adjustment base 420 according to the step-by-step angle adjustment of the mirror 300 . The angle adjustment fixing holes 431 are marked with corresponding angles around each, for example, 60 degrees, 65 degrees, 70 degrees, and 75 degrees.

The plunger 432 for angle adjustment is mounted on the plunger mounting hole of the angle adjustment base 420, and a nose is selectively fitted into the angle adjustment fixing holes 431 to set the angle adjustment base 410 to the angle adjustment base. fixed at (420). The plunger for angle adjustment 432 has a knob disposed on the outside of the body, a nose extending from the knob to pass through the body, and a spring built into the body to apply an elastic force in a direction to withdraw the nose from the body.

The plunger 432 for angle adjustment is operated such that the nose is drawn out by the spring in the body, and the nozzle is retracted when the user pulls the knob, and when the user releases the knob, the nozzle is returned to the drawn out state by the spring.

The aforementioned angle adjuster 400 may act as follows. The user pulls the knob of the plunger 432 for angle adjustment to retract the nose. In this state, the user adjusts the angle adjustment fixing hole 431 to the angle adjustment plunger 432 by manipulating the operation lever 411 while checking the displayed angles around the angle adjustment fixing holes 431 .

Next, the user releases the knob of the plunger 432 for angle adjustment and draws the nose into the fixing hole 431 for angle adjustment, thereby fixing the angle adjustment moving base 410 to the angle adjusting base 420 . As a result, the angle of the mirror 300 may be adjusted to fit the selected imaging viewing angle θ.

In a further aspect, the angle adjustment fixture 430 may include a hinge shaft lock block 433 and a hinge shaft lock lever 434 . The hinge shaft lock block 433 wraps around the hinge shaft 412 of the angle adjustment moving table 410 to face each other in a spaced apart state, and is fixed to the angle adjustment base 420 . The hinge shaft lock lever 434 passes through one end of the hinge shaft lock block 433 and is screwed to the other end of the hinge shaft lock block 433 .

The user may lock or release the hinge shaft 411 with respect to the hinge shaft lock block 433 by manipulating the hinge shaft lock lever 434 to tighten or release both ends of the hinge shaft lock block 433 . As a result, the angle adjustment moving base 410 may be fixed or released to the angle adjusting base 420 .

Meanwhile, the step angle of the mirror 300 may be detected by the angle sensors 440 and provided to the control panel. The control panel displays the imaging viewing angle θ according to the angle of the mirror 300 on the screen of the display based on the information detected from the angle sensors 440 so that the user can check it.

The angle adjustment moving table 410 has a sensor dog 441 for angle. The angle adjustment base 420 mounts the angle sensors 440 to detect the position of the angle sensor dog 441 according to the step-by-step angle adjustment of the mirror 300 . The angle sensor 440 may be formed of an optical sensor or the like.

As described above, the angle adjuster 400 is exemplified as a step-by-step angle of the mirror 300 by the user manually manipulating the angle adjustment moving table 410 . It is not limited thereto, and the angle adjuster 400 additionally mounts the rotation actuator to the hinge shaft 412 of the angle adjustment moving table 410, based on the information detected from the angle sensors 440 to the rotation actuator. It is also possible to automatically adjust the angle of the mirror 300 step by step.

5 and 7, the vertical distance adjuster 500 includes a connection bracket 510, a lifting block 520, a lifting base 530, a lifting mechanism 540, and a vertical distance adjusting base. 550 and the fixing pieces 560, and a plunger 570 for adjusting the vertical distance, and a locking mechanism (580).

The connection bracket 510 supports the angle adjuster 400 . The connection bracket 510 is fixed to the angle adjustment base 420 of the angle adjuster 400 . The connection bracket 510 allows the vertical distance of the mirror 300 to be adjusted by elevating the angle adjustment base 420 according to the elevating of the elevating block 520 .

The elevating block 520 operates to elevate while being fixed to the connection bracket 510 . The elevating base 530 guides the elevating of the elevating block 520 while being fixed to the device frame 100 . The lifting mechanism 540 raises and lowers the lifting block 520 with respect to the lifting base 530 .

As an example, the lifting mechanism 540 may include a screw 541 , an operation handle 542 , a driving gear 543 , and a driven gear 544 . The screw 541 is vertically erected on the lifting base 530 , rotatably supported, and screwed to the lifting block 520 . The operation handle 542 is rotatably supported on the lifting base 530 . The operation handle 542 may be supported on the lifting base 530 rotatably about a horizontal axis.

The driving gear 543 is coaxially fixed to the shaft of the operating handle 542 , and the driven gear 544 is coaxially fixed to the screw 541 and meshed with the driving gear 543 , whereby the operating handle 542 and the screw Transfer the rotation between 541. The driving gear 543 and the driven gear 544 may be formed as bevel gears, respectively.

The vertical distance adjustment base 550 is fixed to the device frame 100 . The fixing pieces 560 each have fixing holes 561 for adjusting the vertical distance formed to correspond to the plunger mounting holes of the connection bracket 510 according to the vertical distance for each step of the mirror 300 and are fixed to the vertical distance adjustment base 550 . do. Fixing pieces 560 are marked with a corresponding angle on each surface.

Here, the fixing pieces 560 may be initially bolted to the vertical distance adjustment base 550 through the long holes 562 formed vertically for adjusting the vertical position. The vertical distance adjustment base 550 and the connection bracket 510 may have tolerances in the assembly process with the surrounding members, and the fixing pieces 560 are initially fixed holes 561 for vertical distance adjustment in consideration of the assembly tolerance. By positioning them, it is possible to accurately adjust the imaging viewing angle θ by matching the correct vertical distance.

The plunger 570 for adjusting the vertical distance is mounted on the plunger mounting hole of the connection bracket 510, and the nose is selectively inserted into the fixing holes 561 for adjusting the vertical distance, so that the connection bracket 510 is attached to the base for adjusting the vertical distance 550. Fix it. The plunger 570 for adjusting the vertical distance may be configured the same as the plunger 432 for adjusting the angle.

The locking mechanism 580 locks the lifting block 520 to the lifting base 530 in a state where the vertical distance of the mirror 300 is adjusted. For example, the locking mechanism 580 may include a handle lock block 581 and a handle lock lever 582 .

The handle lock block 581 wraps around the shaft of the manipulation handle 542 to face each other in a spaced apart state and is fixed to the elevating base 530 . The handle lock lever 582 passes through one end of the handle lock block 581 and is screwed to the other end of the handle lock block 581 .

The user may operate the handle lock lever 582 to tighten or release both ends of the handle lock block 581 , thereby locking or unlocking the axis of the operation handle 542 with respect to the handle lock block 581 . As the operation handle 542 is locked or released, the rotation of the screw 541 is blocked or allowed, so that the lifting block 520 may be locked or unlocked to the lifting base 530 .

The locking mechanism 580 may further include a screw lock block 583 and a screw lock lever 584 . The screw lock block 583 wraps around the lower end of the screw 541 to face each other in a spaced apart state and is fixed to the elevating base 530 . The screw lock lever 584 passes through one end of the screw lock block 583 and is screwed to the other end of the screw lock block 583 .

The user may block or allow rotation of the screw 541 by manipulating the screw lock lever 584 to tighten or loosen both ends of the screw lock block 583 . As a result, the elevating block 520 may be locked or unlocked to the elevating base 530 .

The above-described vertical distance adjuster 500 may act as follows. The user pulls the knob of the plunger 570 for adjusting the vertical distance to retract the nose. In this state, the user operates the operation handle 542 while checking the display angles around the fixing holes 561 for adjusting the vertical distance to raise and lower the connection bracket 510 with respect to the vertical distance adjustment base 550 . Fit the plunger 570 for adjusting the vertical distance to the fixing hole 561 for adjusting the vertical distance.

Then, the user releases the knob of the plunger 570 for adjusting the vertical distance to draw the nose into the fixing hole 561 for adjusting the vertical distance, thereby fixing the connection bracket 510 to the base 550 for adjusting the vertical distance. Then, the user locks the lifting block 520 to the lifting base 530 using the locking mechanism 580 . As a result, the vertical distance of the mirror 300 may be adjusted according to the selected imaging viewing angle θ.

Meanwhile, the step-by-step vertical distance of the mirror 300 may be detected by the vertical distance sensors 590 and provided to the control panel. The control panel displays the imaging viewing angle θ according to the vertical distance of the mirror 300 on the screen of the display based on the information sensed from the vertical distance sensors 590, so that the user can check it.

The connection bracket 510 has a sensor dog 591 for a vertical distance. The vertical distance adjustment base 550 is equipped with vertical distance sensors 590 to detect the position of the vertical distance sensor dog 591 according to the step-by-step vertical distance adjustment of the mirror 300 . The vertical distance sensor 590 may be an optical sensor or the like.

As described above, the vertical distance adjuster 500 is exemplified in that the user manually manipulates the manipulation handle 542 of the elevating mechanism 540 to adjust the vertical distance of the mirror 300 step by step. However, the present invention is not limited thereto, and the vertical distance controller 500 additionally mounts a rotation actuator on the driving gear 543 instead of the operation handle 542 to rotate based on the information sensed from the vertical distance sensors 590 . It is also possible to automatically adjust the angle of the mirror 300 step by step by the actuator.

Although the present invention has been described with reference to one embodiment shown in the accompanying drawings, this is merely exemplary, and it will be understood by those skilled in the art that various modifications and equivalent other embodiments are possible therefrom. will be able Accordingly, the true protection scope of the present invention should be defined only by the appended claims.

10. Inspection object 100. Device frame
200..non-electrical equipment 210..lens
220..camera 230..focal length adjuster
240..Tilt mechanism 300..Mirror
400..Angle adjuster 410..Angle adjuster
411. Operating lever 412. Hinge shaft
420.. angle adjustment base 421.. guide hole
430..Fixing mechanism for angle adjustment 431..Fixing hole for angle adjustment
432..Angle adjustment plunger 433..Hinge shaft locking block
434..Hinge shaft lock lever 440..Sensor for angle
500..Vertical distance adjuster 510..Connecting bracket
520..Elevating block 530..Elevating base
540. Lifting mechanism 541. Screw
542. Control handle 550.. Vertical distance adjustment base
560..Fixed piece 561..Fixed hole for vertical distance adjustment
562.. Long hole 570.. Plunger for vertical distance adjustment
580..locking mechanism 581..handle locking block
582..Handle lock lever 583..Screw locking block
584..Screw lock lever 590..Sensor for vertical distance

Claims (7)

device frame;
at least one vision device mounted on the device frame with the imaging portion facing downward;
a mirror for reflecting the light received from the object to be inspected to the vision device;
an angle adjuster for adjusting the angle of the mirror with respect to the object to be inspected step by step by tilting the mirror up and down about the horizontal axis; and
a vertical distance adjuster for step-by-step adjustment of the vertical distance of the mirror to the object to be inspected by elevating the angle adjuster by the vertical distance of the mirror set according to the step-by-step angle adjustment of the mirror in a state mounted on the device frame;
Inspection apparatus using an optical system comprising a.
According to claim 1,
The angle adjuster,
an angle-adjustable moving table supporting the mirror on the upper side and mounting operation levers on both sides of the lower side;
It supports the angle adjustment moving table so as to be pivotally coaxial with the angle adjusting shaft of the mirror, and has guide holes for guiding the movement of the operation levers according to the pivoting operation of the angle adjusting moving unit, by the vertical distance adjuster. angle-adjustable base for lifting and lowering; and
a fixing mechanism for adjusting the angle for fixing the angle adjusting moving base to the angle adjusting base in a state in which the angle of the mirror is adjusted;
Inspection apparatus using an optical system, characterized in that it comprises a.
3. The method of claim 2,
The fixing mechanism for adjusting the angle,
According to the step-by-step angle adjustment of the mirror, the angle adjustment fixing holes for angle adjustment are formed in the angle adjustment moving table to correspond to the plunger mounting hole of the angle adjustment base and the corresponding angles are marked around each;
and a plunger for angle adjustment that is mounted on the plunger mounting hole of the angle adjustment base and that a nose is selectively fitted into the angle adjustment fixing holes to fix the angle adjustment movable base to the angle adjustment base. Inspection device using optical system.
According to claim 1,
The vertical distance adjuster,
a connection bracket for supporting the angle adjuster;
an elevating block that elevates and elevates while being fixed to the connection bracket;
an elevating base for guiding the elevating of the elevating block while being fixed to the device frame;
an elevating mechanism for elevating the elevating block with respect to the elevating base;
And a vertical distance adjustment base fixed to the device frame,
Fixing pieces each having a fixing hole for adjusting the vertical distance formed to correspond to the plunger mounting hole of the connection bracket according to the step-by-step vertical distance of the mirror, fixed to the vertical distance adjusting base, and having a corresponding angle on each surface;
A plunger for adjusting the vertical distance that is mounted on the plunger mounting hole of the connecting bracket and selectively fitted with a nose into the fixing holes for adjusting the vertical distance to fix the connecting bracket to the base for adjusting the vertical distance, and
and a locking mechanism for locking the lifting block to the lifting base in a state in which the vertical distance of the mirror is adjusted.
5. The method of claim 4,
The fixing pieces are initially bolted to the vertical distance adjustment base through long holes formed vertically for vertical position adjustment.
According to claim 1,
and a focal length adjuster for adjusting the focal length by elevating the vision device.
According to claim 1,
and a tilt mechanism for tilting the vision device about an axis parallel to the angle adjustment axis of the mirror so as to satisfy the Scheimplug condition according to the step-by-step angle adjustment of the mirror.

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