KR20220099429A - Polishing apparatus and polishing method - Google Patents

Abstract

One embodiment of the present invention comprises a polishing wheel unit rotated by receiving power from a driving source, and a passing flow passage is formed in a radial direction from the center of the polishing wheel unit inside the polishing wheel unit. Moreover, the polishing device has a discharge flow passage connected to the passing flow passage and providing a discharge path to the outside of the fluid introduced to the polishing wheel unit.

Description

Polishing apparatus and polishing method

Embodiments of the present invention relate to a polishing apparatus and a polishing method.

With the recent development of various electronic devices such as mobile phones, PDAs, computers, and large TVs, the demand for flat display devices that can be applied thereto is increasing. Such flat display devices currently include liquid crystal displays (LCDs), organic light emitting diodes (OLEDs), and the like.

The substrate used for such a flat display device is generally made of a tempered glass material with increased strength, but nevertheless micro-cracks in the cut surface due to the mechanical cutting process during the cutting process by the wheel from the mother glass There was a problem that the strength was lowered due to the occurrence of such.

In particular, such fine cracks are mainly generated along the edge line of the cut substrate, and the strength of the edge line is strengthened by grinding the generated fine cracks using equipment such as a whetstone. However, in recent years, as the thickness of the substrate is gradually decreasing, the strength problem of the edge line has become more prominent. In order to solve this problem, the strength of the edge line is further strengthened through a separate polishing process after the grinding process.

In such a polishing (or polishing) process, the polishing part, specifically, the polishing wheel part and the supply of grinding water act as important factors determining the quality and process time of polishing. There was a problem in that the inflow of grinding water into the furnace was not performed smoothly.

In addition, there was a problem in that the polishing rate was lowered because the polishing water was not properly supplied to the polishing surface and had to go through the polishing process several times at low speed polishing.

Embodiments of the present invention provide a polishing apparatus and a polishing method capable of improving the polishing rate and increasing the amount of polishing because the fluid passes through the inside of the polishing wheel and is directly sprayed on the polishing surface that is in contact between the polishing wheel and the object to be polished. to provide.

An embodiment of the present invention includes a polishing wheel part rotating by receiving power from a driving source, wherein a passage passage is formed in the inside of the polishing wheel portion in a radial direction from the center of the polishing wheel portion, is connected to the passage passage, and the It provides a polishing apparatus, characterized in that the discharge passage for providing a discharge path to the outside of the fluid flowing into the polishing wheel portion is formed.

According to an embodiment of the present invention, receiving power from a driving source and rotating the abrasive wheel unit; supplying a fluid to the abrasive wheel unit; and moving the abrasive wheel part to the abrasive object, wherein the fluid flows into the abrasive wheel part and is discharged to the object in contact with the abrasive wheel part through a discharge passage formed on an outer circumferential surface of the abrasive wheel part It provides a polishing method, characterized in that.

Other aspects, features and advantages other than those described above will become apparent from the following drawings, claims, and detailed description of the invention.

In the polishing apparatus and polishing method according to an embodiment of the present invention, a passage passage is formed in a radial direction from the center of the polishing wheel part, and rotates through a passage passage and a discharge passage through the fluid supply unit, and is rotated with respect to the polishing surface of the object to be polished. Since the fluid can be directly sprayed and discharged, there is no need for a separate nozzle for spraying a fluid such as polishing water toward the polishing surface, thereby simplifying the structure of the polishing apparatus.

In addition, there is an effect that the pressure and flow rate of the fluid directly sprayed on the polishing surface can be designed by adjusting the rotation speed of the abrasive wheel portion and the size of the cross-sectional area of the passage and discharge passages formed inside the abrasive wheel portion.

In addition, since the passage and discharge passages are formed in a direction away from the center of the abrasive wheel part, the fluid can be forcibly sprayed through centrifugal force. have.

In addition, a preset section is opened in the cover part, and the fluid is directly sprayed on the polishing surface through the section, preventing the fluid from being sprayed into a space unrelated to polishing, and intensive spraying of the fluid toward the polishing surface is possible. there is

1 is a perspective view schematically illustrating a polishing apparatus according to an embodiment of the present invention.
2 is a partially enlarged view of a polishing apparatus according to an embodiment of the present invention.
3 is a plan sectional view showing a polishing wheel unit according to an embodiment of the present invention.
4 and 5 are side cross-sectional views partially illustrating an abrasive wheel unit according to embodiments of the present invention.
6 is a flowchart illustrating a polishing method according to an embodiment of the present invention.

Since the present invention can apply various transformations and can have various embodiments, specific embodiments are illustrated in the drawings and described in detail in the detailed description. Effects and features of the present invention, and a method for achieving them, will become apparent with reference to the embodiments described below in detail in conjunction with the drawings. However, the present invention is not limited to the embodiments disclosed below and may be implemented in various forms.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, and when described with reference to the drawings, the same or corresponding components are given the same reference numerals, and the overlapping description thereof will be omitted. .

In the following embodiments, terms such as first, second, etc. are used for the purpose of distinguishing one component from another, not in a limiting sense.

In the following examples, the singular expression includes the plural expression unless the context clearly dictates otherwise.

In the following embodiments, terms such as include or have means that the features or components described in the specification are present, and the possibility that one or more other features or components may be added is not excluded in advance.

In the drawings, the size of the components may be exaggerated or reduced for convenience of description. For example, since the size and thickness of each component shown in the drawings are arbitrarily indicated for convenience of description, the present invention is not necessarily limited to the illustrated bar.

In the following embodiments, the x-axis, the y-axis, and the z-axis are not limited to three axes on the Cartesian coordinate system, and may be interpreted in a broad sense including them. For example, the x-axis, y-axis, and z-axis may be orthogonal to each other, but may refer to different directions that are not orthogonal to each other.

In cases where certain embodiments are otherwise practicable, a specific process sequence may be performed different from the described sequence. For example, two processes described in succession may be performed substantially simultaneously, or may be performed in an order opposite to the order described.

1 is a perspective view schematically illustrating a polishing apparatus according to an embodiment of the present invention. 2 is a partially enlarged view of a polishing apparatus according to an embodiment of the present invention. 3 is a plan sectional view showing a polishing wheel unit according to an embodiment of the present invention. 4 and 5 are side cross-sectional views partially illustrating an abrasive wheel unit according to embodiments of the present invention.

1 to 5 , the polishing apparatus 1 according to an embodiment of the present invention may include a polishing wheel unit 100 , a cover unit 200 , and a fluid supply unit 300 .

Referring to FIG. 1 , the abrasive wheel unit 100 according to an embodiment of the present invention rotates by receiving power from a driving source, and may perform a polishing process while in direct contact with a polishing object 5 .

Referring to FIG. 1 , the abrasive wheel part 100 according to an embodiment of the present invention may be rotatably installed in the chamber 10 and receives rotational power from a driving source such as a spindle motor. It can be rotated clockwise or counterclockwise with the center of (100) as the central axis of rotation.

Referring to FIG. 1 , the abrasive wheel 100 according to an embodiment of the present invention receives power from the chamber 10 to move toward one surface of a polishing object 5 facing the polishing process, and the polishing process is performed. The edge of the object 5 to be polished may be polished while moving in parallel with the one surface of the object 5 .

1 to 3 , the cover part 200 may be disposed on the outside of the polishing wheel part 100 according to an embodiment of the present invention. The abrasive wheel part 100 shares a center (C) with the cover part 200 and is rotatable with the center (C) as a rotation center inside the cover part 200 .

2 and 3 , the abrasive wheel part 100 according to an embodiment of the present invention is disposed inside the cover part 200 , and rotation of the abrasive wheel part 100 affects the cover part 200 . does not reach The cover part 200 may be installed while being fixed to the chamber 10 in which the abrasive wheel part 100 is rotatably installed.

2 to 5 , a passage passage 110 is formed on one side of the polishing wheel part 100 according to an embodiment of the present invention, and a fluid F supplied from the outside is polished through the passage passage 110 . It may flow into the wheel part 100 .

3 to 5 , the passage passage 110 according to an embodiment of the present invention may be formed to extend along the circumference in a radial direction with respect to the center C of the abrasive wheel part 100 .

However, the present invention is not limited thereto, and the center of the abrasive wheel part 100 within the technical concept that the fluid F supplied from the outside of the abrasive wheel part 100 can be introduced into the abrasive wheel part 100 through the abrasive wheel part 100 . A plurality of passage passages 110 in the radial direction based on the equiangular arrangement with respect to the center (C) of the abrasive wheel part 100 and are independently formed, such as various modifications are possible.

Referring to FIGS. 3 and 4 , the passage passage 110 according to an embodiment of the present invention is connected to the discharge passage 130 to be described later, and the fluid F flowing in from the outside passes through the passage passage 110 . The fluid (F) flows into the inside of the abrasive wheel part 100 through the passageway 110, flows along the passage passage 110, and flows to the outside of the polishing wheel portion 100 through the discharge passage 130 connected to the passage passage 110. can be expelled.

In the present specification, 'fluid' refers to abrasive water, and when the abrasive wheel part 100 comes into contact with the polishing object 5 and performs a polishing process, it means that it is sprayed toward a polishing area.

Referring to FIGS. 2, 4, and 5 , a fluid F, which is abrasive water, is supplied to the abrasive wheel part 100 according to an embodiment of the present invention, and the abrasive water passes through the passage passage 110 to the discharge passage ( 130), there is an effect that the polishing efficiency can be improved by directly spraying the polishing water toward the area where the polishing wheel part 100 comes into contact with the polishing object 5 for polishing.

3 to 5 , the abrasive wheel part as abrasive water flows in a radial direction from the center of the abrasive wheel part 100 through the passage passage 110 formed in the abrasive wheel part 100 according to an embodiment of the present invention. Centrifugal force is increased when the fluid F flows in a direction away from the center C with the center C of 100 as the rotational center axis, and through the discharge passage 130 communicating with the passage passage 110 . There is an effect that can be sprayed at a relatively high pressure when spraying toward the polishing surface of the object 5 to be polished.

4 and 5 , the passage passage 110 according to an embodiment of the present invention may be formed to be inclined downward as the distance from the center C of the abrasive wheel part 100 increases.

Due to this, when a fluid F such as grinding water is supplied to the abrasive wheel 100, as the abrasive wheel 100 is rotated, it can quickly flow outward, and the fluid toward the grinding surface with a strong pressure by centrifugal force. (F) has the effect that it can be discharged.

3 to 5 , the passage path 110 according to an embodiment of the present invention has a cross-sectional area of the flow path through which the fluid F flows as the distance from the center C of the abrasive wheel part 100 increases. can be relatively reduced.

Due to this, there is an effect that the high-pressure fluid F can be discharged and sprayed toward the polishing surface of the polishing object 5 disposed on the outside of the polishing wheel part 100 .

2 to 5 , at least one discharge passage 130 is formed in the abrasive wheel unit 100 according to an embodiment of the present invention, and the discharge passage 130 is connected to the passage passage 110 and is abrasive. A discharge path of the fluid F flowing into the wheel part 100 to the outside may be provided.

3 to 5, the discharge flow path 130 according to an embodiment of the present invention is formed inside the abrasive wheel part 100, and is connected to the passage passage 110 on one side, and the other side opposite to this is formed inside the polishing wheel part 100. It communicates with the outer circumferential surface of the abrasive wheel part 100 and may provide a path through which the fluid F is discharged toward the abrasive object 5 disposed outside the abrasive wheel part 100 .

3 to 5 , the discharge flow path 130 according to an embodiment of the present invention has the same cross-sectional area along the longitudinal direction, but is not limited thereto. Since the area is formed to be small, when the fluid F is discharged toward the polishing surface, there is an effect of allowing the high-pressure fluid F to be sprayed.

Referring to FIG. 3 , a plurality of discharge passages 130 according to an embodiment of the present invention may be provided, and may be formed in a direction away from the center of the abrasive wheel part 100 , and a plurality of discharge passages 130 . is arranged at an angle with respect to the center (C) of the abrasive wheel part 100, and the fluid F flowing into the abrasive wheel part 100 is discharged to the outside, specifically, the fluid F is rapidly discharged toward the grinding surface where the grinding process is performed. It has the effect of making it possible.

4 and 5, the discharge flow path 130 according to embodiments of the present invention is shown, and as shown in FIG. 4, when the abrasive wheel part 100 is cross-sectioned in the yz plane, a single unit along the z-axis direction The discharge passage 130 communicates with the passage passage 110 and may discharge the fluid F flowing into the abrasive wheel part 100 to the outside.

However, the present invention is not limited thereto, and referring to FIG. 5 , a plurality of discharge passages 130 may be provided, and the plurality of discharge passages 130 communicate with the passage passage 110 , respectively, and serve as the abrasive wheel unit 100 . The supplied fluid F may be directly discharged toward the polishing surface formed on the polishing object 5 .

Referring to FIG. 5 , the plurality of discharge passages 130 may be arranged in parallel with different heights based on the rotational central axis AX of the abrasive wheel unit 100 . Due to this, the high-pressure fluid F from the plurality of discharge passages 130 toward the polishing surface formed on the polishing object 5 in an area formed along the circumference with respect to the center C of the polishing wheel 100 is discharged. Polishing performance can be improved by direct spraying and discharging.

In addition, since the fluid F is directly sprayed from the abrasive wheel part 100 toward the abrasive surface of the abrasive object 5, abrasive water, etc. It is possible to improve the polishing efficiency compared to supplying the fluid F, and there is an effect that the polishing process time can be shortened because there is no need to perform a plurality of polishing processes.

1 to 3 , the cover part 200 according to an embodiment of the present invention covers the abrasive wheel part 100 , and a preset area may be opened 210 . The cover part 200 is disposed on the outside of the polishing wheel part 100 and may be connected to the chamber 10 so that the position can be fixed.

Referring to FIG. 2 , a fluid supply unit 300 , which will be described later, may be connected to the cover unit 200 according to an embodiment of the present invention. Fluid F, such as grinding water, through the fluid supply unit 300 passes through the cover unit 200 to be introduced into the abrasive wheel unit 100 , specifically, the passage path 110 formed in the abrasive wheel unit 100 . do.

2 and 3 , the cover part 200 according to an embodiment of the present invention shares a center C with the abrasive wheel part 100 and may cover the abrasive wheel part 100 , the center A region preset at the side formed along the circumference with reference to (C) may be opened 210 .

Polishing in which the polishing process is applied while the fluid F discharged through the discharge passage 130 formed in the polishing wheel portion 100 through the opening region 210 formed along the outer circumference of the cover portion 200 faces each other It has the effect that it can be sprayed and reached directly on the surface.

Due to the opening of only a preset area at the side formed along the outer circumferential circumference of the cover unit 200 according to an embodiment of the present invention, the fluid F passes through the passage path 110 formed inside the polishing wheel unit 100 . ) and the discharge passage 130 communicating with the passage passage 110 and when discharged to the outside of the abrasive wheel part 100, the fluid F is sprayed only on the polishing surface that needs to be supplied with the fluid F, and the remaining area can block the injection path of the fluid F by centrifugal force.

2, 4 and 5 , the fluid supply unit 300 according to an embodiment of the present invention provides a path through which a fluid F such as grinding water is supplied from the outside, and the grinding wheel unit 100 It is possible to supply the fluid (F).

Referring to FIG. 2 , the fluid supply unit 300 according to an embodiment of the present invention may be connected to the cover unit 200 . The fluid supply unit 300 may be installed in the chamber 10 in which the polishing wheel unit 100 is rotatably installed, and as an optional embodiment, may be disposed independently of the chamber 10 and may be connected to the cover unit 200 . .

The fluid supply unit 300 according to an embodiment of the present invention is electrically connected to a control unit (not shown), and the driving is controlled to supply the fluid F to the polishing wheel unit 100 by receiving an electrical signal from the control unit. can

Specifically, the control unit is electrically connected to the abrasive wheel unit 100, the rotational power is transmitted to the abrasive wheel unit 100, and when the rotational power of the abrasive wheel unit 100 is generated based on the rotational central axis AX, the control unit is It transmits an electrical signal, and the control unit transmits an electrical signal to the fluid supply unit 300 to control the driving of the fluid supply unit 300 to supply the fluid F from the fluid supply unit 300 to the abrasive wheel unit 100 . have.

A polishing method using the polishing apparatus 1 according to an embodiment of the present invention as described above will be described.

6 is a flowchart illustrating a polishing method using the polishing apparatus 1 according to an embodiment of the present invention. 6 , the polishing method using the polishing apparatus 1 according to an embodiment of the present invention includes rotating the polishing wheel unit 100 ( S10 ), supplying a fluid F to the polishing wheel unit 100 . Step (S20), it may include a step (S30) of moving the polishing wheel unit 100 to the polishing object (5).

In the step S10 of rotating the abrasive wheel unit 100 , power may be transmitted to the abrasive wheel unit 100 from a driving source such as a spindle motor installed in the chamber 10 to rotate the abrasive wheel unit 100 .

3 to 5 , the abrasive wheel part 100 according to an embodiment of the present invention is formed in a disk shape and can be rotated with a center C as a rotational central axis AX. .

Referring to FIG. 6 , in the step of supplying the fluid F to the abrasive wheel unit 100 ( S20 ), the fluid F is supplied from the fluid supply unit 300 disposed outside the abrasive wheel unit 100 to the abrasive wheel unit 100 . can be supplied towards

The fluid supply unit 300 may be electrically connected to the control unit, and when rotational power is transmitted and driven to the polishing wheel unit 100 , the control unit transmits an electrical signal to the fluid supply unit 300 to move the fluid F toward the polishing wheel unit 100 . ) may be driven to supply the fluid supply unit 300 .

The fluid supply unit 300 may be connected to the cover unit 200 disposed on the outside of the abrasive wheel unit 100 , and the fluid F supplied from the fluid supply unit 300 passes through the outer surface of the cover unit 200 to cover the cover. The fluid F may be supplied to the abrasive wheel part 100 disposed inside the part 200 , specifically, to the passage passage 110 formed on one surface (the upper surface of FIG. 2 ) of the abrasive wheel part 100 .

Referring to FIG. 6 , in the step (S30) of moving the abrasive wheel part 100 to the abrasive object 5, the abrasive device 1, specifically, the chamber 10 in which the abrasive wheel part 100 is installed is transferred to the transfer part (reference numeral). A first direction (y-direction based on FIG. 1) directed toward the polishing object 5 by receiving power from (not set), a second direction perpendicular to the first direction and parallel to the polishing surface formed on the polishing object 5 ( 1), the abrasive wheel unit 100 is moved along the third direction (the z direction based on FIG. 1) parallel to the axis of rotation of the abrasive wheel unit 100, and the abrasive wheel unit 100 can be moved toward the abrasive object 5. .

When the polishing wheel 100 comes into contact with the polishing surface formed on the polishing object 5 and the polishing process is performed, the fluid F supplied from the fluid supply unit 300 to the polishing wheel unit 100 is transferred to the polishing wheel unit 100 . It flows along the passage passage 110 formed in the It can be sprayed and discharged.

In the polishing apparatus 1 and the polishing method according to the embodiments of the present invention, the passage passage 110 is formed in a radial direction from the center of the polishing wheel part 100 , and the passage passage 110 is passed through the fluid supply unit 300 . , the fluid F can be directly sprayed and discharged to the polishing surface of the polishing object 5 while rotating through the discharge flow path 130, so that a separate fluid F such as polishing water is sprayed toward the polishing surface. Since the configuration of the nozzle is not required, the structure of the polishing apparatus 1 can be simplified.

In addition, by adjusting the rotation speed of the abrasive wheel part 100 and the size of the cross-sectional area of the passage passage 110 and the discharge passage 130 formed inside the abrasive wheel portion 100, the fluid F directly sprayed on the polishing surface. It has the effect of being able to design the pressure and flow rate of

In addition, since the passage passage 110 and the discharge passage 130 are formed in a direction away from the center of the abrasive wheel part 100, the fluid F can be forcibly sprayed through centrifugal force, which occurs when the polishing process is performed on the polishing surface. The processing heat cooling performance can be improved.

In addition, since a preset section is opened in the cover part 200 and the fluid F is directly sprayed on the polishing surface through the opening area 210, the injection of the fluid F into a space unrelated to polishing is prevented. Prevents, and has the effect that the concentrated injection of the fluid (F) toward the polishing surface is possible.

In addition, there is an effect that the polishing quality related to chipping, burning, cracks, etc. can be improved by directly spraying a fluid F such as polishing water on the polishing surface of the polishing wheel part 100 and the polishing object 5 .

As such, the present invention has been described with reference to the embodiments shown in the drawings, which are merely exemplary, and those of ordinary skill in the art will understand that various modifications and equivalent other embodiments are possible therefrom. . Accordingly, the true technical protection scope of the present invention should be defined by the technical spirit of the appended claims.

The specific implementations described in the embodiments are only embodiments, and do not limit the scope of the embodiments in any way. In addition, unless there is a specific reference such as "essential", "importantly", etc., it may not be a necessary component for the application of the present invention.

In the specification of the embodiments (especially in the claims), the use of the term “above” and similar referential terms may correspond to both the singular and the plural. In addition, when a range is described in the embodiment, it includes the invention to which individual values belonging to the range are applied (unless there is a description to the contrary), and each individual value constituting the range is described in the detailed description. . Finally, the steps constituting the method according to the embodiment may be performed in an appropriate order unless the order is explicitly stated or there is no description to the contrary. Embodiments are not necessarily limited according to the order of description of the above steps. The use of all examples or exemplary terms (eg, etc.) in the embodiment is merely for describing the embodiment in detail, and unless it is limited by the claims, the scope of the embodiment is limited by the examples or exemplary terminology. it is not In addition, those skilled in the art will appreciate that various modifications, combinations, and changes may be made in accordance with design conditions and factors within the scope of the appended claims or their equivalents.

1: abrasive device F: fluid
5; Polishing object 10: chamber
100: abrasive wheel part 110: passage passage
130: discharge flow path 200: cover part
210: opening area 300: fluid supply unit

Claims (10)

Includes a; abrasive wheel portion rotated by receiving power from a driving source;
A passage passage is formed inside the abrasive wheel portion in a radial direction from the center of the abrasive wheel portion, and a discharge passage is formed that is connected to the passage passage and provides a discharge passage for the fluid flowing into the polishing wheel portion to the outside. abrasive device. The method of claim 1,
Polishing apparatus, characterized in that the plurality of discharge passages are provided. 3. The method of claim 2,
A polishing apparatus, characterized in that the plurality of discharge passages are spaced apart along the circumferential direction with respect to the center of the polishing wheel part. According to claim 1,
Polishing apparatus, characterized in that the cross-sectional area of the passage passage is relatively reduced as the distance from the center of the polishing wheel part. According to claim 1,
The polishing apparatus further comprising a; covering the abrasive wheel part, the cover part having a preset area opened. According to claim 1,
The polishing apparatus further comprising a; a fluid supply unit disposed outside the polishing wheel portion and supplying a fluid toward one surface of the polishing wheel portion on which the passage passage is formed. receiving power from a driving source to rotate the abrasive wheel unit;
supplying a fluid to the abrasive wheel unit; and
Including; moving the abrasive wheel part to the abrasive object;
The fluid is introduced into the abrasive wheel part, and is discharged to an object in contact with the abrasive wheel part through a discharge passage formed on an outer peripheral surface of the abrasive wheel part. 8. The method of claim 7,
The polishing method according to claim 1, wherein a passage passage communicating with the discharge passage is formed inside the polishing wheel portion in a radial direction from the center of the polishing wheel portion. 8. The method of claim 7,
The polishing method, characterized in that the plurality of discharge passages are provided. 8. The method of claim 7,
A polishing method, characterized in that the plurality of discharge passages are spaced apart from each other in a circumferential direction with respect to the center of the polishing wheel part.

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