KR20220058990A - A Magnetic Induction Ball Module and an Apparatus for Heating with the Same - Google Patents

Abstract

The present invention relates to a magnetic induction ball module and a heating device using the same to improve heating efficiency by magnetic induction by including an induction ball inside which increases the effect of magnetic induction. According to the present invention, the magnetic induction ball module comprises: an induction body (11) in which an accommodation space or a flow space is formed and at least a portion of a circumferential surface is made of a magnetic material; and a plurality of induction balls (14_1 to 14_N, 15_1 to 15_M) or heating plates disposed on or inside the circumferential surface of the induction body (11) and transferring heat to the gas flowing into the inside.

Description

A Magnetic Induction Ball Module and an Apparatus for Heating with the Same}

The present invention relates to a magnetic induction ball module and a heating device thereby, and more particularly, to a magnetic induction ball module in which the induction ball is disposed inside an induction body capable of inducing eddy current to improve heating efficiency, and to a heating device thereby .

A conduit connected to a processing device such as a scrubber or a trap for processing various by-products discharged after semiconductor processing needs to be heated during processing. For this it is necessary to use a suitable heating device, for example heating means such as a heater jacket can be used. However, such a heating means has a disadvantage in that the heating efficiency is low and, for example, it takes a lot of time for heating. Therefore, it is necessary to make an appropriate heating means that can compensate for these shortcomings. Patent Registration No. 10-1338970 discloses a system for removing rust or coating layer inside large pipelines such as water and sewage pipelines. In addition, Patent Publication No. 10-2014-0118922 discloses an apparatus and method for heating or coating the outer surface of a pipe or combining heating and coating of the outer surface of the pipe. A heating process is required in various industrial sites, and for example, an induction heating process that generates heat by inducing an eddy current in a conductor such as a metal by electromagnetic induction is used in various industrial sites. The induction heating method has a fast reaction and high efficiency, and is structurally simple, but has a disadvantage that the heating target must be a magnetic material. In addition, it should be designed so that heat is efficiently generated according to the heating object. For this reason, induction heating has been limitedly applied to industrial sites. Therefore, there is a need to develop an induction heating means that can be applied to various heating processes such as, for example, heating of a conduit or heating of a scrubber, or can improve the efficiency of a treatment process. However, the prior art does not disclose such an induction heating means.

The present invention is to solve the problems of the prior art and has the following objects.

Patent Document 1: Patent Registration No. 10-1338970 (Water Resources Technology Co., Ltd., 2013.12.10. Announcement) A system for removing rust and coating inside pipelines using the principle of bogie and induction Patent Document 2: Patent Publication No. 10-2014-0118922 (Inductosom Heating & Welding Limited, published on Oct. 8, 2014) Electric induction heating and coating of the outer surface of the pipe

It is an object of the present invention to provide a magnetic induction ball module and a heating device thereby to improve heating efficiency by magnetic induction, including an induction ball that increases the effect of magnetic induction therein.

According to a suitable embodiment of the present invention, the magnetic induction ball module includes an induction body having an accommodation space or a flow space, and at least a portion of the circumferential surface is made of a magnetic material; and a plurality of induction balls or heating plates disposed on or inside the circumferential surface of the induction body and transferring heat to the gas flowing therein.

According to another suitable embodiment of the present invention, the plurality of magnetic induction balls are composed of at least two ball groups having different shapes or volumes.

According to another suitable embodiment of the present invention, the plurality of induction balls are made of graphite material or metal material.

According to another suitable embodiment of the present invention, the heating device comprises: an induction body having a gas flow space formed therein; an induction coil for inducing a magnetic field on the surface of the induction body; an induction ball module disposed in a portion in thermal contact with the gas induction space or the gas flow space; and a plurality of induction balls or heating plates disposed on the induction ball module to transfer heat generated by the induction coil to the internal gas.

According to another suitable embodiment of the invention, the guiding body is installed on the circumferential face of the conduit for gas flow or forms part of a path for gas flow.

According to another suitable embodiment of the invention, the induction body is connected to a vacuum pump for semiconductor processing.

According to another suitable embodiment of the invention, the guide body is arranged in a reactor of a scrubber.

The magnetic induction ball module according to the present invention has a magnetic induction ball disposed therein so that the heating efficiency is improved by directly contacting the heating target to transfer heat. A magnetic induction type heating device including such a magnetic induction ball module is, for example, a conduit for connecting the scrubber from a vacuum pump (dry pump), a trap device that is connected before and after the vacuum pump to remove solid residues It can be applied to the inner heater (inner heater) means for removing the residue accumulated inside the conduit connecting the vacuum pump or the vacuum pump and the conduit connected to the vacuum pump. The magnetic induction ball module according to the present invention may be combined with various magnetic induction means to form a heating device, and is not limited by the heating object.

1 shows an embodiment of a magnetic induction ball module according to the present invention.
Figure 2 shows an embodiment in which a heating device including a magnetic induction ball module according to the present invention is applied to the conduit.
3 shows another embodiment to which a heating device according to the present invention is applied.
4 shows another embodiment to which a heating device according to the present invention is applied.
5 shows another embodiment to which a heating device according to the present invention is applied.
6 shows an embodiment of a magnetic induction module to which a heating device is applied.
7 shows an embodiment of a controlled process of the heating device according to the present invention.

Hereinafter, the present invention will be described in detail with reference to the embodiments shown in the accompanying drawings, but the embodiments are for a clear understanding of the present invention, and the present invention is not limited thereto. In the following description, components having the same reference numerals in different drawings have similar functions, so unless necessary for the understanding of the invention, the description will not be repeated and well-known components will be briefly described or omitted, but the present invention It should not be construed as being excluded from the embodiment of

1 shows an embodiment of a magnetic induction ball module according to the present invention.

Referring to Figure 1, the magnetic induction ball module 10 is an accommodating space or flow space is formed, at least a portion of the peripheral surface of the induction body 11 made of a magnetic material; and a plurality of induction balls 14_1 to 14_N and 15_1 to 15_M or a heating plate disposed on the circumferential surface or inside of the induction body 11 and transferring heat to the gas flowing therein.

The induction body 11 may have a cylindrical shape, a polyhedral shape or a similar shape as a whole, and an inlet and an outlet are formed so that gas flows in as indicated by an arrow and can be discharged to the outside through the inside of the induction body 11 there is. At least a portion of the circumferential surface of the induction body 11 may include a material that generates heat by an eddy current by induction and change of a magnetic field, and may include, for example, a stainless steel layer. The induction body 11 may have various structures in which a gas may flow or a heating object may be accommodated therein. A plurality of induction balls (14_1 to 14_N, 15_1 to 15_M) may be disposed on the circumferential surface or inside of the induction body 11 . The induction balls 14_1 to 15_M may have high thermal conductivity, and may selectively generate heat by magnetic induction. The induction balls 14_1 to 15_M may have, for example, a spherical shape, a polyhedral shape, or a similar shape, and the different guide balls 14_1 to 15_M may have the same or different volumes. For example, the plurality of induction balls 14_1 to 15_M have a spherical shape and have the same or similar volume as the first ball groups 14_1 to 14_N and the same or similar shape, or have different shapes while having a first ball group It may include second ball groups 15_1 to 15_M having a relatively small volume compared to (14_1 to 14_N). A plurality of ball groups having different structural or electrical characteristics may be accommodated in the induction body 11, and the present invention is not limited thereby. Each of the induction balls 14_1 to 15_M may be made of a ferromagnetic material or may include a coating layer made of a ferromagnetic material, whereby an eddy current may be generated according to a change in the magnetic field. At least some of the plurality of induction balls 14_1 to 15_M, which may have different volumes, may be filled in the entire interior of the induction body 11 or may be partially filled. Alternatively, it may be filled along the inner circumferential surface of the induction body 11 or may be filled in the central portion by forming a core. The plurality of induction balls 14_1 to 15_M may be filled in the interior of the induction body 11 in various ways. Such an induction ball module 10 may be applied as a heating device.

According to one embodiment of the present invention, the heating device includes an induction body 11 in which a gas flow space is formed; an induction coil 12 for inducing a magnetic field on the surface of the heating body 11; an induction ball module 10 disposed in a portion in thermal contact with the gas induction space or the gas flow space; and a plurality of induction balls 14_1 to 14_N and 15_1 to 15_M disposed in the induction ball module 10 to transfer heat generated by the induction coil 12 to the flowing gas.

The gas may be induced into the induction ball module 10, and the gas induced into the induction body 11 may flow to the outside of the induction body 11 after contacting the induction balls 14_1 to 15_M. there is. Alternatively, as shown on the right side of FIG. 1, the induction balls 14_1 to 15_M are disposed in the arrangement space formed inside the circumferential surface of the induction body 11 so that the gas may not contact the induction balls 14_1 to 15_M. . Alternatively, some of the induction balls 14_1 to 15_M may be disposed on the inside of the circumferential surface, and the other part may be disposed on the inside of the guide body 11 . Surrounding at least a part of the induction body 11 and the induction coil 12 for inducing generation of eddy currents on the circumferential surface or the induction balls 14_1 to 15_M on the induction body 11 may be disposed. The induction coil 12 may be connected to a power source 13 for applying an alternating current. The heating device having such a structure may be disposed in a gas flow path or in various facilities requiring heating. An embodiment to which such a heating device is applied will be described below.

2 shows an embodiment in which a heating device including a magnetic induction ball module according to the present invention is applied to the conduit 21 .

Referring to FIG. 2 , the heating device may be applied as a means for heating the gas flowing along the inside of the conduit 21 . Such a conduit heating device is connected to the flow generating module (22a, 22b) for generating a fluid flow, the conduit 21 for flowing the fluid; and an induction ball module (10a, 10b, 10c) coupled to at least a portion of the circumferential surface of the conduit 21 to heat the conduit 21 in a magnetic induction manner, wherein the induction body 11a, 11b, 11c or induction The balls 14_1 to 14_N may be a heat conductor that transfers heat to the gas flowing inside the induction body 11 , or may optionally include a ferromagnetic layer such as a stainless steel layer. The magnetic induction method may be any method of inducing hysteresis loss due to generation of an eddy current in a conductor by a change in a magnetic field according to a change in current. The conduit 21 may have various structures capable of flowing a fluid therein, and may be, for example, a conduit 21 connected to a vacuum pump used in a semiconductor process. Various types of process by-products, including plasma used in the semiconductor process, may be discharged along the conduit 21 according to the operation of the vacuum pump. The conduit 21 may have a structure suitable for transporting a gas containing various types of harmful compounds. The conduit 21 may be connected to a flow generating module 22a , 22b such as a vacuum pump, scrubber or trap, for example. The flow generating modules 22a and 22b may include various process devices for allowing gas to flow into the conduit 21 , or for introducing or discharging gas from the conduit 21 , for example, a vacuum pump used in a semiconductor process. , devices such as, but not limited to, turbopumps, scrubbers, trap devices, or vaporizers. The conduit 21 may be made of various materials and may be made of, for example, a magnetic material such as stainless steel, or may include a magnetic layer, but is not limited thereto. The induction coils 23a, 23b, and 23c connected to the power sources 13a, 13b, 13c may be wound on the circumferential surface of the induction body 11a, 11b, 11c, and the magnetic material by the induction coils 23a, 23b, 23c Alternatively, an induced current may be induced while the magnetic field is transmitted through the magnetic layer. The conduit 21 and the inside of the conduit 21 may be heated by the eddy current induced in the induction body 11a, 11b, 11c or the induction balls 14_1 to 14_N, whereby the gas flowing in the conduit 21 is can be heated. The guide body 11a, 11b, 11c forms a part of the conduit 21, or a part of the conduit 21 forms the guide body 11a, 11b, 11c, or the guide body 11a, 11b, 11c Induction ball modules (10a, 10b, 10c) may be made in a structure surrounding the conduit (21). The induction ball module (10a, 10b, 10c) is coupled to the conduit 21 can be a structure that can heat the conduit 21 or the inside of the conduit in various forms, and is not limited to the presented embodiment. The induction ball modules 10a, 10b, 10c also include an independently operable control unit, a magnetic field generating unit, a means connected to an independent power source or an external power source to be powered and a means capable of being fixed to the conduit 21 . may include The induction ball modules 10a, 10b, and 10c may have various structures that are coupled to the conduit 21 to generate heat.

When a plurality of induction balls 14_1 to 14_N are disposed in the induction ball modules 10a, 10b, and 10c, the flow velocity of the conduit 21 may be reduced. In order to improve the flow rate inside the induction ball modules (10a, 10b, 10c), the inner diameter of the induction ball modules (10a, 10b, 10c) may be adjusted to be larger than the inner diameter of the conduit (21). Alternatively, at least one heating plate 25_1 to 25_N may be disposed in the induction body 11 instead of the induction balls 14_1 to 14_N or together with the induction balls 14_1 to 14_N. A plurality of heating plates 25_1 to 25_N may be continuously disposed inside the induction body 11 , and each heating plate 25_1 to 25_N may be made of a material having high thermal conductivity. Optionally, each of the heating plates 25_1 to 25_N may be made of a ferromagnetic material. A plurality of open flow holes FH1 to FHN may be formed in each of the heating plates 25_1 to 25_N, and the flow holes FH1 to FHN have various structures capable of improving gas flow in the induction body 11 . can be made with Various means for improving the heating efficiency may be disposed inside the induction body 11, and the present invention is not limited thereto.

3 shows another embodiment to which a heating device according to the present invention is applied.

Referring to FIG. 3A, the process by-product is discharged from the process chamber by the vacuum pump 32a through the first conduit 31a and may be guided to the scrubber 32b through the second conduit 31b. . Thereafter, the gas treated with the harmful compound in the scrubber 32b may be discharged to the outside through the third conduit 31c. For the treatment of harmful compounds from the gas flowing along the second conduit 32a, the gas needs to be introduced into the heated scrubber 32b. An induction ball module may be installed in the second conduit 31b, and the induction ball module is a magnetic generating unit 331 surrounding the second conduit 31b and a power supply ( 333) may be included. The induction body or the second conduit 32b of the induction ball module may be made of, for example, stainless steel such as SUS316, but is not limited thereto, and may be made of various ferromagnetic materials. Alternatively, a ferromagnetic layer 332 may be formed on the peripheral surface of the induction body or the second conduit 31b. For example, an inductive layer having a cylindrical shape with a ferromagnetic layer 332 may be coupled. A coil-shaped magnetic generating unit 331 may surround a circumferential surface of the ferromagnetic layer 332 , and a power source 333 may be connected to the magnetic generating unit 331 . An alternating current may flow in the magnetic generating unit 331 by the power source 333, thereby generating a magnetic field in the magnetic generating unit 331, thereby generating heat while an induced current flows in the ferromagnetic layer 332. there is. The type of current applied to the magnetic generating unit 331 by the power source 333 may be controlled, whereby the heating level of the second conduit 31b may be adjusted. For example, the gas flowing through the second conduit 31b may be processed at a temperature of 400 to 600° C. in the scrubber 32b, and the gas flowing along the inside of the second conduit 31b is in the induction ball module. Thus, it may be heated in advance before being put into the scrubber 32b. Optionally, an induction ball module may be installed inside the scrubber 32b. Referring to (b) of FIG. 3, it can be discharged from the process chamber through the first conduit 21 by the vacuum pump 32a, and the by-products in the form of lumps are decomposed in advance before being introduced into the vacuum pump 22a. it is advantageous To this end, a magnetic induction module may be installed in the first conduit 31a, and for example, the inside of the first conduit 31a may be heated to a temperature of 300° C. or higher by the magnetic induction module. And thereby, the solid mass flowing along the first conduit 31a is decomposed to protect the vacuum pump 32a. The coil-shaped magnetic generating coil 331 may be wound around the cylindrical ferromagnetic layer 332 , and the ferromagnetic layer 332 may be coupled to the first conduit 31a. The ferromagnetic layer 332 may be coupled in such a way that they contact each other to enable heat conduction to the first conduit 31a. A power source 333 may be connected to the magnetic generating coil 331 to generate a changing magnetic field in the magnetic generating coil 331 , whereby the magnetic layer 332 is heated while the solid flowing along the first conduit 31a The lump can be pyrolyzed.

Referring to (c) of Figure 3, the induction ball module is installed on the peripheral surface of the first and third conduits (31a, 31c) may have a function of an internal heater (Inner Heater). The internal heater may have a function of preventing by-products such as compounds from being accumulated on the inner peripheral surfaces of the conduits 31a and 31c while the by-products generated during the semiconductor process flow. For example, the induction ball module may be coupled to the first and third conduits 31a and 31c connected to the vacuum pump 32a. As shown in (A) or (B) of FIG. 3 , each induction ball module may include magnetic field generating units 331a and 331b, magnetic layers 332a and 332b and power sources 333a and 333b. Each of the induction ball modules may be operated independently of each other, and the temperature of each of the conduits 31a and 31c may be controlled by interlocking with each other or independently of each other by the operation of each of the induction ball modules. When the conduits 31a, 31b, 31c are made of a ferromagnetic layer, or when a ferromagnetic layer is formed on the circumferential surface of the conduits 31a, 31b, 31c, the conduits 31a, 31b, 31c may have the function of an induction body. . The induction ball module may be applied to various conduits for semiconductor processing and is not limited to the presented embodiment.

4 shows another embodiment to which a heating device according to the present invention is applied.

4, the induction ball module 10 includes an induction coil 12 for inducing a magnetic field according to the flow of current; a coil fixing means 41 in which the induction coil 12 is accommodated; fixing units (42a, 42b) for fixing the induction coil (12) to a predetermined position of the conduit (21); a pair of electrode tabs 43a and 42b formed on the fixing units 42a and 42b; and a plurality of induction balls 14_1 to 15_M disposed on the inner or circumferential surface of the conduit 21, and the conduit 21 may have a function of an induction body.

The conduit 21 may have a hollow cylinder shape in which gas can move along the interior or a structure in which a hollow cross-section is polygonal, for example, may be made of various stainless steel materials including SUS316, but is not limited thereto. . The conduit 21 may be made of various materials, for example, the conduit 21 may be made of stainless steel or a metal material having corrosion resistance similar thereto, for example, stainless steel may be austenitic or martensitic. system and ferritic system. The austenitic system may not have magnetism or may have weak magnetism due to changes during machining. And it has strong corrosion resistance of an austenitic type such as SUS 316 or SUS 316L. When the conduit 21 is made of such an austenitic stainless steel material, a ferromagnetic layer may be formed on the circumferential surface of the conduit 21 . The ferromagnetic layer may be formed to be in contact with the outer circumferential surface of the conduit 21, for example, to be coupled to the outside of the conduit 21 and made into a cylindrical shape, a semi-cylindrical shape or a similar shape in contact with the outer circumferential surface. can, but is not limited to. Optionally, a ferromagnetic layer may be formed on the coil fixing means 41 to which the coil 12 is fixed. The coil fixing means 41 may be made of, for example, a ceramic material or a similar insulator material, and may have a heat insulating function. Optionally, a ferromagnetic layer may be formed inside the ceramic layer, and the ferromagnetic layer may be in contact with the outer circumferential surface of the conduit 21 . The coil fixing means 41 may have various structures capable of fixing the coil 12 , and when the coil 12 is fixed to the outer circumferential surface of the ceramic layer, a protective layer is formed on the outer surface of the coil 21 . The coil 12 may be stably fixed. In a state in which the coil 12 is coupled to the conduit 21, it is necessary to be fixed at a predetermined position of the conduit 21, and for this, both ends of the coil 21 or both ends of the coil fixing means 41 The fixing units 42a and 42b may be coupled. The fixing units 42a and 42b may be made of rubber, elastomer, or similar elastic material, and may each include locking means for fixing in a predetermined position of the conduit 21 . A pair of electrode tabs 43a and 43b for inducing a current to the coil 12 may be formed in each of the fixing units 42a and 42b. A power source 13 may be connected to the electrode tabs 43a and 43b to apply an alternating current to the coil 12 . The magnitude or period of the current applied to the coil 12 by the power source 13 may be controlled by the control unit 44 , and the time at which the current is applied may be controlled by the current control unit 45 . Also, the current control unit 45 may check the magnitude or period of the current applied to the coil 12 . An alternating current for induction of a magnetic field may be applied to the coil 12 in various ways, and the present invention is not limited thereto.

5 shows another embodiment to which the heating device according to the present invention is applied.

Referring to FIG. 5 , the conduit 21 is made of a stainless steel material, and the coil fixing means 41a and 41b may form a gap from the outer circumferential surface of the conduit 21 . The induction ball may be disposed inside the conduit 21, or may be selectively disposed in the gap. In the conduit 21, a plurality of induction ball module structures may be formed at different positions, and the induction ball module structures are interlocked with each other. can work Each magnetic induction module may consist of a pair of sub-induction ball modules that are coupled to each other on the circumferential surface of the conduit 21 in a semi-cylindrical shape and surround the conduit 21 . Each sub induction ball module includes a sub coil (24a, 24b); sub-coil fixing means (41a, 41b); sub fixing units 421a, 421b, 422a, 422b; and an induction ball, and a pair of sub-induction ball modules forming one induction ball module may be connected to each other by a coupling member 47 . The coupling member 47 structurally connects the fixing units 421a, 422a, 422a, 422b to each other while electrically connecting the different sub-coils 12a and 212b fixed to the different high-oil fixing means 41a and 41b. can do it The electrode tabs 51a and 51b may be formed in the sub fixing units 421a and 421b, the detection position 52 is set in the induction ball module, and the temperature or the conduit of the conduit 21 by the detection sensor 53 (21) current leakage can be detected. Also, the temperature or magnetic field of the sub-coils 12a and 12b may be detected and transmitted to the detection sensor 53 . The current applied to the different induction ball modules connected to the power source 13 by the application setting unit 45 may be controlled, for example, the current may be sequentially applied to the induction ball modules adjacent to each other at a time interval. can The sub-coils 12a and 12b may form a gap with the outer circumferential surface of the conduit 21, and the gap may be a vacuum gap, an air-filled gap, or an induction ball-filled gap. The vacuum gap and the air gap may have a function of preventing current leakage between the sub-coils 12a and 12b and the conduit 21 while functioning as an insulating layer. The sub-coils 12a and 12b may have various structures and are not limited to the presented embodiment.

6 shows an embodiment of a magnetic induction module to which a heating device is applied.

Referring to FIG. 6 , the induction ball module may include an induction coil 62 or at least one magnetic induction plate 62a and 62b having a plate shape. As shown in (a) of Figure 6, the magnetic field generating unit is a spiral coil (62); an induction body 61 to which the spiral coil 62 is coupled while being made of a ceramic material or a similar material to which the spiral coil 62 is coupled; and a ferromagnetic layer SL. Referring to FIG. 6B , at least one magnetic induction plate 62a and 62b may be fixed to the fastening fixing plate 63 . Each of the magnetic induction plates 62a and 62b may have a planar coil shape, and the different magnetic induction plates 62a and 62b may be separated from each other and fixed to the fastening fixing plate 63 . The fastening fixing plate 63 may have a structure that can be bent while being made of an insulator material, or may have a shape corresponding to the outer surface of the conduit. The fastening fixing plate 63 may have a function of protecting the magnetic induction plates 62a and 62b while fixing the magnetic induction plates 62a and 62b to the outer circumferential surface of the conduit. Referring to (c) of FIG. 6 , the induction coil 64 having a semi-cylindrical shape may be coupled to the insulating arrangement unit 61a made of an insulator material. For example, the induction coil 64 may be integrally formed while being filled with an insulator material by a method such as molding. An electrical connection member 62 that is structurally connected while being electrically connected to the induction coil 64 may be coupled to the longitudinal edge of the insulation arrangement unit 64 . The different insulating arrangement units 61a and the induction coil 64 may be electrically and structurally connected to each other by the electrical connection member 62 . To this end, a plurality of fastening portions 62_1 to 62_N may be formed on the electrical connection member 62 . Depending on the structure of the conduit or the use of the conduit, various types of coils for inducing magnetic fields may be coupled to the outer peripheral wall of the conduit, and the present invention is not limited thereto. Referring to (d) of FIG. 6 , the induction balls 14 and 15 may have a spherical shape, and may be made of a ferromagnetic material or include a ferromagnetic material. For example, the induction ball 14 may include a core 141 made of an insulator material and an induction layer 141 made of a ferromagnetic material surrounding the core. Alternatively, the induction ball 15 may be made of a ferromagnetic material or a mixture structure in which the ferromagnetic material is mixed in a powder form. The induction balls 14 and 15 may be made of various materials such as metal, graphite, or the like. Optionally, the induction balls 14 and 15 may be made of a material having high thermal conductivity while in contact with a flowing gas without being a ferromagnetic material. In the case of such a structure, the induction balls 14 and 15 may function to transfer heat generated by magnetic induction to the gas while maintaining it. In addition, it may have a function of adjusting the residence time of the gas in the induction heating section. The induction balls 14 and 15 may be made of various materials such as metal, graphite, or the like. The guiding balls 14 and 15 can serve a variety of functions and are not limited to the embodiments presented.

7 shows an embodiment of a controlled process of the heating device according to the present invention.

Referring to FIG. 7 , the operation of the magnetic induction ball module 72 may be controlled by the control unit 44 , and the magnetic induction ball module 72 includes an induction body; a coil that generates a magnetic field; and a guiding ball. The condition of the conduit may be detected by the conduit condition detection 71 , and for example, the temperature of the conduit or the state of the leakage current generated in the conduit may be detected and transmitted to the control unit 44 . In addition, the operation state of the magnetic induction module 72 may be detected by the magnetic induction detection unit 73 , and, for example, a generation state of a magnetic field, a form of a back electromotive force, a temperature or a flow of a current may be detected. And the information detected by the conduit state detection unit 71 and the magnetic induction detection unit 73 is transmitted to the control unit 44, based on this, the operation of the magnetic induction ball module 62 can be controlled. Optionally, the state of the guidance ball may be detected by the guidance ball detection module 74 . The induction ball detection module 74 may function to detect the temperature of the induction ball, the gas flow state, the temperature change, and the pressure of the induction ball arrangement space. The information detected by the guided ball detection module 74 may be transmitted to the control unit 44 to adjust the operation of the guided ball module 72 . Depending on the intended use of the conduit, the operation of the induction ball module 72 may be controlled in various ways and is not limited to the embodiment presented.

Although the present invention has been described in detail with reference to the presented embodiment, those skilled in the art will be able to make various modifications and variations of the invention without departing from the technical spirit of the present invention with reference to the presented embodiment. . The present invention is not limited by such variations and modifications, but only by the claims appended hereto.

10: induction ball module 11: induction body
12: induction coil 13: power
14_1 to 15_ M: guide ball 21: conduit
22a, 22b: flow generating module 23a, 23b, 23c: induction coil
25_1 to 25_N: heating plate 32b: scrubber
42a, 42b: fixing unit 43a, 43b: electrode tab
331: magnetic generating unit 333: power

Claims (7)

an induction body 11 having an accommodation space or a flow space formed therein, and at least a portion of the circumferential surface is made of a magnetic material; and
A magnetic induction ball module including a plurality of induction balls (14_1 to 14_N, 15_1 to 15_M) or a heating plate disposed on the circumferential surface or inside of the induction body 11 and transferring heat to the gas flowing therein. The magnetic induction ball module according to claim 1, wherein the plurality of magnetic induction balls (14_1 to 14_N, 15_1 to 15_M) are composed of at least two ball groups having different shapes or volumes. The magnetic induction ball module according to claim 1, wherein the plurality of induction balls (14_1 to 14_N, 15_1 to 15_M) are made of a graphite material or a metal material. an induction body 11 in which a gas flow space is formed;
an induction coil 12 for inducing a magnetic field on the surface of the induction body 11;
an induction ball module 10 disposed in a portion in thermal contact with the gas induction space or the gas flow space; and
A heating device including a plurality of induction balls (14_1 to 14_N, 15_1 to 15_M) or a heating plate disposed in the induction ball module 10 to transfer heat generated by the induction coil 12 to the internal gas. Heating device according to claim 4, characterized in that the induction body (11) is installed on the circumferential surface of the conduit (21) for gas flow or forms part of a path for gas flow. Heating device according to claim 4, characterized in that the induction body (11) is connected to a vacuum pump for semiconductor processing. Heating device according to claim 4, characterized in that the induction body (11) is arranged in a reactor of a scrubber.

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