KR20220064528A - Apparatus for shape management and method for shape management using the same - Google Patents

Abstract

The present invention relates to a shape management device, and a shape management method using the same. The shape management device comprises: a cross-section data measurement unit for measuring cross-sectional data of an object to be inspected; a thickness measurement unit for measuring thickness of the object to be inspected; and a data processing unit for processing data measured by the cross-section data measurement unit and the thickness measurement unit.

Description

A configuration management device and a configuration management method using the same

The present invention relates to a configuration management apparatus and a configuration management method using the same.

Due to the recent technological development, as thinning and weight reduction of portable terminal devices such as smart phones and tablet PCs are required, the demand for thinning glass substrates mounted on these terminal devices is increasing. Furthermore, as various types of displays such as foldable displays, rollable displays, and stretchable displays have been developed due to the rapid development of the display technology field, the ultra-thin film form that can be applied to these displays The development and manufacturing of glass is in progress.

In order for the glass in the form of an ultra-thin film to exhibit excellent flexibility in a device, thorough quality control for flexural properties such as flexural strength is required.

In quality control for improving the flexural properties such as the flexural strength of the ultra-thin glass, it is complex depending on various factors such as the thickness of the ultra-thin glass, as well as the shape of the edge or the length of the tip. Impact analysis and management are also essential.

Therefore, information on the shape of the edge (end part) of the ultra-thin glass is also one of the elements that need to be managed intensively, but the edge (edge) of the thin and transparent glass of 100 μm or less Part) Since it is impossible to completely measure the shape of the cross-section with the existing equipment, the need for development for this is further emerging.

On the other hand, Korean Patent Laid-Open Patent No. 10-2019-0092368 discloses a technique for managing the cut surface of the glass by evaluating the straightness of the cut surface of the cut glass. However, this is only intended to evaluate the cut state of the cut surface, and the shape of the edge (end portion) cross-section portion of the ultra-thin glass or the cross-section portion tip (TIP) width There are limits to managing

Republic of Korea Patent Publication No. 10-2019-0092368

The present invention calculates the width of the cross-sectional shape to the cross-sectional shape of the tip (TIP) of the object to be inspected with improved accuracy and precision, and a shape for managing it It is an object of the invention to provide a management device.

Another object of the present invention is to provide a shape management method in which the manageability of the distribution of characteristics of an object to be inspected is further improved.

The present invention provides a cross-sectional data measuring unit for measuring cross-sectional data of an object to be inspected; A thickness measuring unit for measuring the thickness of the test object; and a data processing unit for processing data measured by the cross-section data measuring unit and the thickness measuring unit.

In the present invention, in the first aspect, the cross-sectional data measuring unit may be a confocal microscope (Confocal Microscopy).

In a second aspect, the data processing unit includes: an initial value calculating unit for calculating an initial value for calculating a maximum inclination height; a median value calculating unit for calculating a maximum inclination height using the initial value; and a result calculation unit for calculating the width of the tip tip TIP by using the calculated maximum inclination height.

In the third aspect of the present invention, the initial value calculating unit may calculate length data between each component using data measured by the cross-sectional data measuring unit.

According to the fourth aspect of the present invention, the data measured by the cross-section data measuring unit may include data of the maximum depth point.

In the fifth aspect of the present invention, the intermediate value calculating unit may calculate the maximum inclination height by performing an operation of a trigonometric function.

In the sixth aspect of the present invention, the intermediate value calculating unit may calculate a maximum slope height by performing a ratio of similarity operation.

In the seventh aspect of the present invention, the result calculation unit may calculate a result value obtained by subtracting the maximum inclination height from the thickness of the test object as a tip width.

In the eighth aspect, the present invention may further include an aligning unit for aligning the test object.

In the present invention, in the ninth aspect, the test object may be an ultra-thin glass.

In the present invention, in the tenth aspect, the thickness of the ultra-thin glass may be 100 μm or less.

In addition, the present invention, aligning the test subject; measuring cross-sectional data of the object to be inspected by a cross-sectional data measuring unit; measuring the thickness of the test object by a thickness measuring unit; and calculating the width of the cross-section tip (TIP) using the cross-section data and thickness.

The present invention, in its eleventh aspect, calculating the width of the tip tip (TIP) comprises: calculating an initial value for calculating the maximum inclination height; calculating a maximum inclination height using the initial value; and calculating a result value by excluding the maximum inclination height from the thickness of the test object.

According to the shape management device according to the present invention, compared to the conventional shape management device, it is possible to calculate the shape of the cross-section part of the object to be inspected or the width of the tip part tip (TIP) with improved accuracy and precision and manage it. there is.

In addition, according to the shape management method according to the present invention, the manageability of the characteristic distribution of the object to be inspected may be further improved compared to the conventional shape management method.

1 is a schematic side view illustrating a configuration management apparatus according to an embodiment of the present invention.
2 is a schematic flowchart illustrating a configuration management method according to an embodiment of the present invention.

The present invention relates to a shape management apparatus and a shape management method using the same, and by managing the cross-sectional shape using cross-sectional data and thickness of the inspection object, the management performance of the inspection object is improved It is the purpose of the invention to make

Specifically, the present invention provides a cross-sectional data measuring unit for measuring cross-sectional data of an object to be inspected; A thickness measuring unit for measuring the thickness of the test object; and a data processing unit for processing the data measured by the cross-sectional data measuring unit and the thickness measuring unit, to a shape management apparatus and a shape management method using the same.

Hereinafter, embodiments of the present invention will be described in more detail with reference to the drawings. However, the following drawings attached to the present specification illustrate preferred embodiments of the present invention, and serve to further understand the technical spirit of the present invention together with the above-described content of the present invention, so the present invention is described in such drawings It should not be construed as being limited only to the matters.

The terminology used herein is for the purpose of describing the embodiments, and is not intended to limit the present invention. In this specification, the singular also includes the plural unless otherwise specified in the phrase.

As used herein, includes and/or comprising refers to the presence or addition of one or more other components, steps, operations and/or elements other than the recited elements, steps, operations and/or elements. It is used in the sense of not being excluded. The same reference numerals refer to the same components throughout the specification, and components shown in the drawings may be exaggerated, reduced, or omitted for a smooth description.

Spatially relative terms "beneath", "lower", "above", "upper", etc., as shown in the drawings, refer to one element or component and another. It can be used to easily describe a correlation with an element or components. The spatially relative terms should be understood as terms including different orientations of the device during use or operation in addition to the orientation shown in the drawings. For example, when an element shown in the figures is turned over, an element described as "beneath" or "beneath" another element may be placed "above" the other element. Accordingly, the exemplary term “below” may include both directions below and above. The device may also be oriented in other orientations, and thus spatially relative terms may be interpreted according to orientation.

<Shape management device>

1 is a schematic side view illustrating a configuration management apparatus according to an embodiment of the present invention.

Referring to FIG. 1 , the shape management apparatus of the present invention may include a cross-section data measuring unit 100 , a thickness measuring unit 200 , and a data processing unit 300 , and an alignment unit 400 if necessary. It may further include.

The cross-sectional data measuring unit 100 is not particularly limited as long as it can measure cross-sectional data of the object 50, and in one embodiment, may be a confocal microscope.

The cross-section data measuring unit 100 may be provided adjacent to one surface of the object 50 as shown in FIG. 1 , but is not necessarily limited thereto, and may be provided in plurality.

The object to be inspected is not particularly limited as long as shape management of the cross-section is required, but it is more preferable that management of the characteristic distribution is required including curved surfaces or inclined surfaces. For example, the thickness of the test object may be changed from the center to the edge (edge; distal portion), specifically, the thickness of the examination object is the edge (edge; distal portion) ), including curved surfaces or inclined surfaces, and thinning. In an embodiment, the object to be inspected may be ultra-thin glass, and the thickness of the ultra-thin glass may be 100 μm or less, preferably 10 to 70 μm, and more preferably 30 to 50 μm. can

The cross-section means a cross-section of the object to be inspected, and is preferably a cross-section of a region having a different characteristic distribution according to cross-sectional data. For example, as shown in FIG. 1 , the horizontal plane P and the inclined plane S are mixed, so the distribution of flexural strength, etc. may be different depending on the cross-sectional data. In one embodiment, It may be a cross-section of a region including an edge (end portion) of ultra-thin glass.

The cross-section data may be understood as a broad concept meaning information on a cross-section of an object to be inspected. For example, as shown in FIG. 1 , the horizontal plane P data, the inclined plane S data, the inclined plane S depth data, the maximum depth point Sf data, the horizontal plane P and the inclined plane S There may be intersection (Ss) data, distance (d) data from the intersection (Ss) to an edge (edge).

The horizontal plane P data may be defined as position data with respect to an imaginary parallel line extending in the longitudinal direction of the cross-section of the object 50 to be inspected.

The inclined surface (S) data may include depth data of the inclined surface (S) and data of the maximum depth point (Sf). It may be defined as position data for an imaginary parallel line extending along the . In another embodiment of the present invention, the inclined surface S data may be defined as position data for a virtual parallel line extending in a tangential direction of the maximum depth point Sf.

The depth data of the inclined surface S may be defined as data that is formed on the inclined surface and indicates the degree of depth from the horizontal surface P data, and the data of the maximum depth point Sf is cross-sectional data measurement among the depth data. It may be defined as data of the maximum point measurable by the unit 100 .

The thickness measurement unit 200 is not particularly limited as long as it can measure the thickness of the object 50 to be inspected, and in one or a plurality of embodiments, an infrared reflection measurement method, a confocal measurement method, etc. may be used. can

The thickness of the test object 50 may be defined as a cross-sectional thickness of the test object 50, for example, between one horizontal plane P and the other horizontal plane P as shown in FIG. 1 . It can be defined as the distance (T) of

The data processing unit 300 may be for collecting data measured by the cross-section data measuring unit 100 and the thickness measuring unit 200 , and calculating a result value through a predetermined calculation process.

The data processing unit 300 may include an initial value calculation unit, an intermediate value calculation unit, and a result value calculation unit.

The initial value calculating unit may perform an operation of calculating initial data for calculating the maximum inclination height in an intermediate value calculating unit to be described later by using the data measured by the cross-sectional data measuring unit 100 .

Referring to FIG. 1 showing an embodiment of the present invention, the initial value calculating unit first calculates the intersection point (Ss) data measured by the cross-section data measurement unit 100 at a first point (a); Depth data of the inclined surface (S), preferably data of the maximum depth point (Sf) to the second point (b); and data of a point Sf' formed on the horizontal plane P and at which an imaginary line connected to the second point b is orthogonal to the horizontal plane P is defined as the third point c.

Then, the distance ( L _ab ) between the first point (a) and the second point (b); a distance ( L _ac ) between the first point (a) and the third point (c); a distance ( L _bc ) between the second point (b) and the third point (c); and an operation of calculating an initial value representing the distance d between the intersection Ss and the edge as length data.

On the other hand, the initial value, in order to represent an embodiment of the present invention, the distance ( L _ab ) between the first point (a) and the second point (b); a distance ( L _ac ) between the first point (a) and the third point (c); a distance ( L _bc ) between the second point (b) and the third point (c); And parameters such as the distance d between the intersection Ss and the edge were used, but the present invention is not limited thereto. Calculating the maximum slope height in the intermediate value calculation unit to be described later according to the user may be appropriately selected for

The intermediate value calculating unit may perform an operation of calculating the maximum inclination height formed by the inclined surface of the cross-section using the initial value calculated by the initial value calculating unit.

The maximum inclination height may be the maximum height of the inclined surface formed by the inclined surface of the cross-section, and may exceed data of the maximum depth point measured by the cross-section data measurement unit 100 . For example, as shown in FIG. 1 , the maximum inclination height H may exceed data of the maximum depth point Sf.

The intermediate value calculator, according to an embodiment, may calculate the maximum inclination height by calculating a trigonometric function using the inclination angle of the cross-section.

Specifically, referring to FIG. 1 , the intermediate value calculator calculates the inclination angle θ of the cross-section through a calculation process according to Equation 1 below.

[Equation 1]

(In Equation 1, θ is the inclination angle of the cross section, L _bc is length data between the second point and the third point, and L _ac is length data between the first point and the third point.)

Thereafter, the maximum inclination height H is calculated through an operation process according to Equation 2 below.

[Equation 2]

(In Equation 2, H is the maximum inclination height, d is the length data from the intersection Ss to the edge, and θ is the inclination angle of the cross-section.)

On the other hand, the inclination angle of the cross-section is shown as θ shown in FIG. 1 to show an embodiment of the present invention, but is not limited thereto. It is interpreted in a broad sense including the angle of inclination.

In addition, Equations 1 and 2 are interpreted in a broad sense including all equations for substantially performing calculation of the inclination angle of the cross-section, including the form by the transformation of a trigonometric function. For example, there may be an operation by a trigonometric function of a modified form such as a sine function, a cosine function, a tangent function, etc., by combining Equations 1 and 2 or using a ratio of similarity of a polygon, The maximum inclination height may be calculated through an operation process according to Equation 3 below.

[Equation 3]

(In Equation 3, H, L _ac , L _bc and d have the same meaning as in Equations 1 and 2.)

The result calculation unit may perform an operation of calculating the tip width of the cross-section using the maximum inclination height calculated by the intermediate value calculation unit.

The width of the tip TIP may be a width indicated by the tip TIP of a cross-section of an edge of the object 50 except for the inclined surface S.

Referring to FIG. 1 showing an embodiment of the present invention, the result calculation unit calculates the result value after subtracting the maximum inclination height (H) calculated by the median value calculation unit from the thickness (T) of the test object 50 ( TIP) It may be calculated by the width (M).

The shape management apparatus of the present invention may further include an alignment unit 400 for assisting alignment of the examination object 50 .

The alignment unit 400 is not particularly limited as long as it can improve the accuracy and precision of the result value by assisting the alignment of the test object 50 .

Referring to FIG. 1 showing an embodiment of the present invention, the aligning unit 400 aligns the edge (end) of the examination object 50, so that the examination object 50 is positioned at a constant position. It may be an aid to be aligned.

<Shape management method>

The present invention includes a configuration management method using the configuration management device described above.

2 is a schematic flowchart illustrating a configuration management method according to an embodiment of the present invention.

Referring to FIG. 2 , the shape management method of the present invention may include aligning an object to be inspected; measuring cross-sectional data of the object to be inspected by a cross-sectional data measuring unit; measuring the thickness of the test object by a thickness measuring unit; and calculating the width of the cross-section tip TIP using the cross-sectional data and thickness.

Hereinafter, a configuration management method according to an embodiment of the present invention will be described, but the present invention is not limited thereto.

First, the edge of the object to be inspected is provided so as to be aligned with an alignment unit, for example, a mechanical alignment or the like. Thereafter, the cross-sectional data measuring unit provided on at least one surface of the test object, for example, measures the cross-sectional data of the object using a confocal microscope.

Separately from the measurement of the cross-section data, the thickness of the object is measured by a thickness measuring unit provided on at least one surface of the object.

Thereafter, an initial value obtained by processing the measured cross-section data into length data of each component is calculated, and the maximum inclination height is calculated using the initial value. Calculating the maximum slope height using the initial value may be performed including calculation of a trigonometric function or a ratio of similarity.

Thereafter, from the thickness of the test object measured by the thickness measuring unit, the tip width defined as a result value obtained by subtracting the maximum inclination height is calculated and the result is shown.

Meanwhile, although it has been described that each step and sub-step are sequentially performed in the above method, each step and sub-step may be individually and simultaneously performed.

The components disclosed in the shape management method may exhibit all the characteristics described in the item <shape management device> .

In addition, each step of the shape management method may be performed by the components described in the item <shape management device> .

50: test object
100: section data measurement unit
200: thickness measurement unit
300: data processing unit
400: alignment unit

Claims (13)

a cross-sectional data measuring unit for measuring cross-sectional data of the object to be inspected;
A thickness measuring unit for measuring the thickness of the test object; and
and a data processing unit for processing the data measured by the cross-section data measuring unit and the thickness measuring unit.
The method according to claim 1, The cross-section data measuring unit is a confocal microscope (Confocal Microscopy), shape management device.
The method according to claim 1, wherein the data processing unit
an initial value calculating unit that calculates an initial value for calculating the maximum inclination height;
a median value calculating unit for calculating a maximum inclination height using the initial value; and
Using the calculated maximum inclination height to calculate the width of the tip tip (TIP), including a result calculation unit, shape management device.
The shape management apparatus of claim 3 , wherein the initial value calculating unit calculates length data between each component using data measured by the cross-sectional data measuring unit.
The apparatus according to claim 4, wherein the data measured by the cross-section data measuring unit includes data of a maximum depth point.
The method according to claim 3, wherein the intermediate value calculator calculates the maximum inclination height including the operation of a trigonometric function, shape management method
The method according to claim 3, wherein the intermediate value calculating unit calculates the maximum inclination height including a ratio of similarity calculation.
The shape management apparatus of claim 3 , wherein the result calculation unit calculates a result value obtained by subtracting the maximum inclination height from the thickness of the test object as a tip width.
The apparatus of claim 1, further comprising an aligning unit for aligning the inspection object.
The method according to claim 1, The test object is an ultra-thin glass, shape management device.
The method according to claim 10, The thickness of the ultra-thin glass is 100㎛ or less, shape management device.
aligning the test object;
measuring cross-sectional data of the object to be inspected by a cross-sectional data measuring unit;
measuring the thickness of the test object by a thickness measuring unit; and
Comprising the step of calculating the width of the cross-section tip (TIP) by using the cross-section data and the thickness, shape management method.
The method according to claim 12, wherein calculating the width of the tip tip (TIP) comprises:
calculating an initial value for calculating a maximum inclination height;
calculating a maximum inclination height using the initial value; and
Comprising the step of calculating a result value by subtracting the maximum inclination height from the thickness of the inspection object, shape management method.

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